Design of a precision multi-layer roll-to-roll printing system

Roll-to-roll (R2R) printing technologies have been widely adopted in a variety of engineering fields, e.g., organic photovoltaics and flexible electronics, owing to the advantages of cost and throughput. Although a minimum feature size of 100 nm has been demonstrated on R2R systems, the layer to layer registration accuracy (i.e., overlay accuracy) still remains as low as tens of microns, which prevents the fabrication of common electronic and functional devices, such as transistors. To realize the full potential of R2R technologies, the registration accuracy must be improved to match the printing resolution, i.e., 100s nm. To address the issue, we have developed a multi-layer R2R system with multiple-input multiple-output (MIMO) closed-loop control that achieves submicron level alignment precision for large-scale continuous printing processes. The enabling elements in the multi-layer R2R system include: (1) new vision-based alignment algorithm/method, which provides 100s nm position detection capability based on low-cost cameras; and (2) custom-built five-axis compliant roller positioner. Experimental results show that the compliant roller positioner has a ±1 mm range with 100s nm precision in X, Y, and Z axes respectively. For correcting in-plane web errors, the roller positioner can achieve a range of 1 mm with < 1 μm precision, realizing multi-layer R2R printing with submicron overlay accuracy. Based on the new methods, a gate/source-drain multi-layer electrode structure for field-effect transistors (FETs) has been designed and fabricated on a 4-inch PET web, demonstrating better than 1 μm overlay precision in fabricating flexible electronics on a R2R platform for the first time.     

A long-stroke 3D contact scanning probe for micro/nano coordinate measuring machine

This paper presents a long-stroke contact scanning probe with high precision and low stiffness for micro/nano coordinate measuring machines (micro/nano CMMs). The displacements of the probe tip in 3D are detected by two plane mirrors supported by an elastic mechanism, which is comprised of a tungsten stylus, a floating plate and two orthogonal Z-shaped leaf springs fixed to the outer case. A Michelson interferometer is used to detect the vertical displacement of the mirror mounted on the center of the floating plate. An autocollimator based two dimensional angle sensor is used to detect the tilt of the other plane mirror located at the end of the arm of the floating plate. The stiffness and the dynamic properties are investigated by simulation. The optimal structural parameters of the probe are obtained based on the force-motion model and the constrained conditions of stiffness, measurement range and horizontal size. The results of the performance tests show that the probe has a contact force gradient within 0.5 mN/μm, a measuring range of (±20 μm), (±20 μm), and 20 μm, respectively, in X, Y and Z directions, and a measurement standard deviation of 30 nm. The feasibility of the probe has preliminarily been verified by testing the curved surface of a convex lens.     

Atomic force microscope probe calibration by use of a commercial precision balance

In this paper, we investigate the characteristics of a piezoresistive AFM cantilever in the range of 0–1.6 μN by using nano force calibrator (NFC), which consists of a high precision balance with resolution of 1 nN and 1-D fine positioning stage. Brief modeling of the cantilever is presented and then, the calibration results are shown. Tests revealed a linear relationship between the probing force and sensor output (resistance change), but the force vs. deflection is not as linear as the force vs. sensor output curve. The force constant of the cantilever was measured to 0.26 N/m with a standard deviation of 0.01 N/m. It shows that there is big difference between measured and nominal spring constant of 1 N/m provided by the manufacturer’s specifications.     

Development and evaluation of a sensor glove for hand function assessment and preliminary attempts at assessing hand coordination

Quantitative measurement of hand kinematics can help us to better understand pathophysiological aspects of finger neural control and quantify hand impairments. A sensor glove was developed based on resistive bend sensors and resistive force sensors to monitor finger joint angles and forces exerted to objects by fingers. The validity and reliability of the glove were evaluated. A novel method was proposed to visualize and quantify the abnormality of the inter-joint coordination. The validity test indicated that the accuracy error of measuring joint angles was approximately ±6° and that of measuring forces was approximately ±8 g. The reliability test yielded an intraclass correlation coefficient of 0.9876 ± 0.0058 for the force sensors and 0.9561 ± 0.0431 for the bend sensors. The stability, accuracy and reliability of measuring joint angles were comparable with previous studies. The involvement of force sensors and the capacity of reflecting inter-joint coordination make the glove more comprehensive for hand function assessment.     

Small-capacity deadweight force standard machine compensating loading frame

The Korea Research Institute of Standards and Science (KRISS) has developed a 20 N deadweight force standard machine. The machine consists of a weight stack, a loading frame, a taring system, a main body and a control system. The taring system has the role of compensating the initial force generated by the loading frame. With two motors, a displacement sensor, several limit switches, and a synthetic control system consisting of a programmable logic controller and an operating PC, the machine can be operated almost fully automatically. The machine can generate a compressive force in the range of 0.5–22 N with a relative expanded uncertainty of 1.0 × 10^–4. The machine was compared with a 200 N deadweight force standard machine. In the comparison, the relative deviation was 5.8 × 10^–5, less than the declared expanded uncertainty of the force standard machines, therefore confirming the machine’s accuracy.     

A real-time polishing force control system for ultraprecision finishing of micro-optics

Polishing force condition plays a key role in the ultraprecision finishing of micro-optics because it strongly affects the polishing performance. In this paper, a novel polishing force control system is developed to improve the polishing stability. It is proposed for the first time to precisely control polishing force in real-time and has a simple mechanism which mainly composes of a load cell, a piezo stage and a linear stage. The load cell is used to measure the polishing force, whereas the piezo-stage is applied to adjust the force with nano/micro positioning change. The linear stage driven by a stepper motor is employed to prevent force change beyond the travel range of piezo stage which leads to the system out of control. A PID controller is adopted to calculate the command voltage for driving the piezo-stage based on the measured force. The system enables polishing force to be controlled within a range of 0–200 mN with a resolution of 0.1 mN. Some fundamental experiments are conducted to evaluate the performance of newly developed system. The results indicate that the proposed polishing force control system enables a stable polishing, and the polishing force conditions which generate suitable material removal function are acquired.     

Nano force sensing using symmetric double stage micro resonator

A new approach is proposed to improve a graphical approach with considering intensity coupling loss coefficients in the analytical derivation of the optical transfer functions for a symmetric double stage vertically coupled microring resonator. An optimum transmission coupling condition is determined with considering terms of couplers intensity loss which leads to low insertion loss of 1.2 dB, finesse of 1525, the out of band rejection ratio of 61.8 dB. The resonating system is used as an optical force sensing system to make the benefit of the accuracy of measurements in micro and nano scales. The sensitivity of proposed force sensor in terms of wavelength-shift is 33 nm/nN and the limit of detection is 1.6 × 10⁻² nN. The proposed sensing system has the advantages of self-calibration and the low power consumption due to the low intensity.     

Improving the etching performance of high-aspect-ratio contacts by wafer temperature control: Uniform temperature design and etching rate enhancement

A novel wafer temperature control system using direct expansion cycles is developed to improve etching performance. This system enables rapid temperature control of a wafer with low power consumption. In a previous report, we confirmed that the etching rate and mask selectivity of high-aspect-ratio contact etching could be increased by around 6% and 14%, respectively, by controlling the temperature of the wafer during the etching process. In this study, an advanced wafer temperature control system that realizes not only rapid response but also uniform wafer cooling is developed, and a new etching process that controls O₂ gas flow rate as well as wafer temperature during etching is evaluated to decrease the etching rate depression of high-aspect-ratio contact etching. As a result, a rate of wafer temperature change of 1 °C/s and uniformity of ±0.7% with a coefficient of performance exceeding 3 is achieved over a wafer with a diameter of 300 mm during the etching process. Furthermore, etching rate depression in C₄F₆/Ar/O₂ plasma is decreased from 14.4% to 7.8% for a sample with a diameter of 100 nm and aspect ratio of 30.     

Development and precise positioning control of a thin and compact linear switched reluctance motor

This paper describes the development and precise positioning control of a thin and compact linear switched reluctance motor (LSRM). The LSRM that has been developed has a mover that is easy to fabricate and can be disposable. The mover can be easily separated from the stator, allowing it to be changed frequently or discarded in a hazardous application. The prototyped LSRM mover is only 0.128 mm thick with the stator measuring 2.0 mm at its thickest point. These features are highly desirable for space savings while being cost-effective. However, the LSRM has a strong nonlinear driving characteristic that presents a challenge with respect to precision control. In order to overcome this problem and achieve precision positioning, a linearizer unit was designed and integrated into the controller to compensate for the nonlinear relationships among the effective thrust force, mover position, and excitation current. The usefulness of the designed controller was examined experimentally. The experimental positioning results show that the steady-state errors were all less than 1 μm in the working range of the LSRM. In addition, the redesign for the improvement of thrust characteristic and easy fabrication of the LSRM is explained.     

Application of blue laser direct-writing equipment for manufacturing of periodic and aperiodic nanostructure patterns

This study presents the novel development of low cost, highly efficient blue laser direct-writing equipment for using mask-less laser lithography to manufacture periodic and aperiodic nanostructure patterns. The system includes a long-stroke linear motor precision stage (X, Y), a piezoelectric nano-precision stage (Y, θz), a 3-DOF (degrees of freedom) laser interferometer measurement system, and a blue laser direct-writing optical system. The 3-DOF laser interferometer measurement system gives the control system feedback for displacement (X, Y, θz) of the equipment. The laser processing equipment consists of a blue laser direct-writing optical head, a field-programmable gate array (FPGA) alignment interface, and an optical head servo controller. The optical head operates at a wavelength of 405 nm. Processing the nanostructures on thermo-reaction inorganic resists with precise control of the laser intensity, taking advantage of the threshold effect to exceed the limitations of optical diffraction, and reduces the nanostructure hole size. The equipment can be used to fabricate various periodic nanostructure patterns, aperiodic nanostructure patterns, and two-dimensional patterns. The equipment positioning accuracy is within 50 nm at a speed of 50 mm/s, and the minimum critical dimension can be achieved about 100 nm or so.     

Design and experimental validation of an ultra-precision Abbe-compliant linear encoder-based position measurement system

The design and development of an Abbe-compliant linear encoder-based measurement system for position measurement with a targeted 20 nm uncertainty (k = 2) in machine tools and CMMs is presented. It consists of a linear scale and a capacitive sensor, mounted in line on an interface which is guided in the scale's measurement direction and driven by a linear motor based on the output signal of the capacitive sensor. The capacitive sensor measures the displacement of a target surface on the workpiece table. The functional point, which is the center of a tool or touch probe, is always aligned with the scale and capacitive sensor such that this configuration is compliant with the Abbe principle. Thermal stability is achieved by the application of a thermal center between the scale and capacitive sensor at the tip of the latter, which prevents both components to drift apart. Based on this concept, a prototype of a one-DOF measurement system was developed for a measurement range of 120 mm, together with an experimental setup aimed at verifying the reproducibility of the system for changing ambient conditions of ±0.5 °C and ±5%rh and the repeatability during tracking of a target surface over a short period of time. These experiments have shown that the measurement uncertainty of the one-DOF system is below 29 nm with a 95% confidence level.     

Classification of vertebral column disorders and lumbar discs disease using attribute weighting algorithm with mean shift clustering

In this article, a new data pre-processing method has been suggested to detect and classify vertebral column disorders and lumbar disc diseases with a high accuracy level. The suggested pre-processing method is called the Mean Shift Clustering-Based Attribute Weighting (MSCBAW) and is based primarily on mean shift clustering algorithm finding the number of the sets automatically. In this study, we have used two different datasets including lumbar disc diseases (with two classes-our database) and vertebral column disorders datasets (with two or three classes) taken from UCI (University of California at Irvine) machine learning database to test the proposed approach. The MSCBAW method is working as follows: first of all, the centres of the sets automatically for each characteristics in dataset by using the mean shift clustering algorithm are computed. And then, the mean values of each property in dataset are calculated. The weighted datasets by multiplying these mean values by each property value in the dataset that have been obtained by dividing the above mentioned mean values by the centres of the sets belonging to the relevant property are achieved. After the data weighting stage, three different classification algorithms that included the k-NN (k-Nearest Neighbour), RBF–NN (Radial Basis Function–Neural Network) and SVM (Support Vector Machine) classifying algorithms have been used to classify the datasets. In the classification of vertebral column disorders dataset with two classes (normal or abnormal), while the obtained classification accuracies and kappa values were 78.70% ± 0.455 (the classification accuracy ± standard deviation), 81.93% ± 0.899, and 80.32% ± 0.56 using SVM, k-NN (for k = 1), and RBF–NN classifiers, respectively, the combinations of MSCBAW and SVM, k-NN (for k = 1), and RBF–NN classifiers were obtained 99.03% ± 0.977, 99.67% ± 0.992, and 99.35% ± 0.9852, respectively. In the classification of second dataset named vertebral column disorders dataset with three classes (Normal, Disk Hernia, and Spondylolisthesis), while the obtained classification accuracies and kappa values were 74.51% ± 0.581, 78.70% ± 0.659, and 83.22% ± 0.728 using SVM, k-NN (for k = 1), and RBF–NN classifiers, respectively, the combinations of MSCBAW and SVM, k-NN (for k = 1), and RBF–NN classifiers were obtained 99.35% ± 0.989, 96.77% ± 0.948, and 99.67% ± 0.994, respectively. As for the lumbar disc dataset, while the obtained classification accuracies and kappa values were 94.54% ± 0.974, 94.54% ± 0.877, and 93.45% ± 0.856 using SVM, k-NN (for k = 1), and RBF–NN classifiers, respectively, the combinations of MSCBAW and SVM, k-NN (for k = 1), and RBF–NN classifiers were obtained 100% ± 1.00, 99.63% ± 0.991, and 99.63% ± 0.991, respectively. The best hybrid models in the classification of vertebral column disorders dataset with two classes, vertebral column disorders dataset with three classes, and lumbar disc dataset were the combination of MSCBAW and k-NN classifier, the combination of MSCBAW and RBF–NN classifier, and the combination of MSCBAW and SVM classifier, respectively.     

High precision self-alignment using liquid surface tension for additively manufactured micro components

Self-assembly of components using liquid surface tension is an attractive alternative to traditional robotic pick-and-place as it offers high assembly accuracy for coarse initial part placement. One of the key requirements of this method is the containment of the liquid within a designated binding site. This paper looks to expand the applications of self-assembly and investigates the use of topographical structures applied to 3D printed micro components for self-assembly using liquid surface tension. An analysis of the effect of edge geometry on liquid contact angle was conducted. A range of binding sites were produced with varying edge geometries, 45–135°, and for a variety of site shapes and sizes, 0.4–1 mm in diameter, and 0.5 mm × 0.5 mm–1 mm × 1 mm square. Liquid water droplets were applied to the structures and contact angles measured. Significant increases in contact angle were observed, up to 158°, compared to 70° for droplets on planar surfaces, demonstrating the ability of these binding sites to successfully pin the triple contact line at the boundary. Three challenging self-assembly cases were examined: (1) linear initial component misplacement >0.5 mm, (2) angular misplacement of components, and (3) misplacement of droplet. Across all three assembly cases the lowest misalignments in final component position, as well as highest repeatability, were observed for structures with actual edge geometries <90° (excluding 45° nominal), where the mean magnitude of misalignment was found to be 31 μm with 14 μm standard deviation.     

On the film thickness dependence of shear strengths in sliding,boundary-layer friction

The density functional theory calculated pressure-dependent shear strength S of a four-layer slab of KCl on a Fe(1 0 0) substrate is compared to previous calculations for a bilayer slab to gauge the effect of film thickness on the shear properties of the film. It is found that the shear strength varies with pressure as S = S₀ + αP, where P is the contact pressure. The resulting calculated values for the four-layer slab are S₀〈1 0〉 = 62 ± 15 and S₀〈1 1〉 = 65 ± 11 MPa while α〈1 0〉 and α〈1 1〉 are 0.06 ± 0.01. The values are very close to those calculated for the bilayer slab of S₀〈1 0〉 = 64 ± 9 and S₀〈1 1〉 =69 ± 8 MPa and α〈1 0〉 and α〈1 1〉 of 0.05 ± 0.01, and in reasonable agreement with the experiment values. These results suggest that the thickness of the film does not have a profound effect on the shear properties.     

A force-matching method for quantitative hardness measurements by atomic force microscopy with diamond-tipped sapphire cantilevers

We present a new method to improve the accuracy of force application and hardness measurements in hard surfaces by using low-force (<50 μN) nanoindentation technique with a cube-corner diamond tip mounted on an atomic force microscopy (AFM) sapphire cantilever. A force calibration procedure based on the force-matching method, which explicitly includes the tip geometry and the tip-substrate deformation during calibration, is proposed. A computer algorithm to automate this calibration procedure is also made available. The proposed methodology is verified experimentally by conducting AFM nanoindentations on fused quartz, Si(1 0 0) and a 100-nm-thick film of gold deposited on Si(1 0 0). Comparison of experimental results with finite element simulations and literature data yields excellent agreement. In particular, hardness measurements using AFM nanoindentation in fused quartz show a systematic error less than 2% when applying the force-matching method, as opposed to 37% with the standard protocol. Furthermore, the residual impressions left in the different substrates are examined in detail using non-contact AFM imaging with the same diamond probe. The uncertainty of method to measure the projected area of contact at maximum force due to elastic recovery effects is also discussed.     

Stable mounting of beamsplitters for an interferometer

The Basic Angle Monitoring (BAM) system for satellite GAIA (2012–2018) will measure variation on the angle between the lines-of-sight between two telescopes with 2.5 prad uncertainty. It is a laser-interferometer system consisting of two optical benches with a number of mirrors and beamsplitters. The optical components need to be stable with respect to each other within 0.17 pm in position and 60 nrad in angle during measurements over a period of 6 h with 0.1 mK thermal stability. This paper aims at finding the most suitable mounting plane of the fused silica beamsplitters mounted onto the silicon carbide optical bench in the BAM system. These beamsplitters must be clamped mechanically. Based on a force stability analysis, mounting in the plane of light is a more stable solution than mounting on the reflective surface. However, when making a conceptual design the difficulty is making a design which has sufficient alignment stability to survive launch vibrations and a cool-down trajectory is more difficult.     

Measurement and statistical analysis toward reproducibility validation of AZ4562 cylindrical microlenses obtained by reflow

This paper presents the statistical analysis applied into the shape of microlenses (MLs) for validating the high-reproducibility feature of their fabrication process. The MLs were fabricated with the AZ4562 photoresist, using photolithography and thermal reflow processes. Two types of MLs arrays were produced for statistical analysis purposes: the first with a cross-sectional diameter of 24 μm and the second with a cross-sectional diameter of 30 μm, and both with 5 μm spacing between MLs. In the case of 24 μm diameter arrays, the measurements showed a mean difference in diameter of 2.78 μm with a standard deviation (SD) of 0.22 μm (e.g., 2.78 ± 0.22 μm of SD) before the reflow, and 2.34 ± 0.35 μm of SD after the reflow. For the same arrays, the mean difference in height obtained was, comparatively to the 5.06 μm expected, 0.76 ± 0.10 μm of SD before the reflow and 1.91 ± 0.15 μm of SD after the reflow, respectively. A mean difference in diameter of 2.64 ± 0.41 μm of SD before the reflow, and 1.87 ± 0.34 μm of SD after the reflow was obtained for 30 μm diameter MLs arrays. For these MLs, a mean difference in height of 0.71 ± 0.12 μm of SD before the reflow and 2.24 ± 0.24 μm of SD after the thermal reflow was obtained, in comparison to the 5.06 μm of height expected to obtain. These results validate the requirement for reproducibility and opens good perspectives for applying this fabrication process on high-volume production of MLs arrays.     

Surface conductance of graphene from non-contact resonant cavity

A method is established to reliably determine surface conductance of single-layer or multi-layer atomically thin nano-carbon graphene structures. The measurements are made in an air filled standard R100 rectangular waveguide configuration at one of the resonant frequency modes, typically at TE₁₀₃ mode of 7.4543 GHz. Surface conductance measurement involves monitoring a change in the quality factor of the cavity as the specimen is progressively inserted into the cavity in quantitative correlation with the specimen surface area. The specimen consists of a nano-carbon-layer supported on a low loss dielectric substrate. The thickness of the conducting nano-carbon layer does not need to be explicitly known, but it is assumed that the lateral dimension is uniform over the specimen area. The non-contact surface conductance measurements are illustrated for a typical graphene grown by chemical vapor deposition process, and for a high quality monolayer epitaxial graphene grown on silicon carbide wafers for which we performed non-gated quantum Hall resistance measurements. The sequence of quantized transverse Hall resistance at the Landau filling factors ν = ±6 and ±2, and the absence of the Hall plateau at ν = 4 indicate that the epitaxially grown graphene is a high quality mono-layer. The resonant microwave cavity measurement is sensitive to the surface and bulk conductivity, and since no additional processing is required, it preserves the integrity of the conductive graphene layer. It allows characterization with high speed, precision and efficiency, compared to transport measurements where sample contacts must be defined and applied in multiple processing steps.     

Optimisation of a nano-positioning stage for a Transverse Dynamic Force Microscope

This paper describes the optimisation of a nano-positioning stage for a Transverse Dynamic Force Microscope (TDFM). The nano-precision stage is required to move a specimen dish within a horizontal region of 1 μm × 1 μm and with a resolution of 0.3 nm. The design objective was to maximise positional accuracy during high speed actuation. This was achieved by minimising out-of-plane distortions and vibrations during actuation. Optimal performance was achieved through maximising out-of-plane stiffness through shape and material selection as well optimisation of the anchoring system. Several shape parameters were optimised including the shape of flexural beams and the shape of the dish holder. Physical prototype testing was an essential part of the design process to confirm the accuracy of modelling and also to reveal issues with manufacturing tolerances. An overall resonant frequency of 6 kHz was achieved allowing for a closed loop-control frequency of 1.73 kHz for precise horizontal motion control. This resonance represented a 12-fold increase from the original 500 Hz of a commercially available positioning stage. Experimental maximum out-of-plane distortions below the first resonance frequency were reduced from 0.3 μm for the first prototype to less than 0.05 μm for the final practical prototype.     

Specific energy and surface roughness of minimum quantity lubrication grinding Ni-based alloy with mixed vegetable oil-based nanofluids

Vegetable oil is a low toxic, excellent biodegradable and renewable energy source used as an ideal lubricating base oil in machining. Castor oil exhibits good lubrication performance but poor mobility, which limits its application especially in precision grinding. The main objective of the work presented to obtain optimal mixed vegetable based-oil and optimal nanoparticles adding concentration in grinding Ni-based alloy with minimum quantity lubrication. An experimental investigation is carried out first to study the different vegetable oils with excellent mobility mixed with castor oil. The lubrication property of the oil was evaluated in terms of grinding force, force ratio, specific grinding energy, and surface roughness. Based on the test conditions, it is found that soybean/castor mixed oil obtained the optimal results (μ= 0.379, U = 83.27 J/mm³ and Ra = 0.325 μm) and lubricating effect compared with castor oil and other mixed base oils. To further explore the lubricating capability of soybean/castor mixed oil, MoS₂ nanoparticles which have excellent lubricating property were added into the soybean/castor mixed oil to prepare different concentrations nanofluids. From the present study, it can be concluded that 8% mass fraction of the oil mixture should be added to obtain the optimal machining results, with the lowest force ratio (0.329), specific energy (58.60 J/mm³), and average grinding temperature (182.6 °C). Meanwhile, better surface microtopography of ground parts and grinding debris morphologies were also observed for the machining conditions.