The quantitative optical measurement of deep sub-wavelength features with sub-nanometer sensitivity addresses the measurement challenge in the semiconductor fabrication process. Optical scatterings from the sidewalls of patterned devices reveal abundant structural and material information. We demonstrated a parametric indirect microscopic imaging (PIMI) technique that enables recovery of the profile of wavelength-scale objects with deep sub-wavelength resolution, based on measuring and filtering the variations of far-field scattering intensities when the illumination was modulated. The finite-difference time-domain (FDTD) numerical simulation was performed, and the experimental results were compared with atomic force microscopic (AFM) images to verify the resolution improvement achieved with PIMI. This work may provide a new approach to exploring the detailed structure and material properties of sidewalls and edges in semiconductor-patterned devices with enhanced contrast and resolution, compared with using the conventional optical microscopy, while retaining its advantage of a wide field of view and relatively low cost. 相似文献
This article presents a design methodology for linearizing GaN HEMT amplifiers based on splitting a large FET into multiple parallel FETs with same total gate periphery and by biasing them individually. By varying the biases, the magnitude and the phase of the IMD3 components at the output of FET changes. A detailed simulation methodology using commercial microwave CAD software is presented. Simulation results show that by biasing one device in Class AB and other(s) in deep Class AB mode, IMD3 components of parallel FETs can be made out of phase to each other leading to cancellation and improvement in linearity. Three prototype circuits were simulated using (a) a single 5 mm FET (1 × 5 mm), (b) two parallel 2.5 mm FETs (2 × 2.5 mm), and (c) four parallel 1.25 mm FETs (4 × 1.25 mm), for a total gate periphery of 5 mm, over the frequency range of 0.8 to 1.0 GHz. IMD3 improvement up to 20 dBc was achieved with the 4 × 1.25 mm circuit when the FET biases were optimized. Measurement results show improvement in linearity up to 20 dBc for 4 × 1.25 mm circuit. The proposed method improves linearity without a substantial penalty on the power consumption and is straightforward to implement. 相似文献
Cognitive load varies the attention level, which has serious consequences in complex dynamic situations. Assessment of uncertainty in cognitive load during multiple object tracking task is necessary, as it is used to improve the cognitive capabilities. The present research work investigates the uncertainty in cognitive load of multiple object tracking task using electroencephalograph (EEG) on 25 football players. A d2 test of neuropsychological measure of attention was employed before starting the experiment. Each player participated in four levels of the task with variation in the cognitive load, which varies in terms of the targets from 2 to 5. Percentage changes in the power spectral density were estimated for the cognitive levels. Results show that the percentage changes were much more in high cognitive load than in low cognitive load. Significant changes (p < 0.05) were observed in level 1 (− 11.07 to 1.91%), level 2 (− 3.13 to − 14.51%), level 3 (− 6.33 to − 19.46%) and level 4 (− 8.10 to − 20.88%). Variation in the EEG data in terms of the combined uncertainty corresponds very well with low to high cognitive loads. The fourth level of the task with high cognitive load has more uncertainty than the low cognitive load levels. The results are useful for assessing the cognitive state of the player, which is valuable for the design of the effective training model. 相似文献
Surface integrity characterization of manufactured component is very important as it significantly affects the in-service performance of the component. Till now, surface integrity was evaluated using conventional measurement technique like microhardness tester, X-ray diffraction, optical microscopy and surface roughness tester. But, this technique being laboratory based cannot be used for in-service monitoring of the surface integrity. The present study focuses on the characterization of surface integrity upon electric discharge machined sample using non-destructive magnetic Barkhausen noise technique. Electric discharge machining was performed in die-sinking mode on die steel using copper–tungsten electrode (negative polarity). Experiment was performed by selecting different levels of peak current, gap voltage and pulse on time. Surface integrity characteristics like microhardness change, residual stress, microstructural alteration and surface roughness were analysed using microhardness tester, X-ray diffraction, optical microscopy and surface roughness tester, respectively, and were then correlated with magnetic parameter like root mean square value and peak value obtained from Barkhausen noise signal. The results show a good correlation between magnetic parameter (RMS and Peak value) of Barkhausen noise with the microhardness and surface roughness of the machined sample.
A low power and high-performance digital electrocardiogram (ECG) detector has become a basic requirement in modern implantable cardiac pacemakers. A fractional operator-based digital ECG detector for modern pacemaker systems is proposed in this work. Instead of conventional thresholding, an adaptive slope prediction threshold is utilized for the detection of ECG peaks. A stochastic search-based algorithm, namely, cuckoo search algorithm, is used to design an optimal fractional operator that is used for ECG denoising. It has been found that the proposed adaptive slope prediction threshold increases the QRS complex detection performance. A low detection error rate (DER) ranges from 0.01% to 0.56%, positive predictivity (P+) ranges from 99.32% to 99.98%, sensitivity (Se) ranges from 99.45% to 99.98%, and a detection accuracy (Acc) ranges from 99.43% to 99.96% for different databases are achieved for the proposed ECG detector, which is better compared with the existing ECG detectors. The proposed design of fractional order operator based on the lattice wave digital filter (LWDF) requires a minimum number of the multipliers for its structural realization. 相似文献
Silicon - This paper examines, an electrostatically configured Nano-Tube Tunnel Field-Effect Transistor (ED-NTTFET). During the fabrication process, different charges such as fixed charge, oxide... 相似文献
Axial plasma spray is one of the thermal spray techniques to deposit multifunctional advanced coatings. The present work explores the use of this process to deposit thin, continuous, and adherent Ca5 (PO4)3OH (hydroxyapatite, HAp) coatings and characterize its microstructure, phases, hardness and adhesion strength. Three different suspension-deposited HAp coatings were investigated and compared with powder-deposited HAp coating on a Ti6Al4V substrate. The effect of mean solute particle size and solid-loading in the suspension has been explored on the evolution of microstructure, phase content and mechanical properties of axial suspension plasma sprayed (ASPS) coatings. Phase-characterization has shown retention of hydroxyapatite phase and coating crystallinity in the deposited coatings, whereas the adhesion strength of the HAp coating decreased from ~40 MPa to ~13 MPa when bioglass was added to the feedstock material. The lower solid load content and lower mean solute particle size in the suspension were found to be beneficial in achieving porous, rougher, and well-adhering coatings. This work concludes that ASPS can potentially deposit thin HAp coatings (< 50 μm) with high adhesion strength. 相似文献
High-utility Itemset Mining (HUIM) finds patterns from a transaction database with their utility no less than a user-defined threshold. The utility of an itemset is defined as the sum of the utilities of its items. The utility notion enables a data analyst to associate a profit score with each item and thereof to a pattern. We extend the notion of high-utility with diversity to define a new pattern type called High-utility and Diverse pattern (HUD). The notion of diversity of a pattern captures the extent of the different categories covered by the selected items in the pattern. An application of diverse-pattern lies in the recommendation task where a system can recommend to a customer a set of items from a new class based on her previously bought items. Our notion of diversity is easy to compute and also captures the basic essence of a previously proposed diversity notion. The existing algorithm to compute frequent-diverse patterns is 2-phase, i.e., in the first phase, frequent patterns are computed, out of which diverse patterns are filtered out in the second phase. We, in this paper, give an integrated algorithm that efficiently computes high-utility and diverse patterns in a single phase. Our experimental study shows that our proposed algorithm is very efficient as compared to a 2-phase algorithm that extracts high-utility itemsets in the first phase and filters out the diverse itemsets in the second phase.
Russian Journal of Non-Ferrous Metals - This paper investigates the effects of brass interlayer on the microstructural and mechanical properties of friction stir welded AA 6082-T6. To analyze the... 相似文献