不同出射角度对气膜冷却流场的影响

采用RNGk-ε湍流模型对射流出射角度α为90o、正、负60o和正、负30o的气膜冷却流场进行了数值模拟,结合SIMPLEC算法求解了适体坐标系下的控制方程,近壁区流动采用两层模型的壁面函数法处理,结果给出了射流与主气流速度比R为2和4时的射流轨迹和速度场。结果表明:R和α值是影响气膜冷却流场的重要因素,R值增加,冷气射流对主流场影响区域增加,α值为负时,射流对主流场上游影响区域较大,当α值为30o时,射流影响区域减小;当α为正值时,随α值的减小,射流喷孔下游背风侧的分离现象逐渐消失。     

Fabrication of Er3+/Pr3+ Co-doped soda-lime glass thin films using RF magnetron sputtering method and optical property characterization

Er^3+/Pr³⁺ co-doped soda-lime glass thin films have been fabricated using RF magnetron sputtering method and their structural and optical properties have been studied. Deposition rate, crystallinity, and composition of glass thin films were investigated by scanning electron microscopy, transmission electron microscopy, and electron probe micro area analysis. Refractive index, birefringence and binding characteristics have been investigated using a prism coupler and X-ray photoelectron spectroscopy. Er³⁺/Pr³⁺ co-doped soda lime glass thin films were prepared by changing substrate temperature (room temp. ∼550^∘C), RF power (90 W–130 W), and Ar/O₂ gas flow ratio at processing pressure of 4 mTorr. Glass thin films could be obtained at the optimized processing condition at 350^∘C, RF power of 130 W, and gas flow of Ar:O₂ = 40:0 with maximum deposition rate of 1.6 μm/h. Refractive index and birefringence increased from 1.5614 to 1.5838 and from 0.000154 to 0.000552, respectively, as the content of Pr³⁺ increased. Binding energy of Pr3d also increased as the content of Pr³⁺ increased.     

Resonance properties and mass sensitivity of monolithic microcantilever sensors actuated by piezoelectric PZT thick film

The PZT thick film cantilever devices fabricated via MEMS process have much attraction because they are appropriate for biological transducer or sensor, resulting from their large actuating force and relatively high sensitivity especially in liquid. By means of resonance behavior, theoretical calculation and experimental verification of the PZT thick film cantilever devices have not been studied before. Accordingly, we focused on the sensitivity analysis and interpretation of the PZT thick film cantilevers in this study. Especially, the investigation for mass sensitivity of the PZT thick film cantilever is of importance for physical, chemical and biological sensing application. The PZT thick film cantilever devices were constructed on Pt/TiO₂/SiN _X /Si substrates using screen printing method and MEMS process. The harmonic oscillation response (resonance frequency) was measured using an optical laser interferometric vibrometer. The effect of cantilever geometry on the resonance frequency change was investigated. Compared with the theoretical resonant frequency change by mass loading, the experimental resonant frequency change of the PZT micromechanical thick film cantilever shows a variation of less than 2%. Mass sensitivities are estimated to be 30.7, 57.1 and 152.0 pg/Hz for the 400 × 380 μm, 400 × 480 μm and 400 × 580 μm cantilever, respectively.     

Substrate effect on in-plane ferroelectric and dielectric properties of Ba0.7Sr0.3TiO3 thin films

Heteroepitaxial Ba_0.7Sr_0.3TiO₃ thin films were grown on (LaAlO₃)_0.3(Sr₂AlTaO₆)_0.35 (001) (LSAT) and SrTiO₃ (001) (STO) single crystal substrates using pulsed laser deposition (PLD). X-ray diffraction characterization revealed a good crystallinity and a pure perovskite structure for films grown on both LSAT and STO substrates. The in-plane ferroelectric and dielectric properties of the films were studied using interdigital electrodes (IDE). The film grown on LSAT substrate exhibited an enhanced in-plane ferroelectricity, including a well-defined P-E hysteresis loop with the remnant polarization P _r = 10.5 μC/cm² and a butterfly-shaped C-V curve. Nevertheless, only a slim hysteresis loop was observed in the film grown on STO substrate. Curie temperature T _c of the film grown on LSAT substrate was found to be ∼105^∘C, which is nearly 70^∘C higher than that of the bulk Ba_0.7Sr_0.3TiO₃ ceramics. T _c of the film grown on STO substrate has almost no change compared to the bulk Ba_0.7Sr_0.3TiO₃ ceramics. The dielectric tunabilities were found to be 64% and 52% at 1 MHz for the films grown on LSAT and STO substrates, respectively.     

Oxygen permeation properties and surface modification of acceptor-doped CeO2/MnFe2O4 composites

The preparation and oxygen permeation properties of the (Ce_0.8Pr_0.2)O_2−δ − x vol% MnFe₂O₄ composites, where x = 0 to 35, have been investigated. The samples were prepared by the Pechini method. In the case of Ce_0.8Pr_0.2O_2−δ, an oxygen flux density of 6 μmol⋅cm⁻²⋅s⁻¹ (L = 0.0247 cm) and the maximum methane conversion of 50% were attained at 1000^∘C. Unlike composites consisting of Gd-doped CeO₂ and MnFe₂O₄, the oxygen permeability of the (Ce_0.8Pr_0.2)O_2−δ – x vol% MnFe₂O₄ composites was almost constant regardless of the volume fraction of MnFe₂O₄; however, the optimum volume fraction of MnFe₂O₄ was determined to be 5 to 25 in the context of the chemical and mechanical stabilities under methane conversion atmosphere. In addition, the surface modification of the (Ce_0.8Gd_0.2)O_2−δ – 15 vol% MnFe₂O₄ composite was performed by using the FePt nanoparticles. The catalyst loading of 2.8 mg/cm² on the both side of the 0.3 mm-thick (Ce_0.8Gd_0.2)O_2−δ – 15vol% MnFe₂O₄ composite increased the oxygen flux density from 0.30 to 0.76 μmol⋅cm⁻²⋅s⁻¹ in the case of He/air gradients; however, the effect seems to be reduced in the case of high oxygen flux density caused by a large pO₂ gradient. Moreover, the Langmuir-Blodgett film of the FePt nanoparticles were successfully prepared on the tape-cast (Ce_0.8Gd_0.2)O_2−δ – 15vol% MnFe₂O₄ composite. Hydrophobic treatments for the surface of the composite were crucial to achieve high transfer ratio for the deposition of the LB film.     

Pyroelectric properties and X-ray photoelectron spectroscopic study of R.F. magnetron-sputtering-derived PZT thin films deposited on various interlayers

PZT thin films and interlayers were fabricated by the radio frequency (r.f.) Magnetron-sputtering from the Pb_1.1Zr_0.53Ti_0.47O₃, PbO and TiO₂ target. As a result of the XPS depth profile analysis, we can confirm that the substrate temperature affects the oxidation condition of each element of interlayers and the PZT film. Compared to the PZT/Pt structure, the dielectric and pyroelectric properties of PZT thin films inserted by interlayers were measured to a relatively high value. In particular, the PZT/PbO structure had the highest pyroelectric properties (P = 189.4 μC/cm²K; F _D = 12.7×10⁻⁶ Pa^−1/2; F _V = 0.018 m²/C).     

Electron beam evaporated carbon nanotube dispersed SnO2 thin film gas sensor

Carbon nanotube (CNT) is a useful material for gas-sensing applications because of its high surface to volume ratio structure. In this work, multi-wall CNTs are incorporated into tin oxide thin film by means of powder mixing and electron beam evaporation and the enhancement of gas-sensing properties is presented. The CNTs were combined with SnO₂powder with varying concentration in the range of 0.25–5% by weight and electron beam evaporated onto glass substrates. From AFM and TEM characterization, CNT inclusion in SnO₂thin film results in the production of circular cone protrusions of CNT clusters or single tube coated with SnO₂layer. Experimental results indicate that the sensitivity to ethanol of SnO₂thin film increases by the factors of 3 to 7, and the response time and recovery time were reduced by the factors of 2 or more with CNT inclusion. However, if the CNT concentration is too high, the sensitivity is decreased. Moreover, the CNT doped film can operate with good sensitivity and stability at a relatively low temperature of 250–300^∘C. The improved gas-sensing properties should be attributed to the increasing of surface adsorption area of metal oxide produced by CNT protrusion.     

直流磁控溅射制备铝薄膜工艺参数

采用直流磁控溅射法,在硅基片上制备铝薄膜.用扫描电子显微镜(SEM)、X-射线衍射仪(XRD)等对薄膜的表面形貌和结构进行了分析,研究了不同工艺参数对薄膜表面形貌的影响,分析了制备铝薄膜的影响因素.分析结果表明该薄膜为纯铝薄膜,并且晶粒很小.实验得到制备铝薄膜的工艺参数为:本底真空度4.0×10-4Pa、工作真空度1.7 Pa、氩气流量20 cm3/s、工作电压300 V、工作电流1 A.     

快速循环热处理对(Co0.35Fe0.65)99O1薄膜磁性能的影响

针对(Co0.35Fe0.65)99O1薄膜,研究了两种不同热处理工艺对其磁性能的影响。结果表明:快速循环热处理可以改善高磁矩(Co0.35Fe0.65)99O1薄膜磁性能,在450℃几个快速循环热处理后,沉积薄膜的矫顽力从105下降到3 Oe,电阻率下降到70%,a-Fe (Co)相晶粒尺寸可以减小到15~35 nm,该处理方法较以往的热处理更能改善软磁薄膜的性能。