30m望远镜三镜镜面面形误差的斜率均方根评价

由于传统的均方根方法在评价大口径反射镜时难以精确表达光学表面的中空间频率误差,本文提出了基于斜率均方根(SlopeRms)的误差评价方法来评价光学表面面形。该方法先以Zernike多项式拟合光学表面面形,在此基础上求解不同空间间隔上的斜率均方根。这种评价方法可以很好地区分小尺寸磨削工具造成的误差和大口径反射镜在多点支撑下造成的面形误差。文中建立了SlopeRms的数学模型,推导了SlopeRms的计算方法,并以此方法为基础对30m望远镜(TMT)三镜面形进行了评价。结果显示,采用斜率均方根的评价方法得到的光学表面面形值达到0.9μrad,优于传统的RMS评价方法(RMS=115nm),满足设计要求。结果显示,基于斜率均方根的误差评价方法能更加全面和客观地评价大口径反射镜面形,具有实际意义。     

中心点亮度和均方根值两种评价方法间的联系

对评价光学波前误差的两个重要指标——中心点亮度和均方根值的内在联系进行了深入的研究,利用计算机优化得到了两者关系的极限曲线,并进一步分析了利用计算机模拟得到的两种极限情况下面形的特征,得到:均方根误差一定的表面,其中心点亮度与面形误差的空间频率分布有关。若面形误差的中高频分量较高,它的中心点亮度将较低。从而揭示了相同均方根值误差的表面产生不同中心点亮度的原因,为较全面地评价光学元件和系统的误差提供了参考。     

基于在线检测的曲面光学零件加工技术

提出了一种基于在线面形检测与补偿加工相结合的光学曲面零件的超精密加工方法，在线面形检测系统由空气静压浮动探针和光纤式激光干涉位移计构成。利用该加工方法实际加工了一个光学球面零件，其综合面形精度达到了P—V值0．41μm。     

基于运动学支撑的透镜光学表面面形及其复现性

根据高精度投影光刻物镜的特点,提出了一种运动学支撑结构,并采用实验结合有限元分析的方法研究了该支撑结构引起的透镜光学表面变形以及重复装配过程中透镜光学表面面形的复现性.首先,介绍了运动学支撑结构的原理及镜面变形分析的方法.然后,应用Zernike多项式拟合实测和有限元分析得到的面形,并用两种方法对运动学支撑结构夹持力引起的透镜光学表面面形进行对比,以验证有限元分析模型的正确性.同时,分析了考虑重力情况下运动学支撑结构导致的透镜光学表面变形.最后,用实验的方法测量了运动学支撑结构在重复装配过程中透镜光学表面面形的复现性.实验和分析结果显示,由运动学支撑结构夹持力引起的透镜光学表面面形均方根(RMS)值的实测值为1.004nm,分析值为0.974 nm,夹持力及重力综合作用下导致的透镜表面Fringe Zernike拟合面形RMS值为2.538 nm,产生的主要像差为离焦、初级三叶像差和二级三叶像差,重复装配过程中引起的透镜光学表面面形的复现性标准差为0.645nm.得到的结果表明,所设计的运动学支撑结构能够保证透镜光学表面面形在重复装配过程中有良好的复现性.     

提高自由曲面透镜测量精度的迭代重构曲面算法研究

在提出的基于图像变换的光学透镜的表面面形测量方法中，建立了造代重构曲面算法。算法根据待测透镜光学表面在光学成像系统中的图像变换特性，重构出与待测透镜光学表面具有相同图像变换特性的数值三维曲面簇，利用造代方法从中筛选出与待测透镜光学表面面形完全相同的数值三维曲面，解决了测量精度不足的问题。实验结果表明，使用该算法所构建的数值曲面与待测透镜光学表面的曲面面形能够准确相符。     

基于投影法检测光学元件面形的图形处理算法

基于线结构光扫描测量和立体视觉测量相结合的三维检测方法——投影法,能够快速准确地实现光学元件面形的在线检测,通过对采集图片的图像预处理,区域立体匹配分析,曲线拟合及面形实验等算法还原被测光学元件面形模型。实验结果表明,将这种方法用于检测光学元件可以真实还原光学元件三维外貌特性,具有实际应用价值。     

精研磨阶段非球面面形接触式测量误差补偿技术

在对高精度非球面光学元件进行磁流变抛光制造过程中,为了提高达到最终要求的15-30 nm(方均根值) 光学级面形精度的加工效率,必须经过非球面面形快速修正的精研磨过程。针对精研磨阶段的面形误差数字化技术进行了深入分析,建立了分离影响误差收敛精度的线性误差矩阵,并借助于一块具有中心遮拦孔的同轴抛物面反射镜进行验证,结果表明所建立的倾斜误差分离矩阵对于指导非球面研磨阶段的面形检测具有明确的效果,能够提供该阶段待检测工件面形的准确信息,保证了研磨阶段检测与加工的密切衔接,缩短了进入光学抛光阶段的周期。     

一种光学元件表面中频误差提取的新方法

光学元件表面面形误差属于非平稳空间信号,为了在分离光学元件表面各频段面形误差的同时尽可能保留原始信号各频段的细节特征,结合超精密抛光的球面光学元件表面特点,提出一种基于双树复小波变换(dual tree complex wavelet transform,简称DT-CWT)的自适应分离法。利用DT-CWT的多分辨分析、方向性好和良好的时频局部化分析能力等特点,对实测的抛光光学元件表面进行DT-CWT的多尺度分解,并在重构时加入自适应影响因子,成功分离了各频段的面形误差。通过对经DT-CWT直接分离法与DT-CWT自适应分离法得到的高、中、低频面形误差进行参数表征,实验证明基于DT-CWT自适应分离法更为有效地分离光学元件各个频段的面形误差及误差特征,便于后续的识别与评定工作。     

离轴三反射系统的热光学分析和温控指标的制定

考虑空间环境中温度是光学系统成像质量的主要影响源,针对离轴三反射光学系统提出了一套由有限元分析到光学分析的热光学分析方法.在有效分析均匀温度场对系统影响的基础上,采用有限元分析得到温差影响下的镜面面形畸变,并用Zernike多项式拟合畸变面形;将Zernike系数代入光学设计软件CODE V,理论分析了温差影响下的光学...     

拼接干涉技术在同步辐射领域的发展现状及趋势

针对同步辐射领域光学元件的口径逐渐增大,其面形测量精度的要求已达到纳弧度级的问题,本文研究了该领域先进的面形测量方法——拼接干涉技术,以实现光学元件的高分辨率二维测量。介绍了拼接干涉技术的基本原理,综述了目前同步辐射光学领域常用的面形测量设备——激光光束长程面形仪、高精度自准直纳米测量仪,以及拼接干涉仪的发展历程和特点,比较了它们各自的缺点和优势。最后,分析了拼接干涉涉及的主要误差来源,指出该技术的应用和发展趋势主要有拼接算法的创新,干涉仪测量的快速化,拼接干涉仪的商业化,以及拼接干涉技术与其他科学技术的融合等。     

Theoretical model of brittle material removal fraction related to surface roughness and subsurface damage depth of optical glass during precision grinding

Brittle material removal fraction (BRF) is defined as the area fraction of brittle material removed on machined surface. In the present study, a novel theoretical model of BRF was proposed based on indentation profile caused by intersecting of lateral cracks. The proposed model is related to surface roughness and the subsurface damage (SSD) depth of optical glass during precision grinding. To investigate the indentation profile, indentation tests of K9 optical glass were conducted using single random-shape diamond grains. The experimental results indicate that the indentation profile is an exponent function. To verify the proposed BRF model, BRF, surface roughness and SSD depth of K9 optical glasses were investigated by a series of grinding experiments with different cutting depths. The experimental results show that BRF is dependent on surface roughness and SSD depth. The relationship between BRF, surface roughness and SSD depth is in good accordance with the proposed theoretical model. The proposed BRF model is a reasonable approach for estimating surface roughness and SSD depth during precision grinding of optical glass.     

Analysis of profile measurement techniques employed to surfaces planed by an active machining system

The importance of a reliable and robust surface profile measurement system in the inspection of surface finish is beyond any doubt. For years, visual inspection has been employed in industries to determine the quality of surface finish. Since, in most cases, it fails to ensure a consistent minimum standard of finish quality, mechanical stylus based measurement systems have successfully taken over from human inspection. However, in recent years, the trend is to explore other techniques for conducting surface profile measurements. Non-contact optical methods have emerged as one of the leading candidates. In this paper, capabilities of two optical profile measurement methods (namely, light-sectioning and two-image photometric stereo) have been explored for surfaces machined using an active machining system. These profile measurement results have been compared to the ones obtained from a conventional mechanical stylus instrument. An industry-standard Talysurf CLI system has been used to provide the benchmark, traceable to NPL standards, for the measurements. Suitability of different measurement techniques have been discussed based on the results obtained.     

表面微观轮廓的高分辨率光学测量方法

较全面地介绍了用于表面微观轮廓测量的几种高分辨率甚至可达亚纳米的光学测量方法及其最新进展.文中重点描述了以扫描共焦显微检测法、离焦误差检测法为代表的光触针法,以TOPO轮廓仪、Nomarski显微镜、外差干涉轮廓仪、双焦干涉轮廓仪和同轴干涉轮廓仪为代表的干涉测量法和以扫描近场光学显微镜及光子扫描隧道显微镜为代表的近场光学法三种适用于表面微观轮廓测量的光学测量方法,分别介绍了其工作原理、特性、发展现状及存在问题,通过对这些方法的对比和总结,阐述了表面微观轮廓纳米级光学测量的发展趋势.     

基于PZT的非球面能动抛光盘定位误差分析

摘要：变形抛光盘能够改变面型以用于非球面镜加工。基于PZT压电陶瓷驱动器的非球面能动抛光磨盘，能够在PZT驱动器的作用下改变面型，为中小口径非球面镜加工提供了一种新的工具。非球面能动抛光磨盘在相对非球面工件移动时，根据位置，计算出每个PZT驱动器的变形量。因此定位误差会引起压电陶瓷驱动器的变形误差，从而造成输出的非球面面型误差。本文对定位误差进行了理论分析和计算，根据计算结果，定位误差应该限制在±0.5mm。     

光学面形误差对环围能量比的影响

以发射光学系统为研究对象,假设面形误差为高斯平稳随机过程,建立了光学面形误差均方根梯度(GRMS)与远场靶面上环围能量比(EE)之间的数学关系模型,进行了仿真分析并对实际面形数据做了验证。研究表明,环围能量比随GRMS的增加呈指数衰减;同时面形误差低频和高频部分分别形成远场光强分布的中心核和边缘。在GRMS≤7 nm/mm时,理论计算与仿真结果非常吻合。与实际分析结果的比较表明,该数学关系模型是正确的,能够用来分析GRMS对EE的影响。     

一种光学元件面形三维重建的算法研究

为了在线检测光学元件面形,介绍一种基于线结构光扫描测量和立体视觉测量相结合的三维检测方法,目前这种方法多用于检测高反射率的物体,因此将该方法运用于检测光学元件面形是一种新的尝试。实验的三维重建算法是通过MATLAB和VC++软件共同编写程序实现的,实验结果表明,将这种方法运用于检测光学元件是可以真实还原光学元件三维外貌特性的,所以它的研究具有可行性和研究价值。     

Development of a novel profile measurement system for actively planed surfaces

The importance of a reliable and robust surface profile measurement system in the inspection of surface finish is beyond any doubt. For years, visual inspection has been employed in industries to determine the quality of surface finish. Since, in most cases, it fails to ensure a consistent minimum standard of finish quality, mechanical stylus based measurement systems have successfully taken over from human inspection. However, in recent years, the trend is to explore other techniques for conducting the surface profile measurements. Non-contact optical methods have emerged as one of the leading candidates. A target application concerning the surface quality of wooden products requires the use of non-contact techniques to avoid surface damage. This paper deals with a non-contact optical surface profile measurement system based on the pickup of a commercially available DVD player. Significant cost reduction and seamless integration of the sensor into a manufacturing process line may be achieved with the proposed method. The performance of this DVD profilometer with samples of Delrin nylon and hardwood has been analyzed and discussed in this paper. It has been shown that the measurement results show good correlation with the benchmarks obtained with the help of a leading commercial profilometer, the Talysurf.     

Optical 3D profilometer for in-process measurement of microsurface based on phase retrieval technique

We have proposed an optical method that can be applied to in-process or in situ measurement of the microsurface profile. The present method is based on optically performed spectral analysis and the phase retrieval technique. Spectral information of a surface profile is obtained by measuring the Fraunhofer diffraction intensity. The phase retrieval technique is used to reconstruct the surface profile from the measured spectrum. We have developed an instrument on the basis of the general principles of the present method, and measured the surface of a reference standard having rectangular pockets 44 nm deep at intervals of 10 μm. The measured surface profile was in good agreement with the nominal dimensions of the specimen as well as the surface profile obtained by atomic force microscopy (AFM).     

利用人工神经网络测量零件三维表面轮廓的新方法

提出一种利用人工神经网络对零件三维表面轮廓进行非接触测量的新方法，介绍了光学系统、数据获取、训练反向传播神经网络确定系统映射函数以及零件三维曲面测量方法和实例。该方法可降低对测量系统精度的要求，并且不需要精确调整成像系统和预先精确测定系统参数。