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微机电系统测试技术及方法 总被引:5,自引:7,他引:5
微机电系统 (MEMS)测试技术及方法是MEMS设计、仿真、制造及质量控制和评价的关键环节之一,本文对MEMS测试技术及方法所涉及的微机械量、微几何量、微材料特性以及系统综合参数与性能的测试技术及方法进行了讨论。重点介绍了光学及光电检测技术在微机电系统检测中的应用,对计算机微视觉检测技术在微机电系统检测中的应用进行了探讨。 相似文献
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本文介绍了作者对光电倍增管暗电流测试的三种简单实用的方法和设计的该测试装置及具体操作方法。并给出了主要的测试数据及数据处理方法。同时,对光电倍增管暗电流的测试条件、三种简易方法的比较等几个问题进行了讨论。 相似文献
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对ANSI/AMCA210-07通风机额定性能试验的实验室方法及GB/T 1236-2000工业通风机用标准化风道进行性能测试及ISO5801:2007工业通风机用标准化风道进行性能测试三种标准在测试装置种类、测试装置选择方法、公用部件、温度测点等方面进行了对比,通过差异互补,对实际测试中遇到的相关问题起到一定的参考作用。认为AMCA 210标准具有比GB/T 1236及ISO5801更好的测试精度,同时更便于测试者使用。 相似文献
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高压整流桥芯片测试分选机是对整流桥芯片进行如VF、IR和TRR等性能参数的测试,并按照要求,对测试过的芯片进行分档,采用PLC作为高压整流桥芯片分选机的控制设备能够实现高速、准确的测试与精确无误的分选,论文介绍了高压整流桥芯片测试分选机的组成及工艺流程,并对PLC控制系统及程序设计方法进行了详细描述。高压整流桥芯片测试分选机广泛应用于半导体行业。 相似文献
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微结构三维显微测量是研究微加工工艺和微尺度结构特性的主要测试手段.一种基于计算机微视觉的方法被提出用来对三维微结构进行显微测量.对微结构测试及构形系统的基本原理进行了研究,构建了微结构测试及构形系统的硬件和软件平台.从而实现了在光学显微镜下对微结构的三维观测[0].通过运用微结构测试及构形系统的硬件平台实现了对微结构高分辨率的观察测量、三维精确运动控制以及水平与竖直方向的精确制动.通过软件平台完成了对微结构的三维重构.课题利用微结构测试及构形系统对微结构进行了测试及重构.通过实验,证明了理论研究和系统的可行性,该研究在微结构的测试方面具有较大的理论意义和实用价值. 相似文献
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The reason for the rounding error in a measurement system under the condition of a limited sampling period is analysed, and a three-point method based on the difference algorithm (D3P method) is proposed. The effect of the rounding error is reduced by differential approximation of the roundness error and reconstruction of the transfer function. The generalized three-point method (G3P method), the three-point method based on the first-order difference algorithm (I-D3P method) and the three-point method based on the second-order difference algorithm (II-D3P method) are compared and analysed by simulation. The results show that the accuracy of the D3P method is greatly improved compared with that of the G3P method under the restricted sampling period and that the D3P method retains high precision in the case of failed error separation of the G3P method. An experimental system was constructed to realize error separation, and the experimental results show that the D3P method has higher accuracy than the G3P method over a small sampling period. 相似文献
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针对传统模拟车轮踏面制动摩擦热流边界的加载方式存在的不足,如均布热源法计算精度较低和移动热源法计算效率较低,提出基于间隙热流加载法的车轮踏面制动摩擦温升有限元计算方法。以重载列车紧急制动为研究对象,通过与以往的移动热源法和均布热源法进行对比,研究新方法的计算精度和计算效率。计算结果显示:在计算精度方面,新方法不仅可以达到移动热源法的计算精度,还能体现均布热源法无法模拟的因闸瓦和踏面的接触-脱离现象导致的车轮踏面温度时间历程曲线波动现象。在计算时间方面,新方法的计算效率与均布热源法的相当,但新方法的计算速度比移动热源法的快4.3倍。 相似文献
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《Measurement》2014
The moving least squares (MLS) method and the moving total least squares (MTLS) method have been developed to deal with the measured data contaminated with random error. The local approximants of MLS method only take into account the error of dependent variable, whereas MTLS method considers the errors of all the variables, which determines the local approximants in the sense of the total least squares. MTLS method is more reasonable than MLS method for dealing with errors-in-variables (EIV) model. But because of the weight function with compact support, it is complicated to choose fitting method for the best performance. This paper presents an Adaptive Moving Total Least Squares (AMTLS) method for EIV model. In AMTLS method, a parameter λ associated with the direction of local approximants is introduced. MLS method and MTLS method can be considered as special cases of AMTLS method. Curve fitting examples are given to prove the better performance of AMTLS method than MLS method and MTLS method. 相似文献
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主要介绍了无刷直流电动机采用的反电动势过零点检测法。提出了用端电压法、相电压法两种反电动势过零点检测法检测电机转子位置,并对端电压法和相电压法做了进一步的说明。 相似文献
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一种改进的增量谐波平衡法及其在非线性振动中的应用 总被引:1,自引:0,他引:1
对于一般的增量谐波平衡法而言,在求解分段线性系统周期响应时存在收敛速度慢的缺点。针对这一缺点,本文根据最小二乘法原理和增量过程提出了一种改进的增量谐波平衡算法,通过和原有算法进行对比发现二者之间存在着统一的算法形式,因此只要对原有算法作简单的改进即可方便地使用此方法。利用此方法成功计算了齿轮传动分段线性系统的周期解,通过对计算结果比较,发现迭代次数要比一般的增量谐波平衡法少30%左右。从而可以看出这种算法具有收敛速度快的优点。 相似文献
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A Stewart platform is introduced in the 500 m aperture spherical radio telescope(FAST) as an accuracy adjustable mechanism for feed receivers.Accuracy analysis is the basis of accuracy design.However,a rapid and effective accuracy analysis method for parallel manipulator is still needed.In order to enhance solution efficiency,an interval analysis method(IA method) is introduced to solve the terminal error bound of the Stewart platform with detailed solution path.Taking a terminal pose of the Stewart platform in FAST as an example,the terminal error is solved by the Monte Carlo method(MC method) by 4 980 s,the stochastic mathematical method(SM method) by 0.078 s,and the IA method by 2.203 s.Compared with MC method,the terminal error by SM method leads a 20% underestimate while the IA method can envelop the real error bound of the Stewart platform.This indicates that the IA method outperforms the other two methods by providing quick calculations and enveloping the real error bound of the Stewart platform.According to the given structural error of the dimension parameters of the Stewart platform,the IA method gives a maximum position error of 19.91 mm and maximum orientation error of 0.534°,which suggests that the IA method can be used for accuracy design of the Stewart platform in FAST.The IA method presented is a rapid and effective accuracy analysis method for Stewart platform. 相似文献