An empirical study of design-of-experiment data mining for yield-loss diagnosis for semiconductor manufacturing

To maintain competitive advantages, semiconductor industry has strived for continuous technology migrations and quick response to yield excursion. As wafer fabrication has been increasingly complicated in nano technologies, many factors including recipe, process, tool, and chamber with the multicollinearity affect the yield that are hard to detect and interpret. Although design of experiment (DOE) is a cost effective approach to consider multiple factors simultaneously, it is difficult to follow the design to conduct experiments in real settings. Alternatively, data mining has been widely applied to extract potential useful patterns for manufacturing intelligence. However, because hundreds of factors must be considered simultaneously to accurately characterize the yield performance of newly released technology and tools for diagnosis, data mining requires tremendous time for analysis and often generates too many patterns that are hard to be interpreted by domain experts. To address the needs in real settings, this study aims to develop a retrospective DOE data mining that matches potential designs with a huge amount of data automatically collected in semiconductor manufacturing to enable effective and meaningful knowledge extraction from the data. DOE can detect high-order interactions and show how interconnected factors respond to a wide range of values. To validate the proposed approach, an empirical study was conducted in a semiconductor manufacturing company in Taiwan and the results demonstrated its practical viability.     

Synthesis and characterization of novel polyesterimides

A series of soluble novel polyesterimides was synthesized from diamines [a mixture of 2,2‐bis(4‐(4‐aminophenoxy)phenyl)propane (BAPP) with amine‐terminated polysiloxane (ATPS) in various mole ratios] and the ester‐group‐containing dianhydrides. The ester group containing dianhydrides in turn was synthesized by the transesterification reaction of trimellitic anhydride (TMA) with diacetate ester of hydroquinone (HQ), 4,4′‐dihydrophenyl (BP), 1,6‐hexanediol, or ethylene glycol. The resulted polyesterimides were characterized by using Fourier‐transform infrared spectroscopy, inherent viscosity, solubility, differential scanning calorimetry (DSC), and thermogravimetric analysis (TGA). The polyesterimides of BP and HQ had relatively high glass transition temperatures in the range of 214.7–227.2 and 195.7–210.5°C, respectively. The glass transitions decreased rather slowly with the increase in polysiloxane content. Thermal stability and the weight‐loss behavior of polyesterimides were studied by TGA. All polyesterimides of BP and HQ (BPI and HQI) showed no significant weight loss below 500°C in a N₂ environment, and the decomposition temperatures (T_d5%) of BPI and HQI were >520°C. Most polyesterimides were soluble in polar aprotic solvents and m‐cresol. © 2004 Wiley Periodicals, Inc. J Appl Polym Sci 94: 730–738, 2004     

A discussion of the methods for comparing the relative effectiveness of phosphate fertilizers varying in solubility

Because various phosphate (P) fertilizers differ widely in their solubility, it is commonly observed that crop response to P fertilizers varies under the same soil and crop conditions. Furthermore, a major problem encountered in the methods for determining the relative effectiveness (RE) of water-insoluble P fertilizer (e.g., phosphate rock) with respect to water-soluble P fertilizers, e.g., single superphosphate (SSP) and triple superphosphate (TSP), is that their growth response curves are usually nonlinear and often do not share a common maximum yield. In this paper, we review and discuss the advantages and disadvantages of the three most commonly used methods for calculating the RE of phosphate rock with respect to TSP (or SSP). The three methods are vertical comparison, horizontal (substitution rate) comparison, and linear-response comparison.     

Preparation and properties of heterocyclically conjugated poly(3‐hexylthiophene)–clay nanocomposite materials

A series of heterocyclically conjugated polymer–clay nanocomposite (PCN) materials that consisted of organic poly(3‐hexylthiophene) (P3HT) and inorganic montmorillonite (MMT) clay platelets were prepared by in situ oxidative polymerization with FeCl₃ as an oxidant. The as‐synthesized PCN materials were characterized by Fourier transform infrared (FTIR) spectroscopy, wide‐angle powder X‐ray diffraction (WAXRD), and transmission electron microscopy (TEM). The effects of the material composition on the anticorrosion, gas barrier, thermal stability, flammability, mechanical strength, and electrical conductivity properties of the P3HT and PCN materials were studied by electrochemical corrosion measurements, gas‐permeability analysis (GPA), thermogrametric analysis (TGA), limiting oxygen index (LOI) measurements, dynamic mechanical analysis (DMA), and a four‐point probe technique, respectively. The molecular weights of extracted and bulk P3HT were determined by gel permeation chromatography (GPC) with THF as an eluant. © 2004 Wiley Periodicals, Inc. J Appl Polym Sci 91: 3438–3446, 2004     

Agronomic evaluation of fertilizer products derived from Sukulu Hills phosphate rock

Partial acidulation of phosphate rock (PR) or compaction of PR with soluble P fertilizers can improve the usefulness of unreactive PR for use as P fertilizer. A greenhouse study was conducted to evaluate nonconventional phosphate fertilizers derived from a low reactive Sukulu Hills PR from Uganda. Raw PR (which contained 341.0 g kg^–1 Fe₂O₃), beneficiated or concentrate PR, partially acidulated PR (PAPR) and PR compacted with triple superphosphate (TSP) were evaluated. Compacted materials had a P ratio of PR:TSP = 50:50. PAPR materials were made by 50% acidulation with H₂SO₄. TSP was used as a reference fertilizer. Fertilizers were applied to an acidic (pH = 5.4) Hiwassee loam (clayey, kaolinitic, thermic Rhodic Kanhapludults) at rates of 0, 50, 100, 200, 300 and 400 mg P kg^–1 soil. Two successive corn (Zea mays L.) crops were grown for 6 weeks. Compacted concentrate PR + TSP and raw PR + TSP were 94.4 and 89.7% as effective as TSP, respectively, in increasing dry-matter yields for the first corn crop. PAPR from the concentrate was 54.8% as effective as TSP. Raw PR, concentrate PR and the PAPR from the raw PR were ineffective in increasing dry-matter yields. The same trends were obtained when P uptake was used to compare effectiveness. Ineffectiveness of the raw PR and its corresponding PAPR was attributed to a high Fe₂O₃ content in the raw PR. Bray I and Pi paper were found to be nearly equally suitable at estimating available P in the soils treated with responsive fertilizer materials. Mehlich 1 overestimated available P in soil treated with raw PR, concentrate PR or the PAPR from the raw PR.     

Morphology and characterization of conductive films based on polyaniline‐coated polystyrene latexes

The polyaniline (PANI)‐coated polystyrene (PS) latexes were synthesized, and the electrically conductive films were prepared thereafter. The weight ratio of PANI was 5%. Thermal analysis of the latices was performed using DSC and TGA. In this study, the electrically conductive films were prepared above the PS glass transition temperature (T_g). During the film formation, the effects of the annealing temperature and atmosphere (air or N₂) on the film resistance were investigated. In addition, the film morphology was observed utilizing scanning electron microscopy. The film resistance decreased in the initial heating stage due to the increasing temperature and the compaction of film. Then the film resistance increased with further annealing due to the aging of PANI. Typically, the film resistance was about 6000 Ω/sq, and the conductivity was 0.3 S/cm. © 2006 Wiley Periodicals, Inc. J Appl Polym Sci 102: 5406–5413, 2006     

Equilibrium and kinetic studies of the extraction of chelated copper(II) anions with Aliquat 336

The equilibrium and kinetics of solvent extraction of Cu²⁺ from aqueous solutions containing equimolar EDTA with Aliquat 336 in n‐decanol and kerosene at 298 K were investigated. The concentrations of Cu²⁺ (8–50 mol m^?3), Cl^? (5–60 mol m^?3), and Aliquat 336 (20–100 mol m^?3) were varied. A semi‐empirical model with three parameters was proposed to describe the equilibrium behavior, in which the non‐idealities in both aqueous and organic phases were considered. Over the ranges studied, the model agreed reasonably well with the experimental data (standard deviation, 15%). The forward and backward reaction rate constants were determined as (5.31 ± 0.16)×10^?6 m^9/4 mol^?3/4 s^?1 and (2.62 ± 0.09)×10^?7 s^?1, respectively, at 298 K. An interfacial reaction mechanism was proposed, which revealed that the reaction between the chelated anions and trimeric amine molecules at the interface was rate limiting. The derived rate laws were consistent with the experimental results. © 2002 Society of Chemical Industry     

Solid polymer electrolytes. XI. Preparation,characterization and ionic conductivity of new plasticized polymer electrolytes based on chemical‐covalent polyether–siloxane hybrids

A new hybrid polymer electrolyte system based on chemical‐covalent polyether and siloxane phases is designed and prepared via the sol–gel approach and epoxide crosslinking. FT‐IR, ¹³C solid‐state NMR, and thermal analysis (differential scanning calorimetry (DSC) and TGA) are used to characterize the structure of these hybrids. These hybrid films are immersed into the liquid electrolyte (1M LiClO₄/propylene carbonate) to form plasticized polymer electrolytes. The effects of hybrid composition, liquid electrolyte content, and temperature on the ionic conductivity of hybrid electrolytes are investigated and discussed. DSC traces demonstrate the presence of two second‐order transitions for all the samples and show a significant change in the thermal events with the amount of absorbed LiClO₄/PC content. TGA results indicate these hybrid networks with excellent thermal stability. The EDS‐0.5 sample with a 75 wt % liquid electrolyte exhibits the ionic conductivity of 5.3 × 10^?3 S cm^?1 at 95°C and 1.4 × 10^?3 S cm^?1 at 15°C, in which the film shows homogenous and good mechanical strength as well as good chemical stability. In the plot of ionic conductivity and composition for these hybrids containing 45 wt % liquid electrolyte, the conductivity shows a maximum value corresponding to the sample with the weight ratio of GPTMS/PEGDE of 0.1. These obtained results are correlated and used to interpret the ion conduction behavior within the hybrid networks. © 2006 Wiley Periodicals, Inc. J Appl Polym Sci 100: 1000–1007, 2006     

Rapid and Continuous Deposition of Porous Nanocrystalline SnO2 Coating with Interpenetrating Pores for Gas Sensor Applications

In this article, we proposed a rapid and continuous process for the production of nanoporous coatings for functional applications. Experiments following two statistical designs were implemented to screen and investigate the spraying parameters’ effects on coating crystallinity and porosity in order to gain a better understanding. The spraying standoff distance, solution flow rate and power were identified as having significant effects on coating porosity and crystallinity. The result yielded a peculiar microstructure comprised of interpenetrating pores and layered structures with embedded pores. A deposition mechanism was postulated to explain this microstructure. Ethanol gas sensors that are constructed from the coatings had comparable sensitivities to those reported in the literature for thick-film coatings and had a maximum sensitivity near 200 °C. This article is an invited paper selected from presentations at the 2007 International Thermal Spray Conference and has been expanded from the original presentation. It is simultaneously published in Global Coating Solutions, Proceedings of the 2007 International Thermal Spray Conference, Beijing, China, May 14-16, 2007, Basil R. Marple, Margaret M. Hyland, Yuk-Chiu Lau, Chang-Jiu Li, Rogerio S. Lima, and Ghislain Montavon, Ed., ASM International, Materials Park, OH, 2007.