A review of the existing performance verification infrastructure for micro-CMMs

The performance verification of micro-CMMs is now of intense interest because of their capability to perform length measurements in three dimensions to high accuracy with low uncertainties. Currently, verification of micro-CMMs is completed in the spirit of existing specification standards, because strict adherence to these standards is often difficult. This review aims to present and discuss verification techniques available for micro-CMMs: specification standards, existing calibrated test lengths and traceability routes that can be associated with micro-CMMs. Three specification standards used in the testing of CMMs will be considered. In addition, a wide range of calibrated test lengths are reported, and any advantages and disadvantages associated with their use are discussed. It is concluded that micro-CMMs cannot yet be verified in accordance with existing specification standards. Suggestions are made for future standardisation work required to rectify these issues.     

Ultrasonic tomographic velocimeter for visualization of axial flow fields in pipes

An ultrasonic tomographic velocimeter to provide quantitative images of axial flow fields in pipes is developed and presented in this work. To detect the flow in various directions and positions, a novel transducer configuration strategy is proposed. All-in-one transducers are mounted in two sectional planes of the pipe. In each plane, N transducers are equally spaced along the circumference. Overlapped propagation paths are introduced by the configuration strategy, and the influence of the vortex flow can be eliminated theoretically by averaging the line velocities of the overlapped paths. To achieve a fast detection speed, the projection data is collected via an electrical scan in a fan-beam mode. After rearrangement and interpolation of the projection data, the parallel beam filtered back projection (FBP) algorithm is implemented to reconstruct the axial flow field. Numerical simulations with the theoretical velocity profiles were performed. The compensation method for the vortex flow is proved to be effective and necessary, and the number of transducers required for reconstruction of common flow profiles was estimated. Accordingly, an ultrasonic tomographic velocimeter consisting of 2×12 transducers was fabricated. Experiments were conducted in the straight pipe and downstream of a single bend pipe and compared with the computational fluid dynamics (CFD) simulation results. As demonstrated, the ultrasonic tomographic velocimeter was capable of visualizing both symmetric and asymmetric axial flow fields with high reliability.     

烟道流量计量标准装置

为了解决我国烟道流量计的量值溯源问题,中国计量科学研究院建立了烟道流量计量标准装置。装置使用可溯源至标准转盘的激光多普勒测速仪作为原级标准器,采用激光多普勒流速剖面扫描和超声流量计波动修正的方式测量标准流量,经校准的8声道超声流量计为工作级标准表,具备了908~104840m3/h的测量能力,扩展不确定度为0.62%(k=2),可对最大口径为1m的流量计进行校准。装置下游测试段包括圆形管段和矩形管段,能够开展烟道流量计测量性能的研究。     

Improved Repeatability of Pulsed Field Magnetometry Measurements Through Peltier Effect Temperature Control of Measurement Coils

Pulsed Field Magnetometers (PFMs) offer a method for high speed full loop characterisation of hard magnetic materials. As there is no dependency on iron to close a circuit, the repeatability of the technique is good. By utilising Peltier effect techniques to control the temperature of the measurement coil systems employed in a Pulsed Field Magnetometer, the level of repeatability of measurements can be significantly improved.     

高精度标准单晶硅球直径测量系统的研究

为建立我国高准确度固体密度基准和质量自然基准,对高精度标准单晶硅球直径测量系统进行了研究.论述了平面波前激光干涉法测量直径的原理和方法,分析了相移扫描、温度测量控制、以及硅球体积计算等系统的关键组成部分,并给出了各部分的实验结果.理论分析和实验结果表明,整个直径测量系统目前的不确定度为3 nm.     

具有非惯量负载转矩补偿功能的伺服永磁同步电机控制方法

通过电机运动学方程建立以负载惯量、黏性阻尼系数、负载重力力矩和负载初始位置角度为需辨识参数的拟合模型函数式,通过基于该模型函数的非线性回归方法拟合得到这四个参数,从而得到非惯量的负载转矩,使其前馈补偿经典电机PI控制方法中的电流环,实现对时变负载转矩的补偿。仿真结果验证了该方法能使速度响应较快跟踪输入的速度命令,避免较大速度误差的出现。     

基于3D打印技术的眼科OCT设备计量校准装置研制

为了评估眼科光学相干断层成像（OCT）设备的分辨率、视场角、图像匹配度、深度测量准确性等多个关键参数,确保设备输出量值的准确性与有效性,设计并研制了一种模拟真实人眼结构且参数可溯源的模拟眼,包含角膜和晶状体等人眼主要屈光结构。设计并依托3D打印技术加工了用于横向与轴向分辨率检测的三维分辨率板;设计加工了用于视场角检测的阶梯状同心圆环结构;同时设计加工了用于图像匹配度检测的交叉光纤组件和用于深度测量准确性参数检测的平行玻璃板组件,可适配于模拟眼眼底凹槽内。使用共焦拉曼显微镜对三维分辨率板尺寸溯源,横向和轴向最小可检测分辨率分别为9.7 μm和5.7 μm;使用尼康投影仪对同心圆环尺寸及光纤直径溯源,最大可检测视场角109.03°以及最小62.5 μm的图像匹配度检测;使用尼康高度计对平行玻璃板中心厚度溯源,其测量不确定度小于5 μm。经过对商用眼科OCT设备测试表明,结合微纳3D打印技术的计量校准用模拟眼具有精度高、集成度高、适用范围广、稳定性强等优点,适用于眼科OCT设备的计量校准。     

光学锁相环的研究进展

光学锁相环（OPLL）根据其锁定的两束激光间是否存在频差可分为零差光学锁相环和外差光学锁相环。主要介绍了外差光学锁相环的研究进展,它是一种通过鉴频鉴相方式使激光间的频率差保持相对稳定的偏频锁定方法。相较于其他激光偏频锁定方法,光学锁相环具有结构简单、伺服频率带宽大、频率偏置范围宽、锁定准确度高等优势,在原子相干、冷原子系统、相干功率合成以及外差干涉测量等领域都得到了越来越广泛的应用。首先介绍了激光偏频锁定的主要方法及光学锁相环的特点;其次介绍了光学锁相环的基本模型,分析了光学锁相环的误差反馈过程,并按照光学锁相环实现方法的不同详细介绍了其采用的关键技术和研究进展,对近年来光学锁相环在不同领域的应用进展做了简要介绍;最后对该方法的发展路线进行了总结和展望。     

氮化硅集成微腔光频梳器件关键制备技术(特邀)

微腔光频梳,又称微腔梳,是通过腔内四波混频过程产生的一种高相干宽谱的集成光源,有着优异的时频特性,可用于超精密分子光谱、相干通信、激光雷达、轻型化装备等测量应用,是基础科学、计量学及军事装备的重要工具,是一项颠覆性的技术。报道了一种集成氮化硅（Si₃N₄）微腔光频梳器件制备的关键技术,提出了一种方法平衡Si₃N₄的应力、厚度和化学计量之间的矛盾,以满足反常色散和减少双光子吸收的要求。利用这种改进的大马士革工艺微结构降低Si₃N₄厚膜的应力,减少应力缺陷对器件性能的影响,实现高品质Si₃N₄薄膜的可控制备。在微腔刻蚀工艺中,采用30 nm氧化铝牺牲层补偿掩模抗刻蚀能力,实现微环和波导侧壁粗糙度小于15 nm,满足了微腔高Q值的要求。经双光泵浦测量得到1 480~1 640 nm波段内的宽光谱高相干克尔光频梳。