Structural optimization of Z-axis tuning-fork MEMS gyroscopes for enhancing reliability and resolution

Inertial sensors such as gyroscopes and accelerometers are normally considered as the most important sensors in a navigation system. Especially in the underwater or under-ice applications, the accuracy of the entire navigation system has to mainly rely on the precision of the inertial sensors due to inapplicability of global positioning systems. For MEMS-based inertial sensors, fabrication variation and environmental disturbance are among the major error sources. To address these challenges, in this paper we propose an optimization methodology by using parametric analysis on a reference design for improving sensor reliability and resolution. Apart from studying the resolution improvement by deploying an alternative sensing scheme, the effects of changing location, shape, and size of critical cantilevers have been thoroughly explored. By using this method, we have derived an improved mechanical structure for tuning-fork gyroscopes. Our numerical analyses show that the bandwidth of the proposed structure, which is the most important stability measure in the vibratory gyroscopes with slightly mismatched resonant frequencies, is over 1.7 times more immune to fabrication imperfection than the other structural alternatives. The drive and sense resonant amplitude robustness against fabrication imperfection is also improved in the proposed structure. In addition, this structure is able to provide at least 2.3 times larger sense-mode capacitance response to external rotation compared to the previously published designs. More important, it is observed that there is always non-negligible room for improving performance of gyroscopes if our proposed structural optimization methodology is integrated into the conventional MEMS-based inertial sensor design flow.     

“From microtiter plates to droplets” tools for micro-fluidic droplet processing

Droplet-based microfluidic allows high throughput experimentation in with low volume droplets. Essential fluidic process steps are on the one hand the proper control of the droplet composition and on the other hand the droplet processing, manipulation and storage. Beside integrated fluidic chips, standard PTFE-tubings and fluid connectors can be used in combination with appropriate pumps to realize almost all necessary fluidic processes. The segmented flow technique usually operates with droplets of about 100–500 nL volume. These droplets are embedded in an immiscible fluid and confined by channel walls. For the integration of segmented flow applications in established research workflows—which are usually base on microtiter plates—robotic interface tools for parallel/serial and serial/parallel transfer operations are necessary. Especially dose–response experiments are well suited for the segmented flow technique. We developed different transfer tools including an automated “gradient take-up tool” for the generation of segment sequences with gradually changing composition of the individual droplets. The general working principles are introduced and the fluidic characterizations are given. As exemplary application for a dose–response experiment the inhibitory effect of antibiotic tetracycline on Escherichia coli bacteria cultivated inside nanoliter droplets was investigated.     

Giving too much social support: social overload on social networking sites

As the number of messages and social relationships embedded in social networking sites (SNS) increases, the amount of social information demanding a reaction from individuals increases as well. We observe that, as a consequence, SNS users feel they are giving too much social support to other SNS users. Drawing on social support theory (SST), we call this negative association with SNS usage ‘social overload’ and develop a latent variable to measure it. We then identify the theoretical antecedents and consequences of social overload and evaluate the social overload model empirically using interviews with 12 and a survey of 571 Facebook users. The results show that extent of usage, number of friends, subjective social support norms, and type of relationship (online-only vs offline friends) are factors that directly contribute to social overload while age has only an indirect effect. The psychological and behavioral consequences of social overload include feelings of SNS exhaustion by users, low levels of user satisfaction, and a high intention to reduce or even stop using SNS. The resulting theoretical implications for SST and SNS acceptance research are discussed and practical implications for organizations, SNS providers, and SNS users are drawn.     

A legitimacy challenge of a cross-cultural interorganizational information system

This paper studies the adoption and diffusion of a cross-cultural Interorganizational Information System (IOS), which is used to streamline the processing of financial transactions between European investment fund companies and Taiwanese banks. Drawing from institutional and organizational legitimacy theory, we argue that the adoption and implementation of technological innovation is contingent upon its alignment with three institutional pillars in different countries and the deployment of legitimation strategies by stakeholders. Departing from classical innovation diffusion theory, our empirical investigation reveals that the implementation of a cross-cultural IOS is a dynamic process involving the recognition, understanding, and management of the regulative, normative, and cognitive challenges arising in two different institutional settings. This paper contributes to the growing body of research that highlights the significance of social and institutional influences on the adoption of IOS in a global environment.     

Mechanical strengthening of Si cantilever by chemical KOH etching and its surface analysis by TEM and AFM

Mechanical strengthening of a Si cantilever by applying KOH wet etching was investigated. Two kinds of Si cantilever specimens having the different crystallographic orientations of the sidewall surfaces, i.e., Si{100} and Si{110}, were fabricated from the same SOI wafer by a Bosch process. The typical height and pitch of the scalloping formed on the sidewall were 248 and 917 nm, respectively. A 50 % KOH (40 °C) chemical wet etching was applied to increase the fracture stress of the Si cantilever. The fracture stress in the both of Si{100} and Si{110} cantilevers increased with the advance of the etching. The obtained maximum fracture stress in Si{100} and Si{110} were 4.2 and 3.7 GPa, respectively. Sidewall surface of the cantilever was analyzed to investigate the mechanical strengthening of Si cantilever by wet etching. The etched surface crystalline was analyzed by the transmission electron microscope (TEM), and confirmed that the thickness of the affected flow layer was less than 10 nm from the obtained TEM image. Then the change of the surface roughness by the KOH etching was analyzed by the atomic force microscope. The surface was smoothened with the advance of the KOH etching. The roughness value of Ra in Si{100} and Si{110} decreased to 12.1 and 37.7 nm, respectively.     

Design and fabrication of a resonant pressure sensor by combination of DETF quartz resonator and silicon diaphragm

A new type of resonant pressure sensor is presented which is realized by combination of a double-ended tuning fork (DETF) quartz resonator and a silicon diaphragm. To examine the feasibility and investigate the performance of this innovation, theoretical analysis and finite elements method are employed to optimize the structure parameters. Micromachining technology are involved in the fabrication of the silicon diaphragm and the DETF quartz resonator, which are fabricated separately and bounded together afterwards. Performances of the sensor prototypes are experimentally investigated. Preliminary testing results demonstrate that the sensor features a high sensitivity of approximately 452.5 Hz/kPa in the operating range of 0–6 kPa at room temperature, with a non-linearity <0.035 % FS and a hysteresis of 0.055 % FS. In addition, the maximum zero-drift is about 0.5 Hz/h which reveals favorable frequency stability. Thus, the feasibility of this scheme is verified. Due to the excellent performances such as high accuracy, high sensitivity, low cost and simple fabrication, this novel resonant sensor provides a commendable solution for low pressure measurement.     

A novel MEMS tunable antenna with wide tuning range of frequency

In this paper a novel MEMS tunable CPW antenna with wide tuning range of frequency is presented. The antenna’s frequency tuning range increment is achieved by loading three novel large tuning range capacitors at radiation edge of antenna patch. Two techniques are employed for increasing the capacitors tuning range. First, dual gap technique is used to overcome the pull-in limitation and then two lateral beams are added in order to parallel movement of capacitive plate which increases the capacitance value. The simulation result shows that the resonance frequency tuning range of antenna increased from 1.96 GHz loaded by traditional capacitor to 6.89 GHz using the new capacitor structure. Also in resonance frequency, the antenna has a good impedance matching with transmission line even in high capacitance values.     

Accurate sensing of scene geo-context via mobile visual localization

Image geo-tagging has drawn a great deal of attention in recent years. The geographic information associated with images can be used to promote potential applications such as location recognition or virtual navigation. In this paper, we propose a novel approach for accurate mobile image geo-tagging in urban areas. The approach is able to provide a comprehensive set of geo-context information based on the current image, including the real location of the camera and the viewing angle, as well as the location of the captured scene. Moreover, the parsed building facades and their geometric structures can also be estimated. First, for the image to be geo-tagged, we perform partial duplicate image retrieval to filter crowd-sourced images capturing the same scene. We then employ the structure-from-motion technique to reconstruct a sparse 3D point cloud of the scene. Meanwhile, the geometric structure of the query image is analyzed to extract building facades. Finally, by combining the reconstructed 3D scene model and the extracted structure information, we can register the camera location and viewing direction to a real-world map. The captured building location and facade orientation are also aligned. The effectiveness of the proposed system is demonstrated by experiment results.