Ions Bombardment in Thin Films and Surface Processing

Ions bombardment is very important in thin films and surface processing.The ion energy and ion flux are two improtant parameters in ion bombardment.The ion current density mainly dependent on the plasma density gives the number of energetic ions bombarding the substrate.The self-bias voltage in plasma sheath accelerates plasma ions towards the substrate.RF discharge can increase plasma density and RF bias can also provide the insulator substrate with a plasma sheath.In order to choose and control ion energy,ion density,the angle of incidence,and ion species,ion beam sources are used.New types of electrodeless ion sources(RF,MW,ECR-MW) have been introduced in detail,In the last,the effects of ion bombardment on thin films and surface processing are presented.     

Long range implantation by MEVVA metal ion source

Metal vapor vacuum are(MEVVA)source ion implantation is a new technology used for achieving long range ion impantation.It is very improtant for research and application of the ion beam modification of materials.The results show that the implanted atom diffusion coefficient increases in Mo implanted Al with high ion flux and high dose.The implanted depth is 3-11.6 times greater than that of the corresponding ion range.The ion species.doses and ion fluxes play an importnat part in the long-range implantation.Especially,thermal atom chemistry have specific effect on the long-range implatation during high ion flux implantation at transient high target temperature.     

钨掺杂的提铯离子筛的制备及离子交换性能研究

以ZrOCl₂、Na₂MoO₄、Na₂WO₄、K₄P₂O₇为原料,通过沉淀反应、Cs⁺嵌入、固位、抽出等一系列程序合成了用于提取铯的钨掺杂离子筛(W-Cs-IS),研究了W的掺杂比例对离子筛Cs⁺交换性能的影响。用X射线光电子能谱（XPS）、扫描电子显微镜（SEM）及能谱分析（EDS）、氮气吸附-解吸等手段表征了产物的微观结构,并测试了其耐酸性。结果表明：掺杂的W部分存在于产物表面,Mo包藏于内部;离子筛由不规则颗粒及膜状部分组成,具有微孔结构,微孔尺寸约为20 nm;在HCl和HNO₃中均显示出良好的耐酸性。W掺杂有利于提高离子筛的交换性能。随着掺杂比例的增加,离子交换容量先提高后基本不变,在中性（pH=6.98）和酸性（pH=1.05）条件下分别可达到1.66 mmol/g和1.47 mmol/g。W-Cs-IS对模拟高放废液中的Cs⁺和Sr²⁺具有较高的选择性,可同时将Cs⁺和Sr²⁺从高放废液中提取出,对模拟高放废液中Cs⁺的提取率可达到88.2%。     

A Relative Type Ion Beam-educing Technique

1.IntroductionLowenergyionbeambiologyisasubjectfirstcreatedinChina[11.Incontrastwithtraditionalirradiationmeanssuch'asXray,electronbeam,laserbeam,theinjectionofionbeamintoorganismmayresetinmomentumtransfers,massdepositionandchafgeexchangeinadditiolltoenergydeposition[2,31.Usingthebiologicaleffectsofionbeam,suchresearchesasionbeam-mutagenizedbreeding,ionbeam-mediatedtransferringgene,distanthybridizationbyionbeametc.haveledtotremendoussocialandeconomicalbenefits.Generallytheprocessofionimplanta…     

Preliminary Research Results for the Generation and Diagnostics of High Power Ion Beams on FLASH II Accelerator

The preliminary experimental results of the generation and diagnostics of highpower ion beams on FLASH II accelerator are reported, The high-power ion beams presently are being produced in a pinched diode, The method for enhancing the ratio of ion to electron current is to increase the electron residing time by pinching the electron flow, Furthermore, electron beam pinching can be combined with electron reflexing to achieve ion beams with even higher efficiency and intensity. The anode plasma is generated by anode foil bombarded with electron and anode foil surface flashover. In recent experiments on FLASH II accelerator, ion beams have been produced with a current of 160 kA and an energy of 500 keV corresponding to an ion beam peak power of about 80 GW. The ion number and current of high power ion beams were determined by monitoring delayed radioactivity from nuclear reactions induced in a ^12C target by the proton beams, The prompt γ-rays and diode bremsstrahlung X-rays were measured with a PIN semi-conductor detector and a plastic scintillator detector, The current density distribution of ion beam were measured with a biased ion collector array. The ion beams were also recorded with a CR-39 detector.     

Effect of the displacement damage from argon ion irradiation on the synergistic effect of helium–hydrogen in tungsten

The effect of argon ion pre-irradiation on helium and hydrogen ion irradiation was investigated in tungsten. At the same time, comparative experiments were carried out on the irradiation of helium and hydrogen ions in tungsten. Without the argon ion irradiation, the energy of 35 keV hydrogen ions mainly accelerated the coalescence of defects created by the 60 keV helium ions, the irradiation damage degree increased with hydrogen ion fluence increasing. With the argon ion irradiation, lots of voids were created by argon ion irradiation, which increased the helium and hydrogen retention and the synergistic effect of helium–hydrogen in tungsten. In the same hydrogen fluence, the surface damage degree with argon ion pre-irradiation was higher than that without argon ion pre-irradiation.     

Measurement of Ion Parameters by Ion Sensitive Probe in ECR Plasma

Ion parameters in electron cyclotron resonance (ECR) microwave plasma were measured by ion sensitive probe and were compared with the electron parameters obtained by double Langmuir probe. The effects of gas pressure and microwave power on the ion temperature and density were analyzed. The spatial distribution of the ion parameters was also investigated by the ion sensitive probes with a tunable radial depth installed on different probe windows along the chamber axis. Results showed that the ion density measured by the ion sensitive probe was in good agreement with the electron density measured by the double Langmuir probe. The influence of gas pressure on the ion parameters was stronger than that of microwave power. With the increase in working pressure, the ion temperature decreased monotonously with a decreasing rate larger than that at higher pressure. The ion density first increased to a peak (42.3?1010cm-3) at 1 Pa and then decreased. The ion temperature and density increased little with the increase in the microwave power from 400 W to 800 W. The plasma far away from the resonant point is found to be radially uniform.     

脉冲离子束流聚焦装置的研制

用小型化的质量分析系统进行脉冲离子束流实验研究时,从真空弧离子源中引出的束流脉冲幅度大、能量低,由于空间电荷效应使脉冲束流发散度很大,使得离子束流成分分析的不确定度增大。为克服在有限的空间范围内脉冲离子束流聚焦的困难,研制了一种新的双限束光阑三膜片透镜离子束流聚焦装置。双限束光阑着重减少束流发射度,三膜片透镜则适合小尺度空间的脉冲束流聚焦。计算机模拟的结果符合这种大脉冲离子束流聚焦的设计思想。磁质谱仪应用该聚焦装置后,发散到质量分析器分析盒上的脉冲离子束流幅值从未加聚焦前的115 mA减少至0.06 mA,脉冲离子束流质量分析的不确定度降低。     

金属真空弧离子源引出强流离子束的数值模拟

为了引出更高强度、更高亮度的铀离子束,以满足重离子研究中心(Gesellschaft für SchwerionenforschungmbH,GSI)重离子同步加速器的需求,本文用三维的计算机程序KOBRA3-INP对金属真空弧离子源(Metalvapor vacuum arcion source,MEVVA)引出强流铀离子束在引出系统和后加速系统中的动力学特性进行了研究,讨论了离子源发射束流密度对引出束性能的影响.结果表明,束流损失主要发生在引出系统和后加速系统之间的漂移区;在假设漂移区束流被空间电荷中和的情况下,模拟结果和实验结果符合;在发射束流密度为180-230 mA/cm2范围内,经后加速的束流强度变化不大.     

He/H离子辐照损伤及其对ODS钢显微硬度的影响研究

为研究氧化物弥散强化铁素体钢(ODS钢)中的He/H离子协同辐照效应,本文开展了室温条件下ODS钢的He/H离子单一及复合辐照实验,并研究了辐照损伤对其显微硬度的影响。实验结果表明:He/H离子主要分布在损伤峰值附近;H离子辐照对ODS钢显微硬度的影响大于He离子;H离子的引入导致He离子低温解吸峰消失,而He离子的注量减半则使其热解吸起始温度升高;He、H离子与材料中缺陷相互作用不同是影响显微硬度及正电子寿命结果的主要因素。     

An Investigation of Ionic Flows in a Sphere-Plate Electrode Gap

This paper presents analyses of ion flow characteristics and ion discharge pulses in a sphere-ground plate electrode system.As a result of variation in electric field intensity in the electrode gap,the ion flows towards electrodes generate non-uniform discharging pulses.Inspection of these pulses provides useful information on ionic stream kinetics,the effective thickness of ion cover around electrodes,and the timing of ion clouds discharge pulse sequences.A finite difference time domain(FDTD)based space-charge motion simulation is used for the numerical analysis of the spatio-temporal development of ionic flows following the first Townsend avalanche,and the simulation results demonstrate expansion of the positive ion flow and compression of the negative ion flow,which results in non-uniform discharge pulse characteristics.     

Experimental Study for Absorbed dose to Water of Heavy Ion Beam via Ionization Method

The absorbed-dose to water of heavy ion beam is a fundamental quantity for heavy ion therapy. It is necessary to perform the relevant work with in-direct measurement prior to the study of the reproduction for the absorbed-dose to water of heavy ion beam. The absorbed-dose to water of a carbon ion beam, whose incident energy was 400 MeV/u and spread-out Bragg peak was 6 cm, was studied with conventional ionization method. The correction factors of polarity and ion recombination for the ionization chambers were evaluated with the incident heavy ion beam. The uncertainty components for the measurement of the absorbed-dose to water of heavy ion beam are significantly larger than that of the 60Co γ radiation, in terms of the corrections for the polarity and ion recombination of the ionization chambers. The absorbed-dose to water of heavy ion beam deduced from different ionization chambers is consistent within the acceptance of uncertainty. Based on the measurement with ionization chambers, it is crucial to conduct more intensive research activities of radiation dosimetry including the absolute measurement with calorimetric facility, with the purpose of further optimizing the uncertainty in the measurement for the absorbed-dose to water of heavy ion beam.     

Neutral and ionized alkaline metal bombardment type heavy negative-ion source (NIABNIS)

A new type of high current, heavy negative-ion source has been developed in which simultaneous bombardment of both neutral and ionized alkaline metal particles on a sputter cone is utilized for overcoming the disadvantages of the universal negative ion source and the Aarhus negative ion source. To supply a sufficient amount of neutral and ionized cesium particles onto the sputtering target surface, a plasma cesium ion source is used for the primary cesium ion source, and the distance between the extraction aperture of the cesium ion beam and the sputtering target is minimized. This results in a compact body and high yields of negative ion currents. Two experimental apparatus are used: a prototype source for mainly investigating the operating principle and a high current negative ion production source with a target cooling system. The neutral cesium particle bombardment was found to be effective in increasing the negative ion production efficiency. The target surface temperature also had a great influence on this efficiency. Negative ion production experiments of group III, IV and V elements were mainly made. 320 μA of the C^? ion current and 3 μA of the ¹¹B^? ion current were obtained. Negative ion currents obtained to-date are also given for various targets.     

重离子束水吸收剂量的电离法实验研究

重离子束水吸收剂量是开展重离子束治疗最基本的物理量。在开展重离子束水吸收剂量的量值复现研究前，需用间接测量的方法开展相关工作以熟悉实验条件。本文用传统电离法开展了能量400 MeV/u、具有6 cm展宽Bragg峰的碳离子束的水吸收剂量测量研究，并评价了重离子束条件下的相关电离室的极化、离子复合修正因子。在电离室的极化和离子复合修正项方面，重离子束水吸收剂量测量的相关不确定度分量显著大于60Co γ辐射水吸收剂量的相关值。用不同电离室测量重离子束水吸收剂量的结果在不确定度允许的范围内符合。以电离室测量为基础，开展更深入的包括量热法绝对测量在内的辐射剂量学研究，对进一步优化重离子束水吸收剂量测量的不确定度至关重要。     

New Method of Large-Area DC Ion Beam Formation with Multiple Electron Beams, (II)

A new method to form a small divergence dc ion beam using a large-area single-hole electrode instead of a multiaperture electrode is described. A distinctive feature of this method is to make use of multiple electron beams in an ion source to control the spatial ion density distribution at the region of ion beam formation; the electron beams play a role to aid formation of the concave plasma boundary, which is required to extract a convergent ion beam from gaseous plasma according to the experimental facts described in Part (I). In this experiment, it was verified with three slab-like electron beams that formation of the concave boundary was possible in a stable and steady state. This electrode system can be applied to some types of the present high current ion sources to obtain large-area dc ion beams.     

低能高束流氩离子源的结构及性能

离子源技术是等离子体研究中的一项重要内容,而低能大束流源则是离子源技术研究中的一个重要方向,因为这样的源在离子束刻蚀、离子束溅射镀膜以及荷能粒子与物质相互作用方面都有广泛的应用;本文采用空心阴极空心阳极结构,用热阴极电子发射弧放电驱动并用磁场约束产生等离子体,用曲面发射引出离子束,研制成了氩气放电溅射离子源;研究了灯丝加热电流、弧压对弧流的影响和弧流与工作气体压力对离子束引出的影响规律.离子源的引出电压在0-4.0 kV之间连续可调,最大引出束流为100 mA,束斑面积为φ6.0 cm,以Ti为溅射靶时的最大溅射沉积率为0.45 nm/s,离子源可连续工作160 h.     

Application of photoluminescence microspectroscopy: a study on transfer of uranyl and europium ions on dry silica gel plate

ABSTRACT

When water contacts with porous materials, water and chemical species dissolved in the water transfer into the inside of the porous materials. Here, to study the transfer of uranyl and europium ions on a dry silica gel plate, we dropped a small amount of aqueous solution (~0.5 μL) dissolving the two ions on a dry silica gel plate, and the distributions of the two ions spread on the silica gel plate were observed by photoluminescence microspectroscopy. Photoluminescence images of uranyl and europium ions clearly show that when uranyl ion coexists in the solution, europium ion transfers in a larger area compared to uranyl ion. It can be interpreted that the larger-area distribution of europium ion is caused because uranyl ion is preferentially adsorbed to silica gel and the uranyl adsorption disturbs the adsorption of europium ion. The coexistence of uranyl ion may influence the mobility of other ion species.     

离子源研究中的光谱诊断

在离子源研究中,光谱分析作为一种重要的实验手段具有不可替代的优越性和便利性.作为一种非接触式的等离子体诊断手段,光谱分析可以在不影响离子源放电工作状态的前提下,对离子源放电等离子体的有关参数迅速作出测量和判断.本文列举了光谱诊断方法在离子源研究中的几种典型应用.     

复合无机离子交换材料及其在水体放射性Cs检测中的应用

离子交换法速度快、能与检测仪器联用，已逐渐成为水体中放射性Cs的主要富集方法。由于单一的离子交换材料无法兼顾抗辐照性、强选择性和高吸附速率等性能，因此研发兼顾各种性能的新型离子交换材料将成为提高水体中放射性Cs富集效率的关键。本文通过总结复合无机离子交换材料在水体放射性Cs富集分离方面的研究进展及相关应用，分析了各类复合无机离子交换材料的优缺点，并针对不同复合无机离子交换材料的制备提出了溶胶 凝胶、多孔支撑体和有机物黏接等改进方法。这为制备更高效的复合无机离子交换材料和提高放射性Cs检测的效率提供了参考，也为离子交换法在其他领域中的应用提供了新的思路。     

中子管内潘宁离子源的建模与控制

由于中子管内离子源电流滞后于储存器电流，导致离子源电流的调节速度和稳定性不够高，进而影响中子产额的稳定性。本文在分析大量实验数据的基础上，建立了中子管离子源的数学模型，设计出相应的PID控制算法。经测试表明：所构建的离子源模型与实际离子源工作情况符合较好，改进的控制算法能减少稳定离子源电流所需时间，提高中子产额的稳定性。