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41.
Perfluorocarbon gas is widely used in the semiconductor industry. However, perfluorocarbon has a
negative effect on the global environment owing to its high global warming potential (GWP) value.
An alternative solution is essential. Therefore, we evaluated the possibility of replacing conventional
perfluorocarbon etching gases such as CHF3 with C6F12O, which has a low GWP and is in a liquid
state at room temperature. In this study, silicon oxynitride (SiON) films were plasma-etched using
inductively coupled CF4 +C6F12O+O2 mixed plasmas. Subsequently, the etching characteristics
of the film, such as etching rate, etching profile, selectivity over Si, and photoresist, were investigated.
A double Langmuir probe was used and optical emission spectroscopy was performed for plasma
diagnostics. In addition, a contact angle goniometer and x-ray photoelectron spectroscope were used
to confirm the change in the surface properties of the etched SiON film surface. Consequently, the
etching characteristics of the C6F12O mixed plasma exhibited a lower etching rate, higher SiON/Si
selectivity, lower plasma damage, and more vertical etched profiles than the conventional CHF3 mixed plasma. In addition, the C6F12O gas can be recovered in the liquid state, thereby decreasing
global warming. These results confirmed that the C6F12O precursor can sufficiently replace the
conventional etching gas. 相似文献
42.
43.
We report a simple processing method to simultaneously improve the efficiency and stability of organic solar cells (OSCs). Poly(4-styrene sulfonate)-doped poly(3,4-ethylenedioxy-thiophene (PEDOT:PSS), widely used as hole transport layer (HTL) in OSCs, tends to accelerate the degradation of devices because of its hygroscopic and acidic properties. In this regard, we have modified PEDOT:PSS to reduce its hygroscopic and acidic properties through a condensation reaction between PEDOT:PSS and poly(ethylene glycol) methyl ether (PEGME) in order to improve the efficiency and stability of OSCs. As a result, the power conversion efficiency (PCE) increased by 21%, from 2.57% up to 3.11%. A better energy level alignment by the reduced work function of the modified PEDOT:PSS with a highest occupied molecular orbital (HOMO) level of poly(3-hexylthiophene-2,5-diyl) (P3HT) is considered the origin of the improved the efficiency. The half-life of OSCs with PEDOT:PSS modified with PEGME buffer layer also increased up to 3.5 times compared to that of devices with pristine PEDOT:PSS buffer layer. 相似文献
44.
This paper presents an effective approach to achieve efficient electrical actuation and monitoring of shape recovery based on patterned Au electrodes on shape memory polymer (SMP). The electrically responsive shape recovery behavior was characterized and monitored by the evolution change in electrical resistance of patterned Au electrode. Both electrical actuation and temperature distribution in the SMP have been improved by optimizing the Au electrode patterns. The electrically actuated shape recovery behavior and temperature evolution during the actuation were monitored and characterized. The resistance changes could be used to detect beginning/finishing points of the shape recovery. Therefore, the Au electrode not only significantly enhances the electrical actuation performance to achieve a fast electrical actuation, but also enables the resistance signal to detect the free recovery process. 相似文献
45.
This article reviews the current state of the art in the design of traditional uni-directional fibre laminate construction; beyond the ubiquitous balanced and symmetric design. A ply termination algorithm is then employed to develop permissible tapered designs, with single-ply terminations and ply contiguity constraints, which are free from undesirable changes in mechanical coupling characteristics. More importantly however, is the fact that all tapered designs have immunity to thermal warping distortion; which include all combinations of anti-symmetric (or cross-symmetric), non-symmetric and symmetric angle- and cross-ply sub-sequence symmetries. Tapered designs are presented for laminates with fully uncoupled properties, and those possessing extension–shearing and/or bending–twisting coupling. Such designs represent typical fuselage skin thicknesses, i.e., with between (n =) 12 and 16 plies, but due consideration is also given to new fuselage design concepts with grid-stiffeners and/or geodesic stiffener arrangements, for which thinner designs (n ⩾ 8) are of interest. 相似文献
46.
Site-specific seismic hazard analysis is crucial for designing earthquake resistance structures, particularly in seismically active regions. Shear wave velocity ( V S) is a key parameter in such analysis, although the economy and other factors restrict its direct field measurement in many cases. Various V S–SPT– N correlations are routinely incorporated in seismic hazard analysis to estimate the value of V S. However, many uncertainties question the reliability of these estimated V S values. This paper comes up with a statistical approach to take care of such uncertainties involved in V S calculations. The measured SPT– N values from all the critical boreholes were converted into statistical parameters and passed through various correlations to estimate V S at different depths. The effect of different soil layers in the boreholes on the Vs estimation was also taken into account. Further, the average shear wave velocity of the top 30 m soil cover ( V S30) is estimated after accounting for various epistemic and aleatoric uncertainties. The scattering nature of the V S values estimated using different V S– N correlations was reduced significantly with the application of the methodology. Study results further clearly demonstrated the potential of the approach to eliminate various uncertainties involved in the estimation of V S30 using general and soil-specific correlations. 相似文献
47.
《Journal of the European Ceramic Society》2020,40(4):1217-1222
Lead-free (K0.5Na0.5)NbO3-based (KNN) piezoceramics featuring a polymorphic phase boundary (PPB) between the orthorhombic and tetragonal phases at room temperature are reported to possess high piezoelectric properties but with inferior cycling stability, while the ceramics with a single tetragonal phase show improved cycling stability but with lower piezoelectric coefficients. In this work, electric biasing in-situ transmission electron microscopy (TEM) study is conducted on two KNN-based compositions, which are respectively at and off PPB. Our observations reveal the distinctive domain responses in these two ceramics under cyclic fields. The higher domain wall density in the poled KNN at PPB contributes to the high piezoelectric properties. Upon cycling, however, a new microstructure feature, “domain intersection”, is directly observed in this PPB composition. In comparison, the off-PPB KNN ceramic develops large domains during poling, which experience much less extent of disruption during cycling. Our comparative study provides the basis for understanding the relation between phase composition and piezoelectric performance. 相似文献
48.
刮板输送机中板磨损失效已成为输送机运行故障的主要原因之一,为了提高中板耐磨性,基于蜣螂非光滑单元进行了仿生中板设计,以磨损量为响应值,进行了单因素和响应面法优化试验。根据响应面法试验结果得到的因素显著性影响顺序(从高至低)依次为:径向距离,深径比,直径,节距角。基于试验结果建立了磨损量与因素的回归预测模型,经试验对比发现,预测模型与真实试验的相对误差为3.2%。在特定工况(煤散料粒度为6~8 mm、载荷为20 N、刮板链速为0.65 m/s及试验时长为6 600 s)下,当深径比为1.41、直径为0.69 mm、节距角为6.55°和径向距离为4.66 mm时,磨损量最小,仿生中板的耐磨性提高了12.6%。分析其耐磨机理发现,与光滑板相比,仿生板的磨粒磨损及黏着磨损较轻。凹坑分布可破坏持续切削中板表面的煤粒运动状态。中板的仿生优化可为今后刮板输送机的设计提供一定参考。 相似文献
49.
The study presents the preparation of the new magnetic nanocomposite based on PLGA and magnetite. The PLGA used to obtain the magnetic nanocomposites was synthesized by the copolymerization of lactic acid with glycolic acid, in the presence of tin octanoate [Sn(Oct)2] as catalyst, by polycondensation procedure. Magnetite was obtained by co-precipitation from aqueous salt solutions FeCl2/FeCl3. The particles size of magnetite was 420 nm, and the saturation magnetization 62.78 emu/g, while the PLGA/magnetite nanocomposite size was 864 nm and the saturation magnetization 39.44 emu/g. The magnetic nanocomposites were characterized by FT-IR, DLS technique, SEM, VSM and simultaneous thermal analyses (TG–FTIR–MS). The polymer matrix PLGA acts as a shell and carrier for the active component, while magnetite is the component which makes targeting possible by external magnetic field manipulation. Based on the gases resulted by thermal degradation of PLGA copolymer, using the simultaneous analysis TG–FTIR–MS, a possible degradation mechanism was proposed. 相似文献
50.
Chitosan (CHT) is a non-toxic and inexpensive compound obtained by deacetylation of chitin, the main component of the exoskeleton of arthropods as well as of the cell walls of many fungi. In agriculture CHT is used to control numerous diseases on various horticultural commodities but, although different mechanisms have been proposed, the exact mode of action of CHT is still unknown. In sycamore (Acer pseudoplatanus L.) cultured cells, CHT induces a set of defense/stress responses that includes production of H2O2 and nitric oxide (NO). We investigated the possible signaling role of these reactive molecules in some CHT-induced responses by means of inhibitors of production and/or scavengers. The results show that both reactive nitrogen and oxygen species are not only a mere symptom of stress conditions but are involved in the responses induced by CHT in sycamore cells. In particular, NO appears to be involved in a cell death form induced by CHT that shows apoptotic features like DNA fragmentation, increase in caspase-3-like activity and release of cytochrome c from the mitochondrion. On the contrary, reactive oxygen species (ROS) appear involved in a cell death form induced by CHT that does not show these apoptotic features but presents increase in lipid peroxidation. 相似文献