多弧物理气相沉积技术制备（TiAl）N超硬膜

主要介绍采用多弧物理气相沉积（ＰＶＤ）技术研制新型（ＴｉＡｌ）Ｎ超硬膜的工艺技术特点。对其膜层相结构、化学成分、显微组织等方面做了分析研究。结合工业生产实际应用进行了（ＴｉＡｌ）Ｎ与ＴｉＮ涂层刀具切削耐用度对比试验。     

Numerical analysis of geometry effects for target re-deposition during low pressure hollow cathode magnetron sputtering

During low pressure ionized metal physical vapor deposition (PVD) of Cu seed layer for microprocessor interconnects, the re-deposited Cu film on the hollow cathode magnetron (HCM) target may fall off and damage the Cu film on the wafer. An analytical view factor model based on the analogy between metal sputtering and diffuse thermal radiation was used to obtain re-deposition profiles for HCM targets in low pressure (below 0.1 Pa) Cu ionized PVD. The model predictions indicate that there is an inherent non-uniformity in the re-deposition profile even for uniform sputtering over the entire HCM target. The predicted re-deposition profile agrees with experimental observations. Subsequent target redesign studies found that the non-uniformity in the re-deposition profile could be mitigated by using a conical sidewall between the top disk and the cylindrical sidewall or reducing the length of the cylindrical sidewall.     

PVD improvement combined with surcharge and vacuum preloading including simulations

This paper presents the study of PVD improved reconstituted specimen with and without vacuum preloading on large-scale consolidometer in the laboratory tests. Subsequently, the results of the laboratory tests were analyzed and simulated by 2D (axisymmetric) finite element method (FEM) to back-analyze and confirm the related design parameters which were used further in subsequent numerical experiments. The laboratory test results indicated that the increased hydraulic conductivity in the smear zone of PVD with vacuum preloading (Vacuum-PVD) resulted in the increase in the coefficient of horizontal consolidation (Ch) by 16% as well as the decrease in the ratio between the horizontal hydraulic conductivity of the undisturbed zone (Kh) to the horizontal hydraulic conductivity in the smear zone (Ks) or (Kh/Ks) of about 10%. The Vacuum-PVD and PVD only have the same settlement magnitudes with similar equivalent loads.     

Prefabricated and electrical vertical drains for consolidation of soft clay

The use of prefabricated vertical drains to consolidate soft clay is a common ground improvement method. In large projects laboratory testing of PVDs for selection and quality assurance is considered important. This paper presents a review of PVD laboratory testing. The need to provide simulated site conditions in the test is emphasized. In addition instrumented PVDs show that installation stresses in deep soft clay deposits could cause filter rupture under tensile failure. It is also shown that the maximum required discharge capacity of a PVD is obtained by equating the flow rate of the PVD under the installation and consolidation states to the maximum rate of volume reduction of the influential clay cylinder of the PVD. Consolidation can be enhanced much faster in clay soils if vertical drains manufactured with conducting polymer are used. Some laboratory tests, field tests and field applications of such electric vertical drains (EVD) are presented. A minimum current density at appropriate applied voltage is required to benefit from the electric osmosis (EO) application. EVD in dewatering clay soils, extracting heavy metals in clay soils and few other geotechnical applications are also presented.     

Study on the sensing capability of Fe‐C alloy corrosion sensing film

In this paper, a Fe‐C alloy corrosion sensing film was fabricated on the fiber core by PVD, PVD incorporated with electroplating, and other methods. A Light Power Test System which was composed of a LD lamp‐house, a Bare Fiber Adapter (BFA) and a light power meter was used to detect the changes of lamp‐house's output power in the corrosion process of the Fe‐C alloy film. The major factors that may have some effects on the sensing capability of the Fe‐C alloy film were analyzed. The initial results show that lamp‐house's output power increases gradually with the occurrence of Fe‐C alloy film's corrosion, which accords basically with the sensing principle of the film. There are some diversities in the sensing ability of the Fe‐C alloy film fabricated by different methods. The trend of changes of lamp‐house's output power can be used as a qualitative token of the corrosion information of the Fe‐C alloy film. These data have been used for some elementary preparations for a carbon steel Fiber Optical Corrosion Sensor (FOCS).     

Recrystallization and grain growth of nanocomposite Ti–B–N coatings

Nanocomposite Ti–B–N coatings with different chemical composition were prepared by non-reactive co-sputtering of a segmented TiN–TiB₂ target. The coatings investigated are primarily composed of nanocrystalline TiN and TiB₂ phases. Increasing boron content results in a decreasing grain size from approximately 6 to 2 nm. During a thermal treatment of such coatings solely recovery and recrystallization with subsequent grain growth would appear, since the two phases are in thermodynamic equilibrium. Differential scanning calorimetry (DSC) and X-ray diffraction analysis were used to investigate the recrystallization behavior and subsequent grain growth of the nanocomposite Ti–B–N coatings. On heating the coating samples, which were removed chemically from their low alloyed steel substrates, an exothermal peak appeared during the DSC measurements indicating grain growth. From the onset temperature of this peak the recrystallization temperature was found which increases with increasing boron content from 1032 to 1070 °C. Activation energies for grain growth are obtained from Kissinger plots and yield values decreasing from 7.9 to 4.4 eV with increasing boron content. After heat treatment up to 1400 °C during the DSC measurements the coatings showed grain sizes within the range of 15–30 nm. It was found that the highest recrystallization temperature does not imply the highest activation energy for grain growth.     

The wet corrosion of Mo and Mo‐Ti alloy thin film – Part IV: The effect of nitriding

A considerable number of detailed investigations have been carried out on the deposition and characterisation of molybdenum and molybdenum‐titanium‐nitride films by employing a variety of techniques. However, very little is currently known about the effect of composition (N₂/Ar flow rate) on the corrosion properties of MoN and MoTiN thin films for aggressive ambient conditions. In this work, the electrochemical and corrosion behaviour of MoN and MoTiN thin films, produced by Physical Vapour Deposition (PVD) with different N₂/Ar flow rates, has been investigated by Electrochemical Impedance Spectroscopy (EIS) in aerated alkaline chloride solution and compared with the behaviour of pure molybdenum in the same environment. Results obtained indicate that increasing nitrogen content in the film leads to a beneficial effect on the corrosion resistance, but results in decreased electrical conductivity of the film that may limit their application as back contact in photovoltaic modules.     

Neue Kapseltechnik für Diamantverbundwerkstoffe mittels PVD‐Verfahren

Novel encapsulation technique for diamond composites using PVD‐process For machining of mineral materials diamond tools consisting of a steel body combined with diamond impregnated segments are used. Frequently, these segments are hot pressed. Other process routes are pressureless sintering of green compacts partly combined with hot isostatic pressing and hot isostatic pressing of encapsulated powder mixtures. The compaction effect of hot isostatic pressing require a low porosity of sintered components realized by using ultra‐fine metal powder or an impermeable capsule made of metal or glass. The Institute of Materials Engineering pursues a novel process route by physical vapor deposition of a coating on pressureless sintered composites. The thin coating acts as a capsule and guarantees the pressure transfer in the following hot isostatic pressing process. Although bronze powders with particle sizes up to 90 μm are used, the manufacturing of diamond composites with low porosities is possible. In comparison to conventional encapsulation‐techniques the main advantages of this novel process route are the use of comparatively coarse metal powders and a larger geometric flexibility.     

光化学汽相淀积技术在薄膜备制中的应用

介绍了光化学汽相淀积法的原理以及ＰＶＤ－１０００设备淀积薄膜的规律，特点等，并且给出了所淀积的ＳｉＯ２膜，Ｓｉ３Ｎ４膜和ＺｎＳ膜的基本特性。     

Elektronenstrahlbehandlung von PVD‐Hartstoffschichten

Electron beam treatment of PVD – hard coatings Coatings of the type CrN_x, (Ti, Cr)N, (Ti, Al)N, Ti(C, N) and Ti(B,N) were deposited on the quenched and tempered steel C45 to investigate the effect of electron beam treatment on the structure and the properties of hard coated steels. A controlled energy input by electron beams was used to investigate the thermal behaviour of hard coatings with fixing the transformation levels by self‐quenching. Simultaneously a different case hardening of the substrate was caused providing a different effect of supporting the hard layer. There are big differences in the thermal stability of the investigated coatings. The surface hardness, adhesion and wear resistance of the composit hard coating/steel was improved in dependence on the energy input. The use of electron beam technologies enables the generation of support layers which locally increase the working behaviour of hard coated steel.