大尺寸轻型碳化硅质镜体的制造与材料性能测试

利用凝胶注模(gel-casting)成型工艺制备了620 mm和700 mm×300 mm的碳化硅(SiC)轻型反射镜素坯,经过脱模、干燥、脱脂和反应烧结等工艺,制备了反应烧结SiC(RB-SiC)镜体。镜体经过加工和测试,结果表明:制备的RB-SiC内部结构均匀致密;力学性能和热学性能优异,抗弯强度、断裂韧性和热膨胀系数分别达到了350 MPa、 4.1 MPa·m^1/2和2.67×10^－6/K;镜体经抛光后的表面粗糙度RMS值可优于3 nm,适合用于制备空间用大尺寸轻型反射镜。     

同步辐射高分辨率衍射光束线的设计

介绍了第三代同步辐射高分辨率X射线衍射光束线的总体设计。给出了高分辨率衍射的基本原理并描述了获得确定光子能量的近平行高强度X射线光束线所必需的光学元件。特别是用X射线动力学理论,解释了双晶及四次反射晶体单色器。作为一个实例,介绍了将于2009年开始在德国汉堡运行的一个新的同步辐射源PETRAⅢ的高分辨率衍射(HighRes)光束线的设置情况。通过优化光学部件,对微米尺寸光束,q空间的分辨减小到Δq=10^-5 nm^-1,光通量大于10¹¹ cts/s。     

气囊抛光过程的运动精度控制

针对用于球面、非球面光学元件超精密光学加工的气囊抛光技术,提出了一套控制抛光过程中气囊运动精度的方法。该方法通过控制加工单元的温度,保证抛光过程中设备运动精度达到50μm;使用坐标传递法,使检测数据二维方向对准不确定度达到0.30~0.70mm。另外,基于磨头去除量估计与反馈修正法,提高精抛过程面形误差收敛效率。最后,通过磨头探测校准法,将磨头与加工工件法向位置精度提高至10μm。实际抛光实验显示:使用运动精度控制法在280mm口径的平面精密抛光中获得的面形加工精度为0.8nm(RMS),在160mm口径的凹球面精密抛光中获得的面形加工结果为1.1nm(RMS),实现了超高精度面形修正的目的,为超高精度球面、非球面光学元件加工提供了一套行之有效的方法。该方法同样适用于其他接触式小磨头数控抛光方法。     

用于恶劣环境的耐高温压力传感器

为了解决如高温200℃等恶劣环境下的压力测量问题,基于微机电系统(MEMS)和高能氧离子注入(SIMOX)技术,研制了一种量程为0~120 kPa的压阻式压力传感器。该传感器芯片由硅基底、薄层二氧化硅、惠斯登电桥结构的硼离子注入层、氮化硅应力匹配层、钛-铂-金梁式引线层和由湿法刻蚀形成的空腔组成。在氧剂量1.4×10¹⁸/cm²和注入能量200 keV条件下,由高能氧离子注入技术形成厚度为367 nm的埋层二氧化硅层,从而将上部测量电路层和硅基底隔离开,解决了漏电流问题,使得传感器芯片可以在高温200 ℃以上的环境下使用。为了提高传感器在宽温度范围内的稳定性,对温度补偿工艺进行了研究,补偿后的传感器灵敏度温度系数和零位温度系数很容易控制在1×10^-4/℃·FS。实验标定结果表明:在200 ℃下,研发的耐高温压力传感器具有很好的工作性能,其线性度误差达0.12%FS、重复性误差为0.1%FS、迟滞误差为0.12%FS,精度达0.197%FS,满足油井、风洞、汽车和石化工业等现代工业的应用需求。     

特气室温红外探测器的噪声分析

由MEMS技术制备的特气室温红外探测器的噪声主要包括温度噪声、机械热噪声和背景噪声。从理论上建立了器件的基本热模型,推导得到器件的等效热熔和等效热导分别为8.1 μJ/K和1.0×10^-3 W/K,温度噪声约为1.73×10^-10 W/Hz^1/2;通过器件的工作机理和能量均分原理,推导得到热机械噪声的等效噪声功率约为9.96×10^-9 W/Hz^1/2,器件的背景噪声约为3.22×10^-11 W/Hz^1/2,从而得出器件的归一化探测率约为9.03×10⁶ cm·Hz^1/2/W。实验表明,器件的噪声中热机械噪声为主要噪声源,大小主要由浓硼硅薄膜的机械性能和器件结构决定,可以通过增大薄膜厚度,减小薄膜面积,从而增加薄膜的特征频率的方法来减小器件受外界振动的影响,但以降低器件的灵敏度为代价。另外环境振动噪声也对器件的影响很大。为了减小外界气压和温度变化的影响,提出了一种新型的双腔结构来减小和平衡外界环境变化引入的噪声。     

平面光学元件中频误差的磁流变加工控制

为了利用磁流变加工实现对大口径平面光学元件波前中频误差的控制,研究了磁流变抛光去除函数的频谱误差校正能力和磁流变加工残余误差抑制方法。首先,比较了模拟加工前后元件中频功率谱密度(PSD1)误差和元件PSD曲线的变化,分析了磁流变去除函数的可修正频谱误差范围。然后,利用均匀去除方法分析了加工深度、加工轨迹间距和去除函数尺寸等磁流变加工参数对中频PSD2误差的影响,提出了抑制中频PSD2误差的方法。最后,对一块400mm×400mm口径平面元件的频谱误差进行了磁流变加工控制实验。实验显示:3次迭代加工后,该元件的波前PV由加工前的0.6λ收敛至0.1λ,中频PSD1误差由5.57nm收敛至1.36nm,PSD2由0.95nm变化至0.88nm。结果表明:通过优化磁流变加工参数并合理选择加工策略,可实现磁流变加工对大口径平面光学元件中频误差的收敛控制。     

铌硼酸盐玻璃网络结构的研究

用径向分布函数和红外光谱分析方法研究了2Nb₂O₅·4B₂O₃·4K₂O和1.5Nb₂O₅·45B₂O₃·3.5K₂O·0.5TiO₂等玻璃的网络结构.得出了铌原子和硼原子的配位数分别为5.8～5.6及3或4.在原子分布函数g(r)和径向分布函数RDF(r)曲线中得出了Nb-O键平均键长为1.92～1.88Å.位于3.11,3.17和3.85Å的其它峰分别是Nb-B,O-O,和Nb-Nb原子对间的距离.红外光谱表明每种玻璃对应的各吸收峰,归结为=B-O(1440和1220cm^-1),≡B-O(1040或920cm^-1),Nb-O(870、730cm^-1)及Nb-O-B(1330cm^-1)的键振动.也就是说,在网络结构中六配位的铌原子与四配位和三配位的硼原子是共存的.这里,四配位的硼分数N₄决定于K₂O和Nb₂O₅的含量.而且与布雷用核磁共振法在B₂O₃-K₂O系统玻璃中的研究结果相符.最后,在对实验数据的分析和计算的基础上提出了NBK玻璃网络结构的一个可能的模型.认为铌硼酸盐玻璃的网络结构是由NbO₅、BO₄和BO₂共同组成的六节和四节环状结构单位元所构成的.     

ZnO薄膜非线性光学特性的实验研究

利用金属有机化学气相沉积(MOCVD)技术在蓝宝石衬底上生长一层高质量的ZnO薄膜。为了考察沉积温度对样品的非线性特性的影响,在200~500 ℃生长了一系列ZnO薄膜。用X射线衍射谱(XRD)及扫描电镜(SEM)对样品结构进行了评价。以Nd:YAG激光器输出的1.06 μm的激光为基频光,对ZnO薄膜样品的二阶及三阶非线性光学特性进行了实验研究。实验发现,对于250 ℃沉积温度的样品有较强的非线性效应,实验测得的二阶非线性极化张量 χ ⁽²⁾_ZZZ=9.2 pm/V, 三阶有效非线性系数χ⁽³⁾=5.28×10^－20 m²/V²。     

多孔体坩埚生长氟化钙晶体

采用独特设计的多孔体坩埚和自行设计的晶体生长炉,在真空条件下,用Bridgman-Stockbarger法生长出了CaF₂光学晶体。在真空度低于3×10^-3 Pa,生长区中心轴温度梯度为1.8~2.5 ℃/mm,径向梯度＜0.5 ℃/mm,生长速率为3~4 mm/h,初退火降温速率控制在20 ℃/h以下的生长条件下,进行熔料、氟化去氧、均一化熔体、控速生长及初退火,一炉次生长了七根57 mm×190 mm的CaF₂光学晶体,并进行了性能分析。结果表明,生长出的晶体透带宽,从紫外190 nm到红外9 000 nm均有良好的透过率,190 nm处透过率可达81%,9 000 nm处透过率可达83%,单晶率可达80%,位错密度达30/mm²。使用本文提出的设备和工艺,提高了CaF₂晶体的单晶率,降低了使用损耗,可实现中小尺寸CaF₂晶体的规模化生产。     

应用多模式组合加工技术修正大口径非球面环带误差

为了满足大口径非球面光学元件加工的需求,提出了用多模式组合加工(MCM)技术修正大口径非球面反射镜环带误差的方法。本文讨论的MCM技术以经典加工工艺为基础,采用抛光盘的多工位加工和抛光模式的组合完成光学元件的抛光,实现对光学表面中低频段误差的有效控制。介绍了MCM技术的重要组成部分JP-01抛光机械手的工作原理,分析了MCM的工作模式。采用MCM技术对Φ1230mm的非球面反射镜进行环带误差的修正,给出了镜面面形检测结果。实验结果表明,MCM技术可以有效地控制光学表面的中低频误差,使光学表面误差得到有效收敛,从而显著提高抛光效率。目前,采用MCM技术加工1～2m口径的同轴非球面,其精度可以达到30nm(RMS)。     

一个新的泛卡塞格林望远镜系统

将卡塞格林系统的主镜及次镜都取球面,在焦面前加2片以上改正透镜,而将作为密封窗的平行平板的一面加4次方项,可以设计出具有相当大视场,像质优良的新光学系统。平板上的4次方非球面是凹面性质,它的制造,在周边铰支而外加均布载荷时可以加工为球面,释放均布载荷后该面即弹回成所要的4次非球面。所以,此系统从光学工艺角度看只有球面和平面。文中设计了4个不同相对口径系统:F/3,F/5,F/8,F/10。口径和视场相同:φ=300mm,2ω=1°,像质都接近或达到衍射极限。     

Weak absorption test and defect analysis of optical coatings

1Introduction Inmodernoptics,especiallylasertechnolo gy,absorptionisoneofthemostimportant characterswhichmustbeconsidered,notonly foropticalproperties,butalsoforlaser induced damagethreshold(LIDT).Forexample,ab sorptiondefecthasplayedagreatroleinfluen cinglaserinduceddamagebehaviorsofthedie lectricopticalcoatings.Inmanyapplications,veryweakabsorption,1×10-6orless,should bemeasuredandcontrolled.However,thesensitivityofthebestregular spectrometerisonlylowto0.1%.Solutionshad beenfoundtoresolve…     

双层衍射元件在投影式头盔光学系统设计中的应用

利用双层衍射元件设计了一款折衍混合投影式头盔光学系统。系统的衍射效率在可见光波段＞90%,提高了像面图像的对比度,增加了色彩真实性。在出瞳距离为25 mm,出瞳直径为10 mm条件下,系统的视场角为50°,有效焦距为32 mm,直径为19.2 mm,重量为7.8 g,继承了投影式头盔光学系统的轻小性特征;调制传递函数(MTF)在38 lp/mm时,边缘视场达到0.3以上,中心视场达到0.6,充分满足2.8 cm(1.1 in)彩色LCD微显示器的SXGA显示模式;系统垂轴色差为8.2 μm,场曲为0.4 m^-1,畸变为5%,成像质量满足虚拟环境和可视化训练要求。文中给出了双层衍射元件的二元面特征曲线,每周期刻蚀八个台阶时,最小特征尺寸为6.3 μm,且易于加工实现。     

Spectrophotometric Determination of Silicon in Rice and Alloy Steel Samples

Abstract

In the medium of 0.128 mol/L nitric acid and 0.450 mol/L sulfuric acid, silicon(IV) and ammonium molybdate form molybdosilicate blue blue complex in the presence of ascorbic acid. The maximum absorption wavelength of the complex locates at 810 nm. The apparent molar absorptivity is ε_810 nm = 3.18 × 10⁴ L · mol^?1 · cm^?1. Beer's law is followed over the range of 0 ～ 1.0 µg/mLof silicon(IV). The present method has been successfully applied to the determination of silicon in rice and alloy steel samples.     

Estimation method for errors of an aerostatic planar XY stage based on measured profiles errors

This paper describes a method for estimating the geometric errors of an aerostatic planar XY stage. The method calculates two-dimensional (2D) position errors and flatness based on measured guideway profiles. Profile measurements, estimates of motion error, and geometric error models are considered to estimate the 2D position and flatness errors along the X- and Y-axes. A three-probe system is used to measure the guideway profiles for the X- and Y-axes. The motion errors, which are used as input data for geometric error models, are calculated from the force equilibrium of aerostatic bearings along the measured guideway profiles and compared with laser interferometer measurements. Geometric error models were derived to calculate the 2D position and flatness errors of the stage. The measured results and estimates for the 2D position error and flatness differed by 0.5 and 0.6 μm, respectively. Therefore, the proposed estimation method for 2D position and flatness errors of an aerostatic planar XY stage will be a useful tool during the machining and assembly of guideways.     

An improved analysis of experimental data from 125 I hot-line autoradiographs: allowing for the effects of background grains

In this paper we suggest a new statistical method of correcting the results of hot-line experiments for the effects of background sources and we use the new method to reassess the adequacy of three probability distributions proposed in the literature for image spread from line sources. The data are from sources labelled with ¹²⁵I in semi-thin resin sections 0·4-0·8 μm in thickness. The new method reveals that two of the models describe the empirical distributions more closely than earlier analysis had suggested, and it confirms an increasing relationship between half distance of image spread and the thickness of the source. However, it also confirms that considerable ‘inter hot-line’ experimental variation remains, even after background correction. This suggests that multiple experiments are needed to produce reliable estimates of half distance.     

干涉式大气垂直探测仪中面弹簧的有限元分析

面弹簧是干涉式大气垂直探测仪中的精密部件,系统要求其在工作过程中具有较大刚度比和足够的轴向行程。利用有限元分析方法对面弹簧进行了优化设计。通过对比不同缝形面弹簧在轴向拉伸过程中的轴向刚度、径向刚度、刚度比,确定了螺旋缝形是相对最优缝形。进一步对螺旋缝形面弹簧做了系统分析,得到了螺旋缝形面弹簧中的基圆半径 、螺距 、旋转角度 、指数 、直径 、开缝数 、簧片厚度 、材料的杨氏模量等参数在面弹簧轴向拉伸过程中,对其轴向刚度、径向刚度、刚度比的影响规律。根据有限元分析结果最终确定一组最优参数值 r₀=20mm,a=20／π²mm/rad,θ₁=πrad,b=2,=200mm,n=3,t=0.2mm,E=1.3 e11Pa,并据此加工成实物。对实物的实测结果表明,螺旋缝形面弹簧具有的轴向行程和较大的刚度比达到了设计目标,验证了有限元分析结果的准确性和合理性。     

Interactions of uranyl ions with lipid bilayer membranes

Uranyl ions (UO₂²⁺), once bound to the phosphate moieties of phospholipid head groups, stabilize bimolecular lipid membranes (BLMs) as well as decrease the nonactin-induced membrane conductance. UO₂²⁺ bind to a phosphatidyl choline-cholesterol (2:1, molar ratio) BLM surface with a dissociation constant of 2·3 μM and a maximum change in surface potential of 88 mV, which corresponds approximately to one uranyl ion per 31 nm² surface area. Furthermore, uranyl ions can penetrate the lipid bilayers as neutral complexes such as uranyl acetate.     

扫描仪测量镜头畸变误差的软件校正

介绍CCD拼接扫描仪精度高于0.2mm时,测量镜头畸变带来的扫描误差情况.针对该项误差,进行测量、分析、计算,得到镜头畸变的规律和函数曲线,给出利用函数进行软件校正的思路和方法及基本流程.通过试验证明,此方法较好的改善了测量镜头畸变带来的成像误差,并使之满足精度要求.     

Optimization of multilayer cylindrical coils in a wireless localization system to track a capsule-shaped micro-device

A wireless electromagnetic localization method has been presented to track capsule-shaped micro-devices in the gastrointestinal tract. And a prototype for the novel localization system has been developed. In the localization method, cylindrical coils placed on the patient’s abdomen generate alternating electromagnetic fields one by one. The system of equations from the localization model has been established and then transformed into a nonlinear optimization problem. The localization method presents excellent anti-interference ability and high stability. In order to solve the magnetic inverse problem in the localization model, an analytical expression between the magnetic flux density and the position & orientation should be derived by superposition of the fields generated by the coil turns, which causes systematic errors. As a result, the geometry of the cylindrical coils is optimized to reduce the errors. A full factorial experiment with two factors has been carried out. The experiment shows that the optimal L/Dout ratio and Din/Dout ratio are 0.4 and 0.8, respectively. In this case, the mean error and the standard deviation are reduced to 0.89% and 0.77%, respectively, where the distance along the axis of the cylindrical coil from the coil’s center to a measured point is 30 mm. Furthermore, the experimental results also show that the imitation error decreases significantly with increased distance from the coil. The accuracy of the localization model can be further improved using the optimized coil.