Electrochemical characteristic of chemical-mechanical polishing of copper with oxide passive film

1　INTRODUCTIONThankstoitslowresistivityandhighelectromi grationresistance ,copperappearstobeaverypromisingsubstituteforaluminumininterconnec tions[1] .However ,copperisverydifficulttopattern ,andonlychemical mechanicalpolishing (CMP)tech nologycanresolvethisproblem[2 ] .CMPwasinitiallyinvestigatedandopenedoutfrom 1980soverseas[3] ,anditisthebestandonlyglobalplanarizationtech nologyatpresent ,butkeepsholdofbusinesssecretsallthetime .Fayolleetal[2 ] researchedCMPprocessofcopperwhereFe(…     

Desilication from illite by thermochemical activation

Illite occurs widely in bauxite ores and results in low alumina grade of the ores. Differential thermal analysis (DTA), thermal gravimetric analysis (TGA) and X-ray diffraction analysis (XRD) show the OH groups split off from the structural framework of illite between 500 ℃ and 700 ℃. With the increase in temperature up to about 1 100 ℃, the layer structure of illite breaks up and Si in the layers is transformed into the amorphous state. Meanwhile, mullite comes out at 1 100 ℃. Quartz occurring in illite keeps unchanged in structure in the range of 500 -1 200 ℃. A desilication process from illite by thermochemical activation followed by alkali leaching is therefore developed on the basis of the behavior that amorphous silica is alkali soluble. The investigation finds that the optimum parameters for desilication are activation temperature of 1 100 - 1 150 ℃, activation time of 90 - 120 min, leaching temperature of 95 - 110 ℃, leaching time of 90 - 120 min and concentration of caustic soda (Na2Ok) 120 - 150 g/L. An overall desilication about 45% is attained under these conditions. XRD analysis confirms that the active amorphous SiO2 has been dissolved in the alkali solution and removed from the samples, while quartz and mullite have not. The investigation also shows that the formation of mullite during activation and formation of sodium hydroalu minosilicates (Na96 Al96 Si96 O384 and 0.95Na2 O · Al2 O3 · 3.25SiO2 · 4.79 H2 O) during leaching lead to the relatively low desilication of illite.     

矿山磨光球用钢XK5159H的生产试制

XK5159H钢连铸连轧棒材用于制造矿山磨光球，对于钢的纯净度、低倍组织、探伤结果及DI值等均有严格的要求，很难控制。我们通过制定内控化学成分及合理的工艺路线，使生产试制一次成功。     

纳米磨料硬度对超光滑表面抛光粗糙度的影响

通过均相沉淀法制备了纳米CeO2和Al2O3粉体,研究了在相同抛光条件下纳米CeO2、Al2O3和SiO2磨料对硅片的抛光效果,用原子力显微镜观察了抛光表面的微观形貌并测量其表面粗糙度.结果表明:纳米CeO2磨料抛光后表面具有更低的表面粗糙度,在5 靘5 靘范围内表面粗糙度Ra值为0.240 nm,而且表面的微观起伏更趋向于平缓;考虑了纳米磨料在抛光条件下所发生的自身变形,其变形量相当于一部分抵消了纳米磨料嵌入基体材料的切削深度,而这个切削深度最终决定了抛光表面的粗糙度;分析指出这个变形量与纳米磨料的硬度成反比,硬度低的纳米磨料由于自身变形量大,导致切削深度小,抛光后表面的粗糙度值低.解释了在相同的抛光条件下不同硬度的纳米磨料具有不同的抛光表面粗糙度的原因.     

脱酮肟型有机硅建筑密封胶的研制

本文介绍了脱酮肟型有机硅建筑密封胶的配制原理、工艺、产品性能及其影响因素     

内陆核电厂放射性废液中硼酸的反渗透分离实验研究

建设内陆核电是我国经济社会发展的必然需求,但由于内陆核电自然环境和社会环境的特殊性,必须更进一步考虑排放对环境和公众的安全影响,对放射性废液进行深化处理,在解控排放的基础上进一步降低排放水平。本文在内陆AP1000机组已实施的放射性废液处理系统改进的基础上,开展了放射性废液深化处理研究,通过大量实验考察了不同进水pH值、硼浓度、含盐量、水温等水质条件和不同工作压力、回收率等运行条件下反渗透装置对硼酸的去除性能和对模拟放射性核素的截留能力。结果表明,通过控制适当的工艺条件,可以去除废液中80%以上的硼酸,同时保持很好的核素去除效果,达到进一步降低排放水平的目的。研究成果可为内陆核电厂放射性废液处理系统深化处理工程应用提供有力的技术支撑,并为后续内陆核电放射性废液深化处理提供参考。     

表面处理对氮化硅陶瓷力学性能的影响

采用X射线衍射应力分析的sin2ψ法计算了Si3N4陶瓷试样的残余应力，并分别测量了表面处理前后Si3N4试样的力学性能。结果表明，经平面磨削后的Si3N4试样表面残余应力为拉应力，而抛光处理可适当降低残余应力。两种方法都使试样抗弯强度降低。     

EFFECTS OF NONIONIC SURFACTANTS ON PERFORMANCE OF COPPER CHEMICAL MECHANICAL POLISHING

During copper chemical mechanical polishing (Cu-CMP), the physical properties of slurry, such as the dispersion and suspension stability of abrasives, the interaction between particles and the polished surface, and the rheological characteristics, greatly affect the planarization efficiency. In this study, several nonionic surfactants were added to change the aforementioned physical characteristics of slurry and Cu-CMP performance. Their effects were investigated. The experimental results showed that Al₂O₃ slurry with 300 ppm Triton DF-16 could enhance the wettability of the Cu surface and stabilize the dispersion of abrasives in the slurry. Therefore, the passivation reaction on the Cu surface during CMP would occur uniformly, and the removal of particles during post cleaning could be improved. Cu CMP using the slurry with an adequate amount of nonionic surfactants, Triton DF-16, is proposed to reduce the surface roughness, enhancing the planarity.     

CH4-CaSO4和H2S-Fe2O3反应体系的热力学和动力学研究

The destruction of hydrocarbon in deep carbonate diagenetic environment is one of problems on the formation of oil and gas. Organic-inorganic reactions in the process of TSR(Thermochemical Sulfate Reduction) are the main reason to make disappearance of the hydrocarbons. The work in this field has often been the subject of much research work in recent years. In this paper, the thermodynamics of CH4-CaSO4 and H2S-Fe2O3 systems is discussed to investigate the possibility of reactions. It is found that these two reactions can proceed spontaneously.Increasing temperature is favorite for CH4-CaSO4 system but disfavorite for H2S-Fe2O3 system. Thermal simulation experiments were carried out using autoclave at high temperature and high pressure. The properties of the products were characterized by microcoulometry, FT-IR and XRD methods. On the basis of the experimental data, a reaction kinetic model is developed and kinetic parameters are determined.     

新型不锈钢化学抛光剂工艺研究

叙述了一般不锈钢化学抛光溶液的基本类型和在实际应用中存在的问题。着重论述MW－6不锈钢化学抛光剂的工艺研究过程、工艺条件、质量指标及检测方法，同时介绍了它与传统不锈钢化学抛光剂的比较，经验价值，表面质量控制，应用领域及应用前景。