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基于集中质量法建立了同轴面齿轮传动系统弯扭耦合动力学模型,定义了系统动态均载系数计算方法,将均载系数与TRP试验结果进行对比,验证均载计算方法的可靠性,并开展齿轮支撑刚度对系统动态均载特性影响规律的研究.结果表明:输入齿轮支撑刚度对系统输入、输出端均载系数均影响较大,适当减小输入齿轮支撑刚度有利于改善系统的均载性能;惰轮支撑刚度对系统输入端均载系数影响较大,对输出端均载系数影响较小;面齿轮支撑刚度变化对系统输入、输出端均载系数影响均很小,系统均载性能变化不大. 相似文献
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梳齿式微机械加速度计闭环系统的线性度 总被引:1,自引:0,他引:1
为研究离心试验中微机械加速度计的线性度和输入加速度的关系,分析闭环系统的位置误差,然后根据微机械加速度计闭环系统的输出公式,对离心试验的加速度输入和电压输出之间的关系进行最小二乘分析,提出单程线性度和全程线性度的公式,证明线性度为输入的二次曲线函数,且与开环系统低频环路增益有关。线性度公式表明增大低频环路增益,增大悬臂梁机械刚度以提高线性度的方法。利用电测法估算机械参数,并利用离心试验的数据进行验证。结果表明,可以利用±1g静态翻滚试验的数学模型和电气参数来估计高g输入下的线性度,理论值与实测值符合得较好,因此可以用简单廉价的±1g线性度测试来粗略替代复杂且昂贵的离心试验进行满量程线性度的估算。 相似文献
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《机械传动》2016,(8):43-49
针对双输入圆柱齿轮动力分流传动系统,建立了传动系统的静力学分析模型,模型中考虑了齿轮副的啮合变形、齿轮中心的横向变形、双联齿轮轴的扭转变形、齿轮安装误差和支撑刚度等因素。根据传动系统的力矩和力平衡条件,以及其闭环结构的变形协调条件,建立了系统的静力学平衡方程,求解了系统各分支双联齿轮轴的转矩及各分支均载系数,获得了安装误差、安装角、双联齿轮轴扭转刚度对系统均载系数的影响规律。研究结果表明,误差具有累加作用,各误差综合作用时系统均载系数显著增大,并车级齿轮安装误差对系统均载性能的影响大于分扭级;在该组参数条件下,两输入安装角为166°左右时,系统左右输入均载系数相等;降低双联齿轮轴扭转刚度有助于提高系统均载性能,合理配置分扭级安装角和双联齿轮轴扭转刚度差值有利于进一步改善均载性能。 相似文献
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讨论了一种多梳齿力平衡式微机械加速度计表头系统工作原理。因加速度计制造中存在的间距不对称,提出通过调节正负反馈电压比的方法来减小输出非线性误差,并得到了调节的约束关系式。通过体硅深宽比刻蚀和微键合工艺制造了加速度计并进行了封装,闭环电路实验测试得到在未修正系数前,加速度计在量程为-60~65 g时最大非线性误差为-0.8%,修正后满量程最大非线性误差为0.08%。试验结果与理论分析能很好地吻合,验证了方法的有效性。 相似文献
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以进给速度为控制对象的自适应约束控制(ACC)技术有利于提高数控加工效率和实现刀具保护,在分析Profibus总线和模糊控制特点的基础上,针对铣削加工过程的非线性、时变性和不确定性,提出了基于现场总线的铣削加工过程自适应模糊控制的解决方案.采用恒功率约束,利用比例因子在线自调整的方法对切削参数变化的进给速度进行在线控制.仿真结果表明,方案克服了传统的模糊控制动态响应较慢的鲁棒性较差的缺点,具有响应速度快、实时性和稳定性好等优点.当切削深度突变时,能在线自适应调整进给速度,使切削功率接近参考值,防止刀具损坏和提高加工效率. 相似文献
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力平衡式真空微电子加速度传感器的机电耦合特性 总被引:1,自引:0,他引:1
力平衡式真空微电子加速度传感器的惯性敏感元件不仅受弹性力的作用,同时还受静电力的作用,其总刚度为机械刚度和由静电力引入的电学刚度之和。本文利用平行板电容器模型计算发射电极间的静电力,并引入一个修正系数描述发射锥尖阵列的影响,对传感器性能进行了理论分析。分析表明,提高偏置电压可以改善传感器的线性度和灵敏度,通过调节偏置电压来调整系统的刚度和阻尼比可使其具有更好的动态特性。由于静电吸合效应的影响,质量块的位移必须小于偏置电极间初始间距的1/3,系统才能稳定。为了获得较好的动态特性,需要确定一个由偏置电压决定的优化工作点。实验结果表明,当设置发射电压和反馈偏置电压分别为1.953 V和5.478 V时,该真空加速度传感器的灵敏度达到557 mV/g,非线性度为0.95%,传感器系统具有良好的性能。 相似文献
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为了研制谐振微机械加速度计,文中介绍了静电刚度的谐振式微加速度计的工作原理,并根据闭环控制要求,建立了基于自激原理的系统分析方程,利用平均周期法分析了系统稳定性和振动幅度稳态平衡点。理论分析确定了系统起振条件和相位偏差对闭环振幅和频率的影响。对基于体硅溶片制造和真空封装的谐振微加速度计,自激闭环测试结果表明检测电压1 V时,灵敏度为18 Hz/g;检测电压5 V时,灵敏度为58 Hz/g,10 min内闭环谐振频率最大漂移0.2 Hz,可分辨加速度约3.5 mg. 相似文献
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Force in the micronewton range may be traced to the International System of Units by an electrostatic force balance weight system. However, there is a conflict between range and sensitivity. To solve this problem, a lever-type force metrology system based on the null-balance method is reported. The force is loaded on one end of the lever, causing elastic torsion of the central rod, and an electrostatic force is applied to the other end. With a variety of mass loading positions and standard weights, a wide range of moments may be produced to calibrate the system. The electrostatic force was generated by a pair of coaxial cylindrical capacitors where the applied voltage was converted into electrode displacement. The design of the inner and outer cylindrical capacitors was deduced considering the material and miniaturization requirements, and concentric alignment was ensured by a vision system. The null balance was achieved by a proportion-integration-differentiation control system, so that the external force was compensated by the electrostatic force. A method to increase the center of gravity was used to improve the resolution. The mechanism was analyzed based on stiffness, strength, stability, and frequency. Furthermore, the impact on the capacitance gradient due to the capacitor tilt caused by the applied force was estimated. Standard weights were utilized to evaluate the system performance. The results showed that a stiffness of 0.8 N/m and a force resolution of 10?8 N were achieved. 相似文献
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针对现有基于柔性铰链的微动平台动态特性受材料特性、设计制造等误差影响,难以满足精密微动平台对动态响应(特别是可变频率操作)的高要求,基于应力刚化效应,提出了动态特性可调的微动平台设计新方法,推导预应力作用下一端固定一端导向梁的等效刚度和质量公式;基于对称布置假设,建立含有弹片式柔性铰链(下面简称弹片)组数(离散变量)和截面尺寸(连续变量)的离散连续变量复合优化模型,释放承载刚度约束,获得截面尺寸含有弹片组数变量的精确解系列,分析了给定预应力下不同弹片组数微动平台的承载刚度和频率调节范围,从而通过承载刚度约束和频率调节范围要求确定弹片组数。通过数值算例,验证了推导计算模型求解精度和所提设计方法的应用有效性。计算结果表明,与有限元分析结果相比,本模型的计算结果相对误差小于2%,实现了给定工作刚度、频率和承载刚度约束的微动平台最优结构设计。所提方法实现了刚度和频率大范围的调整,不但降低了加工精度要求,还为动态特性自适应匹配的智能微动平台提供一种实现途径。 相似文献
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《Measurement》2016
This work presents the design of a MEMS accelerometer that is specifically intended for Structural Health Monitoring (SHM) applications where sensing low frequency low amplitude accelerations with high resolution is essential. The surface micromachined comb drive capacitance accelerometer structure has been considered in this design. The simulation experiments conducted on these devices using IntelliSuite MEMS design tool show that it has excellent displacement sensitivity of 21.39 μm/g, a capacitive sensitivity of 1.22 pF/g and voltage sensitivity of 1783 mV/g/V when it is designed to measure 0–0.1 g. Further, it is seen that it has a very low noise floor of 1.32 μg/√Hz and therefore high resolution. Since the accelerations can be as low as 0.04 g in SHM applications, excellent resolution is the primary goal in this design. Further, one more sensor specifically meant for strong motion seismic application has also been reported. This device has a bandwidth of 0–250 Hz and a noise floor of 5.612 μg/√Hz in addition to a sensor level voltage sensitivity of 97.9 mV/g/V. Finally, the comparison of these results with other similar devices reported in the past clearly illustrates the comparable performance of the present devices. Further, these devices, unlike the commercial low frequency accelerometers and other similar devices reported in the past can be fabricated by surface micromachining and CMOS compatible processes. 相似文献
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Kong Myeong Bae Jae Min Lee Ki Beom Kwon Ki-Ho Han Nam Yeol Kwon Jeong Sam Han Jong Soo Ko 《Journal of Mechanical Science and Technology》2014,28(4):1449-1454
A high-shock 2000 g accelerometer with suspended piezoresistive sensing bridges has been designed, fabricated, and tested. Structural size of the accelerometer has been obtained through an optimal design process. Four resistors are electrically connected to form a Wheatstone bridge circuit. A sensitivity of 25.5 μV/g has been measured from the fabricated accelerometer with a nonlinearity of 0.2% in an acceleration range within 2000 g. The real-time response of the fabricated accelerometers accurately follows the reference accelerometer. The newly fabricated accelerometer has survived an over-shock condition of 4667 g. 相似文献
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硅微谐振式加速度计的实现及性能测试 总被引:5,自引:4,他引:1
为了提高硅微谐振式加速度计性能,从一种基于DDSOG(Deep Dry Silicon on Glass)工艺的硅微谐振式加速度计样机入手,介绍了加速度计的结构、加工方法和接口电路。该谐振式加速度计结构包括敏感质量块、谐振器和微杠杆3部分,采用差动结构来减小共模误差的影响。接口电路中采用了自动增益控制电路来稳定谐振器的振幅,成功实现了谐振器的闭环自激振荡和频率检测。分析了谐振式加速度计频率输出与加速度输入的关系,测试了硅微谐振式加速度计样机性能,结果为量程±50g,标度因数143 Hz/g,零偏稳定性1.2 mg,零偏重复性0.88 mg,阈值170μg。文章最后提出,DDSOG工艺中采用的玻璃材料和硅材料温度系数不同,影响了加速度计的温度特性,因此需要进步一改进加工工艺。 相似文献