X射线干涉光刻光束线关键光学元件热-结构耦合分析

为了保证上海光源X射线干涉光刻光束线的稳定性,减小热变形对实验结果的影响,对X射线干涉光刻光束线的3个关键光学元件——偏转镜、聚焦镜和精密四刀狭缝进行热-结构耦合分析。首先,计算偏转镜、聚焦镜和精密四刀狭缝所承载的功率密度;然后,建立其有限元模型;最后,获得光学元件的温度场和热变形的结果。结果表明,偏转镜和聚焦镜采用间接水冷方式可有效抑制热变形,冷却后的最大面形误差分别为7.2μrad和9.2μrad。精密四刀狭缝未冷却时,刀片组件温度介于271.56~273.27℃,刀口热变形为0.19 mm,直线导轨热变形为0.08 mm;经过铜辫子冷却后,刀片组件温度降至22.24~23.94℃,刀口热变形降至0.2μm,直线导轨热变形降至0.1μm;采用影像法和接触探头法测试后,刀口直线度、平行度和重复精度均满足技术要求。偏转镜、聚焦镜和精密四刀狭缝的热变形通过间接水冷和铜辫子的冷却方式可以得到很大程度的抑制,进而保证光斑质量。     

High-Tg porous polyimide films with low dielectric constant derived from spiro-(adamantane-2,9′(2′,7′-diamino)-fluorene)

Porous polyimide (PI) films with low dielectric constants and excellent thermal properties have been a pressing demand for the next generation of high-performance, miniature, and ultrathin microelectronic devices. A series of novel porous PI films containing fluorenyl-adamantane groups were prepared successfully via thermolysis of poly(ethylene glycol) (PEG) added in the PI matrix. The cross-sectional morphologies of porous PI films showed closed pores with diameters ranging from 135 to 158 nm, which were uniform and regular in shape without interconnectivity. These porous PI films exhibited excellent thermal properties with a glass-transition temperature at 376 °C whereas the 5% weight loss temperature in air excess of 405 °C due to enhanced rigidity afforded by fluorenyl-adamantane groups. Accompanied by thermolysis content of PEG increasing from 0 to 20 wt %, the density of porous PI films decreased, and the corresponding porosity grew significantly from 0 to 11.48%. Depending on porosity, the dielectric constant and dielectric loss of porous PI films significantly declined from 2.89 to 2.37 and from 0.050 to 0.021, respectively. These excellent properties benefit the as-prepared porous PI films for application as interlayer dielectrics, integrated circuit chips, or multichip modules in microelectronic fields. © 2018 Wiley Periodicals, Inc. J. Appl. Polym. Sci. 2019 , 136, 47313.     

减压渣油与FCC油浆共炭化的化学组成变化

考察了齐鲁石化胜利炼油厂催化油浆（FCC）和胜利减压渣油（VR）在490℃，0.8MPa下不同混合比的原料和不同反应时间的中间产物的HS、TS、PS、P及其1h中间产物的HS和TS的^1H-NMR。数据结果反映了体系的反应速度。掺入FCC油浆抑制了VR的反应活性，降低了体系的反应速度，增加了基质的溶解度；1h中间产物的组成结构更接近于原料及反应体系的反应性和基质的溶解度；1h中间产物的芳香度越高，取代基越少，侧链越短，基质对VR中的活性反应组分在炭化早期生成的高度缩合物质的溶解度越大。     

高分子纳米LB膜的制备及其光刻性能研究

合成并表征了N-十六烷基丙烯酰胺（HDA）和对叔丁基苯酚甲基丙烯酸酯（BPhMA）的共聚物p（HDA-BPhMA）s。当HDA含量较高时，共聚物可在气，液界面上形成稳定，排列紧密的单分子薄膜，并可以Y型膜的方式沉积在各种固体基片上，形成多层均匀的Langrnuir-Blodgett（LB）膜。这种LB膜被成功地应用于光刻，获得了分辨率为0.5μm的LB膜图形。以该图形为抗蚀层，可将图形进一步转移至金属薄膜上，得到分辨率较高的金属图形，在图形转移的过程中，这种LB膜显示出较高的抗蚀性，有望作为纳米抗蚀薄膜材料在亚微米刻蚀领域得到应用。     

温度敏感葡聚糖凝胶的合成及其细胞相容性研究

合成了N-异丙基丙烯酰胺（NIPAAm）与葡聚糖的共聚水凝胶，利用红外光谱表征了单体和凝胶结构，研究了水凝胶在去离子水和细胞培养基中的温度响应性，并对凝胶进行了细胞培养和脱附研究．结果表明，共聚凝胶具有很好的温度敏感性和细胞相容性，可以通过控制温度变化，实现对细胞的无损伤脱附．     

大截面金属镍棒的焊接工艺与实践

金属镍在电渣精炼前需用氩弧焊焊接接长,为保证焊接接头具有足够熔深,需要大参数进行焊接.采用直流焊机并联使用解决了焊机电流不足的情况,通过采取垫高镍棒端头,使接缝处于受压状态,以防止裂纹的产生.     

供应链环境下的性能评价系统研究

在竞争全球化的趋势下，供应链管理越来越受到企业重视，供应链性能评价系统(supply Chain Performance Mea-surement System,SCPMS)是供应链管理的关键组成部分，然而企业却不愿意或没有能力建立有效的性能评价系统。总结了供应链性能评价的定义、发展过程及难点，在此基础上提供了一套供应链性能评价的方法，为企业快速建立集成供应链性能评价系统提供借鉴。     

Preparation of a pitch-based activated carbon with a high specific surface area

Pitch based activated carbons (PAC) with a high specific surface area were produced by a direct chemical activation route in which oxidative stabilized pitch derived from ethylene tar oil was reacted with potassium hydroxide under various activation conditions. It was found that PACs with a surface area of around 2600–3600 m² g^-1 could be obtained under suitable activation conditions. N₂ adsorption (at 77 K) and X-ray photoelectron spectroscopy experiments showed that the PAC has a uniformly developed micropore structure and a narrow pore size distribution (radius 0.8–1.6 nm). Abundant oxygen-containing functional groups (such as C–OH, C–O–C, C=O, COOR etc.) were found to exist on its surface. Compared with a commercially available activated carbon (AC) and also a pitch based activated carbon fibre, PAC has a quicker adsorption–desorption velocity and a larger adsorptive capacity to benzene due to its higher surface area. Clear surface differences between PAC and AC were observed by transmission electron microscopy. This revised version was published online in November 2006 with corrections to the Cover Date.     

一种基于DBF的双基地雷达系统的性能分析与实验研究

讨论了一种基于数字波束形成的脉冲追赶式双基地雷达系统的构成和基本工作原理．对该双基地雷达的性能进行了理论分析，并通过实验结果进行了验证。     

光纤制备中的外汽相沉积工艺研究

人们对光纤生产过程中外汽相沉积(OVD)工艺的沉积机理的研究已经有好多年，但实际生产过程中，很多因素都会影响沉积速率和效率。为此我们通过试验，研究了决定沉积速率和沉积效率的主要因素，如预制棒表面温度、SiCl4流量和SiO2颗粒的温度等。