薄膜铂电阻温度计

近20年来,对更新的薄膜传感元件的生产制造技术进行了大量的研制与改进。薄膜铂电阻是把铂粉均匀地沉积到一块化学性质稳定的基片上,形成电阻形式,然后用精密激光切割而成。与传统线绕温度计相比,薄膜温度计发挥     

基于机器视觉的光学元件表面洁净度检测仪研制

针对SG-III精密光学元件表面洁净度检测特点,提出了基于机器视觉的检测方案。设计了三维电控平台和夹持架,选用步进电机和光栅尺实现闭环高精度控制,采用线阵CCD作为图像采集设备,选用卤素灯作为光源,利用图像处理技术得到污染物的特征参数。对340mm*340mm的光学元件测试表明,检测仪能在11分钟内完成单面扫描和分析,识别15μm以上的污染物,大大提高了检测效率。该技术可应用于多种精密表面检测项目。     

RPCVD SnO_2薄膜气敏元件初探

本文介绍用等离子体激活化学气相淀积(RPCVD)方法在平板陶瓷基片上淀积纯SnO_2,得到稳定性好,工作温度低及灵敏度高的薄膜气敏元件。研究了该元件对H_2、C_2H_5OH,LPG 及CO 等气体的气敏效应,以及元件的稳定性和湿敏特性。提出了采用分子筛选膜的多层结构来改善选择性的设想。与烧结型元件相比,肯定了薄膜型元件是一种很有希望的气敏元件。     

大口径精密光学元件表面疵病检测系统研究

根据大口径精密光学元件表面疵病检测的工程特点,提出了一种基于优化模糊相似度算法的案例推理疵病识别法,解决了疵病图像获取中的摄像机平面移动定位、自动调焦和图像拼接等自动检测技术问题,研制了基于机器视觉的大口径精密光学元件表面疵病检测系统.实验结果表明,以上算法和技术是正确的,达到了理想的效果,可推广应用到其他材质的精密表面缺陷检测中.     

微结构光学功能元件模具的超精密磨削加工技术

微结构光学功能元件在航空航天、机械电子、光学以及光电子领域都具有非常重要的应用价值和极其广阔的应用前景,针对其大批量复制用模具的超精密磨削加工技术也越来越受到重视。微结构光学功能元件模具的超精密磨削加工技术不同于传统的磨削加工技术,是在模具表面加工制造出各种不同形貌、不同尺度、不同维数并具有不同光学功能的微小几何结构。结合目前国内外微结构表面超精密制造技术的研究和发展,对微结构光学功能元件模具的超精密磨削加工技术进行综述。介绍超精密磨削加工技术在微结构表面制造中的应用,分析目前微结构光学功能元件模具超精密磨削加工中存在的关键技术问题,并对微结构光学功能元件模具的超精密磨削加工发展趋势进行预测。     

基于遗传算法的汽车涂胶工艺视觉检测标定技术研究

汽车涂胶工艺是汽车制造过程中的一个重要环节,它对汽车有防腐、防震、隔音和密封等作用。为了提高汽车零部件涂胶质量控制需求,阐述了一种基于遗传算法的汽车涂胶工艺视觉在线检测的标定技术,实现汽车涂胶过程的自动化,在实际应用中取得良好的标定效果,降低了劳动力资源成本,提高了汽车涂胶的生产效率和汽车涂胶的智能化水平。     

玻璃精密模压成形的研究进展

玻璃精密模压成形是一种高效率、绿色环保的先进光学元件制造技术,近年来得到了飞速发展。本文首先介绍了光学元件的需求与种类,提出玻璃精密模压成形技术存在的问题。综述了国内外近年来精密模压成形光学透镜的重要研究进展,其中包括光学玻璃材料、模具材料与涂层、模具加工、模压过程仿真以及各种参数对透镜质量的影响。阐述了光学模压成形元件的坯料、镀膜技术和冷加工技术、成形元件的残余应力分布以及折射率、模具与玻璃间摩擦效应、模具的补偿技术、成形透镜质量的预测、模压技术的其他应用等。最后,对未来光学玻璃精密模压成形趋势进行了预测。     

蓝宝石衬底基片表面平整加工工艺研究

重点探讨了蓝宝石衬底基片表面平整加工工艺方案,并开展了表面平整加工工艺的实验研究。采用形状测量激光显微系统、接触式测厚仪等,对平整加工工艺各阶段的表面形貌、表面粗糙度Ra、翘曲度、平整度及加工去除量等进行测量和对比分析。结果表明:随着本实验平整加工工艺方案的进行,蓝宝石衬底基片的表面质量不断提高,最终获得了超光滑无损伤镜面表面,化学机械抛光后的衬底表面粗糙度Ra达0.3nm,翘曲度为3.8μm,平整度为1.5μm,符合蓝宝石衬底基片超精密加工的表面质量要求。     

利用化学溶液法制备硫化铅薄膜及其特性研究

通过化学溶液法在玻璃基片上沉积硫化铅(PbS)薄膜,利用原子力显微镜(AFM)分析薄膜的表面形貌,采用X射线衍射(XRD)技术分析薄膜的结晶性能,利用透射光谱分析薄膜的光学性质.研究了退火对PbS薄膜性能的影响.结果表明:经过250℃退火处理,减小了PbS薄膜表面颗粒的平均高度,细化了PbS薄膜的晶粒大小,并改善了PbS薄膜表面形貌的均匀性;退火不改变PbS薄膜的晶体结构,其晶体结构依然是立方晶型;但退火后PbS薄膜的透过率明显降低.     

纳米氧化钛薄膜湿敏元件的电学特性研究

采用溶胶-凝胶法在印有梳状电极的石英玻璃表面涂覆氧化钛纳米薄膜制备湿敏元件,利用LCR测量仪测量薄膜各电学参数随温度、湿度和频率的变化,并分析其复阻抗特性.结果表明:500 ℃烧结得到的薄膜元件感湿性能较好;相对湿度高于40%时,元件的阻抗模值随着湿度的增大而减小;复阻抗特性表现为半圆形.     

2m大口径RB-SiC反射镜的磁控溅射改性

为了消除RB-SiC反射镜直接抛光后表面存在的微观缺陷,降低抛光后表面的粗糙度,提高表面质量,针对大口径SiC的特性,选择Si作为改性材料,利用磁控溅射技术对2m量级RB-SiC基底进行了表面改性。在自主研发的Φ3.2m的磁控溅射镀膜机上进行基底镀膜,利用计算机控制光学成型法对SiC基底进行了抛光改性。实验结果表明,改性层厚度达到15μm;在直径2.04m范围内,膜层厚度均匀性优于±2.5%;表面粗糙度由直接抛光的5.64nm(RMS)降低到0.78nm。由此说明磁控溅射技术能够用于大口径RB-SiC基底的表面改性,并且改性后大口径RB-SiC的性能可以满足高质量光学系统的要求。     

工艺参数和沉积方法对ZnS／YbF3薄膜缺陷的影响

研究了不同沉积方式和工艺参数对沉积在K 9基底上的单层ZnS、Y bF3薄膜和多层ZnS/Y bF3薄膜缺陷的影响,发现基底温度和蒸发速率等工艺参数对缺陷的产生有较大的影响,太高或太低的基底温度和蒸发速率都会导致缺陷增加,采用电子束蒸发和蒸发源形状不同的阻蒸蒸发方式,缺陷密度分布有较大的差异。通过比较不同蒸发方式和工艺参数所镀薄膜的缺陷密度,找到了现有工艺条件下缺陷密度最小的最佳蒸发方式和工艺参数。     

溅射气压和衬底温度对Si1-xGex薄膜结构和光吸收性能的影响

采用射频磁控溅射法沉积了Si1-xGex薄膜,研究了溅射气压、衬底温度对薄膜结构、厚度、表面形貌、表面成分及光吸收性能的影响。结果表明:薄膜均为微晶结构且相组成不随溅射气压和衬底温度的改变而改变;随着溅射气压升高,薄膜结晶性能降低,升高衬底温度使其结晶性能提高;随气压或温度的升高,薄膜厚度均先增大后减小,在1.0Pa或400℃达到最大值;随温度的升高,薄膜表面团簇现象消失并变得平整致密,气压为8.0Pa时,表面有孔洞和沟道;随气压升高,薄膜中锗含量降低,光吸收强度减小,光学带隙增大;衬底温度的变化对光学带隙影响不大。     

一种基于Ni80Cr20薄膜的高精度中性密度滤光片的制备方法

Ni80Cr20合金薄膜在可见光波段展现出很好的光学中性度。真空镀膜系统中石英晶振膜厚传感器的测量误差是导致薄膜的实际光密度值偏离设定值的主要原因。为此,提出了一种提高中性密度滤光片光密度值精度的制备方法,即采用真空镀膜结合离子束蚀刻技术,通过对镀膜和蚀刻参数的精确控制,实现对薄膜厚度的精密调控,将光密度值的相对误差控制在±2%以内,绝对误差不超过±0.01,使得薄膜的厚度调控量处于原子层尺度,满足了滤光片在高精度要求下光谱系统中的使用要求。同时验证了中性密度滤光片在离子束蚀刻微量减薄后,依旧拥有良好的光学性能和表面平整度,使得离子束轰击蚀刻薄膜技术成为一种新的且可靠的薄膜厚度微量调控方法。     

磁控溅射Ni56Mn27Ga17合金薄膜的光学反射特性研究

Ni-Mn-Ga磁性形状记忆合金薄膜是非常有用的多功能材料,为考察其光学反射特性,采用磁控溅射技术在单晶硅衬底上沉积了Ni56Mn27Ga17合金薄膜,并对其表面形貌和光学反射特性进行研究。研究结果表明,薄膜的表面粗糙度随退火温度的升高而增大;在300～800nm波长范围内,薄膜反射率均随波长的减小而降低,且薄膜整体谱线范围内的反射率随退火温度的升高而降低。     

Mechanical analysis of the blistering of a thin film deposited on a glassy polymer

In most cases, scratching of the surface of a polymeric glass elicits brittle behavior. A common way to improve the scratch resistance of a sensitive surface is to coat it with a thin film. Further work is required to explain the improvement in scratch resistance due to coating technique and predict the cracking in anti-scratch coatings. Moreover, the substrate/thin film adhesion must be well controlled and measurable. The present study contributes to these aims. Using a single-asperity scratching device allowing in situ observation of the scratch, the fracturing of a thin nano-composite coating deposited on a polycarbonate substrate was investigated under different conditions of temperature and scratching speed. Four types of fracture mechanisms were observed, depending on these two variables. A global energy balance model of the blistering process which is obtained for some experimental conditions permits one to determine the adhesion of the system. The adhesion can be measured by following the delaminated area (quantified by image analysis) as a function of the scratching distance during blistering. The particular case of an experimental stable blistering process was studied and the corresponding substrate/thin film adhesion was derived using the global energy balance model.     

Assessment of adhesion between thin film and silicon based on a scratch test

Thin film coatings are commonly utilized to prevent wear, modify surface properties, and manipulate the frictional behavior of various mechanical systems. The behavior of a coating has a direct effect on the life as well as performance of the system. However, the coating itself is subject to damage, and the quality of the coating is related to the adhesion characteristics between the coating and the substrate. Therefore, a quantitative assessment of the adhesion properties of thin film is important to guarantee the reliability of not only the thin film but also the mechanical system. In this study, ramp loading scratch tests were performed to assess the adhesion characteristics of Ag and ZnO thin films coated on a silicon wafer. Silver thin film, deposited by sputtering, and ZnO thin film, fabricated by a sol-gel method, were used as scratch specimens. Scratch tests using a diamond tip were performed with a continuously increasing normal force. During the scratch test, the normal and frictional forces were monitored to assess the integrity of the film. The Benjamin and Weaver model commonly used for obtaining the horizontal force during the scratching of films coated on a substrate showed large discrepancies with the experimental results. In this work, the model was modified with a plowing term to minimize the difference between the experimental and theoretical results. Using the modified model, the experimental results could be predicted with an accuracy of about 10%.     

Effect of Surface Roughening of Substrate Steel on the Improvement of Delamination Strength and Tribological Behavior of Hydrogenated Amorphous Carbon Coating Under Lubricated Conditions

The adhesion strength of diamond-like carbon (DLC) coatings is an obstacle in efforts to improve the reliability of coated products. It is generally believed that the roughening of the substrate surface improves the adhesion between a substrate and coating. The effect of surface roughening of the substrate on the delamination strength of DLC coating and the tribological behavior under lubrication were studied. Five types of roughened substrates were prepared by a wet blast device with differing materials, shapes, and sizes of the shot particles. A hydrogenated DLC film was deposited using plasma-enhanced chemical vapor deposition on the roughened substrates. The tribological properties were investigated under air and lubrication with pure water or n-decane. It was found that the delamination strength of the DLC coating could be improved by roughening the substrate surface, especially by spherical particles. It was also found that slight polishing of either the DLC surface deposited on the rough substrate or the roughened substrate before deposition significantly reduced the wear of the counter surface. The remaining chemical element of alumina particles on the roughened surface affected the delamination strength of the DLC coating.     

Wear resistance of amorphous-crystalline detonation coatings with solid lubricant additive in vacuum

Detonation amorphous-crystalline coatings Zr–Si–B that additionally contain solid lubricant additive as an anti-friction component in the form of the dispersed molybdenum disulfide have been developed. The high wear resistance of coatings that contain molybdenum disulfide has been noted. In a study of the surface layer, photomicrographs of friction surfaces on which activation processes take place have been used in electron diffraction analysis. The wear resistance of the coatings has been established, which enabled the creation of separating juvenile thin film surface of an object that represented the product of oxygen-free structures based on chemical elements of intermetallic phases included in the coating composition.     

改善CVD金刚石薄膜涂层刀具性能的工艺研究

用热丝CVD法,以丙酮和氢气为碳源,在WC-Co硬质合金衬底上沉积金刚石薄膜,在分析了工艺条件(衬底温度、碳源浓度、反应压力)对金刚石薄膜性能的影响的基础上,提出了分步沉积法改善金刚石薄膜涂层刀具性能的新工艺.结果表明,合理控制工艺条件的新工艺对涂层薄膜质量、形貌和粗糙度、薄膜与衬底间的附着力、刀具的耐用度及切削性能有显著影响,对获取实用化的在硬质合金刀具基体上沉积高附着强度、低粗糙度金刚石薄膜的新技术具有重要的意义.