基于最小二乘拟合的不同探针测量线宽的比较

AFM探针的形貌和尺寸对纳米尺度线宽的测量有较大影响．首先建立了一个基于最小二乘的应用于AFM测量技术的线宽计量模型，并使用三种不同探针在NanoScopeⅢa型AFM上对设计线宽尺寸为1000nm的样本进行了测量．应用该模型和算法对线宽进行计算，揭示出探针尺寸对线宽测量结果的影响以及该模型对探针尺寸的依赖性．     

A torsional resonance mode AFM for in-plane tip surface interactions

Changing the method of tip/sample interaction leads to contact, tapping and other dynamic imaging modes in atomic force microscopy (AFM) feedback controls. A common characteristic of these feedback controls is that the primary control signals are based on flexural deflection of the cantilever probes, statically or dynamically. We introduce a new AFM mode using the torsional resonance amplitude (or phase) to control the feedback loop and maintain the tip/surface relative position through lateral interaction. The torsional resonance mode (TRmode™) provides complementary information to tapping mode for surface imaging and studies. The nature of tip/surface interaction of the TRmode facilitates phase measurements to resolve the in-plane anisotropy of materials as well as measurements of dynamic friction at nanometer scale. TRmode can image surfaces interleaved with TappingMode™ with the same probe and in the same area. In this way we are able to probe samples dynamically in both vertical and lateral dimensions with high sensitivity to local mechanical and tribological properties. The benefit of TRmode has been proven in studies of water adsorption on HOPG surface steps. TR phase data yields approximately 20 times stronger contrast than tapping phase at step edges, revealing detailed structures that cannot be resolved in tapping mode imaging. The effect of sample rotation relative to the torsional oscillation axis of the cantilever on TR phase contrast has been observed. Tip wear studies of TRmode demonstrated that the interaction forces between tip and sample could be controlled for minimum tip damage by the feedback loop.     

Influence of tool material on dynamics of drilling of GFRP composites

Drilling trials have been carried out on glass Fibre reinforced plastics (GFRP) with plain high speed steel (HSS), TiN coated HSS and tipped tungsten carbide drills. Most of the defects in drilling of composites are due to thrust force experienced by the workpiece. The parametric influence on cutting force was experimentally evaluated. The experimental results show that the defects toleranced drilling can be attained by proper selection of cutting parameters and tool material. This is substantiated by monitoring flank wear, hole shrinkage and acoustic emission during drilling.     

Improved dynamic cutting force model in ball-end milling. Part I: theoretical modelling and experimental calibration

An accurate cutting force model of ball-end milling is essential for precision prediction and compensation of tool deflection that dominantly determines the dimensional accuracy of the machined surface. This paper presents an improved theoretical dynamic cutting force model for ball-end milling. The three-dimensional instantaneous cutting forces acting on a single flute of a helical ball-end mill are integrated from the differential cutting force components on sliced elements of the flute along the cutter-axis direction. The size effect of undeformed chip thickness and the influence of the effective rake angle are considered in the formulation of the differential cutting forces based on the theory of oblique cutting. A set of half immersion slot milling tests is performed with a one-tooth solid carbide helical ball-end mill for the calibration of the cutting force coefficients. The recorded dynamic cutting forces are averaged to fit the theoretical model and yield the cutting force coefficients. The measured and simulated dynamic cutting forces are compared using the experimental calibrated cutting force coefficients, and there is a reasonable agreement. A further experimental verification of the dynamic cutting force model will be presented in a follow-up paper.     

Direct probing of solvent-induced charge degradation in polypropylene electret fibres via electrostatic force microscopy

Electrostatic force microscopy was used to directly probe solvent‐induced charge degradation in electret filter media. Electrostatic force gradient images of individual polypropylene electret fibres were used to quantify the extent of charge degradation caused by the immersion of the fibres into isopropanol. Electrostatic force gradient images were obtained by monitoring the shifts in phase and frequency between the oscillations of the biased atomic force microscopy (AFM) cantilever and those of the piezoelectric driver. Electrostatic force microscopy measurements were performed using non‐contact scans at a constant tip‐sample separation of 75 nm with varied bias voltages applied to the cantilever. Mathematical expressions, based on the capacitance of the tip‐sample system, were used to model the phase and frequency shifts as functions of the applied bias voltage to the tip and the offset voltage due to the fibre's charge. Quantitative agreement between the experimental data and the simplified model was observed.     

用复合振子模型计算纳米尺度滑动摩擦力的研究

以光滑界面摩擦为研究对象,探讨用复合振子模型计算纳米尺度滑动摩擦力的原理和方法,推导出滑动摩擦力和摩擦因数的计算公式,并用原子力显微镜探针在硅试样和云母试样上做扫描实验进行验证。实验值与理论计算值的对比结果表明,两者所反映的规律基本一致,表明所提出的理论和方法可行。研究表明,滑动摩擦力与接触面积成线性增长关系,并随宏观振子横向刚度的增大而减小,由于可通过改变摩擦表面的几何形貌来改变宏观振子的横向刚度,因此这一结论将为摩擦控制提供一种新途径。     

高强度钢干式铣削替代半精磨的试验研究

采用硬质合金刀片(YW1)和涂层刀片(YB415)进行了高强度钢的干式铣削代替半精磨试验研究。根据试验结果,确定适合加工该型号高强度钢的刀具材料和切削用量。以这两种刀片在不同切削用量条件下的耐用度、加工表面粗糙度和主切削力作为刀具加工性能的评价依据,同时研究了刀片的磨、破损机理和卷、排屑稳定性。试验结果表明:涂层刀片干铣削高强度钢的加工性能优异,工件加工表面质量达到半精磨水平。     

新型过约束正交并联六维力传感器测量模型与静态标定试验

面向航空航天领域对重载大吨位多维测力传感器的急需,通过引入冗余测力分支,提出一种适用于重载测力场合的新型过约束正交并联六维力传感器结构,在提高传感器结构刚度和承载能力的同时有效抑制了关节摩擦对多维力传感器测量精度的影响。基于螺旋理论,推导得到了该并联传感器一阶静力影响系数矩阵,建立理想状态下该新型过约束正交并联六维力传感器测量数学模型。考虑各测量分支的初始预紧力与刚度,基于传感器静力平衡方程与补充建立的位移协调方程,推导建立考虑初始预紧力与分支刚度因素下该新型过约束正交并联六维力传感器测量数学模型。在此基础上,设计并研制该新型过约束正交并联六维力传感器样机,搭建传感器加载标定与信号采集及处理试验系统,对新型过约束正交并联六维力传感器进行了加载标定试验。根据试验结果计算了传感器测量误差矩阵,分析得到了传感器测量精度,从而为重载过约束并联六维力传感器的开发与应用提供了参考。     

空间柔性结构振动的直接速度反馈控制

针对空间柔性结构的低频振动问题，采用轻质的直流电机和拉索作为控制器，通过传感器和控制器的共位布局方式，建立柔性结构的直接速度反馈主动阻尼控制方案。该方案无需柔性结构的系统控制模型，只需调整速度反馈增益，即可以达到控制结构振动的目的。为验证该方案的有效性，文中对一含中心刚体的柔性卫星缩尺模型进行数值仿真，并采用气浮台模拟太空无重力环境，对该模型进行控制实验。仿真和实验的结果表明，该控制方案对空间柔性结构的低频大幅振动有很好的控制效果。     

Computational models of a nano probe tip for static behaviors

It is difficult to predict the measurement bias arising from the compliance of the atomic force microscope (AFM) probe. The issue becomes particularly important in this situation where nanometer uncertainties are sought for measurements with dimensional probes composed of flexible carbon nanotubes mounted on AFM cantilevers. We have developed a finite element model for simulating the mechanical behavior of AFM cantilevers with carbon nanotubes attached. Spring constants of both the nanotube and cantilever in two directions are calculated using the finite element method with known Young's moduli of both silicon and multiwall nanotube as input data. Compliance of the nanotube-attached AFM probe tip may be calculated from the set of spring constants. This paper presents static models that together provide a basis to estimate uncertainties in linewidth measurement using nanotubes. In particular, the interaction between a multiwall nanotube tip and a silicon sample is modeled using the Lennard-Jones theory. Snap-in and snap-out of the probe tip in a scanning mode are calculated by integrating the compliance of the probe and the sample-tip interacting force model. Cantilever and probe tip deflections and points of contact are derived for both horizontal scanning of a plateau and vertically scanning of a wall. The finite element method and the Lennard-Jones model provide a means to analyze the interaction of the probe and sample and measurement uncertainty, including actual deflection and the gap between the probe tip and the measured sample surface.