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为提高铜互连化学机械抛光(CMP)后表面质量,在抛光液中需引入适当的表面活性剂以改善磨料的稳定性以及CMP后铜的表面粗糙度。研究了十二烷基硫酸铵(ADSA)、脂肪醇聚氧乙烯醚硫酸铵(AESA)、直链烷基苯磺酸(LABSA)3种不同阴离子表面活性剂,以及非离子表面活性剂脂肪醇聚氧乙烯醚(AEO-9)和LABSA复配表面活性剂对钽阻挡层抛光液润湿性、分散性以及对材料去除速率的影响。通过接触角测量仪、纳米粒度仪、扫描电镜和原子力显微镜测试表面张力、接触角、大颗粒数、粒径分布以及CMP后铜的表面粗糙度,并分析复配表面活性剂的作用机制。结果表明:抛光液中加入LABSA后,因其具有直链型结构,抛光液的润湿性和分散性效果最好,抛光后铜表面的粗糙度最低;AEO-9和LABSA进行复配,相较于单一的LABSA,抛光液的润湿性、分散性、稳定性和抛光后铜表面粗糙度均有所改善,体积分数0.1%LABSA+0.1%AEO-9的复配表面活性剂性能最优,CMP后铜表面粗糙度降至0.7 nm。 相似文献
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本文通过实验测定了HCR水系金属冷冲压润滑剂的各项性能参数,并详细论述了该助剂的各项性能,实验结果表明该助剂具有良好的油膜强度和摩擦系数,具有润滑,同油漆系合,对焊接无任何影响等综合性能。 相似文献
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我厂在Gy型轴向柱塞泵洁净装配生产线上,使用了广州机床研究所研制的金属洗涤剂——Gy-1除蜡水,至今3年,效果良好:①大大提高了油泵的洁净度,提高了液压元件的工作可靠性,因此,油泵使用寿命可延长20%,为此,每年多为社会创造了财富百万元以 相似文献
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为了强化蒸汽冷凝传热,基于协同排液思想,设计并制备一种乳突+条纹双层结构表面:一层为超亲水乳突表面,另一层为亲水-超疏水条纹表面。在纯蒸汽环境中进行了冷凝传热试验,结果表明,条纹表面对冷凝传热过程具有一定的强化能力,当过冷度为7.0 K时,条纹表面的冷凝传热系数为光滑铜表面的1.39倍。而增加排液乳突可获得更好的冷凝传热性能,相同工况下,冷凝传热系数可提高到光滑铜表面的2.14倍。利用高速摄影仪对不同表面上冷凝液滴的形成和运动过程进行了可视化研究,并进行了受力分析,研究发现,条纹表面和乳突表面均对液滴具有一定的驱动作用,在乳突+条纹表面的综合驱动作用下,超疏水区的冷凝液滴迅速脱离,极大地降低了冷凝热阻,强化了冷凝传热。 相似文献
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新型焊料Ag-24Cu-25Ge-4Sn(%)的熔化温度:544-557℃,固-液相间隔为:13℃;采用氮气雾化的方法将该焊料制成粉体,利用扫描电镜对焊料粉体形貌进行了观察,并用X-ray衍射对焊料的相结构进行了分析。研究表明:所制备的焊料粉体呈球形,粒径约20μm;焊料主要由富Ag相、Ge相、中间相Ag6.7Sn和Cu5Ge2相组成。利用丙烯酸酯类化合物为载体将其调配成膏状焊料;焊膏铺展试验表明,该焊料流散性一般,钎焊后焊料表面色泽光亮,但边界有堆积现象;钎焊截面分析发现,在钎焊界面处存在明显的多层过渡层,这应与镍基板上的Ni和钎料中元素Cu的互相扩散有关系。 相似文献
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This paper considers the performance of the spherical thrust bearing, known as the hydrosphere. The analytical and experimental work of Shaw and Strang is examined and experimental results presented to substantiate the authors' own inertia theory presented in their previous paper. The paper demonstrates that inertia action could not account for the performance of the hydrosphere tested by Shaw and Strang. Various other factors, such as thermal effects on the lubricant and differential expansion of the bearing solids, are examined to see if they could account for the known performance of Shaw and Strang's bearing. Finally, the authors conclude that the most likely factor to explain the observed results is thermal expansion of the bearing lands between the grooves. 相似文献
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Richard L. Leslie 《摩擦学汇刊》2013,56(2):180-185
The performance of hydraulic systems at high temperatures is particularly sensitive to the properties of the hydraulic fluids. The effects of stability, viscosity, compressibility, volatility, gas solubility, and lubrication on hydraulic component and system performance are discussed. These properties singly and in combination affect many aspects of hydraulic system operation. The reaction of fluids to high temperatures causes significant changes in hydraulic performance. 相似文献
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吊环法表面张力自动测量仪的研究 总被引:5,自引:0,他引:5
本文在国内外现有吊环法表面张力测量仪的基础上又做了一些自动化测量方面的研究,以拉力传感器测量方式代替扭力丝转盘测量方式。使吊环法对液体表面张力的测量具有更高的精度 相似文献
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To achieve a hydraulic power system, it is important to control tribology because water has a lack of lubricity. Therefore, coated surface is necessary under water lubrication. Diamond-like-carbon (DLC)-coating is known as a useful material because of its high hardness and low friction, therefore it can be used as a coating durable for the water lubrication. Deposition methods of DLC-coating are developed in various ways. Particles called “droplets” are observed on the surface of DLC-coating depends on deposition methods and it can affect friction and wear properties. In this study, DLC-coating was prepared using a multi-cathode unbalanced magnetron sputtering (UBMS) system. The surface was polished with diamond slurry solution and aero lap to remove droplets. DLC-coatings were evaluated by tribo-tests before and after polishing. It is considered that some surface modification occurred. Moreover, the results of tribo-tests show that friction coefficients became lower and more stable than before polishing. Although partial delamination was observed after tribo-tests without polishing, no appreciable wear was observed after polishing. 相似文献
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Influence of friction on the surface characteristics of EPDM elastomers with different carbon black contents 总被引:1,自引:0,他引:1
L. MartínezR. Nevshupa D. FelhösJ.L. de Segovia E. Román 《Tribology International》2011,44(9):996-1003
Tribological properties and surface characteristics of ethylene-propylene-diene elastomers were studied as a function of carbon black (CB) content. The surface analysis was performed inside and outside the wear track by X-ray photoelectron spectroscopy (XPS) in order to evaluate possible compositional changes produced by rubbing. Carbon black content had only a small influence on the surface chemistry of the unworn surfaces. However, on the surfaces subjected to friction, the oxygen concentration decreased with increasing CB content. Neither the surface analysis by XPS nor the wettability tests revealed important thermal degradation of the polymer in these friction tests. 相似文献
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Theoretical investigations are carried out for a plain journal bearing considering the influence of thermal effects on non-Newtonian lubrication. With reasonable assumptions, the steady state and dynamic characteristics are presented using a thermohydrodynamic analysis of a bearing lubricated by a nonlinear, i.e., cubic, fluid model. Experiments are conducted on a rig to study the steady state and dynamic performance of a full journal bearing with different types of non-Newtonian lubricants. Experiments include the measurements of eccentricity ratio, critical speed, and stability limit. The theoretical investigation reveals that the interaction of the non-Newtonian effect and the thermohydrodynamic effect is strong for friction, and the interaction effect is negligible in the case of eccentricity ratio, attitude angle, and lubricant flow rate. Further, for relatively high values of non-Newtonian parameter, αn , the effect due to the non-Newtonian parameter is not negligible. 相似文献
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Tae-Ho Song 《Journal of Mechanical Science and Technology》1991,5(1):10-15
Laminar natural convection induced by free surface temperature gradient has been investigated numerically. Buoyancy effect
and surface tension effect were made to oppose against each other. For fluid of unit Prandtl number and cavity of unit aspect
ratio, the flow field was examined to determine the relative importance of surface tension force and buoyancy force. The flow
patterns of each regime are: free surface-concentrated streamlines for surface tension flows, opposite direction circulation
for buoyancy driven flows, and surface tension cell above with buoyancy driven cell below for mixed flows. The borderlines
of each flow regime were obtained by interpolation and the flow regime map was obtained. 相似文献
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These authors experimentally investigate the influence of multi-scale roughness on contact angle measurements, and they propose a model combining the Wenzel and Cassie–Baxter equations with the 3D roughness parameters defined by ISO25178. To do this, a generic methodology based on a statistical method (bootstrap and correlation coefficient) is developed and applied to a polypropylene textured femtosecond laser (55 surfaces, ablation depths=5–45 μm and depth/diameter=0.07–0.53). A mixed model is proposed according to the correlations obtained between the contact angle of a plane surface, θ0, and a textured surface, θ, with the roughness parameters as the developed surface, Sdr, closed hills area, Sha and the closed dales area, Sda, with regard to the models of Wenzel and Cassie–Baxter. 相似文献