共查询到19条相似文献,搜索用时 296 毫秒
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超薄石英晶片超精密抛光实验的研究 总被引:1,自引:0,他引:1
为了解决超薄石英晶片高表面质量的加工问题,以及寻求一种高效低成本的加工方法,将一种新的超精密抛光工艺应用到超薄石英晶片的加工中。给出了加工过程中的抛光原理,制定出了在研磨和抛光过程中的最优实验条件,并对加工后超薄石英晶片的粗糙度和厚度做了详细的分析;讨论了磨粒的尺寸对表面粗糙度和材料去除率的影响,同时对加工过程的材料去除机理做了论述,以表面粗糙度和厚度为评价目标对超薄石英晶片的加工特性和表面质量进行了评价。研究结果表明:使用该实验的工艺加工超薄石英晶片可以得到厚度为99.4μm、表面粗糙度为0.82nm的超光滑表面;同时,该研究还发现通过延长抛光时间可以减小石英晶片的表面残余应力,可有效控制石英晶片四角“翘曲”现象,得到更好的平面度和平行度。 相似文献
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光学硬脆材料在机械加工过程中不可避免地形成表面/亚表面损伤,对器件性能、使用寿命等具有至关重要的影响。相较于磨削、研磨两种前道工艺,抛光阶段材料的损伤逐渐减少至极其微量的程度,而最终残留的损伤将伴随材料的使用全周期,研究抛光阶段表面质量的变化过程对掌握抛光的工艺质量十分必要,但测量难度高。针对这一问题,本文在总结抛光阶段损伤形式的基础上,首先仿真分析了准布儒斯特角法检测表面质量的原理和优势,随后以Nd∶GGG激光晶体为研究对象,利用椭偏仪对不同抛光工艺下样品表面质量的变化进行了实验研究。通过与白光干涉法测量的表面形貌进行对比,准布儒斯特角偏移量和相位角变化曲线斜率准确地反映了抛光过程中表面质量的变化,展现了该方法的无损伤和高灵敏度特性,以及辅助研究抛光工艺的可行性。最后,对准布儒斯特角法在表面质量检测方面面临的问题进行了分析和展望。 相似文献
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非球面超精密抛光技术研究现状 总被引:13,自引:0,他引:13
非球面应用范围的拓展以及应用精度要求的不断提高对非球面元件的尺寸精度与表面质量提出了更高要求;作为终加工手段,非球面超精密抛光技术也越来越受到世界各国的重视。掌握非球面超精密抛光过程中的材料去除机理以及由此导致的亚表面损伤等特性对提高非球面抛光的精度与效率十分重要。对非球面抛光技术的发展进行回顾,并根据非球面超精密抛光技术的发展脉络,阐述当前主要非球面超精密抛光技术的加工原理及加工实例,随后从亚表面损伤、边缘效应等方面对几种非球面超精密抛光技术进行比较,并以提高抛光精度与效率为目标,对非球面超精密抛光技术的发展趋势进行预测。 相似文献
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开发受控核聚变能源是一种解决未来能源问题的有效途径。多年来国内外研究发现,钨具有高熔点、高热导率、低物理溅射率、低氚滞留、低肿胀等优点,被认为是最有潜力作为第一壁的候选材料。应用于核聚变反应堆极端环境中的材料,要求具有良好的抗氧化性能、力学性能、抗辐照性能等综合性能。但钨的抗氧化性能较差、再结晶温度较低、脆韧转变温度较高和辐照敏感性,实际应用中还有许多待解决之处。因此需要通过合金化,掺杂第二相弥散强化和制备超细晶钨的手段改善钨基材料性能。合金化是最常用的改善钨基体材料性能的手段之一。结合了近些年来研究成果,综述了掺杂合金元素对钨基材料性能方面的改善效果、作用机理以及分析了未来的发展趋势。 相似文献
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空间RB-SiC反射镜的表面离子辅助镀硅改性技术 总被引:3,自引:0,他引:3
针对空间用RB-SiC材料由Si\SiC两相结构引起的光学表面缺陷问题,提出了表面离子辅助沉积(IAD)硅膜的改性新方案以优化RB-SiC光学表面反射率。对厚度为10µm的IAD-Si改性层的主要性能研究显示:IAD-Si膜层为非结晶结构,能够提供较好的抛光表面,在77K-673K的热冲击下膜层稳定性良好。以Si膜的抛光机理为依据对IAD-Si改性层进行了大量抛光工艺实验和表面质量测试,给出了关键的抛光工艺参数和实验结果。通过表面IAD-Si改性及本文提出的改性层超精加工技术能够在反射镜表面得到面形精度的RMS值低于1/20λ(λ=632.8nm)且表面粗糙度的RMS值低于0.5nm的超光滑表面;与改性前相比,反射镜改性层抛光表面在360-1100 nm 波段的反射率提高了4.5%以上。 相似文献
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A single crystal of potassium dihydrogen phosphate (KH2PO4, KDP), which possesses unique excellent non-linear electro-optical properties, is currently the only material suitable for electro-optic switches and high power laser-frequency conversion applications in laser-induced inertial confinement fusion. However, KDP crystals are difficult to produce because of their inherent softness, brittleness, and water-solubility, as well as their strong anisotropy and temperature sensitivity. Obtaining high-quality near-lossless KDP elements is an issue that should be solved urgently. In this study, an ultra-precision numerical control polishing method based on the water dissolution principle was introduced to achieve a controllable material removal. A small polishing tool was used to process a large KDP surface, and an accurate tool influence functions is required for deterministic fabrication of KDP surface. In order to quantify the influence of critical parameters (e.g., polishing speed, polishing pressure, water content, and directions of revolution and rotation) on material removal rate distribution, a tool influence function model was established based on the Preston equation. The model was then modified based on experiments, and its accuracy was verified. This modified model lays the foundation for ultra-precision water dissolution polishing of large KDP crystals. A very smoothed surface with high surface accuracy (peak-to-valley value below 0.4 λ) and low surface roughness (Ra 1.598 nm) could indeed be obtained by using the model. This research is also applicable to the polishing of other water-soluble materials. 相似文献
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Guilherme Ferreira Gomes Fabricio Alves de Almeida Sebastiao Simões da CunhaJr Antonio Carlos AncelottiJr 《The International Journal of Advanced Manufacturing Technology》2018,98(5-8):1155-1162
Due to the superior properties of titanium alloys, there are more and more applications of the ultra-precision situations. Nevertheless, the machinability of titanium alloys in the ultra-precision machining is still very poor. To investigate the effect of ultra-precision polishing path on the surface quality of titanium alloy Ti6Al4V, a series of ultra-precision polishing tests of titanium alloy have been carried out after the ultra-precision turning tests. The results proved that the better surface quality can be obtained using the zigzag path in the ultra-precision polishing of titanium alloys. In addition, the finite element model (FEM) has been presented to simulate the press distribution and elastic deformation of the polished surface. The results of simulation proved that the zigzag path can increase the press and deformation on the workpiece. 相似文献
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碳纤维增强热塑性复合材料(Carbon fiber reinforced thermoplastic composite,CFRTP)由于其优越的力学性能、较低的加工成本及可回收性,逐渐成为继铝合金、高强钢之后的新一代轻量化材料。国内外科研机构和材料企业都投入巨资和人力竞相开展相关研究,部分高校、企业已开始探索将CFRTP应用于机身与车身的制造与装配。超声波焊接是最适合焊接热塑性材料的方法之一,也是实现大规模装配CFRTP零部件的关键使能技术之一。从CFRTP超声波焊接基本过程、接头形式、数值模拟、质量监控和异种材料连接五个方面进行分析,系统讨论CFRTP超声波焊接最新研究成果,展望CFRTP超声波焊接中有待解决的共性问题,以期为CFRTP零部件的大规模装配应用提供参考。 相似文献
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气囊抛光去除函数的数值仿真与试验研究 总被引:2,自引:1,他引:1
为提高光学元件的面形精度,提高加工效率,对超精密气囊抛光方法的去除函数进行了理论和试验研究.通过分析气囊抛光的原理,以Preston方程为基础,应用运动学原理推导了气囊抛光"进动"运动的材料去除函数,利用计算机仿真的方法,得到近似高斯分布的去除函数,通过仿真分析几个主要参数对"进动"抛光运动去除特性的影响,总结得到三点气囊抛光工艺过程中重要的结论.通过在一台超精密气囊式智能抛光机上的试验对比,两者吻合很好,并得到面形精度 RMS=0.012 6 μm的超精密的光滑表面,为开展气囊抛光的工艺研究提供了理论依据. 相似文献
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在数控坐标磨床上应用化学机械抛光(Chemo-mechanical polishing,CMP)技术,对氮化硅陶瓷回转曲面零件进行超精密加工工艺实验研究.分析了氮化硅陶瓷化学机械抛光原理,并搭建化学机械抛光实验平台.通过实验研究了水基CeO2抛光液浓度、抛光液流量、抛光轮转速等主要工艺参数对氮化硅陶瓷零件抛光的表面质量的影响规律,根据实验结果对抛光工艺参数进行了优选.结果表明:在抛光液浓度为20%,抛光液流量为0.6 L/min,抛光轮转速为6 000 r/min的条件下,能获得较好的抛光表面质量,其表面粗糙度Rα达12 nm. 相似文献
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Precision surfaces of optical grade have been in great demand for various applications such as high-power laser systems, astronomical reflecting telescopes glass mirrors, folding mirrors of avionics displays, reflectors, guides for transmission of hot and cold neutron beams for neutron exploration setups, electronic substrate, display covers and substrates for biomedical imaging and sensing, etc. Generation of such surfaces has been a challenge; particularly the polishing operation of optical fabrication process is quite critical which determines the final surface quality. To achieve the required optical surface parameters, a good control and systematic understanding of polishing process and its parameters are required. However, the conventional or full aperture optical polishing process still depends on operator's skills to achieve the target surface quality. To exploit the process to the extent, it is must to have a scientific understanding of material removal behavior of the polishing process, which will lead to the process becoming deterministic. This article has attempted to address this issue. Authors have summarized different material removal theories and discussed various mathematical models as proposed by researchers so far. Attempt has been made to come up with knowledge gaps which are required to be bridged in future. 相似文献
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Gasbag polishing is a kind of ultra-precision machining technology by means of flexible contact, while how to control the polishing contact force online is one of the key issues. In this paper, by analyzing the effect of downward depth and inflation pressure on the contact force experimentally, and then the coupling contact force model is developed. Thus, the predictions of polishing contact force and inflation pressure in terms of the nonlinear composite material of rubber gasbag can be obtained, which can be used to get the optional combination and controllable range of polishing contact force, and to construct the control system of coupling contact force as well. Experimental study shows that applying coupling contact force model to the control system of gasbag polishing contact force with BP neural network PID control strategy is a proper method, which realizes the polishing contact force controllable online and uniform surface quality of mold. 相似文献