Use of a neural network to link AFM etch patterns to plasma parameters

Plasmas play a critical role in depositing thin films or etching fine patterns while manufacturing integrated circuits. A new model for plasma diagnosis is presented. This was accomplished by linking atomic force microscopy (AFM) to plasma parameters using a neural network. Experimental AFM data were collected during the etching of silicon oxynitride films in C₂F₆ inductively coupled plasma. Surface roughness of etched patterns was characterized by means of discrete wavelet transformation. This led to the construction of three vertical (type I), diagonal (type II), and horizontal (type III) wavelet coefficient-based models. The performance of diagnosis models was evaluated in terms of the prediction and recognition accuracies. Both accuracies were optimized as a function of the number of hidden neurons. Comparisons revealed that the type I model yielded the largest recognition and the smallest prediction error. This was demonstrated even under stricter monitoring conditions. More improved diagnosis is expected by enhancing AFM resolution.     

定向井和水平井套管柱的优化设计

为了满足定向井和水平井套管设计的要求 ,在综合分析套管设计理论和方法的基础上 ,通过对套管柱载荷的计算 ,建立了其优化设计模型 ,利用数据库技术 ,研制出套管柱优化设计软件 ,并通过计算实例给出了软件的操作过程。软件界面友好 ,操作简单 ,功能齐全 ,设计者在进行套管设计时 ,只需输入设计所需基本参数 ,按界面提示操作即可完成全部设计工作 ,便于现场实际推广应用。     

高应力复合型软岩巷道支护技术研究

以某矿井底车场巷道为例，通过对围岩物化分析、力学参数、地应力测试，现场工程地质调查及巷道破坏特征分析，针对该矿软岩巷道围岩变形量大和流变变形显著这两个特点，提出了一次支护采用强力锚喷网、二次支护采用锚注支护是适合该矿岩体特点的合理支护形式，并在该矿西大巷延拓及井底车场巷道、硐空修复中成功应用，取得了良好的技术经济效果。     

关于引入劳动力市场价位的思考

引入劳动力市场价位是企业薪酬制度改革的必然趋势。系统研究和分析了劳动力市场价位的基本特征;提出企业在引入劳动力市场价位过程中应该遵循的基本原则。     

用于皮带及链传动的一种恒张力张紧装置

指出了皮带及链传动现有张紧方法的缺点，设计了一种结构简单、工作可靠的用于皮带及链传动的恒张力控制装置，该装置能自动调整压在皮带或链上的力，在很大挠角范围内保持其张力基本恒定。     

Numerical modelling for scattering of waves in three-dimensional cracked material

In this paper, a mathematical model is proposed for the problem of the scattering of plane waves in a three-dimensional cracked materials. Instead of obtaining closed-form solutions as in conventional theoretical analysis methods, this approach, called the Equivalent Nodal Force (ENF) method formulates the mechanical effects of cracks as an equivalent nodal force in a numerical procedure, and physically translates cracked material into an equivalent continuous one. Several mechanical relations between waves and cracks are evident from this method. Also the results of several numerical calculations are presented and these are compared with those obtained by the conventional methods.     

厚度控制技术在中厚板轧制生产中的应用

本文探讨了影响中厚板厚度波动的因素，结合安钢中板厂2800mm轧机按合同轧制一批交货重量不大于理论重量船板的生产实践，总结了实际生产中实现高精度厚度控制的有效方法。     

3-D gust effect factor for slender vertical structures

Original studies on gust factor buffeting dealt with the alongwind displacement of structures. Research on this topic carried out since the nineties followed two distinct lines: the first determines the maximum effects due to the alongwind response; the second extends the original method from the alongwind response to crosswind and torsional responses. This paper represents the junction point of these research lines with reference to cantilever slender vertical structures. It derives the most relevant effects associated with the three-dimensional (3-D) wind-excited response of this structural type and shows that a suitable definition of one non-dimensional quantity, referred to as the 3-D gust effect factor, provides such effects at any level through a wide set of experimental, numerical and analytical procedures. A new definition of a 3-D equivalent static force consistent with this method is also introduced and critically compared with previous analogous statements.     

Observation of atomic steps on CaCO3 crystal surface

By using scanning polarization force microscopy,the deliquescence process and the atomic steps on the cleavage surface of CaCO3 in air were studied in situ.Under an exposure to medium umidity(-57%),the sloiw step movement has been observed.     

涂层材料的断裂分析(英文)

和基体厚度相比,涂层很薄,因此细观力学模型可把基体作为半无限弹性体。由于涂层和基体材料的膨胀系数及弹性系数不匹配,涂层材料中残余热应力的解析解为 E_c/(1-γ_c)·(α_s-α_c)△T。用有限元法校核,该应力和解析解吻合得好。通过对涂层产生裂纹驱动力和断裂韧性的讨论,提出了抗裂涂层厚度公式。