Development of a simple system for the simultaneous measurement of pitch, yaw and roll angular errors of a linear stage

A simple measurement system has been developed and implemented for the simultaneous measurement of pitch, yaw and roll of the moving axes of a linear stage. This developed system is based on the principle of the diffractive theorem and optical triangulation. It is composed of a laser source, two quadrant detectors and a diffracting grating. The diffraction grating mounted on the moving axes of a stage reflects an incident laser beam into several diffractive rays and two quadrant detectors are set up for detecting the position of ±1st-order diffraction rays. When the diffraction grating moves, the locations where the diffractive beams are generated change and also the positions of the spots on two quadrant detectors. According to the relationship between the three angular motions of a moving stage and the output coordinates of two quadrant detectors, an inverse algorithm is used to solve these pitch, yaw and roll angular errors through a kinematic analysis .     

LD注入调频扫描系统研究

为了减小扫描系统测量误差,可以利用半导体激光器注入式调频装置和光栅来建立扫描系统。通过改变注入电流来改变半导体激光器的输出光频,使输出光入射在光栅上,随着频率的改变,衍射光的衍射角会发生改变,进而衍射光点的位置发生改变,从而实现无机械光点扫描,能够消除扫描测量过程中机械抖动和振动带来的误差。     

精密转台角分度误差补偿

为了修正精密转台中由圆光栅安装偏心、倾斜等引起的角分度误差,提出一种基于稀疏分解的角分度误差补偿方法。首先,分析了圆光栅安装偏心、倾斜等对精密转台角分度误差的影响。然后,根据圆光栅测角误差中不同阶次误差项的特性,结合稀疏分解思想与谐波分析建立了角分度误差补偿模型,对转台的角分度误差进行补偿。最后,搭建试验平台,采用提出的角分度误差补偿模型对精密转台角分度误差进行修正,验证该方法的有效性。试验结果表明:该方法能够将角分度精度提高2个数量级,对角分度误差最大值为90.85"的转台进行误差补偿后,能够使角定位误差的最大值减小到0.64"。采用该方法进行误差补偿后,能够显著提高角度定位精度,结果满足精密转台角位移的高精度测试要求。     

Design of precision angular indexing system for calibration of rotary tables

The indexing table was developed for angle measurements on machine tools. The measuring techniques, which have been reviewed in this paper, are currently available in manufacturing engineering to calibrate the angle measurement. The measuring principles of each equipment are outlined and their capabilities are also discussed. The new indexing table using 6 points kinematic concept and employing ball and vee grooves location was designed and manufactured to calibrate angle errors of rotary tables using a laser interferometer. The manufacturing method was evaluated to manufacture the accurate vee grooves. A special cam was designed and manufactured to translate rotation movement into lift-up and rotation movement. A CNC machining centre and indexing head were used to manufacture the cam. All parts of the new indexing table were manufactured with a manufacturing tolerance according to drawings, squareness and parallelism checked to obey the 6 points kinematic concept. Also these factors controlled the repeatability of the new indexing table. After installing the new indexing table, the performance was evaluated using rotary table operating in both the horizontal and vertical orientations.     

基于AR模型的转台位置预测方法研究

文中以时栅传感器作为CNC系统的位置检测元件,为了解决时栅数控转台在高精度伺服控制过程中的动态位置反馈误差问题,研究了利用AR模型对转台位置进行预测测量的方法。介绍了预测测量的原理、预测方法及其模型系数的求解方法,并搭建了一套实验装置。经实验表明,基于AR模型的转台位置预测测量方法正确可行,通过修正后预测误差为±2″.     

Development of an optical measuring system for integrated geometric errors of a three-axis miniaturized machine tool

Miniaturized machine tool (mMT) is one kind of downsized machine tool derived from conventional machines to manufacture miniature parts. However, it is extremely difficult to calibrate an mMT due to its small dimension. This paper presents a novel method that uses laser diode and optics to measure integrated geometric errors (three translation errors and three rotational errors). The squareness error between two axes is calculated by the least-square method. These seven errors are acquired simultaneously in one setup for each motion direction. The proposed measuring system consists of laser diodes, beam splitters, and 2D position sensing detectors (PSDs). The relationship between the PSD readings and the geometric errors calculated by the algorithm based on homogeneous transformation matrix is derived according to the configuration of measured mMT. Simulation is carried out to prove the validity of this algorithm. Sensitivity analysis based on the mounting errors of system components is also presented in this paper. Finally, an experiment is executed to verify the feasibility of the proposed measuring method.     

A new optical measurement system for determining the geometrical errors of rotary axis of a 5-axis miniaturized machine tool

Machine tools have greatly improved in recent decades. Among them, miniaturized machine tools (mMTs) that have advantages in terms of reduced energy consumption, space requirements, costs, and other resources are becoming more and more popular in the area of micro scale parts manufacturing. However it is exceedingly difficult to calibrate an mMT due to its small size. This paper proposes a novel method for identifying the geometrical errors of a rotary axis of miniaturized 5-axis machine tools using two position sensitive detectors (PSDs) and a laser diode. This work not only reduces the complication of the system structure and setup but also solves the problem of assembly. We propose a method to determine errors based on the geometrical position of PSDs, laser beam path, and its readout signals after each angle of rotation. The homogenous transformation approach is used to find the individual error components. A system sensitivity analysis is also presented in this paper.     

A method for measuring and calibrating resistive microtorque of a mechanical microcounter

This paper reports a technique for measuring the calibrating resistive input torque of a micro counter and gearbox assembly. The technique presented uses a hairspring (with a quantifiable output torque) to drive the input shaft to a mechanical counter and gearbox assembly in order to determine its resistive torque. The angular displacement of this spring, a parameter needed to compute the torque, is measured using a combination of a laser diode and a monolithic one-dimensional position sensitive device (PSD). This study includes the steps undertaken to develop it from a concept to functional prototype and interpretation of the results it yields. Tests show that in principle the use of a hairspring and PSD is a viable method of measuring micro-torque.     

时栅数控转台空间回转位置预测方法研究

时栅传感器利用时空变换技术将空域信息变换到时域,以时间测量空间位移.为了研制高精度时栅数控转台,减少动态位置反馈误差,提出了一种回转位置预测测量新方法,利用时空变换技术将时域信息返回到空域.利用时间序列理论对时栅测量值进行建模,从而预测出数控转台未来一段时间内的位置值,并利用当前测量值对前一次的预测误差进行实时修正.介绍了测量数据建模方法和预测系数估计算法.为了验证位置预测方法的有效性,设计了一套动态实验系统.实践证明,数控转台的角位移预测误差为±2″,实现了精密位置预测.     

半导体激光器列阵的smile效应与封装技术

为了减小半导体激光器列阵在封装过程中引入热应力而产生的smile效应,提高半导体激光器列阵光束质量,利用对半导体激光器列阵发光点成像放大的方法,准确测量了半导体激光器列阵的smile效应,测量误差为±0.1μm。由于smile效应的准确测量能客观地比较减小smile效应的各种技术与方法,本文根据分析测量结果,提出了通过优化封装半导体激光器列阵焊接回流曲线的方法,使smile效应值控制在±0.5μm内。该方法减小了半导体激光器列阵的smile效应值,提高了激光器列阵光束质量,为下一步研制小芯径、高光束质量半导体激光器列阵光纤耦合模块提供了基础条件。     

双波长集成光栅干涉微位移测量方法

介绍了一种基于双波长激光的集成光栅干涉位移检测方法,利用该方法对硅-玻璃键合工艺制作的集成光栅位移敏感芯片进行了测试实验。实验系统主要由敏感芯片、波长为640nm和660nm的双波长半导体激光器、双光电二极管及检测电路组成,敏感芯片则由带反射面的可动部件和透明基底上的金属光栅组成。入射激光照射到光栅上产生衍射光斑,衍射光的光强随可动部件与光栅之间的距离变化,通过分别测量两个波长的衍射光强信号并交替切换选取灵敏度较高的输出信号,实现了一定范围内的扩量程位移测量,并得到绝对位置。实验结果表明,利用双波长集成光栅干涉位移检测方法测得敏感芯片可动部件与基底光栅的初始间隙为7.522μm,并实现了间隙从7.522μm到6.904μm区间的高灵敏度位移测量,其噪声等效位移为0.2nm。     

激光微加工系统中控制器的设计

在自行研制的激光微加工系统中,激光光源固定,待加工工件置于X-Y移动平台上,驱动平台运动带动工件运动,利用光束与工件的相对运动加工出各种图形.X-Y移动平台运动控制的核心是控制器.控制器通过串行通讯接口与PC机串行通讯,接收PC机下载的加工轨迹文件和运动控制命令,以步进电动机作为执行机构、以光栅尺作为反馈部件构成闭环控制系统.以光栅尺测量为标准,系统的位置控制误差小于2μm.     

Geometric error measurement and compensation for the rotary table of five-axis machine tool with double ballbar

This paper proposes a novel measuring method for geometric error identification of the rotary table on five-axis machine tools by using double ballbar (DBB) as the measuring instrument. This measuring method greatly simplifies the measurement setup, for only a DBB system and a height-adjustable fixture are needed to evaluate simultaneously five errors including one axial error, two radial errors, and two tilt errors caused by the rotary table. Two DBB-measuring paths are designed in different horizontal planes so as to decouple the linear and angular errors. The theoretical measuring patterns caused by different errors are simulated on the basis of the error model. Finally, the proposed method is applied to a vertical five-axis machining center for error measurement and compensation. The experimental results show that this measuring method is quite convenient and effective to identify geometric errors caused by the rotary table on five-axis machine tools.     

基于无衍射姿态探针和全站仪组合测量空间隐藏坐标

针对大尺度空间中构件特征隐藏区的空间坐标测量,提出了一种基于无衍射光束的测量探针,并将该探针与全站仪结合构成了空间坐标组合测量系统。介绍了探针姿态测量系统和组合测量系统的结构与原理。测量时,首先将探针测头接触于被测点,并用全站仪或激光跟踪仪瞄准探针的光学系统,测得探针的空间位置坐标。接着,使用探针将测距激光通过axicon透镜变换为无衍射光,并由CCD摄像机获得图像。由无衍射光的中心一对一映射激光的入射方向,通过无衍射光图像定中计算,获得探针的水平角和俯仰角。最后,通过电子倾角仪测得探针滚动角;联合测得各姿态角和位置坐标,通过坐标变换,计算得出被测点的空间坐标。实验显示,该探针的姿态角测量精度为1mrad,组合测量空间位置偏差为±1mm,表明基于无衍射光束的探针与全站仪所构成的组合测量系统可满足大尺度空间中特征隐藏区空间坐标测量的要求。     

弧面分度凸轮机构动力学建模与Simulink仿真技术的研究

对弧面分度凸轮机构动力学特性进行了研究，考虑间隙存在、柔性轴和电机特性下，建立了系统动力学方程，应用Matlab／Simulink求解和动态仿真。结果显示间隙对凸轮和工作盘的响应有影响，从动件最大角加速度提高28％，电机输出轴角速度高频振荡。     

自研角度计量转台在圆分度器件校准中的应用

为了实现亚角秒级圆分度器件的高精度校准,建立了基于角度计量转台和自准直仪的角度测量系统,研究了基于无实物基准的圆分度误差检测方法和控制测量系统引入误差的策略。简要介绍了基于真空预载气浮支承和超声马达驱动的自研转台的结构,搭建了整个测量系统。利用圆封闭原理和最小二乘原理分析了圆分度误差的测量算法,讨论了测量过程的误差来源,并分析了抑制各误差源的方法。最后,在构建的测量系统上测量了多齿分度台的圆分度误差,并对测量不确定度进行了分析。实验结果表明：自研计量转台和被校多齿分度台的最大圆分度误差分别为0.12″和0.15″,测量不确定度为0.05″（k=2）。通过比对,表明测量系统能够实现亚角秒级圆分度误差的高精度校准。     

图像式角位移测量的光栅偏心度监测系统

图像式角位移测量装置中,光栅的安装偏心标定结果直接影响着角位移测量的精度。为此,本文设计了一种用于调试图像式角位移测量装置光栅偏心度的系统。首先,根据图像式角位移测量机理,提出了基于线阵图像传感器的标定光栅偏心度监测原理;然后,在图像传感器上建立了偏心调试监测信号的模型,并提出存在偏心时偏心监测信号的变化机理;最后,对某型号角位移测量装置进行了实验,并给出了调试建议。实验表明,经过调节误差均方差由1017″降低到12.8″。本文设计的偏心监测系统能够实现对标定光栅的高精度安装调试,提高了图像式角位移测量装置的批量生产效率。     

采用衍射、干涉技术提高光电轴角编码器的测角精度和分辨率

光电轴角编码器广泛应用于精密角位置的测量、数控及数显系统中,是国内外研究的热点.采用衍射、干涉技术的光电轴角编码器(简称激光编码器)具有结构紧凑、小型化;分辨率和测角精度高;响应频率高等优点.通过对几种激光编码器的成功方案的深入分析,阐述了这项技术的最新进展和所面临的问题.     

用于血栓弹力图仪的光电微小转角测量装置

血栓弹力图仪是测量全血凝结和纤溶过程动态变化的仪器,其关键技术之一是微小转角的测量。本文根据光杠杆原理,采用激光器结合光电位置传感器(PSD),研制了一套用于血栓弹力图仪的微小转角光学测量装置,其中PSD产生的微弱光电流信号经过I/V转换和差动电路放大,再采用sym3小波进行滤波去噪。之后选用不同粘度的液体进行实验,初步验证了该转角测量装置的可行性。     

全闭环数控回转轴定位精度研究

针对全闭环数控回转轴的关键检测元件—圆光栅的安装误差引起回转轴定位精度差的问题,基于圆光栅测量角度的工作原理,分析了圆光栅在安装时由于光栅定位端面的跳动误差对莫尔条纹的影响规律,推导出了相应的数学关系,建立了回转轴定位误差与光栅定位端面的跳动误差之间的数学模型.数值仿真表明当圆光栅出现端面定位安装误差后,回转轴回转一周,输出的莫尔条纹光强变化经历了一个周期,近似为一正弦曲线.针对上述理论分析,在加工中心回转轴C轴上进行了实验研究,结果表明,通过调整圆光栅端面的跳动误差从原来的70 μm到16 μm,利用高精密单频激光干涉仪对回转轴的定位误差进行了检测,两次测量的定位误差曲线均为正弦曲线,且回转轴的定位精度提高了3倍.研究结果表明,减小圆光栅定位端面的轴向跳动误差可有效提高回转轴的定位精度.