红外焦平面用面阵微透镜的氩离子束刻蚀制作

讨论了制作大面阵矩底拱面状微透镜阵列的工艺条件，给出了氩离子束刻蚀制作红外焦平面用面阵微透镜的离子束刻蚀速率的经验关系式，通过实验获得了光电材料几种常用的氩离子束刻蚀速率与氩离子束能量之间的关系曲线，用扫描电子显微镜测量了所制微透镜阵列的微结构形貌特征。     

Interdiffusion behavior of Hg in HgTe/CdTe superlattices grown on Cd0.96Zn0.04 Te (211)B substrates by molecular beam epitaxy

Double-crystal x-ray rocking curve (DCRC) and secondary-ion mass-spectroscopy (SIMS) measurements have been performed to investigate the effect of rapid thermal annealing on the interdiffusion behavior of Hg in HgTe/CdTe superlattices grown on Cd_0.96Zn_0.04Te (211)B substrates by molecular beam epitaxy. The sharp satellite peaks of the DCRC measurements on a 100-period HgTe/CdTe (100Å/100Å) superlattice show a periodic arrangement of the superlattice with high-quality interfaces. The negative direction of the entropy change obtained from the diffusion coefficients as a function of the reciprocal of the temperature after RTA indicates that the Hg diffusion for the annealed HgTe/CdTe superlattice is caused by an interstitial mechanism. The Cd and the Hg concentration profiles near the annealed HgTe/CdTe superlattice interfaces, as measured by SIMS, show a nonlinear behavior for Hg, originating from the interstitial diffusion mechanism of the Hg composition. These results indicate that a nonlinear interdiffusion behavior is dominant for HgTe/CdTe superlattices annealed at 190°C and that the rectangular shape of HgTe/CdTe superlattices may change to a parabolic shape because of the intermixing of Hg and Cd due to the thermal treatment.     

国外离子束系统（IBS）发展概况

综述了国外离子束刻蚀和沉积系统的研究进展，指出了离子束系统在半导体技术研究，开发和生产中的重要性。     

连续重整装置仿真系统的设计开发

为提高操作人员对连续重整装置开停工及事故处理的熟练程度，并对生产进行指导，采用半机理模型结合设计和现场数据介发的连续重整装置仿真系统已在现场成功投用。介绍了该仿真系统的软硬件结构、动态模型及仿真功能。     

二元光学分束器的设计

系统地阐述了几种二元光学分束器的基本设计理论，比较其算法以及衍射效率和再现误差，并提供了设计实例。     

高功率激光器的光束质量及其对激光加工的影响

本文介绍了光束的模式、评价光束质量的几种方法,着重介绍了国际标准化组织(ISO)提出的光束传输系数M作为评价光束质量的方法。文中还讨论了光束质量对焊接、切割加工的影响;热透镜效应对加工的影响等。     

连续驱动摩擦焊动态扭矩检测的新方法—VCMM法

连续驱动摩擦焊动态扭矩检测的新方法──ＶＣＭＭ法刘金合，罗键连续驱动摩擦焊扭矩是一个重要的工艺参数。摩擦焊扭矩是动态扭矩，具有时变性、速变性以及变化范围大等特点。现有的检测摩擦焊扭矩的方法均有一定的局限性’‘－’‘，本文提出了通过驱动主电机定子电压和...     

High-efficiency finishing process for metal mold by large-area electron beam irradiation

A new finishing process for metal molds by large-area electron beam (EB) irradiation is proposed in this study. In the large-area EB irradiation equipment used here, an EB with high-energy density is irradiated without focusing the beam, and so the EB with a maximum diameter of 60 mm can be used for melting or evaporating metal surface instantly. Experimental results show that the surface roughness decreases from 6 μmRz to less than 1 μmRz in just a few minutes under proper machining conditions. The corrosion resistance of metal mold surface also could be greatly improved by large-area EB irradiation. Furthermore, the surface roughness of tilting surface close to 90° could be well improved. Therefore, large-area EB irradiation method has a possibility to become a high-efficiency finishing process for metal molds.     

奥钢联板坯连铸计算机系统升级研究

某钢厂板坯连铸过程控制系统采用的奥钢联(VAI)技术,运行数年来,由于模型不透明,维护和调整困难,迫切需要升级改造。改造后的计算机系统充分考虑现有资源和需求,能够达到升级改造的目的。     

气囊在建筑施工中的应用

对气囊在路基压实密度检测、空心板梁制作和大型混凝土构件搬运中的运用进行了分析,指出将气囊这种先进的施工工艺应用到建筑施工中,加快了施工进度,确保了工程施工质量,并降低了工程施工成本,值得推广使用。