铝硅合金互连线电迁移失效试验

随着微电子技术的发展,作为超大规模集成电路互连线的金属薄膜的截面积越来越小,其承受的电流密度急剧增加,电迁移引起的互连失效变得尤为突出.针对集成电路中金属互连线的电迁移现象,以Black方程为基础,对其进行了修正.并以铝硅合金互连线为研究对象,对其电迁移过程进行了详细的加速寿命试验研究,获取了修正后的Black方程中的相关参数,分析了不同环境温度、不同电流密度、不同初始电阻等因素对铝互连线电迁移的影响规律.结果表明,铝硅合金互连线的电迁移寿命与上述参数均成反比关系.     

金属互连线电迁移的影响因素

应用有限元分析软件ABAQUS,对金属互连线的电迁移过程进行了电热耦合仿真分析,比较了不同互连线材料、不同温度、不同层间介质等因素对互连线电迁移失效的影响. 结果表明,与铝硅合金互连线相比,在同样电流密度条件下,无论是电势梯度最大值还是热通量最大值,铜互连线的均高于铝互连线的,从而将加速互连线的电迁移;在一定的温度范围内,电流密度是影响互连线电迁移寿命的主要因素,而温度的变化对其影响较小;与SiO2相比,SiN作为层间介质能够防止互连线中的热聚集,有利于互连线热量的散发,从而对于缓解电迁移具有积极的作用.     

Graphene Devices: Structured Graphene Devices for Mass Transport (Small 6/2011)

The reversible atomic‐mass transport along graphene devices has been achieved. The motion of Al and Au in the form of atoms or clusters is driven by applying an electric field between the metal electrodes that contact the graphene sheet. It is shown that Al moves in the direction of the applied electric field whereas Au tends to diffuse in all directions. The control of the motion of Al is further demonstrated by achieving a 90° turn, using a graphene device patterned in a crossroads configuration. The controlled motion of Al is attributed to the charge transfer from Al onto the graphene so that the Al is effectively charged and can be accelerated by the applied electric field. To get further insight into the actuation mechanism, theoretical simulations of individual Al and Au impurities on a perfect graphene sheet were performed. The direct (electrostatic) force was found to be ～1 pN and dominant over the wind force. These findings hold promise for practical use in future mass transport in complex circuits.     

氯盐侵蚀混凝土结构延寿技术初探Ⅱ——混凝土中6种胺类有机物电迁移与阻锈性能

采用有机元素分析仪、快速氯离子测定法(RCT)、电化学阻抗谱法(EIS)和弱极化法,研究6种胺类有机物在混凝土中的电迁移能力、氯离子的排除情况及通电前后钢筋锈蚀的变化情况.结果表明:相同条件下,不同的胺类阻锈剂在混凝土中的电迁移能力和存留能力不同,且胺类阻锈剂种类对氯离子的排除影响不大;双向电渗技术的除氯效果比电化学的除氯效果弱,但双向电渗后钢筋附近混凝土孔隙液中阻锈剂的含量是氯离子含量(质量摩尔浓度)的2～7倍;双向电渗后混凝土保护层电阻增大,钢筋的锈蚀速度由通电前的电荷传递过程控制转变为氧气在混凝土中的渗透速度控制,钢筋的腐蚀电位显著提高,从而使钢筋的耐蚀性能得以提高.     

混凝土梁电化学修复后的耐久性能及力学特征

电化学修复技术可对耐久性劣化的混凝土结构进行耐久性提升,然而也会引起黏结性能降低、混凝土孔隙结构改变、钢筋氢脆等负面效应,进而影响构件整体的服役性能.为探明电化学除氯和双向电迁处理后混凝土梁的耐久性能及力学性能,本文结合氯离子含量梯度变化和弱极化曲线等对比分析了电化学修复后梁的抗腐蚀性能,结合荷载挠度曲线、钢筋与混凝土应变、裂缝分布等对比分析了静力力学性能.研究结果表明:电化学修复能有效去除钢筋表面氯离子,使钢筋恢复钝化,但钢筋笼内氯离子迁移效率相对较低;通电参数选取较小时电化学修复不影响混凝土梁的刚度和承载能力,但通电量较大时承载能力减小,延性退化较为明显.基于试验结果,本文建议电化学修复采用的通电参数需综合考虑耐久性提升效果及对力学性能损伤作用,以满足结构耐久性和安全性的要求.     

电化学修复后钢筋疲劳性能试验研究

为了探明电化学修复对钢筋疲劳性能的影响,开展电化学除氯和双向电迁处理后钢筋的轴向拉伸疲劳试验. 基于断裂力学原理及断口微观形貌分析,揭示电化学修复技术引起钢筋疲劳性能变化的机理. 结果表明,电化学除氯会引起钢筋疲劳裂纹门槛值的减小及疲劳弹性模量的退化,宏观表现为钢筋疲劳寿命减小;电化学除氯后钢筋疲劳裂纹起源于钢中白点,裂纹扩展区疲劳辉纹间距增大,瞬断区韧窝变小变浅. 掺入阻锈剂的双向电迁方法对钢筋疲劳性能的负面影响较小,双向电迁修复后钢筋的疲劳断口微观形貌相对于普通钢筋未见明显变化.     

杂散电流环境下保护层内氯盐传输特性研究

采用电迁移锈蚀法对杂散电流环境下混凝土保护层中氯盐传输特性进行了研究。通过对四组试件在不同电流强度,不同通电时间情况下混凝土保护层内氯离子浓度的变化特征,重点分析了电场作用对保护层内氯离子传输进程和试件表面氯离子浓度的影响规律。结果表明,电场作用下保护层内氯离子浓度在数十小时内便从非稳态传输演变为稳态传输,传输效率较自由扩散高900多倍,但在稳态传输阶段氯离子浓度并非稳定不变,而是随通电时间增加整体呈下降趋势;保护层内氯离子达稳态传输前,混凝土表面氯离子浓度增长规律与一般氯盐环境中明显不同,其随通电时间增长以幂函数形式降低,随电流强度增加呈幂函数形式增长,且受通电时间的影响更为显著。     

Lattice Strain Due to an Atomic Vacancy

Volumetric strain can be divided into two parts: strain due to bond distance change and strain due to vacancy sources and sinks. In this paper, efforts are focused on studying the atomic lattice strain due to a vacancy in an FCC metal lattice with molecular dynamics simulation (MDS). The result has been compared with that from a continuum mechanics method. It is shown that using a continuum mechanics approach yields constitutive results similar to the ones obtained based purely on molecular dynamics considerations.     

Phase field computations for surface diffusion and void electromigration in {\mathbb{R}^3}

We consider a finite element approximation of a phase field model for the evolution of voids by surface diffusion in an electrically conducting solid. The phase field equations are given by a degenerate Cahn–Hilliard equation with an external forcing induced by the electric field. We describe the iterative scheme used to solve the resulting nonlinear discrete equations and present some numerical experiments in three space dimensions. The first author was supported by the EPSRC grant EP/C548973/1.     

Improved electromigration reliability of surface acoustic wave devices using Ti/Al-Mo/Ti/Al-Mo electrodes

In order to obtain both high electromigration (EM) reliability and fine-dimensional control in high-frequency surface acoustic wave (SAW) devices, 4-layered Ti/Al-Mo/Ti/Al-Mo electrode films were investigated on 128° Y-X LiNbO₃ substrates by sputtering deposition. The results indicated that the 4-layered films had an improved EM reliability compared to conventional Al-0.5wt.%Cu films. Their lifetime is approximately three times longer than that of the Al-0.5wt.%Cu films tested at a current density of 5 × 10⁷ A/cm² and a temperature of 200°C. Moreover, the 4-layered films were easily etched in reactive ion etching and fine-dimensional control was realized during the pattern replication for high-frequency SAW devices. For the 4-layered films, an optimum Mo quantity and sputtering parameters were very significant for high EM reliability.