A new method for wideband characterization of resonator-based sensing platforms

A new approach to the electronic instrumentation for extracting data from resonator-based sensing devices (e.g., microelectromechanical, piezoelectric, electrochemical, and acoustic) is suggested and demonstrated here. Traditionally, oscillator-based circuitry is employed to monitor shift in the resonance frequency of the resonator. These circuits give a single point measurement at the frequency where the oscillation criterion is met. However, the resonator response itself is broadband and contains much more information than a single point measurement. Here, we present a method for the broadband characterization of a resonator using white noise as an excitation signal. The resonator is used in a two-port filter configuration, and the resonator output is subjected to frequency spectrum analysis. The result is a wideband spectral map analogous to the magnitude of the S21 parameters of a conventional filter. Compared to other sources for broadband excitation (e.g., frequency chirp, multisine, or narrow time domain pulse), the white noise source requires no design of the input signal and is readily available for very wide bandwidths (1 MHz-3 GHz). Moreover, it offers simplicity in circuit design as it does not require precise impedance matching; whereas such requirements are very strict for oscillator-based circuit systems, and can be difficult to fulfill. This results in a measurement system that does not require calibration, which is a significant advantage over oscillator circuits. Simulation results are first presented for verification of the proposed system, followed by measurement results with a prototype implementation. A 434 MHz surface acoustic wave (SAW) resonator and a 5 MHz quartz crystal microbalance (QCM) are measured using the proposed method, and the results are compared to measurements taken by a conventional bench-top network analyzer. Maximum relative differences in the measured resonance frequencies of the SAW and QCM resonators are 0.0004% and 0.002%, respectively. The ability to track a changing sensor response is demonstrated by inducing temperature variations and measuring resonance frequency simultaneously using the proposed technique in parallel with a network analyzer. The relative difference between the two measurements is about 5.53 ppm, highlighting the impressive accuracy of the proposed system. Using commercially available digital signal processors (DSPs), we believe that this technique can be implemented as a system-on-a-chip solution resulting in a very low cost, easy to use, portable, and customizable sensing system. In addition, given the simplicity of the signal and circuit design, and its immunity to other common interface concerns (injection locking, oscillator interference, and drift, etc.), this method is better suited to accommodating array-based systems.     

新型驻波模式的声表面波MEMS-IDT陀螺仪

文中提出了一种新型基于驻波模式的声表面波(SAW)MEMS-IDT陀螺仪,包括一个谐振腔内驻波反节点位置分布金属点阵的两端SAW谐振器和一组平行于谐振器设置的双延迟线型SAW振荡器.SAW谐振器形成稳定的驻波,由于旋转利用分布的金属点阵产生Coriolis力并激发垂直于旋转方向的二次SAW,并与SAW延迟线上传播的SAW产生相干效应,以此改变声波速度,从而导致延迟线型振荡器的频率输出发生变化.双延迟线振荡器结构有效地降低由于外围温度等干扰的影响.单相单向换能器(SPUDT)以及梳状换能器结构用于构建SAW延迟线,以改善振荡器的频率稳定性.所研制的用于构建陀螺仪的80 MHz两端谐振器以及延迟线器件的测试结果表现出低损耗等特点.利用旋转台对所研制的SAW陀螺仪进行性能评价,在0～1 000 deg/s范围内表现出良好的灵敏度(119 Hz/(deg·s))以及线性度性能.     

Thermal stress fracture mode of CO2 laser cutting of aluminum nitride

A thermal stress fracture mode of material removal by laser cutting was conducted in 1-mm thick wafers of aluminum nitride (AlN) using a continuous wave CO₂ laser with a defocused beam. In this mode, a thin layer (10–20 μm) of AlN surface was melted in an oxygen environment to form aluminum oxide. Solidification of the melt layer coupled with thermal expansion mismatch generated thermal stresses that in turn created a crack along the middle path of the laser beam, resulting in material separation. Thermochemical modeling of laser heating, oxide forming, and subsequent cooling of AlN was performed to validate the formation of cracks as well as material separation through unstable crack propagation. A comparison with the conventional “evaporation/melt and blow” laser cutting method showed that the thermal stress method offers significant benefits such as improved precision, better cut quality, higher cutting speed, and lower energy losses.     

独特谐振模式下薄膜体声波谐振器的设计

计算了四层复合结构的薄膜体声波谐振器(FBAR)的输入阻抗谱,各层采用的材料分别是Al/AlN/Al/Si,其尺寸为0.8 μm/1.9 μm/0.8 μm/100 μm,得出其有效机电耦合系数k²_eff随谐振模式的分布情况,从而得到最大k²_eff的独特谐振模式在1~2 GHz为第40阶谐振模式。从理论上探讨了各层的尺寸及材料属性对该独特谐振模式及其频移的影响,以及串联谐振品质因数FOM等滤波器设计的主要性能参数在该模式下的分布情况。实验结果表明,工作在独特谐振模式下的FBAR的性能依赖于各层材料尺寸,当压电层厚度从0.2 μm变到4.3 μm时,特殊谐振模式频率从1.2 GHz增加到4.8 GHz;当基底厚度变厚时,有效机电耦合系数从3.2%变到0.8%,串联品质因数从2 000变到700;而电极变厚后,有效机电耦合系数趋于一个稳定值。这些数据在实际设计过程中对滤波器的微调具有参考意义。     

Tribology and oxidation behavior of TiN/AlN nano-multilayer films

In this study, a series of TiN/AlN nano-multilayer films were prepared using a new sputtering setup, which features a medium frequency (MF) twin unbalanced magnetron sputtering system (UBMS) and a DC balanced magnetron sputtering system (BMS). The MF (6.78 MHz) twin UBMS, which is a modification of single RF power source system, is a special design of this deposition machine. The UBMS was employed to deposit the AlN film, and the BMS the TiN film. The aim of this study was to obtain, through controlling the deposition conditions, a group of TiN/AlN nano-multilayer films with various periods (λ). Then a series of experiments were conducted to understand their wear and oxidation properties.The results revealed that through controlling of the deposition parameters, the TiN/AlN nano-multilayer films with λ ranging from 2.4 to 67.6 nm were obtained. At λ3.6 nm, the nano-multilayers had extremely high hardness and excellent adhesion. The oxidation tests found that the multilayers had obviously better anti-oxidation property, as compared with the single-layer TiN film. The high hardness and good oxidation resistance contributed to very good wear performance of the TiN/AlN nano-multilayer films.     

Complex permittivity measurement using capacitance method from 300 kHz to 50 MHz

Complex permittivity measurement has been performed using a parallel plate capacitor and a vector network analyzer (VNA) from 300 kHz to 50 MHz. The material under test (MUT) is a flat and thin sample clamped between the capacitor plates and connected to the VNA to obtain its two port S parameters. The S parameter is converted into impedance to calculate the complex permittivity using Matlab program. Techniques used to overcome the air gap and stray capacitance was described. Measurement obtained using the proposed method was compared with the free space method to validate its accuracy. The percent difference is less than 5%.     

刀具负载对蜂窝复合材料超声切割声学系统阻抗特性的影响

针对刀具负载对蜂窝复合材料超声切割声学系统的影响,利用四端网络法,将压电换能器与变幅杆结合在一起,提出了声学系统的整体设计方程,得出了负载与声学系统阻抗特性的关系式。利用有限元软件对声学系统进行模态分析及谐响应分析,并利用阻抗分析仪和激光位移传感器对声学系统的阻抗﹑谐振频率和输出振幅进行检测。仿真和实验结果表明：随着刀具负载的增大,声学系统的阻抗值增大,谐振频率减小,但仿真与实验得出的输出振幅与理论分析不同,这是由于刀具的放大作用造成的。研究结果对声学系统的设计及实际应用有指导意义。     

DESIGN OF PIC-CONTROLLED PULSED ULTRASONIC TRANSMITTER FOR MEASURING GINGIVA THICKNESS

The aim of this study is to design and implement a noninvasive ultrasonic thickness measurement device that determines the gingiva thickness, which is quite an important criterion in dentistry, by using A-mode ultrasonic method. Operating frequency of the device is selected as 8 MHz, since gingival thickness is quite slight. The measurements are performed as 192.5 μm precision by the implemented system. Surface-mounted devices integrated circuits (SMD ICs) and electronic parts are used in the implementation of the device. Thus, a small-dimension, handheld device has been design and constructed. The transmitter of the device is tested under simulated object, and encouraging results were obtained.     

A new method to correlate acoustic spectroscopic microscopy (30 MHz) and light microscopy

A powerful new method is used to investigate the correlation between light microscopic and acoustic properties of biological tissues. Specimens of liver were sectioned into successive slices, 250 μm and 10 μm thick. The thick sections were investigated acoustically, the thin sections by means of light microscopy. Markers that could be detected and located, both optically and acoustically, were used to find and reconstruct corresponding regions in the acoustic and optical sections (2·5 × 2·5 mm). Parameter images were reconstructed from the sections investigated acoustically. The acoustic parameters were attenuation at 30 MHz, the slope of the attenuation spectrum (between 10 and 50 MHz), backscattering at 30 MHz, the slope of the backscattering spectrum (between 10 and 50 MHz) and the local ultrasound velocity. Acoustic images were obtained in the frequency range from 10 to 50 MHz, yielding a lateral resolution of about 50 μm. The sections for light microscopy were stained according to the Goldner trichrome staining technique. The histological composition was determined quantitatively, using digital image segmentation techniques. The percentage of collagen-rich fibrous tissue, luminal structure and interstitial spaces, and the number of nuclei were calculated for regions of 250 × 250 μm. These histological features were correlated with the acoustic parameters obtained from the corresponding regions in adjacent sections. It was thus possible to find the histological components responsible for acoustic parameters.     

Focusing ultrasonic waves in a 2-D covered channel above the periodic array of Helmholtz resonators

This paper presents the numerical simulation and experiments on focusing low-frequency ultrasonic waves in a 2-D covered channel above acoustic metamaterials composed of the periodic array of Helmholtz resonators, in which the refractive index can be in a negative value. The 2-D channel above the acoustic metamaterials is covered by a plate to limit the area affected by the negative refractive index metamaterials. Ultrasonic waves propagated in the 2-D covered channel are found to be highly dependent on input frequency and the designed Helmholtz resonator structure, where its negative refractive index causes the focusing phenomenon in this channel. From the numerical simulation and experiments, an amplitude focus spot is observed in the peak-to-peak of the time domain signal and frequency response at 125 kHz by mapping a pressure field in the 2-D covered channel. Different focal points with several input frequencies are also identified. Our research demonstrates the possibility of applying the designed lens based on acoustic metamaterials to improve the focusing effect in ultrasonic testing.     

Resonance frequency and quality factor tuning in electrostatic actuation of nanoelectromechanical systems

In an electro statically actuated nanoelectromechanical system (NEMS) resonator, it is shown that both the resonance frequency and the resonance quality (Q) factor can be manipulated. How much the frequency and quality factor can be tuned by excitation voltage and resistance on a doubly—clamped beam resonator is addressed. A mathematical model for investigating the tuning effects is presented. All results are shown based on the feasible dimension of the nano resonator and appropriate external driving voltage, yielding up to 20 MHz resonance frequency. Such parameter tuning could prove to be a very convenient scheme to actively control the response of NEMS for a variety of applications.     

Note: Vector network analyzer-ferromagnetic resonance spectrometer using high Q-factor cavity

A ferromagnetic resonance (FMR) spectrometer whose main components consist of an X-band resonator and a vector network analyzer (VNA) was developed. This spectrometer takes advantage of a high Q-factor (9600) cavity and state-of-the-art VNA. Accordingly, field modulation lock-in technique for signal to noise ratio (SNR) enhancement is no longer necessary, and FMR absorption can therefore be extracted directly. Its derivative for the ascertainment of full width at half maximum height of FMR peak can be found by taking the differentiation of original data. This system was characterized with different thicknesses of permalloy (Py) films and its multilayer, and found that the SNR of 5 nm Py on glass was better than 50, and did not have significant reduction even at low microwave excitation power (-20 dBm), and at low Q-factor (3000). The FMR other than X-band can also be examined in the same manner by using a suitable band cavity within the frequency range of VNA.     

Properties of Dielectric Ring Resonator and Application to Moisture Measurement

This paper presents properties of a dielectric ring resonator and its application to measurement of material moisture. Theoretical analysis has been done to select better resonant modes in the resonator with higher sensitivity and wider moisture content measurable range than the formerly often used TE₀₁₁ mode by some researchers. Experiments have also been done to verify the theoretical results. The HE₂₁₂ mode in the resonator has the highest sensitivity of 1.0 MHz frequency shift corresponding to change of 1.0% moisture content. The measurable range of moisture content is up to 12% at dry basis. The mode of HE₂₁₁ has a wide measurable range approximately between 3% and 75% and its corresponding frequency shift is 12 MHz.     

Design of shared bus DSP board in vector network analyzer

Currently,the mainstream vector network analyzer employs embedded computer module with a digital intermediate frequency （IF） board to form a high performance windows platform.Under this structure,the vector network analyzer needs a powerful encoding system to arbitrate the bus acquirement,which is usually realized by field-programmable gate array （FPGA） chip.The paper explores the shared bus design method of the digital signal processing （DSP） board in network analyzer.Firsty,it puts an emphasis on the system structure,and then the shared bus communication method is described in detail; Finally,the advantages of the shared bus communication mechanism are summanzed.     

一种新的大尺寸长条形超声塑焊开槽焊头的设计方法

提出了一种大尺寸长条形超声塑焊开槽焊头的设计方法,并对其进行了实验验证。首先将长条形焊头合理划分为若干单元,从而把结构复杂的开槽焊头的设计转化为结构简单的焊头单元设计;然后将焊头单元和考虑了耦合振动的等截面半波振子比较,利用等效机械阻抗的概念得出了焊头的频率方程;最后利用该方程研究了开槽数、槽宽度以及槽长度等因素对焊头振动特性的影响。按此方法设计加工了几组大尺寸长条形开槽焊头,实验结果表明焊头共振频率的实测值和理论值符合很好。     

Prediction of forming limit based on cross-sectional distortion for rotary draw bending of H96 brass double-ridged rectangular tube

Results from the temperature field and thermal deformation simulation of a spindle system are greatly affected by the accuracy of convective heat transfer coefficients (CHTCs). This paper presents a new method based on radial basis function (RBF) neural network to calculate CHTCs. First, the temperature field and thermal deformations of a spindle system were obtained by experimental and finite-element (FE) methods. However, the simulation results are significantly different from the experimental results because boundary conditions used for the FE model were derived empirically. Second, the relationship between the simulated temperature values and CHTCs were established by a RBF neural network. Using the experimental temperature values as an input vector of the RBF neural network, CHTCs of the spindle system can be predicted through an iterative calculation taking 14 cycles. Finally, the effectiveness of the proposed method was proved using steady-state and transient-state analyses of the spindle system. Results from the steady-state simulation show that temperature errors were less than 4 % at the seven thermal-critical points and deformation errors in the three directions were less than 6 %. Results from the transient-state simulation of the spindle system show that the variations for each of the thermal characteristics are in good agreement with the experimental results. The method provides guidance for modifying boundary conditions of a FE model.     

Optical Ring Resonator Based Temperature Sensor

Temperature sensor based on optical ring resonator has been demonstrated with its constituent material as silicon (Si-fiber) and germanium (Ge-fiber) in this work. It has been done through optical delay line signal processing technique in Z-domain. The group indices of both the materials vary with the change in temperature due to the thermo-optic effect in materials. Thus temperature dependence of free spectral range forms the basis of modeling the sensors. Silicon (Si) fiber based optical sensor can sense the temperature in the range 30–500 °C and that for germanium (Ge) fiber the range is ?25 to 300 °C. Obtained temperature sensitivities for Ge and Si-fibers are 5.55 and 2.97 MHz/°C respectively.     

POWER RADIO FREQUENCY CIRCUIT DESIGN FOR A SMALL CO2 SLAB WAVEGUIDE LASER

The design, construction, and test of a radio frequency oscillator-amplifier is presented in this paper. The RF circuit is inserted as part of the electrodes of an in-house-built compact CO₂ waveguide laser. Our circuit was designed to have a frequency at 81 MHz and its signal output between 90 W and 150 W. Capacitive discharge is evaluated over a period of time and, after a correct positioning of several inductors parallel-distributed along the laser electrodes, a steady and uniform plasma discharge was created. The overall RF circuit-laser test is done with a typical gas mixture of CO₂-N₂-He with proportion of 1:1:3, correspondingly, and at a final pressure of 40 Torr. Under these conditions, a maximum optical output power greater than 10.7 W was obtained for an input feed RF power of 147 W.     

Oxidation and ignition behavior of a magnesium alloy containing rare earth elements

The oxidation and ignition behavior of Mg–8 wt.%Al alloy added with rare earth (RE) was investigated. When 0.1 wt.%RE was added, the ignition-proof effect was optimum and the ignition temperature of the alloy increased from 654°C to 823°C. The oxide scales and substrates of the alloy with 0.1 wt.%RE were characterized by scanning electronic microscope, X-ray diffraction, and energy dispersive spectrometer. The results show that a layer of tightly coherent oxidation film formed on the alloy surface under high temperature mainly consists of MgO, RE₂O₃, and Al₂O₃, which is about 2.5–3.5 µm thick. The oxidation kinetics curve of Mg–8 wt.%Al–0.1 wt.%RE follows the parabola rule at 400°C and 700°C and cubic rule at 600°C, which proves that the oxidation at these temperatures is controlled by diffusion obstruction so that the oxidation film can effectively restrain the alloy from further oxidation.     

Anti-oxidant mechanism of TiAlN/SiN decorative films on borosilicate glass by magnetron sputtering

The black TiAlN decorative film was prepared on the borosilicate glass by the magnetron sputtering in equipment with multiple vacuum chambers. The transparent SiN protective layer was deposited on the surface of the TiAlN film to keep the black color invariant at the high temperature. The structure of the TiAlN/SiN film was characterized by scanning electron microscope (SEM), X-ray diffraction (XRD), and high-resolution transmission electron microscopy (HRTEM). The coating adhesion was measured by scratch tester. The TiAlN film has a columnar crystal structure with a thickness of 200 nm, and the top SiN layer is amorphous with a thickness of 100 nm. The coated borosilicate glass with the TiAlN/SiN films still retains the black color after oxidation at 600 °C in atmosphere. While the oxidation temperature elevates to 700 °C, the color of the TiAlN/SiN films begins to change. The top SiN layer plays a role as the barrier against oxygen diffusion into the inner TiAlN layer. The thin self-formed aluminum oxide layer was generated on the surface of the SiN layer and it contributes to the improvement of anti-oxidant property of the inner TiAlN layer. However, the thick self-formed aluminum oxide layer leads to the color change of the black TiAlN film. The thermal oxidation benefits the improvement of the adhesion for the TiAlN/SiN films with glass substrate.