加入10%Si对阴极电弧蒸镀TiAlSiN涂层的影响（英文）

研究加入10%Si(摩尔分数)对Ti Al Si N涂层的影响。采用阴极电弧蒸镀在WC-Co基体上沉积Ti_(0.5)Al_(0.5)N、Ti_(0.5)Al_(0.4)Si_(0.1)N和Ti_(0.55)Al_(0.35)Si_(0.1)N涂层,通过X射线衍射(XRD)、X射线光电子能谱(XPS)、扫描电镜(SEM)、纳米压痕测量和划痕试验研究涂层的显微组织和力学性能,探讨Si对涂层的性能和结合失效模式的影响机理。结果表明:加入10%Si后,涂层中形成非晶Si_3N_4包覆(Ti,Al,Si)N纳米晶的纳米复合结构。TiAlSiN涂层的硬度和韧性升高,但结合强度下降。与Ti_(0.55)Al_(0.35)Si_(0.1)N涂层相比,Ti_(0.5)Al_(0.4)Si_(0.1)N涂层的硬度较高但韧性较低。TiAlN涂层由于韧性低、界面结合强,因此结合失效模式以楔形剥落为主。Ti AlS iN涂层由于韧性改善、但界面结合变差,因此结合失效模式以屈曲剥落为主。     

Nb添加对TiAlN涂层结构、力学和热性能的影响

为了改善切削刀具表面常用的TiAlN涂层的性能,采用阴极弧蒸发方法在硬质合金、低合金钢、刚玉片和钨基体上制备了TiAlN和TiAlNbN涂层,借助差示扫描量热仪(DSC)、扫描电子显微镜(SEM)、X射线能量色散谱仪(EDX)、X射线衍射仪(XRD)和纳米压痕仪研究了Nb添加对TiAlN涂层的结构、力学及热性能的影响。结果表明:制备的Ti_(0.46)Al_(0.54)N、Ti_(0.40)Al_(0.53)Nb_(0.07)N和Ti_(0.34)Al_(0.52)Nb_(0.14)N涂层均为亚稳的面心立方结构,其硬度分别为30.1±0.4 GPa、29.7±0.4 GPa和29.6±0.7 GPa;Nb添加提高了涂层的H~3/E~2值,表明其韧性得到改善;Nb添加抑制了TiAlN涂层热分解过程中的调幅分解和六方相AlN的形成,从而改善其热稳定性;另外,在900℃氧化10 h后,Ti_(0.46)Al_(0.54)N涂层已完全氧化,而Ti_(0.40)Al_(0.53)Nb_(0.07)N和Ti_(0.34)Al_(0.52)Nb_(0.14)N涂层的氧化层厚度分别为0.91μm和0.67μm。     

Al含量对TiAlN涂层的组织和抗氧化性能的影响

采用阴极电弧蒸发镀在WC-Co硬质合金基体表面沉积两种不同Al含量的(Ti_(1-x)Al_x)N涂层,比较了(Ti_(0.4)Al_(0.6))N涂层和(Ti_(0.55)Al_(0.45))N涂层的组织和抗氧化性能。结果表明:两种涂层的主要相都是呈NaCl型面心立方结构的TiN。(Ti_(0.4)Al_(0.6))N涂层晶格常数较小,固溶强化作用较大,具有较高的硬度。与(Ti_(0.55)Al_(0.45))N涂层相比,(Ti_(0.4)Al_(0.6))N涂层900℃氧化后增重较少。XRD和SEM分析结果表明氧化后TiAlN涂层会形成Al_2O_3和TiO_2氧化物,且Al_2O_3对涂层中TiO_2析出有抑制作用,氧化后Al含量较高的(Ti_(0.4)Al_(0.6))N涂层的Al_2O_3和TiO_2含量较低,表面的氧化物颗粒尺寸也较小。(Ti_(0.4)Al_(0.6))N涂层抗氧化性能优于(Ti_(0.55)Al_(0.45))N涂层。     

TiAlSiN涂层对γ-TiAl基合金抗高温氧化性能的影响

采用多弧离子镀的方法在两种γ-TiAl基合金(Ti-46Al-2.5V-1Cr-0.3Ni和Ti-48Al-2Cr-2Nb,原子分数)表面制备了TiAlSiN涂层,研究了样品在800℃下空气中的循环氧化行为。在800℃循环氧化300 h后,γ-TiAl基合金表面都形成了TiO_2和Al_2O_3混合氧化物膜,氧化膜分层;Ti-46Al-2.5V-1Cr-0.3Ni合金表面氧化膜较厚且剥落严重,而Ti-48Al-2Cr-2Nb合金氧化膜较薄,只发生了轻微剥落。表面施加Al、Si含量不同的TiAlSiN涂层显著降低了TiAl基合金的氧化速率,涂层表面氧化膜主要由TiO_2和α-Al_2O_3组成。Ti_(0.5)Al_(0.4)Si_(0.1)N和Ti_(0.5)Al_(0.45)Si_(0.05)N两种涂层样品表面氧化膜薄而致密,涂层未发生明显退化;Ti_(0.6)Al_(0.3)Si_(0.1)N涂层样品表面氧化膜相对较厚。Al含量较高的Ti_(0.5)Al_(0.4)Si_(0.1)N和Ti_(0.5)Al_(0.45)Si_(0.05)N涂层抗氧化性能优于Al含量较低的Ti_(0.6)Al_(0.3)Si_(0.1)N涂层的。TiAlSiN涂层与TiAl基合金之间只发生了轻微互扩散。     

Si、Cr的加入对TiAlN涂层热稳定性能的影响

采用阴极电弧蒸镀在WC-Co硬质合金基体上沉积Ti_(0.45)Al_(0.55N)、Ti_(0.35)Al_(0.55)Si_(0.1)N和Ti_(0.3)Al_(0.55)Cr_(0.15)N涂层,并在900℃下对涂层试样真空退火30 min和120 min。采用X射线衍射仪和显微维氏硬度计分析比较退火前后涂层的物相及硬度,研究Si、Cr的加入对Ti Al N涂层热稳定性能的影响。结果表明:在Ti Al N涂层中加入Si、Cr后涂层的硬度增加。900℃退火后,Ti_(0.45)Al_(0.55)N涂层的硬度逐渐下降,Ti_(0.35)Al_(0.55)Si_(0.1)N和Ti_(0.3)Al_(0.55)Cr_(0.15)N涂层的硬度则呈上升趋势,并且Ti_(0.3)Al_(0.55)Cr_(0.15)N涂层的硬度始终保持最高,而Ti_(0.45)Al_(0.55)N涂层的硬度最低。Si、Cr的加入能推迟涂层退火过程中软质的密排六方Al N相的形成,Cr还能延缓面心立方(TiAl)N相的调幅分解。Si、Cr的加入有效改善TiAlN涂层的热稳定性能,Ti_(0.3)Al_(0.55)Cr_(0.15)N涂层的热稳定性优于Ti_(0.35)Al_(0.55)Si_(0.1)N。     

Ti_(0.44)Al_(0.56)N和Cr_(0.42)Al_(0.58)N涂层的结构与热性能研究

TiAlN和CrAlN涂层是目前切削刀具应用最为广泛的涂层材料。本研究借助阴极弧蒸发技术在低合金钢、钨片和Al2O3刚玉片上制备了Al含量接近的Ti_(0.44)Al_(0.56)N和Cr_(0.42)Al_(0.58)N涂层,采用扫描量热仪(DSC)、扫描电子显微镜(SEM)、X射线能量色散谱仪(EDX)、X射线衍射仪(XRD)和纳米压痕仪对比研究其结构、力学性能、热稳定性及抗氧化性能。结果表明:Ti_(0.44)Al_(0.56)N和Cr_(0.42)Al_(0.58)N涂层均为单相面心立方结构,其硬度分别为30.1±0.4 GPa和30.2±0.7 GPa;Ti_(0.44)Al_(0.56)N涂层在退火过程中会产生时效硬化效应而呈现更好的热稳定性,900℃时为32.4±0.7 GPa;在1 100℃退火后,Ti_(0.44)Al_(0.56)N和Cr_(0.42)Al_(0.58)N涂层的硬度分别降至27.8±0.8 GPa和22.6±0.4 GPa;Cr_(0.42)Al_(0.58)N涂层则具有更优异的抗氧化性能,Cr_(0.42)Al_(0.58)N涂层在1 000℃氧化10 h后,氧化层的厚度仅为0.17μm,而Ti_(0.44)Al_(0.56)N涂层在900℃氧化10 h后已完全氧化。     

电弧离子镀电磁线圈电压对TiAlN涂层结构及性能的影响

目的 揭示电弧离子镀过程中,电磁和永磁复合磁场耦合作用下电磁线圈偏压对TiAlN涂层结构及性能的作用规律,优化TiAlN涂层制备工艺。方法 采用电弧离子镀技术在M2高速钢基体表面沉积高Al含量Ti0.33Al0.67N涂层（TiAl靶,原子数分数,Ti∶Al=1∶2）。改变电磁线圈电压,研究涂层微观组织结构、表面粗糙度、硬度、膜/基结合力和耐磨性的变化规律。结果 在15~45 V范围内,电磁线圈电压小于30 V时,Ti0.33Al0.67N涂层内部致密;线圈电压大于30 V时,涂层内部变得疏松。线圈电压为15 V时,TiAlN涂层表面粗糙度最小,为0.2 μm。随着线圈电压升高,Ti0.33Al0.67N涂层硬度增大,线圈电压为45 V时,Ti0.33Al0.67N涂层硬度达到最大,为3866HV0.025。随着线圈电压的升高,Ti0.33Al0.67N涂层膜/基结合力及耐磨性先增加后减小,线圈电压为15 V时,结合力最高,为95.4 N,磨损率达到最低,为1.62×10-15 m3/(N?m)。结论 在线圈电压较小时,随着电压的升高,作用于阴极靶材的磁场强度增加,阴极弧斑速度加快,每个弧光点维持时间缩短,能量降低,离化率升高,溅射出的液滴数量减少,涂层结构致密,粗糙度降低,硬度和耐磨性能升高;随着线圈电压进一步升高,磁场强度继续增大,弧斑运动受到的磁性束缚力增大,弧斑运动半径向靶材中心收缩,作用于固定位置的弧光累计时间更长,离化率降低,液滴增多,涂层综合性能下降。     

基体材料对AlCrN硬质涂层结构及摩擦学性能的影响

采用真空阴极多弧离子镀技术,分别在Cr8、W6、Cr12及V-4E四种不同材质模具钢表面制备了Al Cr N多元纳米硬质涂层。利用划痕仪、工具显微镜、HV显微硬度计、球磨仪、SEM及XRD对Al Cr N涂层硬度,膜层厚度、结合力、摩擦系数进行了对比测试,并对涂层磨痕宽度、划痕宽度、表面形貌及相结构进行了表征。结果表明:相对于其它三种基材,V-4E基材的Al Cr N涂层显微硬度更高、膜基结合力更好、摩擦系数更低、耐磨性最好;四种基材的表面形貌基本一致,均有大颗粒及凹坑,V-4E基材Al Cr N涂层的晶粒尺寸最小,沉积的Al Cr N涂层结构更致密,耐磨性更优异。     

氮气流量及后续热处理对多弧离子镀制备Ti2AlN涂层的影响规律

利用电弧离子镀技术在1Cr18Ni9Ti基材上低温沉积Ti-Al-N涂层,研究氮气流量及热处理工艺对涂层微观组织结构的影响。结果表明,沉积态涂层中不含三元层状陶瓷Ti_2AlN MAX相,可能含有Ti_3AlN(反钙钛矿结构)、TiN、α-Ti、fcc-Al及Ti_xAl_y金属间化合物等。涂层经退火后在一定条件下可以形成Ti_2AlN。涂层中的N元素含量及退火温度对Ti_2AlN的形成起到重要作用。N元素含量过多不利于Ti_2AlN的形成;提高退火温度可以促进Ti_2AlN的形成。透射电镜(TEM)分析结果表明,退火过程中Ti_2AlN的形成伴随着涂层微观组织结构的转变,从明显的层状结构转变为细小的等轴晶结构。     

Si含量对多元等离子体浸没离子注入与沉积技术制备TiAlSiN涂层微结构和机械性能的影响(英文)

采用多元等离子体浸没离子注入与沉积制备TiAlSiN纳米复合涂层,利用EDX,XRD,SEM,XPS,纳米探针和划痕试验对涂层成分组成、微结构和机械性能进行测试分析。XRD测试表明,TiAlSiN涂层具有较强的TiN(200)择优取向。XPS测试表明,TiAlSiN涂层中也含有AlN、Si3N4、Al2O3和Ti2O3。与制备的TiN涂层相比,当涂层中的Si含量为0.9%时,TiAlSiN涂层表现出较高的硬度,达32GPa,但涂层的断裂韧性和结合强度较低;当涂层中的Si含量增加至6.0%时,TiAlSiN涂层具有超高的硬度57GPa,并表现出较好的断裂韧性和结合强度。     

Improved properties of Ti-Al-N coating by multilayer structure

Multinary Ti-Al-N coatings are used for various applications where hard, wear and oxidation resistant materials are needed. Here, we prepare TiAlN/TiN nano-multilayer coatings with modulation period of ~ 20 nm in order to further improve the properties of Ti-Al-N coating. Annealing of both coatings up to 700 °C results in an increase in hardness due to the precipitation of cubic Al-rich domains by spinodal decomposition. Multilayer structure results in an increase in adhesion with substrates from ~ 72 N for Ti-Al-N single layer coating to 98 N for TiAlN/TiN nano-multilayer coating. Additionally, the interfaces of TiAlN/TiN nano-multilayer coating retard the outward diffusion of metal atoms (Al and Ti) and inward diffusion of O while exposing coatings in air atmosphere with elevated temperature, and thus improve its oxidation resistance. An improved machining performance regardless of continuous cutting and milling is obtained by TiAlN/TiN nano-multilayer coated inserts, which can be attributed to the combined effects of higher adhesion with substrates and better oxidation resistance.     

Improved properties of Ti-Al-N coating by multilayer structure

Multinary Ti-Al-N coatings are used for various applications where hard, wear and oxidation resistant materials are needed. Here, we prepare TiAlN/TiN nano-multilayer coatings with modulation period of ~ 20 nm in order to further improve the properties of Ti-Al-N coating. Annealing of both coatings up to 700 °C results in an increase in hardness due to the precipitation of cubic Al-rich domains by spinodal decomposition. Multilayer structure results in an increase in adhesion with substrates from ~ 72 N for Ti-Al-N single layer coating to 98 N for TiAlN/TiN nano-multilayer coating. Additionally, the interfaces of TiAlN/TiN nano-multilayer coating retard the outward diffusion of metal atoms (Al and Ti) and inward diffusion of O while exposing coatings in air atmosphere with elevated temperature, and thus improve its oxidation resistance. An improved machining performance regardless of continuous cutting and milling is obtained by TiAlN/TiN nano-multilayer coated inserts, which can be attributed to the combined effects of higher adhesion with substrates and better oxidation resistance.     

复合涂层刀具加工RuT500的铣削力研究及参数优化

为探究和改善蠕墨铸铁RuT500的铣削力，基于单因素试验，选用TiAlN/AlCrN、TiCN/Al₂O₃复合涂层硬质合金刀具对RuT500进行铣削加工，结合响应面探究涂层和铣削参数对RuT500铣削力的影响规律，并进行了铣削参数优化。结果表明：相比于TiAlN/AlCrN复合涂层硬质合金刀具，TiCN/Al₂O₃复合涂层硬质合金刀具铣削RuT500时会产生更大的铣削力；对蠕墨铸铁铣削力影响最显著的因素是背吃刀量，其次是进给量，铣削速度对蠕墨铸铁铣削力的影响程度相对较少；铣削参数交互作用对铣削力的影响具有一定的显著性；取较大的背吃刀量a_p、适当的进给量f和较大的铣削速度v_c时，可以获得较低的铣削力F和良好的加工效率。     

PVD涂层刀具高速铣削CoCrMo合金的性能研究

目的为了提高涂层硬质合金刀具的切削性能,研究了物理气相沉积PVD法制备的涂层硬质合金铣刀在高速干式环境下的铣削性能。方法采用阴极电弧技术制备了TiN、TiAlN以及TiAlSiN涂层硬质合金铣刀刀头,通过一同沉积涂层的硬质合金圆片,间接测量得出涂层的显微硬度、厚度和平均摩擦系数,并以CoCrMo合金为切削对象,进行了PVD涂层与无涂层刀具高速铣削下的对比试验。结果TiAlSiN显微硬度最高达3800HV,摩擦系数达0.3,TiAlN涂层平均膜厚为2μm,间接测得TiN、TiAlN以及TiAlSiN涂层的结合力依次为60、58、42N。在三者的切削性能中,TiAlSiN涂层的切削性能比TiAlN和TiN涂层的好,同等切削参数时,TiN刀具的高速铣削时间最短,TiAlSiN涂层的平均磨损值为0.1895,TiN的平均磨损值为0.3047。结论涂层中添加Al、Si,极大地提高了刀具的使用性能,改善了刀具切削过程中的耐磨性、红硬性,极大地延长了刀具的使用寿命。TiAlSiN涂层的硬度高,耐磨损性好,切削性能好,适合高速铣削加工。     

Machining performance of Ti-Al-Si-N coated inserts

Ti-Al-Si-N quaternary coating has recently been developed for industrial applications due to its excellent machining performance. Here, we present a comparative research on Ti-Al-N single layer, Ti-Al-Si-N single layer, TiAlN-TiAlSiN bilayer and TiAlN/TiAlSiN multilayer coatings deposited onto cemented carbide substrates by cathodic arc evaporation. The incorporation of Si into the Ti-Al-N coating results in an increase in hardness and thermal stability due to the formation of nanocomposite nc-TiAlN/a-Si₃N₄, and thereby causes an improved performance during continuous cutting. However, the lower toughness and adhesive strength with a substrate reduce its cutting-life during milling. Further optimization of Ti-Al-Si-N coated inserts during milling can be obtained by a structure adjustment from the nanocomposite into TiAlN-TiAlSiN bilayer and TiAlN/TiAlSiN multilayer coatings, which causes an increase to 156% and 172% for the life-time of Ti-Al-Si-N coated inserts, respectively. Our results indicate that the machining performance of coatings containing Si in both continuous cutting and milling can be optimized by the structure design of the TiAlN/TiAlSiN multilayer, where the coating sustains a high hardness of the Ti-Al-Si-N coating combined with a good cohesive strength with the substrate similar to the Ti-Al-N coating.     

TiN/TiAlN涂层Ti(C,N)基金属陶瓷刀具的切削性能

采用多弧离子镀技术在Ti(C,N)基金属陶瓷基体上沉积了TiN/TiAlN多层涂层,通过扫描电镜、涂层附着力自动划痕仪对其显微组织形貌和涂层的结合强度进行了分析,并对涂层和未涂层金属陶瓷铣刀以及硬质合金铣刀进行了切削0Cr18Ni9钢的试验.结果表明,多弧离子镀TiN/TiAlN涂层均匀,TiN/TiAlN多层涂层与金属陶瓷之间的结合强度高达57.52 N.TiN/TiAlN涂层金属陶瓷的切削性能明显优于未涂层金属陶瓷和硬质合会YW2,其平均寿命为硬质合金刀具的2倍.TiN/TiAlN涂层金属陶瓷刀具的失效形式主要是磨损和崩刃,没有涂层剥落现象,TiN/TiAlN涂层与基体的结合强度很好.未涂层金属陶瓷刀具的磨损形式主要是磨损和粘着.     

Structure and wear resistance of TiN and TiAlN coatings on AZ91 alloy deposited by multi-arc ion plating

In order to investigate the microstructure of TiN and TiAlN coatings and their effect on the wear resistance of Mg alloy, TiN and TiAlN coatings were deposited on AZ91 magnesium alloy by multi-arc ion plating technology. TiN and Ti70Al30N coatings were prepared on the substrate, respectively, which exhibited dark golden color and compact microstructure. The microstructures of TiN and Ti70Al30N coatings were investigated by X-ray diffractometry (XRD) and scanning electron microscopy (SEM). The micro-hardness and wear resistance of TiN and Ti70Al30N coatings were investigated in comparison with the uncoated AZ91 alloy. The XRD peaks assigned to TiN and TiAlN phases are found. The hardness of TiN coatings is two times as high as that of AZ91 alloy, and Ti70Al30N coating exhibits the highest hardness. The wear resistance of the hard coatings increases obviously as result of their high hardness.     

Structures and properties of TiAlCrN coatings deposited on Ti(C,N)-based cermets with various WC contents

In this paper, the Ti(C,N)-based cermets with various WC contents were used as the substrates of TiAlCrN coatings. The influence of WC addition on the structures and properties of the coatings was investigated. Besides, cutting tests on the coated cermet inserts were conducted under different conditions. The results indicated that the cermet substrates with finer grains provided more nucleation to the coatings. The grain size of the coating decreased with increasing WC contents in the substrate. W diffused from the substrates to coatings, which deteriorated the adhesion between TiAlCrN coatings and the cermet substrates. The coated cermet inserts presented better cutting performance, when WC was added to the substrates. However, the cutting performance of the coated cermet inserts was weaken when the addition of WC was more than 10 wt%.     

Self-lubricant nanocomposite hard coatings in Ti-Al-N-C system

An ambitious objective in the development of self-lubricating wear-resistant coatings is to make use of lubricious phases such as graphite, amorphous carbon or MoS2 incorporated into coatings. A series of (Ti,Al)(N,C)coatings with different carbon contents (0 -28 %, mole fraction) were deposited by reactive magnetron sputtering of TiAl in a mixture of Ar, N2 and CH4 gases. The microstructure and constitution of these coatings were investigated using EPMA, AFM, XPS, (HR)TEM, Raman spectroscopy and X-ray diffraction. Starting from a pure TiAlN coating significant changes in the microstructure of the coatings were observed dependent on the carbon concentration. Under optimum conditions nanocomposite coatings with a structure of a coexisting metastable hard, nanocrystalline fcc (Ti,Al)(N,C) phase and an amorphous carbon phase were deposited. The localization of an amorphous carbon phase was shown by HRTEM.     

Contact damage investigation of CVD carbonitride hard coatings deposited on cemented carbides

The evolution of damage induced as contact load is increased has been investigated on single- and multilayered coated cemented carbides by means of spherical indentation. The main objective of the study was to assess the effect of the intermediate wear-resistant carbonitride layer on the contact damage resistance of industrial milling (multilayered) inserts. This was approached by evaluating systems consisting of a single carbonitride layer of different chemical nature: novel Zr(C,N) and conventional Ti(C,N) chemical vapor deposition (CVD) coatings. Deformation and damage phenomena were characterized using a wide range of advanced techniques: confocal laser scanning microscopy, scanning electron microscopy, focused ion beam and X-ray synchrotron. Zr(C,N) coated systems are found to exhibit a higher mechanical integrity than Ti(C,N) counterparts. Main reasons behind are the relatively different thermal residual stresses generated during CVD cooling, as a result of the dissimilar coefficient of thermal expansion between the coating and the substrate, as well as the intrinsic cohesive strength of the studied coatings. Such different mechanical response was also discerned to affect the interaction between cracking and layer assemblage in multilayer coated specimens. It then supports the beneficial effect of using Zr(C,N) as the intermediate wear-resistant layer toward enhanced performance of industrial milling inserts.