Patterning issues for the fabrication of sub-micron memory capacitors' electrodes

This paper describes some of the key issues associated with the patterning of metal electrodes of sub-micron (especially at the critical dimension (CD) of 0.15 μm) dynamic random access memory devices. Due to reactive ion etching lag, the Pt etch rate decreased drastically below the CD of 0.20 μm and thus K-th storage node electrode with the CD of 0.15 μm could not be fabricated using the Pt electrodes. Accordingly, we have proposed novel techniques to surmountly-the above difficulties. The Ru electrode cannot for the stack-type structure is introduced and alternative multischemes based on the introduction of the concave-type selfstructure upto using semi-Pt or Ru as an electrode material are outlined respectively.     

Enhanced thermal stability of a sputtered titanium-nitride film as a diffusion barrier for capacitor-bottom electrodes

The effect of a thin RuO_x layer formed on the Ru/TiN/doped poly-Si/Si stack structure was compared with that on the RuO_x/TiN/doped poly-Si/Si stack structure over the post-deposition annealing temperature ranges of 450–600°C. The Ru/TiN/poly-Si/Si contact system exhibited linear behavior at forward bias with a small increase in the total resistance up to 600°C. The RuO_x/TiN/poly-Si/Si contact system exhibited nonlinear characteristics under forward bias at 450°C, which is attributed to no formation of a thin RuO_x layer at the RuO_x surface and porous-amorphous microstructure. In the former case, the addition of oxygen at the surface layer of the Ru film by pre-annealing leads to the formation of a thin RuO_x layer and chemically strong Ru-O bonds. This results from the retardation of oxygen diffusion caused by the discontinuity of diffusion paths. In particular, the RuO_x layer in a nonstoichiometric state is changed to the RuO₂-crystalline phase in a stoichiometric state after post-deposition annealing; this phase can act as an oxygen-capture layer. Therefore, it appears that the electrical properties of the Ru/TiN/poly-Si/Si contact system are better than those of the RuO_x/TiN/poly-Si/Si contact system.     

火工品压药机装配误差的研究

针对军用雷管生产线中压药机结构,分别用极值法和概率法对压药机冲子和雷管的配合精度,进行了装配尺寸链的描述和计算,并对所得的结果进行了比较。     

NSA-500-1型氩弧焊机VD9不同接法对引弧和稳弧的影响

从一起NSA－500－1型氩弧焊机故障，分析其高压脉冲旁路二极管VD9不同接法对引弧、稳弧及设备安全的影响。     

Continuous time stochastic adaptive control: non-explosion, ε-consistency and stability

For completely observed continuous time constant parameter stochastic linear systems, an indirect adaptive control law is presented which, subject principally to a weak location hypothesis concerning the true parameter, and a persistent excitation hypothesis, generates ε-consistent recursive least squares parameter estimates and ensures the system is mean square sample path stable. The adaptive control algorith mentails (i) recursively calculating the least squares estimate of the system parameter, and (ii) recursively generating the LQR feedback gain matrix lying in a set of matrix gains γ known to contain a stabilizing gain. The a.s. non-explosion of the system is a direct consequence of this construction.     

含混合金属的羟基镍铝交联蒙托石的合成

用两种方法——取代法和共聚法合成了一系列羟基镍铝交联蒙托石(GNiAl-CLM和NiAl-CLM),首次利用两种方法,交联前和交联后高温老化处理,对交联蒙托石的热稳定性进行改进。结果表明:取代法合成的羟基镍铝交联蒙托石具有均一的(001)面衍射,底面间距d(001)值均为1.8nm左右,而共聚法合成的羟基镍铝交联蒙托石出现两个(001)面衍射,d(001)值分别为1.8nm和1.55nm;高温处理后,热稳定性得到明显改进,热稳定性可高达700℃以上。     

盐浓度对交联聚合物线团形态的影响

用核孔膜过滤法 (过滤体积对过滤时间作图 )、动态光散射法 (DLS)和扫描电镜法 (SEM )研究了交联反应前后盐 (NaCl)浓度变化对低浓度HPAM与AlCit形成的交联聚合物溶液 (LPS)中交联聚合物线团 (LPC)形态的影响。所用HPAM相对分子质量 1.1× 10 7～ 1.4× 10 7,LPS中HPAM与Al的质量比 2 0∶1,HPAM浓度 0 .1或 0 .2 g/L ,交联反应温度 40℃ ,时间 7天。实验结果表明 :①LPC的平均水力半径Rh(DLS测定值 )随交联反应时盐浓度的增大先减小后增大 ,盐浓度由 0 .5 g/L增加到 2 g/L时Rh 由 45 0nm迅速减小到 2 5 0nm ,盐浓度增加到 2 0 g/L时Rh达到最小值 16 0nm ,此后随盐浓度的继续增加Rh 有所增大 ;盐浓度 0 .5和 2 .0 g/L时Rh 的SEM测定值分别为45 0和 2 5 0nm ,与DLS结果一致。②交联反应完成后改变LPS的盐浓度 ,也可改变LPC的Rh 值 ,但改变幅度较小 ;盐浓度 0 .5 g/L时形成的LPS ,当盐浓度增加至 2 g/L时 ,Rh 值由 45 0nm减小至 35 9nm ,大于盐浓度 2 g/L时形成的LPS的Rh 值 (2 46nm) ;盐浓度 2 g/L时形成的LPS ,当盐浓度减少至 0 .5 g/L时 ,Rh 值由 2 46nm增大至32 6nm ,小于盐浓度 0 .5g/L时形成的LPS的Rh 值 (4 5 0nm)。用盐浓度改变引起LPC水化层厚度改变 ,线团收缩或舒张解释盐浓度改变时Rh 测定值的     

一种基于小波逼近的稳定直接自适应控制算法

针对一类未知不稳定非线性系统,基于小波逼近理论,提出了一种直接自适应控制 算法,并由Lyapnov理论证明了整个控制闭环系统的稳定性.     

DIRECT RESONANCE OF TURBULENT BOUNDARY LAVER OVER COMPLIANT WALLS

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Regulator problem for uncertain linear discrete-time systems with constrained control

A necessary and sufficient condition to test the robustness of a regulator of uncertain linear systems with constrained control is given. The candidate regulator for this test is that stabilizing nominal systems. An illustrative example is also given.