Atomic layer chemical vapour deposition of copper

Copper films with (1 1 1) texture are of crucial importance in integrated circuit interconnects. We have deposited strongly (1 1 1)-textured thin films of copper by atomic layer deposition (ALD) using [2,2,6,6-tetramethyl-3,5-heptadionato] Cu(II), Cu(thd)₂, as the precursor. The dependence of the microstructure of the films on ALD conditions, such as the number of ALD cycles and the deposition temperature was studied by X-ray diffraction, scanning electron microscopy (SEM), and transmission electron microscopy. Analysis of (1 1 1)-textured films shows the presence of twin planes in the copper grains throughout the films. SEM shows a labyrinthine structure of highly connected, large grains developing as film thickness increases. This leads to low resistivity and suggests high resistance to electromigration.     

二氧化锡溅射工艺研究

SnO2 是最早使用也是目前使用最广泛的一种气敏材料 ,使用该材料设计制作的气敏传感器具有许多优点。在简要介绍溅射镀膜的成膜过程和特点的基础上 ,着重介绍了SnO2 膜的制备流程 ,分析了功率和温度变化对成膜质量的影响     

在二(2-乙基己基)磷酸钠的微乳液中金属萃合物对水增溶的影响

测算了由二（2－乙基己基）磷酸钠，金属盐（CoSO4,NiSO4,ZnSO4,MgCl2或Cr(NO3)3)水溶液，正辛醇和正辛烷组成的微乳液中正辛醇从连续油相到界面的ΔGo→i^o和水的极限增容量φ'H2O。用金属萃取络合物反胶束的形成及其亲油性解释了金属离子对φ'H2O和ΔGo→i^o的影响。     

大功率CO2激光器脉冲电源研究

本文论述了直流高压与高频脉冲电源相叠加，构成高频、高压脉冲电源，并使其对CO2激光器进行放电实验，研究了同条件下的放电参数与功率。     

Preparation and properties of nano-sized SnO2 powder

1　INTRODUCTIONSnO2isoneofthemainmaterialsusedingassensor.Becauseofthehumidityandgassensingfunction,itattractsmoreandmoreattentions.Butthepresentproblemishowtoimprovethestabilityandsensibilityofgassensor.Researchershavetakenmanymeasurestoresolvethisproble…     

Dissolved organic carbon dynamics in the upper rhone: The influence of side-arms?

Dissolved organic carbon (DOC) dynamics were investigated over a two year period in the Upper Rhǒne River to examine the role of side-arms in providing DOC to the main channel in relation to discharge fluctuations, especially floods. Concentrations of DOC are shown to remain low in space and in time (average 1.5 mg ^?1) and to be more related to global hydrological events (precipitation) than to any local flushing for backwaters during floods. The results do not support the general assumption that side-arms are the providers of DOC to the main channel.     

双波长稳频CO_2激光模糊控制系统的建模与优化

报导一种模糊逻辑控制系统的建模与优化方法。以此方法设计的模糊逻辑控制器，用于双波长稳频ＣＯ２激光器的控制得到令人满意的结果。     

2-乙基己酸的制备

研究了 2乙基己酸的制备 ,该反应是 2乙基己醇与氢氧化钠在催化剂存在下进行氧化、脱氢 ,生成产物2乙基己酸。通过实验找到了一种新型、高效、廉价的催化剂 ,以及最佳反应条件。通过对 2乙基己酸的分析测试 ,产品完全符合质量标准。     

ZG31Mn2Si履带板的铸造工艺

采用ＺＧ３１Ｍｎ２Ｓｉ替代ＺＧＭｎ１３生产拖拉机和推土机履带板．改进铸造工艺，可以生产出合格的铸件；经淬火、低温退火处理，其基体组织为马氏体，属强韧性钢种，能够切削加工．     

利用T2分布进行岩石孔隙结构研究

测井地层评价的基本任务除了要研究储层参数外，还要研究岩石孔隙结构。核磁共振测井技术和出现和应用，为测井解释研究孔隙结构提供了一种有效方法。通过研究泥质砂岩岩心核磁共振T2分布与压汞毛管压力曲线之间的关系，建立起二者之间的相互计算方法，从而为利用T2分布进行岩石孔隙结构研究提供了理论和方法的支持。