不同检测电容结构对MEMS电容传感器性能的影响分析

改进传感器检测电容几何结构能有效改善传感器的性能。本文对梳齿电极结构、栅形电极结构及梳栅电极结构检测电容的性能特点进行分析比较,重点分析了振子质量、空气阻尼、系统阻尼系数比以及灵敏度等特性,得出在相同的外轮廓尺寸、支撑梁、振子厚度以及振子到衬底的距离的条件下,栅形结构传感器的振子质量最大,空气阻尼最小,适合制作高分辨率的传感器;在大气下,梳齿结构灵敏度增加的同时空气阻尼力也会增加,且振子质量较小,适合制作高灵敏度,低分辨率传感器结构;梳栅结构的特点居于两者之间,适合制作需要兼顾分辨率和灵敏度的传感器。通过实例计算,证明了该结果。     

MEMS热电堆高温测试系统中单晶材料的红外衰减特性研究

在对PerkinElmer公司的MEMS热电堆红外探测器静态和动态特性实验研究的基础上,本文提出了由MEMS热电堆、红外衰减片、靶体和存储模块组成瞬态表面高温测试装置的方案,对拓宽测温上限的关键元件--红外陶瓷衰减片进行了较深八的研究,用MEMS热电堆测量方法测量了氧化锆陶瓷片红外吸收系数,得出了不同厚度氧化锆（熔点为2715℃）陶瓷片红外衰减倍数曲线,为基于MEMS热电堆的表面高温测试装置的设计提供了依据。     

故障自动防护微机械角速度传感器

微机械角速度传感器是目前市场上能够进行批量生产的最复杂的传感器之一。它由在真空中做复杂运动的惯性质量块和驱动该设备、分析其响应的多种复杂电路组成,并集中于一个在极狭小的空间内。本文介绍了由奥地利SensorDynamics公司成功研制的一种MEMS角速率传感器,可以满足现代应用的全部要求,尤其是汽车工业所要求的小尺寸、坚固的机械结构、长期稳定性、不受限制的故障自动防护性和AEC-Q100认证。     

虚拟训练动作获取系统软件设计

针对目前虚拟训练软件常用的输入设备逼真度不足的问题,为虚拟训练软件设计了一种新的人性化接口设备（Human Interface Device,HID）一基于MEMS器件的虚拟训练动作获取系统。系统将微惯性测量原理应用于人体姿态检测,选用微机电系统（Micro Electro Mechanical Systems,MEMS）惯性器件构建微惯性测量单元（Micro Inertial Measurement Unit,MIMU）作为人体训练动作的硬件采集设备;采用VC＋＋设计上位机系统软件,完成人体动作获取与识别算法,系统软件通过软件接口驱动虚拟训练软件。通过对原理样机测试,测试结果表明系统运行稳定可靠,解算精度在3°以内,满足虚拟训练的要求,且其操作体验较鼠标键盘操作更为逼真,沉浸感更强。该研究首次将微惯性测量单元应用于人体动作检测,拓展了MEMS器件的应用领域,极大增强了虚拟训练的真实感和训练效果,具有广阔的市场前景。     

基于多核技术的三轴陀螺数字测控系统

本文首次介绍了一种基于SOPC多核技术的三轴一体化MEMS陀螺数字测控系统。系统通过进行驱动频率闭环、驱动幅度闭环控制,使三只陀螺驱动轴稳定地工作在各自谐振点上且幅度稳定,同时对陀螺敏感轴信号进行解调,实时输出三轴同步的角速度信息。本文采用SOPC多核协调同步、多总线控制、并行计算、数字闭环控制等技术,创新性的构建了单片FPGA内集成多个计算内核的三轴实时并行计算系统,与传统的FPGA+DSP数字控制系统相比显示出小体积、低功耗、低成本、完全可重构、高并行处理能力等优势,同时为今后系统ASIC化打下基础,具有很好的应用前景。     

Fabrication uncertainties and yield optimization in MEMS tunable capacitors

Intrinsic uncertainties of MEMS fabrication processes can severely affect the performance of devices because the tolerance ranges of these processes are relatively large and improvement of process accuracy is very expensive. Therefore, the analysis of fabrication uncertainties and their outcome on a device performance is a vital task before finalizing the design. In this paper, the effects of process inaccuracy on the performance of MEMS tunable capacitors are studied. Design parameters such as dimensions of electrodes and the initial gap between them and the stiffness of supporting beams are considered as random variables. The variation of these parameters within tolerance ranges drastically alters the capacitor's actual response from the desired one and results in low yield. Hence, design optimization with the objective of maximizing yield in early steps becomes very important. An effective method for yield optimization of MEMS capacitors under given fabrication uncertainties is introduced. The method utilizes aspects of the advanced first-order second-moment (AFOSM) reliability method to find a linearized feasible region to estimate the yield. The yield is calculated directly using the joint cumulative distribution function (CDF) over the tolerance box requiring no numerical integration and avoiding computational complexity. The optimal design verified by Monte-Carlo (M-C) simulation exhibits a significant increase in the yield. The main advantage of this method comparing to other design optimization methods is that the proposed method does not change the design topology or fabrication accuracy. It increases the yield by finding the optimum design variables as demonstrated in this paper.     

Enhancement of thermal uniformity for a microthermal cycler and its application for polymerase chain reaction

Thermal uniformity is essentially important for micro reactors which require precise control of critical reaction temperatures. Accordingly, we report a new approach to increase the temperature uniformity inside a microthermal cycler, especially for polymerase chain reaction (PCR). It enhances the thermal uniformity in the reaction region of a PCR chip by using new array-type microheaters with active compensation (AC) units. With this approach, the edges of the microthermal cyclers which commonly have significant temperature gradients can be compensated. Significantly, the array-type microheaters provide higher uniformity than conventional block-type microheaters. Besides, experimental data from infrared (IR) images show that the percentages of the uniformity area with a thermal variation of less than 1 °C are 63.6%, 96.6% and 79.6% for three PCR operating temperatures (94, 57 and 72 °C, respectively) for the new microheaters. These values are significantly better than the conventional block-type microheaters. Finally, the performance of this proposed microthermal cycler is successfully demonstrated by amplifying a detection gene associated with Streptococcus Pneumoniae (S. Pneumoniae). The PCR efficiency of the new microthermal cycler is statistically higher than the block-type microheaters. Therefore, the proposed microthermal cycler is suitable for DNA amplification which requires a high temperature uniformity and is crucial for micro reactors with critical thermal constraints.     

人体声发射定位技术的研究

从人体声发射技术与医学检测的特点出发,将人体骨科疾病的诊断和人体声发射结合起来,提出了具体的研究问题和解决手段。通过BL—420生物机能实验系统采集人体骨骼中的声发射信号,对该声发射信号利用互相关法计算时差,从而实现声源定位。     

MEMS集成滤波器技术

滤波器是频率转换系统(如,调谐电路、接收器)的基本构成模块。借助于MEMS技术实现的滤波器不仅带来插入损耗、功耗、线性等性能的改善,也有利于将整个通信前端集成到单一芯片上。综述了MEMS可调滤波器的研究进展。与单一利用MEMS电容的调变实现频率可调的滤波器相比,分形可调MEMS滤波技术有更小的插入损耗和更宽的调频范围。