基于小挠度假设的电容式微型压力传感器模型

在小挠度变形假设的基础上对接触型电容式微型压力传感器进行分析。通过对压力传感器敏感元件硅膜片的弹性分析给出了传感器的模型。传感器的接口电路由ＭＯＳ电流镜和模拟开关构成,该电路具有线性度好和测量增益高的特点,并能有效地消除电路中的寄生电容对测量的影响,大大降低测量噪声。     

LIGA技术及其在制造可动微结构件中的应用

介绍了将LIGA技术及其与牺牲层技术相结合 ,制造可动微结构的工艺方法。并给出了可实现摆动、转动的可动微结构———微执行器、微传感器和三维加速度传感器的制造过程等应用实例     

压电薄膜微传感器振动模态的仿真分析

以压电本构方程为基础，建立了压电薄膜微传感器机电耦合的有限元模型，采用有限元分析软件ANSYS7．0对压电薄膜微传感器进行了模态分析，同时分析了压电薄膜微传感器的结构尺寸对振动模态的影响，探讨了影响压电薄膜微传感器工作稳定性和响应速度的关键因素，结果表明为了提高压电薄膜微传感器的工作稳定性和响应速度，应该在符合工艺要求和保证其它特性的前提下，尽量减小微悬臂梁结构长度，增加多晶硅层厚度，限制PZT层厚度，而微悬臂梁宽度的影响较小。     

Polymer-based materials to be used as the active element in microsensors: a scanning force microscopy study

Polymer-based materials can be incorporated as the active sensing elements in chemiresistor devices. Most of these devices take advantage of the fact that certain polymers will swell when exposed to gaseous analytes. To measure this response, a conducting material such as carbon black is incorporated within the nonconducting polymer matrix. In response to analytes, polymer swelling results in a measurable change in the conductivity of the polymer/carbon composite material. Arrays of these sensors may be used in conjunction with pattern recognition techniques for purposes of analyte recognition and quantification. We have used the technique of scanning force microscopy (SFM) to investigate microstructural changes in carbon-polymer composites formed from the polymers poly (isobutylene) (PIB), poly (vinyl alcohol) (PVA), and poly (ethylene-vinyl acetate) (PEVA) when exposed to the analytes hexane, toluene, water, ethanol, and acetone. Using phase-contrast imaging (PI), changes in the carbon nanoparticle distribution on the surface of the polymer matrix are measured as the polymers are exposed to the analytes in vapor phase. In some but not all cases, the changes were reversible (at the scale of the SFM measurements) upon removal of the analyte vapor. In this paper, we also describe a new type of microsensor based on piezoresistive microcantilever technology. With these new devices, polymeric volume changes accompanying exposure to analyte vapor are measured directly by a piezoresistive microcantilever in direct contact with the polymer. These devices may offer a number of advantages over standard chemiresistor-based sensors.     

用于氨氮检测的无透气膜安培型氨气微传感器及系统

设计并制备了一种无透气膜的安培型氨气微传感器,并构建了氨氮检测系统,该系统实现了将溶液中的氨氮转化为氨气,并应用所设计的微传感器检测气态氨氮．采用MEMS工艺制备组成该微传感器的微电极芯片,氨敏感材料选用铂黑,通过电化学方法修饰于微电极表面．在微电极芯片的SU-8微池中滴入微量LiCl溶液,形成可使氨气迅速扩散到电极表面的薄层电解液．使用自行设计的氨氮检测系统对不同浓度氨氮样品进行检测,对微传感器的时间响应特性、线性度、灵敏度及重复性进行了测试和分析．微传感器的线性范围为0．2mg／L～4mg／L,线性相关系数为0．9847,检测下限为0．2mg／L,达到90％响应信号所需的时间在3min以内．结果表明,使用安培型氨气微传感器检测氨氮的方法是可行的．     

谐振式微机械惯性传感器

对几种典型的谐振式加速度微传感器和微陀螺的结构、工作原理等方面进行了概述,分析了各自的应用特点。从中反映出谐振式微惯性传感器具有优良的特性,必有广阔的应用和发展前景。     

一种液压油多污染物微检测传感器设计及研究

基于微流体芯片技术提出了一种液压油微传感器.微传感器由内嵌硅钢片的平面电感检测线圈与对置硅钢片构成.电感检测模式下对金属颗粒进行检测,电容模式下检测水滴与气泡,实现了对油液中铁磁性颗粒、非铁磁性颗粒、水滴、气泡4种污染物的区分检测.通过实验证明新型结构的微传感器在电感模式下对金属颗粒检测精度的提高,并可以检测到油液中2...     

Tailored binding and transport parameters of molecularly imprinted films via macromolecular structure: The rational design of recognitive polymers

Most acrylic acid-based superabsorbent hydrogels, which have been widely used in many applications, are crosslinked with water-solvable crosslinker N,N-methylenebisacrylamide (NMBA), which is easy to hydrolyze when radiated by ultraviolet, leading to decomposition of the superabsorbent hydrogels. In this article, ultraviolet-induced decomposition of acrylic acid-based superabsorbent hydrogels crosslinked with NMBA was investigated by weight loss method under ultraviolet radiation. The results showed that the decomposition rate of the superabsorbent hydrogels was controlled by ultraviolet-induced activation of amide groups on the networks when the intensity of ultraviolet radiation was low, whereas it was controlled by hydrolysis of amide groups on NMBA molecules when the intensity of ultraviolet radiation was high. The ultraviolet stability of acrylicacid-based superabsorbent hydrogels crosslinked with NMBA can be improved by increasing the neutralization degree of acrylic acid, increasing the dosage of crosslinker NMBA, or introducing acrylamide as comonomer. © 2008 Wiley Periodicals, Inc. J Appl Polym Sci, 2008     

微电子机械技术的研究和发展趋势

MEMS技术作为一门新兴的技术，越来越受到世界各国的重视。文中主要阐述了MEMS的研制背景、加工工艺、现状和发展趋势，并对MEMS技术面临的问题进行了简要分析。