高分辨率X射线衍射光学元件

评述了BESSY研制的用于X射线聚焦的各种衍射光学元件。基于布拉格-菲涅耳光学元件,设计了高效高分辨率X射线聚焦和色散光学元件。描述了对长焦距布拉格-菲涅耳透镜与可变曲率半径反射镜组合所做的实验研究。用一块反射菲涅耳波带板作聚焦和色散光学元件进行了短脉冲X射线吸收谱(XAS)的测量。     

Circular multilayer zone plate for high-energy x-ray nano-imaging

A circular multilayer zone plate (MZP) was fabricated and its focusing performance was evaluated using 20-keV x-rays. MoSi(2) and Si layers were alternately deposited by DC magnetron sputtering on a wire core; all the interfaces satisfied the Fresnel zone condition. The measured line spread function was converted to a point spread function by tomographic reconstruction. The results suggest that the MZP has the potential to realize the diffraction-limited resolving power, which is calculated to be 35 nm using the diffraction integral. Furthermore, scanning transmission microscopy using the MZP could resolve a 50-nm line-and-space pattern.     

Diffractive focusing fan-out element for the parallel DNA sequencer

Various issues of creation of diffractive optical elements transforming one laser beam with small divergence to a matrix of converging beams with a diffraction size of focused spots in the plane of object illumination and their application for problems of DNA sequencing and microscopy are considered. The parameters of diffractive elements are calculated and optimized in the approximation of the Fresnel–Kirchhoff diffraction theory. Diffractive elements are fabricated by the method of direct laser writing on a photoresist by using a circular laser writing system. Experimental characteristics of a diffractive element creating a matrix consisting of 33 × 33 beams, which are focused in one plane at a distance of 210 mm, are presented. The degree of nonuniformity of beam intensities determined by the ratio of beam intensities in the central region to intensities of peripheral beams is 1/2.5, which is potentially sufficient to be used in DNA sequencing problems. The maximum distortions of spot positions in the entire focusing field is <0.15%.     

基于PZT微驱动的激光直写自动调焦系统动态特性分析

为提高激光直写调焦系统的稳定性和响应速度,从弹性力学角度出发,对调焦执行机构微动台进行了力和位移关系的建模,并全面分析了其动态响应特性,动态特性分析为P ID调节提供了理论依据。在P ID校正中着重加强微分超前调节作用,缓解了系统相位滞后的问题,从而使系统得到较好的稳定度和响应速度。通过激光直写试验验证调焦系统的调焦精度为0.2μm。     

Estimation of Laser Ablation Surface Cleaning Efficiency

Based on the properties of a high-power short–pulsed Nd:YAG laser and its ablation effect investigated using a 21 μm-thick Zn-coated steel plate as a target, the surface cleaning efficiency of laser ablation processing was discussed through theoretical analysis and experimental data. Cleaning efficiency was derived and a 2-fibre structure was used to examine whether calculations agreed with experimental results. The present method was confirmed and taken as a guide for the practical application of laser ablation surface cleaning of large areas such as the inner surface of radioactively polluted facilities in nuclear power plants.     

激光共振电离质谱计用光入射系统的研制

针对NINT3000质谱计的结构特点,利用高斯光学理论,推导出双透镜系统光学参数传递方程,并以此为依据设计出一套光学系统和光路调整装置,实现了激光束在离子源腔内的精确定位和聚集,焦斑半径为160μm,调节精度为10μm。目前,该系统已经安装在激光共振电离质谱计上,并实现了镥的单色双光子共振电离。     

X射线成像波带片及制作

研究了X射线成像波带片的工作原理和制作工艺。从理论上分析了波带片的空间分辨率与最外环宽度的关系,以及波带片衍射效率与厚度和折射率的关系。利用国家同步辐射实验室发展的加工工艺,即电子束光刻技术和X射线光刻技术结合制作波带片。实验结果表明:波带片最外环宽度为150 nm,高宽比为4,基本满足高分辨X射线成像波带片的高空间分辨率、大高宽比、高精度等要求。     

High-precision detection of focal position on a curved surface for laser processing

A new technique for detecting the focal position of a curved surface provides several advantages both in research and industrial applications. The quality of patterns lasered on a roll surface is determined by the precision of the focus detection, and surfaces of the massive rolls used in laser fabrication can be difficult to adjust properly using conventional technologies. Here, a unique method for detecting the focal position of a curved surface based on the reflected profile of a laser beam is presented. The versatility of the proposed technique results from being able to adjust the laser beam based on changes in the shape and diameter of the beam spot when the specimen surface deviates from the focal plane. A theoretical model based on three-axis movement is proposed, and experimental setups are developed based on the model. Analysis of the obtained results enables high precision positioning of the specimen and identification of the focal point. Furthermore, the presented technique can be used to locate the focal point on any curved surface. Therefore, the theoretical model, analysis results, and focal detection method can be combined in an algorithm for a novel auto-focusing system that can be applied to laser processing of curved surfaces, such as fabricating microgrooves, or engraving roll surfaces in printed electronics.     

Analysis of angular distortion in line-heating

A simplified analytical model for prediction of deformations of metal plates due to line-heating process is presented. In the present work, a formula for plate deformation produced by line-heating in terms of process parameters such as heat input and plate dimensions is developed analytically using an eigenstrain concept. The residual deformation due to thermal processing was depends on the magnitude and region of plastic strains at heating zone. The magnitude of plastic strains was determined by disk model and its region was calculated using the Rosenthal's solution. The vertical displacement of the plate was analysed by using an infinite laminated plate theory to consider a cuboidal inclusion with an eigenstrain. Comparison of calculated results and experimental data shows the accuracy and validity of proposed model.     

高精度动载体激光发射系统光束控制反射镜

设计了一种适于车载等运动环境下的快速控制反射镜, 用于在具有振动和冲击的工作环境下控制激光发射系统的激光光束稳定及其精确校准。根据某光学系统的性能指标要求,阐述了用于高能激光的平面反射镜的物理性能以及控制反射镜负载应有的机械特性。采用大行程的音圈电机作为控制反射镜的驱动器,并设计了精度高、抗干扰能力强的角位移测量装置作为控制反射镜的位置传感器。对所采用的4个音圈电机和4个角位移测量装置进行了合理布局,既降低了系统的转动惯量又提高了系统的可靠性和环境适应性。实验结果表明：该快速控制反射镜的定位精度优于1.4″,满足高能激光发射系统对控制反射镜的精度要求。     

双柔性平行六连杆微动平台结构的设计及测试

采用直圆型柔性铰链设计了承载能力较大的双柔性平行六连杆微纳定位平台,并对其性能进行了测试。基于柔性铰链经典刚度公式计算了直圆型柔性铰链转动刚度,推导了双柔性平行六连杆微动平台在运动方向的整体刚度函数;建立了平台的动力学模型,得到了平台的固有频率解析式。基于静动态特性优化设计了双柔性平行六连杆微纳定位平台,得到了平台的优化参数。基于激光干涉仪和多普勒激光测振仪建立了平台的静动态特性测试系统。对微纳定位平台进行了试验和测试,结果显示:刚度的理论计算值为7.92N/μm,试验值为7.44N/μm,误差为6.5%;固有频率的理论模型值为349.9Hz,实验值为342.2Hz,误差为2.3%。空载和加载为250、500、2 000、2 250、2 500g时的平台位移表明加载不均匀会对平台输出位移产生较大的影响,当加载为2 500g时,不均匀加载对位移的影响量约为均匀加载的5倍。此外,平台最大位移为56.59μm。重复定位精度测试显示,在施加电压50、100、150V时,定位平台在同一输入电压下的位移最大偏差为0.896μm。实验结果表明,建立的双柔性平行六连杆的刚度和固有频率计算模型是正确的,设计的微动平台的最大位移及精度可满足设计要求。     

Predictions of transverse deflections and in-plane strains in impulsively loaded thin plates

This paper is an extension of earlier work [Nurick et al., Inelastic Behaviour of Plates and Shells. Springer Verlag, Berlin (1986)] in which experimental and theoretical studies of thin circular, square and rectangular plates subject to transverse impulsive loading were presented. Major interest in the experimental study was the range where the permanent displacement is large, up to 12 times the thickness of the plate. The theoretical model was based on a rigid-plastic membrane theory, using the concept of the instantaneous mode approximation technique. Predicted transverse displacements agreed well with experimental data. However, it was assumed that points on the plate surface move only in the direction normal to the initial plane of the plate: as a consequence of that, in-plane membrane strains are incorrectly predicted. In this paper the mode approximation is modified by assuming that points on the plate surface move in a direction which is instantaneously normal to the current plate surface. The modified theory continues to give good predictions of the transverse displacement, and gives quite good estimates of in-plane strains.     

基于工件弹性变形的薄型非球曲面(玻璃)零件加工方法研究

针对传统非球曲面加工技术存在对设备依赖度高及加工效率较低等问题,研究了薄型非球曲面零件的弹性变形加工法,并基于材料弹性变形特性,将非球曲面加工转变为平面加工。通过理论计算及ABAQUS有限元仿真确定了平板玻璃工件在均匀压力及周边简支条件下的弹性变形面型,并对工件进行了弹性变形加工实验;加工面型与理论面型误差的最小均方根、峰谷值分别为1.66μm与2.80μm,验证了使用弹性变形加工方法进行薄型非球曲面零件加工的有效性。     

球铁中石墨球径尺寸对铁素体化率影响

本文按炭扩散牛眼状铁素体生产模型定量地描述石墨球径尺寸对铁素体化率影响规律,对球径均方根值为2.20μm、3.42μm、5.56μm,三种情况下铁素体化率实验结果与理论曲线所作的对比表明：在曲线中部大部分区域内实验与理论计算结果定量符合;在曲线开头小部分区域内理论计算结果高于实验值;在曲线末端理论计算结果低于实验值。球径愈小理论与实验符合愈好。分析表明：在曲线开头小部分区域内理论与实验之间的差异归因于铁素体成核需要一定的孕育期;在曲线末端理论与实验不符归因于石墨——奥氏体共晶团范围内分成分偏析。     

压电驱动微型精密夹持机构设计与实验研究

为了简化压电精密夹持机构的结构以及降低其加工制造难度,提出了一种基于柔性铰链和两夹持臂的压电微型精密夹持机构,并分析了该夹持机构的工作原理。利用压电材料的非线性应变关系建立了压电精密夹持机构的输出位移和受力模型,通过数值仿真分析了精密夹持机构的输出特性。搭建了实验平台,通过实验测试验证了压电精密夹持机构的输出性能以及理论模型的正确性。结果表明：两夹持臂的实验与仿真位移均存在迟滞现象,在120 V驱动电压下,两夹持臂的最大径向位移测试值分别为73.8 μm和68.6 μm;当驱动电压大于50 V时,夹持臂输出位移测试值与仿真值间的误差在10%以内;当驱动电压为120 V时,夹持机构最大切向和轴向摩擦夹持力的实验值分别为7.8 N和5.7 N。     

弹落点坐标测量系统的快速校准方法及精度分析

针对弹落点坐标测量系统的使用环境及精度要求,提出了一种仅对焦距及光轴水平偏角进行现场校准的相机参数快速获取方法。通过分析坐标解算模型,得出线性的校准方程,利用测量区域内两个坐标已知点(靶标),多个视觉传感器可一次完成校准。通过精度分析给出了该方法下最优的靶标摆放位置。该方法具有校准速度快,精度较高,实用和算法性能分析容易等优点,适用于远距离、大范围视觉坐标测量中相机参数的获取,尤其是野外坐标测量。实际应用中, 在1 200 m外对直径400 m靶区进行监测时,该方法可保证区内各点的坐标测量误差均小于0.3 m。     

Bending and extension of a multilayered plate with body forces and thermal loading

A multilayered plate composed of thin layers of isotropic materials is analyzed. The problem for the multilayered plate with body forces is formulated by using the lamination theory in which displacement fields are expressed in terms of in-plane displacements on a main plane and transverse displacement. Placing the main plane at an appropriate distance from the lower surface of the plate, a set of equilibrium equations is shown to be written in uncoupled forms, which are identical to those for an uncoupled plate such as a single layer plate. It is proved that the complete solutions of the multilayered plates subject to the specified in-plane resultant tractions or in-plane displacements on its whole boundary can be obtained from the sum of solutions for uncoupled plates. Closed form solutions are obtained for a circular laminate clamped or simply supported on its the boundary as well as for a rotating disk with a constant angular velocity. The calculations of thermoelastic stresses and displacements in multilayered plates are also discussed. Closed form solutions are obtained for a circular laminate with distributed temperature varying in the radial direction and through the thickness.     

Scanning photoelectron microscope for nanoscale three-dimensional spatial-resolved electron spectroscopy for chemical analysis

In order to achieve nondestructive observation of the three-dimensional spatially resolved electronic structure of solids, we have developed a scanning photoelectron microscope system with the capability of depth profiling in electron spectroscopy for chemical analysis (ESCA). We call this system 3D nano-ESCA. For focusing the x-ray, a Fresnel zone plate with a diameter of 200 μm and an outermost zone width of 35 nm is used. In order to obtain the angular dependence of the photoelectron spectra for the depth-profile analysis without rotating the sample, we adopted a modified VG Scienta R3000 analyzer with an acceptance angle of 60° as a high-resolution angle-resolved electron spectrometer. The system has been installed at the University-of-Tokyo Materials Science Outstation beamline, BL07LSU, at SPring-8. From the results of the line-scan profiles of the poly-Si/high-k gate patterns, we achieved a total spatial resolution better than 70 nm. The capability of our system for pinpoint depth-profile analysis and high-resolution chemical state analysis is demonstrated.     

轴棱锥顶点加工精度分析

由菲涅耳衍射理论出发详细地分析轴棱锥顶点加工误差对光束传输特性的影响。分析指出,当轴棱锥顶点加工成圆形时,它相当于一个平凸镜,对光束起点聚焦作用;而双曲线顶点模型更贴近真实加工的轴棱锥,这时衍射光束因为干涉原因产生振荡,形成畸变无衍射光束。文章理论推导了不同顶点加工轴棱锥的衍射光场表达式,模拟分析了光束传输变换特性,最后针对双曲线顶点加工的轴棱锥提出改进方案,修正后的光束特性效果理想,对实际加工的轴棱锥应用具有很好的指导意义。     

电子束泵浦准分子激光放大器的双程光路自动准直

提出了一种电子束泵浦准分子激光放大器的双程光路准直方法,以保证光束在放大器中按照预定方向传输,并使多路光束稳定精确地照射靶面.首先,鉴于准分子放大器中无天然准直基准提出了利用双叉丝像传递光路进行准直的方法,即把输入光束叉丝基准作为“近场点”,把输出光束叉丝基准作为“远场点”,并设计了放大器准直光路,编写了相应的软件.然后,在现有实验室条件下开展了电子束泵浦准分子激光放大器双程光路的自动准直实验.最后,分析了影响该方法的相关因素及准直精度.实验及分析表明,设计的准直系统在较短时间内实现了预定传输光路的自动准直,系统自身精度为0.63μrad,光束最大复位误差为13.75 μm,满足了电子束泵浦准分子激光放大器双程光路自动准直的要求.