MEMS-based gas flow sensors

Micro-electro-mechanical system (MEMS) devices integrate various mechanical elements, sensors, actuators, and electronics on a single silicon substrate in order to accomplish a multitude of different tasks in a diverse range of fields. The potential for device miniaturization made possible by MEMS micro-fabrication techniques has facilitated the development of many new applications, such as highly compact, non-invasive pressure sensors, accelerometers, gas sensors, etc. Besides their small physical footprint, such devices possess many other advantages compared to their macro-scale counterparts, including greater precision, lower power consumption, more rapid response, and the potential for low-cost batch production. One area in which MEMS technology has attracted particular attention is that of flow measurement. Broadly speaking, existing micro-flow sensors can be categorized as either thermal or non-thermal, depending upon their mode of operation. This paper commences by providing a high level overview of the MEMS field and then describes some of the fundamental thermal and non-thermal micro-flow sensors presented in the literature over the past 30 years or so.     

Cyclic moving average control approach to cylinder pressure and its experimental validation

Cyclic variability is a factor adversely affecting engine performance. In this paper a cyclic moving average regulation approach to cylinder pressure at top dead center （TDC） is proposed, where the ignition time is adopted as the control input. The dynamics from ignition time to the moving average index is described by ARMA model. With this model, a one-step ahead prediction-based minimum variance controller （MVC） is developed for regulation. The performance of the proposed controller is illustrated by experiments with a commercial car engine and experimental results show that the controller has a reliable effect on index regulation when the engine works under different fuel injection strategies, load changing and throttle opening disturbance.     

大直径圆筒结构墙前后土压力数值分析

为研究大直径圆筒结构墙前后土压力分布规律,完善大直径圆筒结构土压力的计算方法,采用有限元软件ABAQUS进行数值分析,土体的本构关系采用D-P模型,筒与土接触面模拟采用接触对算法,计算不同筒径和埋深下大直径圆筒结构的土压力,通过比较各种工况的计算结果,得出筒前及筒后竖向土压力随筒径以及埋深变化的分布规律,为相关设计提供一定依据。     

Isochoric (p-π-T) measurements on liquid and gaseous air from 67 to 400 K at pressures to 35 MPa

Comprehensive isochoricp--T measurements have been carried out on liquid and gaseous air along 16 isochores at densities ranging from 2 to 32 mol · dm^–3. The air mixture has a nominal composition of 0.7813 N₂ + 0.2096 O₂ + 0.0092 Ar. Thep--T data cover a temperature range from 67 to 400 K at pressures up to 35 MPa. Comparisons with experimental results from independent sources are presented using a fundamental equation of state based. in part, on thep--T data from this study.     

Effect of pressure on three catalytic partial oxidation reactions at millisecond contact times

The effects of pressure on reactant conversion and product selectivities in three catalytic oxidation systems have been examined at pressures between 1 and > 5 atm. Reaction was sustained autothermally near adiabatic operating conditions at temperatures of 1000°C with residence times over the noble metal catalysts between 10^–4 and 10^–2 s. The three systems investigated were (1) HCN synthesis over Pt-10% Rh gauze catalysts, (2) methane oxidation to synthesis gas (CO and H₂) over rhodium-coated monoliths, and (3) ethane conversion to ethylene over platinum-coated monoliths. We find that selectivities in all three reactions do not change dramatically with approximately a five-fold increase in pressure. This strongly suggests that free radical homogeneous chain reactions are not significant in these processes and that they can be operated reliably above atmospheric pressure. For the synthesis of HCN over Pt-10% Rh gauzes, the selectivity to HCN can be maintained above 0.75 at pressures up to 5.5 atm. Selectivities to synthesis gas (CO and H₂) from a methane-air mixture over a Rh-coated foam monolith at pressures up to 5.5 atm were maintained above 0.90. Over a Pt-coated foam monolith, the selectivity to ethylene from ethane-air and ethane-O₂ mixtures was independent of pressure up to 6.5 atm and conversion rose slightly although it was necessary to maintain constant velocity and residence time over the catalyst to avoid carbon formation.This research was supported by DOE under Grant No. DE-FG02-88ER13878.     

Bio-Inspired Artificial Fast-Adaptive and Slow-Adaptive Mechanoreceptors With Synapse-Like Functions

Development of artificial mechanoreceptors capable of sensing and pre-processing external mechanical stimuli is a crucial step toward constructing neuromorphic perception systems that can learn and store information. Here, bio-inspired artificial fast-adaptive (FA) and slow-adaptive (SA) mechanoreceptors with synapse-like functions are demonstrated for tactile perception. These mechanoreceptors integrate self-powered piezoelectric pressure sensors with synaptic electrolyte-gated field-effect transistors (EGFETs) featuring a reduced graphene oxide channel. The FA pressure sensor is based on a piezoelectric poly(vinylidene fluoride-trifluoroethylene) (P(VDF-TrFE)) thin film, while the SA pressure sensor is enabled by a piezoelectric ionogel with the piezoelectric-ionic coupling effect based on P(VDF-TrFE) and an ionic liquid. Changes in post-synaptic current are achieved through the synaptic effect of the EGFET by regulating the amplitude, number, duration, and frequency of tactile stimuli (pre-synaptic pulses). These devices have great potential to serve as artificial biological mechanoreceptors for future artificial neuromorphic perception systems.     

Phase Equilibrium studies in the system “FeO”–SiO2–Al2O3–CaO–MgO at 1200 °C and Po2 10-8atm

Iron oxides and silica are the major components of copper smelting slag. The oxides of aluminum, calcium and magnesium are also present in the slag that is introduced through copper concentrate, flux and refractories. Liquidus temperatures of the copper smelting slags are usually controlled by Fe/SiO₂. The concentrations of Al₂O₃, CaO and MgO, and FeO/Fe₂O₃ in the slag can also affect the liquidus temperatures where FeO/Fe₂O₃ is a function of oxygen partial pressure. High temperature equilibration under controlled oxygen partial pressure followed by quenching and electron probe microanalysis were used to determine the compositions of the liquid and solid phases at 1200 °C and Po₂ 10^-8 atm. The experimental results are presented in the forms of pseudo-ternary sections “FeO”-CaO-SiO₂ at fixed 2, 4 and 6 wt pct MgO, and 2 + 2, 4 + 4 and 6 + 6 wt pct MgO + Al₂O₃. Spinel and tridymite are the major primary phases in the composition range investigated. In addition, CaSiO₃, pyroxene, olivine, and melilite are also present. The isotherms in the spinel and tridymite primary phase fields move towards higher SiO₂ concentration directions with increasing CaO, Al₂O₃, and MgO concentrations. The experimentally determined results are compared with the FactSage calculations.     

Skin-like Omnidirectional Stretchable Platform with Negative Poisson's Ratio for Wearable Strain–Pressure Simultaneous Sensor

Conventional elastomeric polymers used as substrates for wearable platforms have large positive Poisson's ratios (≈0.5) that cause a deformation mismatch with human skin that is multidirectionally elongated under bending of joints. This causes practical problems in elastomer-based wearable devices, such as delamination and detachment, leading to poorly reliable functionality. To overcome this issue, auxetic-structured mechanical reinforcement with glass fibers is applied to the elastomeric film, resulting in a negative Poisson's ratio (NPR), which is a skin-like stretchable substrate (SLSS). Several parameters for determining the materials and geometrical dimensions of the auxetic-structured reinforcing fillers are considered to maximize the NPR. Based on numerical simulation and digital image correlation analysis, the deformation tendencies and strain distribution of the SLSS are investigated and compared with those of the pristine elastomeric substrate. Owing to the strain-localization characteristics, an independent strain-pressure sensing system is fabricated using SLSS with a Ag-based elastomeric ink and a carbon nanotube-based force-sensitive resistor. Finally, it is demonstrated that the SLSS-based sensor platform can be applied as a wearable device to monitor the physical burden on the wrist in real time.     

MXene Functionalized,Highly Breathable and Sensitive Pressure Sensors with Multi-Layered Porous Structure

Breathable, flexible, and highly sensitive pressure sensors have drawn increasing attention due to their potential in wearable electronics for body-motion monitoring, human-machine interfaces, etc. However, current pressure sensors are usually assembled with polymer substrates or encapsulation layers, thus causing discomfort during wearing (i.e., low air/vapor permeability, mechanical mismatch) and restricting their applications. A breathable and flexible pressure sensor is reported with nonwoven fabrics as both the electrode (printed with MXene interdigitated electrode) and sensing (coated with MXene/silver nanowires) layers via a scalable screen-printing approach. Benefiting from the multi-layered porous structure, the sensor demonstrates good air permeability with high sensitivity (770.86–1434.89 kPa⁻¹), a wide sensing range (0–100 kPa), fast response/recovery time (70/81 ms), and low detection limit (≈1 Pa). Particularly, this sensor can detect full-scale human motion (i.e., small-scale pulse beating and large-scale walking/running) with high sensitivity, excellent cycling stability, and puncture resistance. Additionally, the sensing layer of the pressure sensor also displays superior sensitivity to humidity changes, which is verified by successfully monitoring human breathing and spoken words while wearing a sensor-embedded mask. Given the outstanding features, this breathable sensor shows promise in the wearable electronic field for body health monitoring, sports activity detection, and disease diagnosis.     

A Sensing and Stretchable Polymer-Dispersed Liquid Crystal Device Based on Spiderweb-Inspired Silver Nanowires-Micromesh Transparent Electrode

Polymer-dispersed liquid crystal (PDLC) devices are truly promising optical modulators for information display, smart window as well as intelligent photoelectronic applications due to their fast switching, large optical modulation as well as cost-effectiveness. However, realizing highly soft PDLC devices with sensing function remains a grand challenge because of the intrinsic brittleness of traditional transparent conductive electrodes. Here, inspired by spiderweb configuration, a novel type of silver nanowires (AgNWs) micromesh-based stretchable transparent conductive electrodes (STCEs) is developed to support the realization of soft PDLC device. Benefiting from the embedding design of AgNWs micromesh in polydimethylsiloxane (PDMS), the STCEs can maintain excellent electrical conductivity and transparency even in various extreme conditions such as bending, folding, twisting, stretching as well as multiple chemical corrosion. Further, STCEs with the embedded AgNWs micromesh endow the assembled PDLC device with excellent photoelectrical properties including rapid switching speed (<1 s), large optical modulation (69% at 600 nm), as well as robust mechanical stability (bending over 1000 cycles and stretching to 40%). Moreover, the device displays the pressure sensing function with high sensitivity in response to pressure stimulus. It is conceivable that AgNWs micromesh transparent electrodes will shape the next generation of related soft smart electronics.