Ti-Rich Barrier Layers Self-Formed on Porous Low-k Layers Using Cu(1?at.%?Ti) Alloy Films

To investigate the applicability of the technique of barrier self-formation using Cu(Ti) alloy films on porous low-k dielectric layers, Cu(1 at.% Ti) alloy films were deposited on porous SiOCH (low-k) dielectric layers in samples with and without ~6.5-nm-thick SiCN pore seals. Ti-rich barrier layers successfully self-formed on the porous low-k layer of both sample types after annealing in Ar for 2 h at 400°C to 600°C. The Ti-rich barrier layers consisted of amorphous Ti oxides and polycrystalline TiC for the samples without pore sealing, and amorphous TiN, TiC, and Ti oxides for the pore-sealed samples. The amorphous TiN originated from reaction of Ti atoms with the pore seal, and formed beneath the Cu alloy films. This may explain two peaks of Ti segregation at the interface that appeared in Rutherford backscattering spectroscopy (RBS) profiles, and suggests that the Ti-rich barrier layers self-formed by the reaction of Ti atoms with the pore seal and porous low-k layers separately. The total molar amount of Ti atoms segregated at the interface in the pore-sealed samples was larger than that in the samples without pore sealing, resulting in lower resistivity. On the other hand, resistivity of the Cu alloy films annealed on the porous low-k layers was lower than that annealed on the nonporous low-k layers. Coarser Cu columnar grains were observed in the Cu alloy films annealed on the porous low-k layers, although the molar amount of Ti atoms segregated at the interface was similar in both sample types after annealing. The cause could be faster reaction of the Ti atoms with the porous dielectric layers.     

Three-dimensional transient two-phase study of the cathode side of a PEM fuel cell

A three-dimensional transient two-phase isothermal model has been developed for the cathode side of a proton exchange membrane fuel cell (PEMFC). This has been done in order to fully investigate the effects and the time variation of liquid water formation as well as the gas phase transport under the start up condition. It is considered that the generated water in the cathode catalyst layer (CL) is liquid water and that the gas diffusion layer (GDL) is hydrophobic. A non-equilibrium water condensation-evaporation is also assumed. The time variations of liquid water distribution in along-channel and through-plane directions are investigated. This is to determine the liquid water accumulation at the start up time (above the channel under the CL), then the movement of the liquid water in the domain and the final accumulation at the steady state condition (above the rib and near the CL). It has also been found that it takes less time for a high average current density to attain the steady state condition which is due to the capillary pressure gradient inside the porous media. Validation of the numerical results has been implemented via a polarization curve comparison with the experimental data. Both sets show good agreement.     

Characterization of Self-Formed Ti-Rich Interface Layers in Cu(Ti)/Low-k Samples

In our previous studies, thin Ti-rich diffusion barrier layers were found to be formed at the interface between Cu(Ti) films and SiO₂/Si substrates after annealing at elevated temperatures. This technique was called self-formation of the diffusion barrier, and is attractive for fabrication of ultralarge-scale integrated (ULSI) interconnects. In the present study, we investigated the applicability of this technique to Cu(Ti) alloy films which were deposited on low dielectric constant (low-k) materials (SiO _x C _y ), SiCO, and SiCN dielectric layers, which are potential dielectric layers for future ULSI Si devices. The microstructures were analyzed by transmission electron microscopy (TEM) and secondary-ion mass spectrometry (SIMS), and correlated with the electrical properties of the Cu(Ti) films. It was concluded that the Ti-rich interface layers were formed in all the Cu(Ti)/dielectric-layer samples. The primary factor to control the composition of the self-formed Ti-rich interface layers was the C concentration in the dielectric layers rather than the enthalpy of formation of the Ti compounds (TiC, TiSi, and TiN). Crystalline TiC was formed on the dielectric layers with a C concentration higher than 17 at.%.     

Numerical simulation of buoyancy-assisting,backward-facing step flow and heat transfer in a rectangular duct

Two- and three-dimensional numerical simulations have been performed for mixed convective upward flows over a backward-facing step in a duct. The Reynolds number, expansion ratio, and aspect ratio (in 3-D simulations) were kept constant at Re = 125, ER = 2, and AR = 16, respectively. The heat flux at the wall downstream of the step was uniform. The straight wall, the step, and the side walls (in 3-D simulations) were assumed to be adiabatic. The effect of the buoyancy level, Ri^*, was the major interest in this study. It was found that the reattachment point and the peak Nusselt number point moved upstream as Ri^* was increased. The secondary recirculation region, which developed at the corner of the step, became larger. A secondary flow was also found in a cross section immediately downstream of the step. Flow directed toward the center of the duct became more intensive as Ri^* increased, which possibly resulted from an increase in the level of three-dimensionality of the flow and thermal fields. © 1999 Scripta Technica, Heat Trans Asian Res, 28(1): 58–76, 1999     

Application of porous microspheres prepared by SPG (Shirasu porous glass) emulsification as immobilizing carriers of glucoamylase (GluA)

Fairly uniform spheres of crosslinked polystyrene (PS) and polymethyl methacrylate (PMMA), prepared by a particular emulsification process using SPG (Shirasu Porous Glass) membranes and subsequent suspension polymerization, were applied for immobilizing carriers of Glucoamylase (GluA). A mixture of monomers, solvents, and oil-soluble initiator was allowed to permeate through the micropores of SPG, suspended in an aqueous solution of poly(vinyl alcohol), and polymerized while retaining the narrow size distribution during polymerization. A small amount of acrylic acid or glycidyl methacrylate (GMA) was incorporated for the immobilization of GluA via covalent bonding. Although GluA has been regarded as being difficult to retain its activity after the immobilization process, a porous structure of the carriers definitely favored the immobilization, and a maximum 55% relative activity (RA) was obtained by the physical adsorption to PMMA spheres. The reaction of epoxide in GMA with 6-aminocaproic acid provided a spacer arm for the carboxyl group. An improvement of activity was expected by the incorporation of the spacer arms; however, barely noticeable activity was observed for PMMA carriers either by the physical adsorption or by the covalent bonding. A slight improvement was observed for PS carriers with spacers compared to the carriers without them. The diffusion process of oligosaccharides in the porous carriers seemed to retard the rate of hydrolysis in the case of largest carriers, 60 μm PS-DVB-AA spheres. The activity of immobilized GluA was retained during a long storage period of more than 150 days, some of them even increasing gradually, while the activity of native GluA dropped to zero after 100 days. © 1997 John Wiley & Sons, Inc. J Appl Polym Sci 65: 2655–2664, 1997     

Alkaline Corrosion Resistance of Anodized Aluminum Coated with Zirconium Oxide by a Sol-Gel Process

To improve the alkaline corrosion resistance of aluminum, composite films were prepared that consisted of a porous layer of anodically grown aluminum oxide filled with zirconium oxide, with a zirconium oxide coating layer that was deposited thereon via the sol—gel process, using a dip-coating technique. The alkaline corrosion resistance of these composite films was extremely improved when this coating layer was placed on an anodic oxide film. Comparisons of the composite film and conventional anodic oxide film showed that the alkaline corrosion resistance of the composite film was increased by a factor of 24–50. Because these composite films, which have high corrosion resistance, indicated a vibration phenomenon of voltage in the duration time curve of the electromotive force measurement, the composite film had a self-repairing action for alkaline corrosion.     

Study of flow instability in off design operation of a multistage centrifugal pump

In recent years, attempts have been made to make multistage centrifugal pumps smaller in size and more efficient. However, such designs are known to cause positive-slope phenomena in the Q-H curve, especially under low-flow conditions. These phenomena, which have thus far been studied experimentally and numerically, stem from flow instability in the pump. However, their mechanisms have not yet been clarified because it depends on various parameters. In this study, we focused on diffuser rotating stall, observed in positive Q-H characteristics. This study elucidates the mechanism of positive-slope generation through experimental results and two-dimensional numerical analysis.     

Glycated Albumin versus Glycated Hemoglobin as a Glycemic Indicator in Diabetic Patients on Peritoneal Dialysis

Compared with glycated hemoglobin (HbA1c), glycated albumin (GA) is superior in estimating glycemic control in diabetic patients on hemodialysis (HD). However, the better index for assessment of glycemic control in diabetic patients on peritoneal dialysis (PD) and the impact of protein loss on GA are unknown. Twenty diabetic patients on HD were matched by age, sex, and baseline postprandial plasma glucose (PG) levels to 20 PD patients. PG, HbA1c, GA, and serum albumin levels were measured for six months. Protein loss in PD patients was estimated by measuring the protein concentration in the peritoneal dialysate and by 24 h urine collection. Although PG and HbA1c did not differ significantly between the groups, the PD group had significantly lower GA (17.8% versus 20.8%, p < 0.001) and GA/HbA1c ratio (2.95% versus 3.45%, p < 0.0001) than the HD group. Although the PG level correlated significantly with the GA levels in both groups, it was not correlated with the HbA1c levels in both groups. HbA1c level was negatively associated with erythropoiesis-stimulating agent (ESA) dose in both groups, whereas GA was not significantly associated with serum albumin, hemoglobin concentration, ESA dose, and protein loss. Multiple regression analysis identified GA as the only independent factor associated with PG in PD patients. Our results suggested that GA was not significantly associated with protein loss, hemoglobin, serum albumin, and ESA dose. Although GA might underestimate glycemic status, it provided a significantly better measure for estimating glycemic control than HbA1c, even in PD patients.     

Performance of sputter-deposited platinum cathodes with Nafion and carbon loading for direct methanol fuel cells

One of the difficulties for a direct methanol fuel cell (DMFC) is low catalyst utilization efficiency because a certain amount of Pt loading is inactive as the catalyst. Sputter-deposited Pt electrodes are expected to improve mass activities for oxygen reduction reaction (ORR) compared with those prepared by a conventional method. Meanwhile, mass activities of sputter-deposited Pt cathodes for the ORR decreased with an increase in amount of Pt loading. In this study, the loading of protonic and electronic conductors to improve mass activities of sputter-deposited Pt electrode were investigated as cathodes for DMFCs.