Characterization of plasma parameters, first beam results, and status of electron cyclotron resonance source

Electron cyclotron resonance (ECR) plasma source at 50 keV, 30 mA proton current has been designed, fabricated, and assembled. Its plasma study has been done. Plasma chamber was excited with 350 W of microwave power at 2450 MHz, along with nitrogen and hydrogen gases. Microwave power was fed to the plasma chamber through waveguide. Plasma density and electron temperature were studied under various operating conditions, such as magnetic field, gas pressure, and transversal distance. Langmuir probe was used for plasma characterization using current-voltage variation. The nitrogen plasma density calculated was approximately 4.5 x 10(11) cm(-3), and electron temperatures of 3-10 eV (cold) and 45-85 eV (hot) were obtained. The total ion beam current of 2.5 mA was extracted, with two-electrode extraction geometry, at 15 keV beam energy. The optimization of the source is under progress to extract 30 mA proton beam current at 50 keV beam energy, using three-electrode extraction geometry. This source will be used as an injector to continuous wave radio frequency quadrupole, a part of 100 MeV proton linac. The required root-mean-square normalized beam emittance is less than 0.2pi mm mrad. This article presents the study of plasma parameters, first beam results, and status of ECR proton source.     

A source of broad homogeneous beams of low-energy (∼0.5 keV) gas ions

A source of gas ions (argon, oxygen, nitrogen, etc.), the operating principle of which is based on the use of a glow discharge in an electrode system of a wide-aperture hollow cathode and anode in a magnetic field, is described. The exit aperture diameter of the hollow cathode, increased up to a size close to the ion beam diameter (10 cm), ensures the uniform ion emission of the plasma generated in the discharge region near the anode. A decreased angular divergence or increased ultimate ion-beam current density is achieved by a change in the potential drop in the space charge sheath between the plasma and the ion optics. The source generates broad (50 cm²) slightly diverging (ω/2∼3°–5°) ion beams with energies of 300–1000 eV at a beam current density of ∼0.5 mA/cm².     

Development of a plasma generator for a long pulse ion source for neutral beam injectors

A plasma generator for a long pulse H(+)/D(+) ion source has been developed. The plasma generator was designed to produce 65 A H(+)/D(+) beams at an energy of 120 keV from an ion extraction area of 12 cm in width and 45 cm in length. Configuration of the plasma generator is a multi-cusp bucket type with SmCo permanent magnets. Dimension of a plasma chamber is 25 cm in width, 59 cm in length, and 32.5 cm in depth. The plasma generator was designed and fabricated at Japan Atomic Energy Agency. Source plasma generation and beam extraction tests for hydrogen coupling with an accelerator of the KSTAR ion source have been performed at the KSTAR neutral beam test stand under the agreement of Japan-Korea collaborative experiment. Spatial uniformity of the source plasma at the extraction region was measured using Langmuir probes and ±7% of the deviation from an averaged ion saturation current density was obtained. A long pulse test of the plasma generation up to 200 s with an arc discharge power of 70 kW has been successfully demonstrated. The arc discharge power satisfies the requirement of the beam production for the KSTAR NBI. A 70 keV, 41 A, 5 s hydrogen ion beam has been extracted with a high arc efficiency of 0.9 -1.1 A/kW at a beam extraction experiment. A deuteron yield of 77% was measured even at a low beam current density of 73 mA/cm(2).     

Electrostatic energy analyzer measurements of low energy zirconium beam parameters in a plasma sputter-type negative ion source

A plasma sputter-type negative ion source is utilized to produce and detect negative Zr ions with energies between 150 and 450 eV via a retarding potential-type electrostatic energy analyzer. Traditional and modified semi-cylindrical Faraday cups (FC) inside the analyzer are employed to sample negative Zr ions and measure corresponding ion currents. The traditional FC registered indistinct ion current readings which are attributed to backscattering of ions and secondary electron emissions. The modified Faraday cup with biased repeller guard ring, cut out these signal distortions leaving only ringings as issues which are theoretically compensated by fitting a sigmoidal function into the data. The mean energy and energy spread are calculated using the ion current versus retarding potential data while the beam width values are determined from the data of the transverse measurement of ion current. The most energetic negative Zr ions yield tighter energy spread at 4.11 eV compared to the least energetic negative Zr ions at 4.79 eV. The smallest calculated beam width is 1.04 cm for the negative Zr ions with the highest mean energy indicating a more focused beam in contrast to the less energetic negative Zr ions due to space charge forces.     

16厘米低能强流宽束离子源

介绍了一个新型16厘米束径多会切磁场低能强流宽束离子源(MCLB-16)。由于采用新型多会切磁场和优化的低能引出系统,所以该源在薄膜辅助沉积的能量(200eV～800eV)范围内,具有较好的低能特性。源的最大引出束流可达650mA。可用反应气体或惰性气体工作。源在使用氧气时,可连续工作数十小时。该源可用于各种高性能薄膜制备的辅助沉积,也可用于制备大面积类金钢石膜(DLC)。叙述了该源的结构及性能。     

A source of gas, vapor, metal, and carbon ions based on a low-pressure hollow-cathode discharge

A compact source of gas, vapor, metal, and carbon ions based on a cold-hollow-cathode reflective discharge has been developed, in which a 6-mm-diameter flat target (Cu, Mo, W, C) is installed on the bottom of the cold cathode insulated from it. The density of the ion flow from cathode plasma reaches 100 mA/cm² at an accelerating voltage of up to 10 kV and a discharge current of 0.2-0.5 A. Vapors produced during ion sputtering of the target are ionized in the cathode and anode cavities. A beam containing ions of the plasma-producing gas and vapor is extracted throug h the channel in the reflector cathode. A fraction of the vapor of the sputtered target, the flow of which is sufficient for growing layers at a rate of ∼0.03 nm/s at a distance of 10 cm from the emission channel under the action of an ion beam, is extracted together with ions. The fraction of metal ions in the extracted beam is 0.05-0.10. The total current of the ion beam is 20-30 mA.     

A source of broad electron beams with a self-heated hollow cathode for plasma nitriding of stainless steel

The principle of operation and characteristics of a broad electron beam source based on the discharge with a self-heated hollow cathode and widened anode part are described. The source is intended for the ion nitriding of metals in the electron beam plasma. The influence of the current density (1–7 mA/cm²) and ion energy (0.1–0.3 keV) on the nitriding rate of the 12X18H10T austenitic stainless steel is studied. It is shown that the maximal nitriding rate is reached by the combining of the minimal bias voltage across the samples (100 V) and maximal ion current density, which ensures the dynamic oxide layer sputtering on the sample surface. The electron source, in which electrons are extracted through a stabilizing grid in the direction normal to the axis of the hollow cathode, ensures the radially divergent electron beam formation with a 700-cm² initial cross section, a current of up to 30 A, and initial electron energy of 0.1–0.5 keV. The source stably operates at nitrogen-argon mixture pressures of up to 3 Pa.     

Design and operating characteristics of new type cold cathode ion source

In this work, the design and performance of new type ion source are described. The discharge mechanism of the source is based on creating an arc discharge through a saddle electric field inside the discharge tube. The saddle electric field is created by immersing an annular anode inside the discharge tube covered from the upper and lower ends with two flanges. These two flanges act as cathodes. The discharge tube is surrounded by a solenoid coil which produces an axial magnetic field (up to 400 G) measured at the center of the source. Measurements have been performed to find out the influence of arc power, pressure, discharge voltage, magnetic field, and extracting voltage on the ion source properties. The source yields an argon ion current of approximately 0.6 mA and electron current of approximately 4 mA at normal operating conditions (extraction voltage V(ex)=7 kV, pressure of 5.5x10(-4) Torr, V(arc)=400 V, I(arc)=1 A, B=200 G). It showed an energy spread of 20 eV at a discharge voltage of 400 V and an extraction voltage of 3 kV.     

An ultra-low energy (30-200 eV) ion-atomic beam source for ion-beam-assisted deposition in ultrahigh vacuum

The paper describes the design and construction of an ion-atomic beam source with an optimized generation of ions for ion-beam-assisted deposition under ultrahigh vacuum (UHV) conditions. The source combines an effusion cell and an electron impact ion source and produces ion beams with ultra-low energies in the range from 30 eV to 200 eV. Decreasing ion beam energy to hyperthermal values (≈10(1) eV) without loosing optimum ionization conditions has been mainly achieved by the incorporation of an ionization chamber with a grid transparent enough for electron and ion beams. In this way the energy and current density of nitrogen ion beams in the order of 10(1) eV and 10(1) nA/cm(2), respectively, have been achieved. The source is capable of growing ultrathin layers or nanostructures at ultra-low energies with a growth rate of several MLs/h. The ion-atomic beam source will be preferentially applied for the synthesis of GaN under UHV conditions.     

Ion energy distribution functions of low energy beams formed by wire extraction electrodes

The two-electrode extractor system made of 0.1 mm diameter tungsten wires separated by 0.7 mm has formed an argon ion beam with 50 V extraction potential. Energy spreads of the extracted beams were typically less than 2 eV when the beam current density was low. The beam intensity rapidly decreased as the distance between the extractor and the beam detector increased, indicating space charge limited transport of the beam. Problems associated with the emittance measurements are also discussed.     

Subcutoff microwave driven plasma ion sources for multielemental focused ion beam systems

A compact microwave driven plasma ion source for focused ion beam applications has been developed. Several gas species have been experimented including argon, krypton, and hydrogen. The plasma, confined by a minimum B multicusp magnetic field, has good radial and axial uniformity. The octupole multicusp configuration shows a superior performance in terms of plasma density (~1.3 x 10(11) cm(-3)) and electron temperature (7-15 eV) at a power density of 5-10 Wcm(2). Ion current densities ranging from a few hundreds to over 1000 mA/cm(2) have been obtained with different plasma electrode apertures. The ion source will be combined with electrostatic Einzel lenses and should be capable of producing multielemental focused ion beams for nanostructuring and implantations. The initial simulation results for the focused beams have been presented.     

Simple, high current, antimony ion source

A simple metal ion source capable of producing a continuous, uncontaminated, high current beam of Sb ions is presented. It produced a total ion current of 200 muA at 1 kV extraction voltage. A discharge occurred in the source at a pressure of 6x10(-4) Torr. The ion current extracted from the source increased with the 3/2 power of the extraction voltage. The perveance of the source and ion density in the plasma were 8x10(-9) and 1.8x10(11) cm(-3), respectively.     

Measurements of beam current density and proton fraction of a permanent-magnet microwave ion source

A permanent-magnet microwave ion source has been built for use in a high-yield, compact neutron generator. The source has been designed to produce up to 100 mA of deuterium and tritium ions. The electron-cyclotron resonance condition is met at a microwave frequency of 2.45 GHz and a magnetic field strength of 87.5 mT. The source operates at a low hydrogen gas pressure of about 0.15 Pa. Hydrogen beams with a current density of 40 mA/cm(2) have been extracted at a microwave power of 450 W. The dependence of the extracted proton beam fraction on wall materials and operating parameters was measured and found to vary from 45% for steel to 95% for boron nitride as a wall liner material.     

A Gas-Ion Ribbon Beam Source with a Wide-Aperture Cold Hollow Cathode

A source of gas-ion ribbon beams on the basis of a glow discharge in a prolonged electrode system with a closed drift of fast electrons is described. This drift ensures a uniform plasma ion emission in the transverse direction relative to the magnetic induction vector. A discharge with a current of up to 3.5 A and a voltage of 400–600 V in a magnetic field of 6 mT is maintained under a gas flow of 40 cm³atm/min and ensures a saturation ion current density from plasma of up to 4 mA/cm² (±5%) over a length of 50 cm. Using slit-type optics with an aperture of 50 × 1 cm, a ribbon beam with a current of up to 0.2 A and an energy of argon ions of up to 25 keV has been obtained. Methods of the concentration of discharge near the emissive slit and the effect of the electron drift on the ion emission from the plasma are considered. The optimal conditions for ion beam formation are determined.     

Fast ion beam-plasma interaction system

A device has been constructed for the study of the interaction between a fast ion beam and a target plasma of separately controllable parameters. The beam of either hydrogen or helium ions has an energy of 1-4 keV and a total current of 0.5-2 A. The beam energy and beam current can be varied separately. The ion source plasma is created by a pulsed (0.2-10-ms pulse length) discharge in neutral gas at up to 3 x 10(-3) Torr. The neutrals are pulsed into the source chamber, allowing the neutral pressure in the target region to remain less than 5 x 10(-5) Torr at a 2-Hz repetition rate. The creation of the source plasma can be described by a simple set of equations which predict optimum source design parameters. The target plasma is also produced by a pulsed discharge. Between the target and source chambers the beam is neutralized by electrons drawn from a set of hot filaments. Currently under study is an unstable wave in a field-free plasma excited when the beam velocity is nearly equal to the target electron thermal velocity (v(beam) approximately 3.5 x 10(7) cm/s, Te = 0.5 eV).     

Li+ alumino-silicate ion source development for the neutralized drift compression experiment

We report results on lithium alumino-silicate ion source development in preparation for warm dense matter heating experiments on the new neutralized drift compression experiment II. The practical limit to the current density for a lithium alumino-silicate source is determined by the maximum operating temperature that the ion source can withstand before running into problems of heat transfer, melting of the alumino-silicate material, and emission lifetime. Using small prototype emitters, at a temperature of ≈1275 °C, a space-charge limited Li(+) beam current density of J ≈1 mA/cm(2) was obtained. The lifetime of the ion source was ≈50 h while pulsing at a rate of 0.033 Hz with a pulse duration of 5-6 μs.     

Effects of electrode geometry on the ion beam extraction of closed drift type anode layer linear ion source

Closed drift type anode layer linear ion source was investigated with focusing on the electrode geometry effects on ion beam emission and anode layer formation. In the electrode geometry, the discharge gap between anode and cathode plays an important role to control anode layer formation as well as electron generation. When the discharge gap is increased from 2 to 3 mm, the ion current density was enhanced from 0.9 to 1.35 mA∕cm(2). Computational simulation by using an object oriented particle in cell showed that the discharge volume was extended due to enhanced electron generation and the electric field at the anode layer was enhanced from 1.32 to 1.52 MV∕cm.     

Development of low-energy and high-current-density ion beam system

A low-energy ion beam system operating at a dc voltage of less than 300 V was developed using an ion source with a multicusp magnetic field. A high-current-density ion beam of 6.9 mA∕cm(2) was successfully extracted at the electrode. The beam extraction characteristics for flat and concave electrodes were compared. In the case of a concave electrode with a designed focal length of 350 mm, it was observed that the beam profile was sharper than that obtained using a flat electrode.     

Intense source of spin-polarized electrons

Spin angular momentum conservation in chemiionization reactions involving optically oriented He(2(3)S) atoms in a flowing helium afterglow has been exploited to yield a source of spin-polarized electrons. Either transversely or longitudinally polarized electrons can be extracted. Polarized electron beam currents of approximately 2 muA have been realized at 40% polarization. The beam has an effective emittance of approximately 2 mrad/cm over the energy range 100-400 eV, an energy spread of less, similar0.15 eV, and the polarization is readily reversible. The source is relatively inexpensive and appears suitable for the majority of low-energy spin-dependent scattering experiments proposed to date.     

Characteristics of the Berkeley multicusp ion source

The performance of a cubical permanent magnet generated line-cusp ion source has been investigated for use with neutral beam injectors. This source has been operated with discharge currents greater than 500 A and ion current densities higher than 400 mA/cm2 at the extraction grid. The uniformity of the density profile across the extraction area is found to be dependent on the gas pressure. By using a fast Langmuir probe sweeping circuit, the electron temperature and the plasma density and potential have been analyzed for different discharge powers and gas pressures. The heat load on the plasma grid when it is electrically floating or connected to the negative cathode has been compared calorimetrically. The use of lanthanum hexaboride and impregnated oxide cathodes have been investigated for the purpose of long pulse operation. The phenomenon of mode flipping is found to occur quite frequently during a discharge with these magnetic-field-free cathodes. Species composition as a function of discharge power and chamber length is measured by a mass spectrometer.