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11.
Woo‐Seok Cheong 《ETRI Journal》2003,25(6):503-509
Selective epitaxial growth (SEG) of silicon has attracted considerable attention for its good electrical properties and advantages in building microstructures in high‐density devices. However, SEG problems, such as an unclear process window, selectivity loss, and nonuniformity have often made application difficult. In our study, we derived processing diagrams for SEG from thermodynamics on gas‐phase reactions so that we could predict the SEG process zone for low pressure chemical vapor deposition. In addition, with the help of both the concept of the effective supersaturation ratio and three kinds of E‐beam patterns, we evaluated and controlled selectivity loss and nonuniformity in SEG, which is affected by the loading effect. To optimize the SEG process, we propose two practical methods: One deals with cleaning the wafer, and the other involves inserting dummy active patterns into the wide insulator to prevent the silicon from nucleating. 相似文献
12.
吴彦文 《电信工程技术与标准化》2003,(5):41-44
现今,信息通信从窄带向宽带、从有线向无线转变乃大势所趋。随着中国各运营商通信网络的迅猛发展,用户对网络的平均服务质量要求也越来越高,宽带无线接入技术作为一种有效的宽带解决方案而普遍地受到了人们的重视。那么,固定宽带无线接入与移动宽带无线接入有什么不同呢?本文首先在研究了固定宽带无线接入系统与移动宽带无线接入系统的网络结构后,重点讨论了两者的不同之处,即做了一个对比研究。希望能给相关人员有所参考。 相似文献
13.
自适应阵对角线加载研究 总被引:5,自引:0,他引:5
本文分析了对角线加载对自适应阵性能的影响,提出了加载门限的概念,以及加载门限的计算公式,为加载量的选取提供了方法和依据,并将加载研究的结果加以推广,提出了有效的LS自适应波束形成算法的非零初始化方法。 相似文献
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15.
Characteristics of hydrostatic bearing/seal parts for water hydraulic pumps and motors. Part 1: Experiment and theory 总被引:2,自引:0,他引:2
In this paper, the load-carrying capacity, power losses and stiffness of disk-type hydrostatic thrust bearings including the case of eccentric loading are discussed theoretically. The numerical analysis method is established based on a two-dimensional elastohydrostatic problem with an elastic deformation model, which is extended to adapt it for a non-axisymmetric load acting on the thrust bearing. The bearing is made of a combination of stainless steel/stainless steel and stainless steel/plastics. For the elastic materials, the maximum stiffness derived from, i.e., minimum film thickness is, larger than that of the rigid material in the range of a large ratio of pocket pressure and a hydrostatic balance ratio of over unity, which is defined as the ratio of the load to the maximum hydrostatic load-carrying capacity. The maximum load-carrying capacity and minimum power loss can exist in the domain of the hydrostatic balance ratio over unity for the case of the bearing consisting of elastic/rigid materials, in comparison with that composed of the same rigid materials. For the case of water, the power loss due to leakage flow is slightly larger but that due to frictional torque is much smaller than that in the case of hydraulic oil. Then, the total power loss is much smaller than that of hydraulic oil. 相似文献
16.
预处理工艺对硬质合金与金刚石膜间粘结力的影响 总被引:1,自引:0,他引:1
在两种经不同预处理的硬质合金YG8基底上,采用微波等离子体化学气相沉积法,在微波功率2kW,压强4.0kPa和6.5kPa,CH4和H2流量分别为1.6cm/s和100.0cm/s的条件下生长金刚石薄膜。利用X射线衍射检测了金刚石薄膜是否存在,用拉曼光谱分析了薄膜的质量,用金相显微镜观察了薄膜的洛氏硬度压痕,标定并比较了不同预处理工艺膜与基底的结合力。实验结果表明,不同的预处理方法对于粘结力的影响不大,最主要的因素是钴含量的多少。 相似文献
17.
本文叙述了杨凌国际会展中心基桩静力载荷试验的试验过程 ;通过对三根灌注桩承载力的试验结果分析 ,认为后压浆技术对提高灌注桩单桩极限承载力有很大作用 相似文献
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The aim of this study was to investigate the drug‐loading effects on release and mechanical properties of a scleroglucan gel, with the intention of considering them in delivery systems formulations. The rheological and kinetic properties of a 2 % w/w scleroglucan gel matrix loaded with 0, 0.02, 0.04, 0.06, 0.2 and 0.4 % w/w of theophylline (Th, used as a model drug) were investigated. Rheological measurements were performed in a controlled‐stress rotational‐shear rheometer under isothermal conditions. For theophylline release from the gel a flat Franz cell was used and the kinetic parameters were derived applying a semi‐empirical power law. The influence of scleroglucan molar weight on kinetic and rheological behaviour was also studied. Results suggest two possible effects of drug loading on the gel network: in the 0.04–0.06 % w/w Th range a plasticizing effect and in the 0.2–0.4 % w/w Th range a rigidization effect. In the first range mentioned, the changes in the gel structural properties tested by means of rheological measurements are coincident with changes in drug‐release kinetics. Copyright © 2005 Society of Chemical Industry 相似文献