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1.
基于全息图放大的数字全息显微结构测量   总被引:2,自引:1,他引:1  
针对典型预放大数字显微全息光路中存在的二次位相误差,本文设计了基于全息图放大的数字全息显微光路。此设计中,光束首先照射透明显微物体,然后与平行参考光干涉,形成全息图,最后经显微镜获得放大的全息图。这种光路从系统上直接消除了主要由球面波引起的位相畸变,有利于数字处理及实时化。作者以位相光栅(30 lines/mm,槽深约0.3 µm)作为实验样本,对此光路进行了分析研究,并分别用菲涅耳近似法和卷积法再现单幅全息图,同时获取了物体的强度信息和三维位相信息,位相深度的计算结果为0.27 µm。结果表明本文设计的光路对二次位相产生的离焦误差有明显的抑制作用。  相似文献   

2.
考虑高精度子孔径拼接干涉测量技术对自动化拼接的要求,提出了一种子孔径零条纹自动快速调节方法。分析了干涉条纹数量对拼接误差的影响,分析显示:当子孔径干涉条纹数量少于5条时,干涉仪回程误差小于λ/50(PV值)。对子孔径拼接测量装置进行了结构优化,提出了拼接位移台角位移偏差自动补偿方法,实现了各个子孔径的零条纹测量,进而控制了子孔径拼接的累积误差。对450mm×60mm长条镜进行了子孔径拼接干涉测量,结果表明:自动测量结果与手动调整零条纹测量结果在面形分布上更为一致;但前者测量速度及测量效率都有所提高,测量时间平均减少5min。提出的方法不仅能完成干涉拼接测量装置的自动定位及自动快速调整,还提高了测量重复性与检测效率。  相似文献   

3.
基于多孔径重叠扫描拼接技术的圆柱度测量研究   总被引:1,自引:1,他引:0  
提出了一种利用多孔径重叠扫描拼接技术的圆柱度非接触式测量新方法,可以有效地改进目前现有圆柱度测量方法中所存在的采样点不足、评定结果不统一等问题.该方法首先对圆柱体零件进行多个子孔径(单视角)的面形测量,其次,利用重叠区域面形信息建立相对空间位置关系,并通过坐标变换将各子孔径面形统一于同一坐标系下,从而实现完整面形的拼接测量.根据获得的圆柱体零件面形数据,可以实现零件圆柱度的精确评定.文中给出了基于多孔径重叠扫描拼接技术的光栅投射测量系统,计算机模拟和实验结果验证了拼接测量方法的可行性.  相似文献   

4.
利用相关拼接技术实现光学波面检测,可以用较小的测量口径实现较大面积的测量,并保持高的测量精度、高的空间分辨率和系统的低成本。获得高精度的子孔径波面分布和有效的拼接方法是这一技术的关键。简述了采用相移技术测量子孔径波面的关键技术。两个子孔径之间的拼接是比较容易的,但采用两两拼接的方法会有很大的误差累积。因此采用了具有误差均化作用的拼接方法,该方法本质上是一种并行的方法。文中简述了该拼接方法的数学模型和求解方法。最后给出了拼接的实测结果。  相似文献   

5.
采用立体视觉实现子孔径拼接测量的工件定位   总被引:1,自引:0,他引:1  
为了实现大口径光学元件的子孔径拼接干涉测量,提出了采用立体视觉进行光学元件位姿测量的方法,建立了基于双目视觉的子孔径拼接测量系统。介绍了圆形子孔径拼接干涉测量的原理,基于齐次坐标变换分析了其对工件定位的要求;引入了立体视觉辅助测量系统,建立了通用测量模型,利用双目视觉获取不同子孔径测量时与工件刚性连接的特征点的三维全局坐标,在完成全部子孔径测量后利用四元数法求取各子孔径相对于全局坐标系的转换矩阵,然后利用优化拼接算法将各子孔径数据统一到全局坐标系下,完成大口径光学元件的全局测量。最后利用该系统实现了对口径为150mm平面和100mm球面的检测。实验结果证明,在本系统中,立体视觉系统平移定位精度优于0.1mm,转动测量精度优于0.01°,可为优化拼接算法提供一个有效的初始值,该方法能够快速给出各子孔径间的相对坐标变换且不产生误差累积方法简单且可靠。  相似文献   

6.
用非零位补偿法检测大口径非球面反射镜   总被引:5,自引:2,他引:3  
研究了利用圆形子孔径拼接和环形子孔径拼接检测非球面的方法,以实现非零位补偿法对大口径非球面的测量.分析和研究了该技术的基本原理,并基于齐次坐标变换和最小二乘拟合建立了综合优化和误差均化的拼接数学模型;分别开发了圆形子孔径拼接和环形子孔径拼接检测非球面的算法软件;设计和搭建了子孔径拼接干涉检测装置,并分别利用圆形子孔径拼...  相似文献   

7.
采用立体视觉的子孔径拼接测量工件定位   总被引:1,自引:0,他引:1  
为了实现大口径光学元件的子孔径拼接干涉测量,提出了采用立体视觉进行光学元件位姿测量的方法,建立了基于双目视觉的子孔径拼接测量系统,对该系统的数学模型、测量原理以及基于四元数法的位姿变换矩阵求取方法进行了研究。首先,介绍了圆形子孔径拼接干涉测量的原理,并基于齐次坐标变换分析了其对工件定位的要求,接着引入了立体视觉辅助测量系统,建立了其通用测量模型,利用双目视觉获取不同子孔径测量时与工件刚性连接的特征点的三维全局坐标,在完成全部子孔径测量后利用四元数法求取各子孔径相对于全局坐标系的转换矩阵,然后利用优化拼接算法将各子孔径数据统一到全局坐标系下,完成大口径光学元件的全局测量。最后利用该系统实现了对口径为150mm平面和100mm球面的检测。实验结果证明,在本系统中,立体视觉系统平移定位精度优于0.1mm,转动测量精度优于0.01度,能够给优化拼接算法提供一个有效的初始值,且该方法能够快速给出各子孔径间的相对坐标变换且在其视场范围内不产生误差累积,方法简单实用,稳定可靠。  相似文献   

8.
郑鹏  郭红卫 《光学仪器》2009,31(2):31-37
基于对多孔径拼接测量技术基本原理的研究,提出在拼接坐标变换时采用四元数法进行子孔径的旋转和平移,推导构建了多孔径拼接数学模型,并给出了确定载物台旋转轴线的测量方法。计算机模拟验证了该拼接测量方法的精确性,基于光栅条纹投射系统进行三维物体的拼接测量,实验结果证明了这种方法的有效性。与传统方法相比,该方法具有运算简单、速度快、精确等特点。  相似文献   

9.
子区域拼接数字莫尔条纹非球面检测的理论分析   总被引:1,自引:1,他引:0  
利用moire 条纹测量三维物体表面,由于这种方法具有非接触性、自动化程度高、速度快等特点。并且不需要补偿器、辅助镜、全息图等辅助组件就可以实现非球面检测,使其得到广泛的应用。但在测量大口径、高陡度非球面以至离轴非球面时,受到光栅面积、CCD相机分辨能力等因素的限制;存在着一些困难,就此问题,本文提出了利用数字莫尔条纹(结合数字相移技术)进行子区域拼接的非球面检测方法,给出了这种方法的基本原理,阐述了方法的数学实现过程,结果显示子区域拼接数字莫尔条纹法可以作为补偿检验以外的另一种非球面检测方式  相似文献   

10.
针对非球面波前本身带有波前误差的特点和测量中由于装调误差而带来的新的波前误差,提出基于多阶波前误差校准实现子孔径间重叠区不匹配度最小化的方法,建立待拼接的子孔径间相位关系模型;应用逐步回归法确定拼接测量中各波前误差对拼接精度影响的权重,进一步得到优化的子孔径干涉拼接测量(SSI)非球面的测量模型,并且获得较好的波面重构结果。仿真分析表明,理论上该测量模型的拟合精度高于传统测量模型,进一步仿真测量实验表明,基于波像差校准的拼接测量模型能够满足高精密非球面测量的要求。  相似文献   

11.
误差均化的拼接技术   总被引:4,自引:0,他引:4  
利用相关拼接技术实现光学波面检测,可以用较小的测量口径实现较大面积的测量,并保持高的测量精度、高的空间分辨率和系统的低成本.获得高精度的子孔径波面分布和有效的拼接方法是这一技术的关键.最简单的两两拼接的方法由于在拼接过程中存在误差积累,对全孔径拼接精度有很大的影响.采用误差均化的拼接方法,要求所有拼接区中相差值的平方和同时达到最小.从本质上看,这是一种并行算法.给出了在平面直角坐标系下误差均化拼接的数学模型和求解方法,进行了计算机仿真.结果证明该方法是切实有效的.  相似文献   

12.
In this paper, we introduced a mathematical method for measuring the optical path length differences (OPDs), which is suitable for large OPD values where the fringes connections are difficult to detect. The proposed method is based on varying the width of the fringes, without changing the wavelength of the used coherent source. Also, in this work, we discussed the need for such method in off‐axis phase‐shifting digital holography. Low‐resolution off‐axis holograms failed to detect the correct interference order. In general, off‐axis phase‐shifting digital holography is limited by the resolution of the captured holograms. The results obtained using our proposed technique were compared to the results obtained using off‐axis phase‐shifting digital holograms and conventional two‐beam interferometry. Holograms were given for illustration.  相似文献   

13.
两种稀疏孔径系统的成像研究   总被引:4,自引:0,他引:4  
介绍一种由九个子镜构成的复合三子镜稀疏孔径系统及其结构形式。将复合三子镜和同样由九个子镜构成的典型GOLAY 9稀疏孔径系统进行比较来研究两种稀疏孔径系统的成像情况。通过比较它们的结构特点与调制传递函数,并计算两种稀疏孔径系统的等效直径和实际等效直径,对不同填充因子的两种稀疏孔径模拟成像和维纳滤波,用图像的标准差和对比度指标对两种系统的成像像质进行评价。结果表明:在调制传递函数(MTF)的最大值方向,除归一化频率在0.55~0.65以外的空间频率处复合三子镜I 型的MTF明显高于GOLAY 9的MTF。当填充因子≥20%时,复合三子镜I 型和GOLAY 9的等效直径和实际等效直径基本接近。在空间频率24~45 lp/mm处,图像对比度复合三子镜I 型优于GOLAY 9,复合三子镜整体性能与GOLAY 9相近,且复合三子镜在结构排列上具有对称易装调的优点。  相似文献   

14.
A method is proposed for parallel (simultaneous) readout of information from threedimensional “coupled” Fourier holograms. The method is based on the principle of transformation of informational degrees of freedom of the optical signal with the use of moving diffraction gratings: the spectrum of spatial harmonics of superimposed holograms is transformed to a spectrum of time harmonics separated in terms of frequency. A method of formation of images of moving gratings with a prescribed orientation in the volume of the recording material is developed. Conditions of the frequency separation of the signals, resolution of the method over the material depth, and the number of detected bits as a function of grating parameters are obtained.  相似文献   

15.
We report a new method that gives atomic resolution in the reconstruction of simulated holograms in theoretical low energy electron point source (LEEPS) microscopy, and that uses a screen size that is commensurate with screen sizes used in experimental LEEPS. The method exploits the spherical symmetry in the electron waves emerging from the source. We compare holograms obtained by rotating the screen about an axis passing through the point source as opposed to rotating the atomic cluster in the opposite sense about the same axis. We show that, by generating and combining simulated holograms obtained by rotating the cluster, with the screen held fixed, a composite hologram, comprised of the individual holograms, captures enough information that atomic resolution in the reconstructions is obtained. A key feature is to choose the rotations to optimize the collective interference pattern on the composite hologram. This results in sharper resolution while using a considerably smaller screen size; results are reported for a screen size about ten times smaller than screen sizes typically used in theoretical LEEPS. The method used gives commensurate or better resolution on comparison to results obtained using the larger screen size. Possible implications for experimental LEEPS are briefly discussed.  相似文献   

16.
A method for studying the effect of temperature on the optical properties of basalt fiber is presented. It is based on recording a set of phase‐shifted digital holograms for the sample under the test. The holograms are obtained utilizing a system based on Mach–Zehnder interferometer, where the fiber sample inserted in an immersion liquid is placed within a temperature controlled chamber. From the recorded digital holograms the optical path differences which are used to calculate the refractive indices are determined. The accuracy in the measurement of refractive indices is in the range of 4 × 10?4. The influence of temperature on the dispersion parameters, polarizability per unit volume and dielectric susceptibility are also obtained. Moreover, the values of dispersion and oscillation energies and Cauchy's constants are provided at different temperatures.  相似文献   

17.
The beam emission spectroscopy (BES) turbulence diagnostic on MAST is to be upgraded in June 2010 from a one-dimensional trial system to a two-dimensional imaging system (8?radial×4?poloidal channels) based on a newly developed avalanche photodiode array camera. The spatial resolution of the new system is calculated in terms of the point spread function to account for the effects of field-line curvature, observation geometry, the finite lifetime of the excited state of the beam atoms, and beam attenuation and divergence. It is found that the radial spatial resolution is ~2-3?cm and the poloidal spatial resolution ~1-5?cm depending on the radial viewing location. The absolute number of detected photons is also calculated, hence the photon noise level can be determined.  相似文献   

18.
Dark field electron holography is a new TEM-based technique for measuring strain with nanometer scale resolution. Here we present the procedure to align a transmission electron microscope and obtain dark field holograms as well as the theoretical background necessary to reconstruct strain maps from holograms. A series of experimental parameters such as biprism voltage, sample thickness, exposure time, tilt angle and choice of diffracted beam are then investigated on a silicon-germanium layer epitaxially embedded in a silicon matrix in order to obtain optimal dark field holograms over a large field of view with good spatial resolution and strain sensitivity.  相似文献   

19.
We present a new cryogenic wind tunnel facility developed to study the high Reynolds number developed classical or quantum turbulence in liquid (4)He. A stable inertial round jet flow with a Reynolds number of 4 × 10(6) can be sustained in both He I and He II down to a minimum temperature of 1.7 K. The circuit can be pressurized up to 3.5 × 10(5) Pa. The system has been designed to exploit the self-similar properties of the jet far field in order to adapt to the spatial resolution of the existing probes. Multiple and complementary sensors can be simultaneously installed to obtain spatial and time resolved measurements. The technical difficulties and design details are described and the system performance is presented.  相似文献   

20.
The layered systems of holographic photopolymer materials for recording color holograms are designed and developed. Monochrome and two-color (green-red, red-blue, and green-blue) volume reflection holograms are obtained using the He—Ne, Ar+, and DPSS lasers in red, green, and blue spectral ranges. The effects of cross-bleaching of the dyes used and the holographic properties of monochrome and two-color holograms in layered systems are considered. It is shown experimentally that the diffraction efficiency of these holograms is ~(70–80%) and comparable with that of monochrome holograms obtained in single-layer holographic photopolymer materials.  相似文献   

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