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81.
Development of an Experimental EUVL System 总被引:5,自引:3,他引:2
The authors have developed an experimental system for the studies of extreme ultraviolet projection lithography at 13.0nm wavelength, which includes a laser plasma source,an ellipsoidal condenser, a transmission mask and a Schwarzschild optics. The optical system is optimized to achieve 0.1μm resolution over a 0.1mm diameter image field of view and the mirrors of the objective were coated with Mo/Si multilayer to provide 60% reflectance atnear-normal incidence angle for 13.0nm radiation. 相似文献
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提出了一种由单个光纤光栅和一个光纤方向耦合器组成的新型全光纤反射器,推导出了当光栅为均匀 Bragg 光栅、器件任意端口输入时,任何一端口的输出解析式。分析表明器件具有法布里-珀罗腔干涉仪的特点,耦合器的耦合比系数类似于法布里-珀罗腔的反射率, 耦合比系数越大,输出光谱半高全宽度(FWHM)越窄, 消光比越好。当耦合比系数大于 0.8 时,FWHM 可以窄到0.02nm,消光比大于 0.9。如果光栅是“强”耦合,器件具有均匀分布的多通道梳状输出特性;光栅为“弱”耦合时,则能实现 FWHM 小于 0.02nm 的单频输出。器件只需单个光栅,克服了制作两个完全相同光栅的困难。 相似文献
84.
Leonardo D. Bonifacio Bettina V. Lotsch Daniel P. Puzzo Francesco Scotognella Geoffrey A. Ozin 《Advanced materials (Deerfield Beach, Fla.)》2009,21(16):1641-1646
One‐dimensional photonic structures, known as Bragg stacks or Bragg reflectors or Bragg mirrors, represent a well‐developed subject in the field of optical science. However, because of a lack of dynamic tunability and their dependence on complex top‐down techniques for their fabrication, they have received little attention from the materials science community. Herein, we present recent and ongoing developments on the way to functional one‐dimensional photonic structures obtained from simple bottom‐up techniques. We focus on the versatility of this new approach, which allows the incorporation of a wide range of materials into photonic structures. 相似文献
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Andrea Antonini Maria A. Butturi Paolo Zurru 《Progress in Photovoltaics: Research and Applications》2015,23(11):1668-1677
The design of a specific low concentration photovoltaic module is described here, with a report of the results of the first experimental tests of its industrial version. The product is a 20× reflective concentrating photovoltaic module based on silicon solar cells. The optics were designed to mount these modules on 2‐axis trackers with angular pointing accuracy of up to about ±4° without significant power loss. The high angular acceptance of the non‐imaging optics permits the collection of a high fraction of the circumsolar light impinging on the module's frontal aperture, providing high direct normal irradiance efficiency in real operative conditions. Many technical features of the product are described here, in which features are the result of 5 years of product development in order to improve performance, reliability and cost issues. Copyright © 2015 John Wiley & Sons, Ltd. 相似文献
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