Characterization and optimization of copper chemical mechanical planarization

The feature scale planarization of the copper chemical mechanical planarization (CMP) process has been characterized for two copper processes using Hitachi 430-TU/Hitachi T605 and Cabot 5001/Arch Cu10K consumables. The first process is an example of an abrasive-free polish with a high-selectivity barrier slurry, while the second is an example of a conventional abrasive slurry with a low-selectivity barrier slurry. Copper fill planarization has been characterized for structures with conformal deposition as well as with bumps resulting from bottom-up fill. Dishing and erosion were characterized for several structures after clearing. The abrasive-free polish resulted in low sensitivity to overpolish and low saturation levels for dishing and erosion. Consequently, this demonstrated superior performance when compared to the International Technology Roadmap for Semiconductors (ITRS) 2000 roadmap targets for planarization. While the conventional slurry could achieve the 0.13-μm technology node requirements, the abrasive-free polish met the planarization requirements beyond the 0.10-μm technology node.     

QUANTUM MECHANICAL MODEL AND SIMULATION OF GaAs/AlGaAs QUANTUM WELL INFRARED PHOTO- DETECTOR-Ⅰ OPTICAL ASPECTS

ＩｎｔｒｏｄｕｃｔｉｏｎＩｎｆｒａｒｅｄｄｅｔｅｃｔｏｒｔｅｃｈｎｉｑｕｅｈａｓｂｅｅｎａｋｅｙｆａｃｔｏｒｉｎｔｈｅｄｅｖｅｌｏｐｍｅｎｔｏｆｔｈｅｉｎｆｒａｒｅｄｔｅｃｈｎｏｌｏｇｙｆｏｒｍｏｒｅｔｈａｎ 4 0 ｙｅａｒｓ .Ｓｉｎｃｅ 1970 ,ｓｅｍｉｃｏｎｄｕｃｔｏｒｓｌｉｋｅＩｎＳｂａｎｄＨｇＣｄＴｅｈａｖｅｂｅｅｎｔｈｅｐｒｉｎｃｉｐａｌｍａｔｅｒｉａｌｓｆｏｒｖａｒｉｏｕｓｉｎｆｒａｒｅｄｄｅｔｅｃｔｏｒａｐｐｌｉｃａｔｉｏｎｓ .Ｔｈｅｆｏｒｍａｔｏｆｔｈｅｉｎｆｒａｒｅｄｄｅｔｅｃｔｏｒｍｏｔｉｖａｔｅｄｂｙｓｍａｒｔｔｈｅｒｍａｌｉｍａｇｉｎｇｓｙｓｔｅｍｃｈａｎｇｅｄｆｒｏｍｓｉｎｇｌｅｅｌｅｍｅｎｔｄｅｖｉｃｅｔｏｆｏｃａｌｐｌａｎａｒｒａｙｓ(ＦＰＡｓ)ｉｎｔｈｅｍｉｄｄｌｅｏｆ 80’ｓ [1].Ｔｏｄａｙ’ｓｔｅｃｈｎｏｌｏｇｙｏｆｉｎｆｒａｒｅｄｄｅｔｅｃｔｏｒｃｏｎｃｅｎｔｒａｔｅｓｌａｒｇｅｌｙｏｎｆｏｃａｌｐｌａｎａｒｒａｙｓ ,ｅｘｐｅｃｉａｌｌｙｆｏｒｓｅｎｓｉｔｉｖｅ ,ｈｏｍｏｇｅｎｅｏｕｓａｎｄｌａｒｇｅｆｏｒｍａｔｓｃａｌｅｄｅｖｉｃｅｓ .ＨｇＣｄＴｅ...     

Processing and microstructure of non-oxide ceramic fibres

Research and development efforts on high-temperature, oxidation-resistant fibres have increased over the past decade due to the demand for light-weight, stiff and strong composite materials in aerospace applications. Varieties of ‘high-performance’, continuous, non-oxide fibres with low-density, high tensile strength and tensile modulus have been developed either from organic precursors or via chemical vapour deposition for fabrication of ceramic matrix composites. Fibres derived from polymer precursors (e.g. Nicalon, Tyranno, HPZ) are small in diameter (compared to CVD monofilaments) and are ideally suited for ceramic composites. Processing, microstructural stability and mechanical properties of these newly developed SiC and Si₃N₄ base fibres are briefly reviewed in this paper.     

微型无阀泵参数化结构设计及测试

 从理论计算和试验两方面研究了用于微流控化学分析芯片的微型无阀泵流动特性，初步建立了微型无阀泵流道结构的数学模型，重点讨论了结构参数的选取原则及相应的流动阻尼系数的计算方法． 通过试验验证了数值计算的可靠性，为微型无阀泵参数化设计及优化提供了理论依据及经验曲线．     

不动管柱换层采油工艺技术与应用

胜利油田已进入高含水中后期采油阶段 ,应用新开发的不动管柱换层采油工艺技术 ,取得了很好的分层开采效果。对这项工艺技术的分析表明 ,该项工艺技术的创新点在于 :(1)管柱满足直井、大斜度井、定向井机械控水的使用要求 ;(2 )设计了密封可靠、解封安全的Y4 41E型液压封隔器及其配套工具 ;(3)YK型液压换层开关换层可靠 ,性能稳定 ;(4)可随意换层生产 ,减轻了层间生产矛盾 ,降低了作业成本。     

Effects of hydrolysis on the physical properties of short glass-fibre reinforced poly(ethylene terephthalate)

The mechanical fracture strength and toughness of short-fibre composites, injection moulded from compounds of poly(ethylene terephthalate) (PET) containing 10 and 30% (by weight) (w/o) glass, have been investigated and the dependence upon matrix hydrolytic stability determined. Mouldings have been characterised by several physical techniques to evaluate molecular weight, degradation rates, crystallinity and morphology, whilst time-dependent gravimetric data were derived to quantify sorption kinetics and allow comparisons with theoretical reaction rates to be made. During melt processing, PET is hydrolysed extremely rapidly by traces of moisture (<0.02w/o). yet the inherent strength of moulded composites declines significantly only below an apparently critical molecular weight. However, on long-term humid ageing in hot water, impact behaviour especially is rendered more complex by simultaneous crystallisation, molecular reorder and losses of interfacial bond strength.     

NiTi形状记忆薄膜的显微结构和力学性能

NiTi形状记忆合金薄膜具有形状记忆效应，极有希望用于制造高技术领域微电子机械系统中的微型激发器。NiTi形状记忆合金薄膜在制备和使用过程中需要高品质（衬）底材。本文利用高分辨电子显微学和高分辨分析电子显微学详细研究了硅底材NiTi形状记忆合金薄膜的NiTi／Si和NiTi／SiO2微结构体系，包括薄膜精细结构和界面反应。也研究了其显微结构和力学性能的关系。特别给出了NiTi形状记忆合金薄膜产生疲劳过程的微观过程的起因，通过高达十万个使用热循环前后样品显微结构变化的比较，发现纳米尺度上的TiNi3新相的形成导致疲劳过程的发生。如何抑制TiNi3新相形成的研究正在进行之中，这将为进一步提高NiTi形状记忆合金的使用寿命指出方向。     

啤酒标签用铝箔力学性能研究

分析研究了连续铸轧坯料的合金成分，冶金组织和热处理工艺对啤酒标用铝箔力学性能的影响，选定成形性优良的合金系列，并优化铸轧工艺和热处理工艺是提高铝箔力学性能的关键。     

Simulation of Strength Distribution in Ground Ceramics by Incorporating Residual Stress Effect

Strength of ground ceramics may be affected by residual stress as well as surface flaws induced by grinding. Strength prediction for ground ceramics is convenient for mechanical design of ceramic components. In this article, a numerical procedure based on fracture mechanics was proposed to estimate strength distribution of ground ceramics by considering grinding-induced residual stress. Bending strength and residual stress of ground ceramics were measured for three grinding-conditions. By comparison of simulated results with experimental ones, it was revealed that strength characteristics in experiments were well simulated by using the proposed procedure.     

Poly(butylene terephthalate)–clay nanocomposites prepared by melt intercalation: morphology and thermomechanical properties

Nanocomposites based on poly(butylene terephthalate) (PBT) and an organoclay (Cloisite 30B) were prepared by melt blending using a twin‐screw extruder. Two kinds of PBTs, ie PBT‐A and PBT‐B, with different inherent viscosities (η_inh), were used for this study (η_inh of PBT‐A and PBT‐B were 0.74 and 1.48, respectively). Dispersion of the clay layers in the PBT nanocomposites was characterized by using X‐ray diffraction (XRD) and transmission electron microscopy (TEM). Tensile and dynamic mechanical properties and non‐isothermal crystallization temperatures of the nanocomposites were also examined. Nanocomposites based on the higher‐viscosity PBT (PBT‐B) showed a higher degree of exfoliation of the clay and a higher reinforcing effect when compared to the composites based on the lower‐viscosity PBT (PBT‐A). The clay nanolayers dispersed in PBT matrices lead to increases in the non‐isothermal crystallization temperatures of the PBTs, with such increases being more significant for the PBT‐B nanocomposites than for the PBT‐A nanoocomposites. Copyright © 2004 Society of Chemical Industry