测头读数及定位误差对三点法圆度测量精度的影响

研究三点法测量圆度时测头的读数及角位置误差对圆度测量精度的影响。从三点法的原理出发对测量过程进行误差分析,导出了圆度测量误差方程,并通过计算机仿真详细研究了测头的读数及角位置误差对圆度测量精度的影响。圆度测量精度主要决定于读数误差;如果３个测头间的夹角选择不当,将使测头读数误差在某些谐波上被大大放大。必须恰当选择３个测头间的夹角,使读数误差对圆度各次谐波测量结果的影响都较小。     

三点法中测头最佳角位置的确定方法

论述了三点法圆度及轴系运动误差测量系统中确定三个测头最佳角位置的方法。通过分析测头读数误差对圆度各次谐波测量精度的影响,提出了确定三个测头最佳角位置的优化策略,基于MonteCarlo思想和单纯形模式搜索方法编制了高效、高精度的寻优程序,优化得到三个测头的最佳角位置。研究表明：在误差分析的基础上对三个测头的角位置进行优化能很好地解决三点法圆度测量形状失真问题,随机模式搜索寻优是确定测头最佳角位置的有效手段。     

三点法中测头角位置的精密测量方法

研究了三点法圆度及轴系误差测量中测头角位置的精密测量方法。设计了能直接测量非接触电容传感器测头实测状态下的角位置的测角系统,提出了克服测头角位置测量误差及三个测头灵敏度标定误差影响的校正方法。实验表明：采用本文提出的“多刻线”法测角精度优于1′,测头角位置测量误差及三个测头灵敏度标定误差对测量精度的影响可降致最小。     

四点法圆度检测中测头最佳角位置的研究

在三点法圆度检测中测头最佳角位置研究的基础上,建立四点法圆度检测数学模型;在对四点法的测量精度进行理论分析的基础上获得了影响圆度检测精度的主要因素及函数;运用优化软件对其函数进行多目标优化求解,得到测头最佳角位置;搭建测量平台,通过多组对比实验对优化所得的角度的合理性进行检验。实验研究结果表明:在优化所得的角度基础上进行圆度检测,可以得到相对高精度的结果。此研究为后续四点法的圆度检测奠定了理论基础。     

基于傅里叶变换的转台分度误差分离与补偿方法

为了保证和提高转台测角系统的现场测量精度,本文针对基于傅里叶变换的转台分度误差分离与补偿方法开展研究。在原理证明傅里叶变换实现转台分度误差分离的基础上,建立转台分度误差与读数头测量值之间的函数模型;根据傅里叶变换中传递函数性质,重点说明双读数头安装角度间隔与测量误差谐波阶次间关系,优化了双读数头布置;在现场可编程门阵列电路平台上实现多读数头测量值的同步获取,采用坐标旋转数字计算方法完成谐波误差函数实时计算。搭建实验平台进行误差分离与补偿效果验证实验,实验结果证明采用优化布置的双读数头信号进行分度误差分离并补偿后,转台的分度误差峰峰值由57.58″减小到3.36″,补偿后的转台测角系统扩展测量不确定度为0.9″(k=2)。     

五点法测量机床主轴轴向及倾角的运动误差

提出了测量机床主轴的轴向及倾角运动误差的端面五点法。在轴端面绕轴心的某一圆周上,垂直于轴端面,按通过误差分析优化确定的位置,布置五个测头,在主轴回转一圈中同时测得主轴的轴向及倾角运动误差以及端面基准的形状误差,并将测头的读数及定位误差的影响降至最低程度。本方法可用于机床主轴回转精度的实时测量,试验表明其测量精度可达亚微米级。     

蒙特卡罗在圆度测量精度分析中的应用研究

根据三点法圆度测量的基本原理,重点分析了三测头的测量误差对圆度测量精度的影响.由于三测头测量误差的传递关系非常复杂,因此作者提出了一种采用Monte Carlo随机抽样和随机模拟对此进行分析的方法,直观地确定了由测头测量误差引起的工件轮廓上各点的圆度测量标准差,并通过仿真证明了该方法是有效的.     

提高测角精度的双读数头转台设计

转台的测角精度在测量轴类零件的圆度、圆柱度等几何精度中起着至关重要的作用。为了提高轴类零件测量仪中转台的测角精度和稳定性,研发了一台采用双读数头结构的数控转台。首先分析了双读数头消除误差的原理,并比较了数模信号取平均值法的优缺点。然后在转台结构方面进行了创新设计,采用气体静压的半球轴承技术减小制造和调试难度。最后采用自准直仪进行单、双读数头两种方案的转台测角精度对比实验,实验表明,对双读数头数字信号采用求平均值法,能有效提高转台测角精度。     

三平行传感器式频域法误差分离技术--在线测量圆度误差的新方法

提出了一种能临床测量与分离工件圆度误差和主轴系统回转误差的新方法——三平行传感器式频域法：三个位移传感器呈平行布置，其中一个传感器的测量轴线通过被测对象中心，其优点是测试系统易于安装与调整。给出了该方法的读数方程和权函数表达式以及应用频域法分离求解的途径。提出了避免其谐波抑制的措施。实测结果与经典的三点法的测量结果作了比对，表明该方法简便、正确、有效。     

双读数头圆光栅偏心参数标定修正算法

圆光栅安装偏心误差是影响圆光栅角度测量精度的关键因素,偏心误差补偿是提高角度测量精度的重要方法。为准确辨识和补偿圆光栅安装偏心误差参数,在建立的圆光栅偏心误差模型基础上提出了一种双读数头平均误差补偿方法,对读数误差进行修正,并对测量与修正模型进行仿真实验。使用正23面棱体与光电自准直仪搭建实验装置,对所提方法的测量补偿效果进行验证。实验结果表明:采用所提出的补偿修正方法能够有效补偿圆光栅读数头读数偏差,圆光栅的测角精度达到1″以内。     

基于几何动态模型的圆度误差分离模拟

针对精密加工过程中影响圆度误差分离精度的问题,提出了一种基于几何动态模型的圆度误差分离模拟方法。在主轴空间运动规律的基础上,通过回转体轴心的自转和公转关系建立工件截面的几何模拟动态模型。结合三点法圆度误差分离技术实现了动态条件下的圆度误差准确表示,并分析研究了传感器安装角度与干扰误差对圆度误差分离精度的影响。数值实验分析表明,建立的几何模型分析有利于研究回转加工中圆度误差分离结果的正确性,达到了提高误差分离精度及抑制误差对加工精度影响的目的。     

基于主轴回转运动误差在线检测的二次相移三点法

提出了一种基于数据重组和反滤波的二次相移三点法圆度误差分离技术,可以先行分离出主轴的回转运动误差,从而能够实现运动误差的在线检测.通过对三个传感器的测量数据按照二次相移原则进行数据重组,可以在数据处理的首次操作时消除圆度形状误差的影响,从而在二次操作时先行得到运动误差.权函数的对比分析表明该方法与圆度三点法在本质上的同源性和统一性.仿真与实验结果均表明:该方法可以先后分离出运动误差和形状误差,具有良好的分离效果.     

A hybrid three-probe method for measuring the roundness error and the spindle error

The three-probe method is the most widely used technique for separating the artifact roundness error from the spindle error, with the superiority available for in situ measurement. For further improving the measurement accuracy of the three-probe method, in this paper, the harmonic measurement errors are investigated analytically and experimentally. To achieve this aim, firstly, according to the transfer matrices W(k), the harmonics are classified into two types: the suppressed harmonics with zero W(k) and the unsuppressed harmonics with no-zero W(k). Then, on one hand, through mathematical deduction, the formulation for determining the suppressed harmonics is derived; on the other hand, the measurement errors to the unsuppressed harmonics are experimentally acquired, and the experimental results demonstrate that the measurement errors to the unsuppressed harmonics are greatly related to the determinant of the transfer matrix |W(k)|, but not rigorously in inverse proportion to |W(k)|. Based on the conclusions drawn from the investigations, a hybrid three-probe method is constructed, where several conventional three-probe measurements are performed for optimizing individual harmonic coefficients. Experiments verify that the hybrid three-probe method is more robust to the error sources than the conventional method.     

A new multiprobe method of roundness measurements

This paper presents a new multiprobe method for roundness measurements called the mixed method. In this method, displacements at two points on a cylindrical workpiece and an angle at one of the two points are simultaneously monitored by two probes. The differential output of the probes cancels the effect of the spindle error, and deconvolving the differential data yields the correct roundness error. The mixed method is compared to the traditional 3-point method with respect to the transfer function and resolution. Unlike the 3-point method, the mixed method can completely separate the roundness error and the spindle error, and can measure high-frequency components regardless of the probe distance. Resolution can also be improved throughout the entire frequency domain by increasing angular separation of the probes. An optical sensor specifically suited to the mixed method is designed and used to make roundness measurements. A fiber coupler and single-mode fibers are used in the sensor to divide a light beam from a laser diode into two beams, resulting in a compact sensor with good thermal drift characteristics. The displacement meter of the sensor is based on the imaging system principle and has a resolution of 0.1 μm. The angle meter is based on the principle of autocollimation and has a resolution of 0.5 in. A measurement system is constructed to realize measurements of roundness by using the optical sensor. Experimental results confirming the effectiveness of the mixed method for roundness measurements are also presented in this paper.     

High-accuracy roundness measurement by a new error separation method

This paper presents a new error separation method for accurate roundness measurement called the orthogonal mixed method. This method uses the information of one displacement probe and one angle probe to separate roundness error from spindle error. This method was developed from the mixed method, which uses the information of two displacement probes and one angle probe to carry out the error separation. In the present paper, the relationship between the characteristics of the mixed method and the probe arrangement is analyzed. Well-balanced harmonic response of the mixed method is verified to be obtainable for the case where the angular distance between the displacement probe and the angle probe is set at 90°. This orthogonal mixed method also had the simplest probe arrangement, because it requires only one displacement probe and one angle probe to realize the error separation. Optical probes were used to construct an experimental measurement system that employs the orthogonal mixed method. The displacement probe and the angle probe both use the principle of the critical angle method of total reflection, and they have stabilities of 1 nm and 0.01 in., respectively. The measurement results show that roundness measurement can be performed with a repeatability on the order of several nanometers.