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A 45-channel 100 GHz arrayed waveguide grating (AWG) based on Si nanowire waveguides is designed, simulated and fabricated. Transfer function method is used in the spectrum simulation. The simulated results show that the central wavelength and channel spacing are 1 562.1 nm and 0.8 nm, respectively, which are in accord with the designed values, and the crosstalk is about ?23 dB. The device is fabricated on silicon-on-insulator (SOI) substrate by deep ultraviolet lithography (DUV) and inductively coupled plasma (ICP) etching technologies. The 45-channel 100 GHz AWG exhibits insertion loss of 6.5 dB and crosstalk of ?8 dB. This work has been supported by the National High Technology Research and Development Program of China (No.2015AA016902), and the National Natural Science Foundation of China (Nos.61435013 and 61405188). E-mail:zhangjiashun@semi.ac.cn 相似文献
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According to the plasma dispersion effect of silicon (Si), a silicon-on-insulator (SOI) based variable optical attenuator (VOA) with p-i-n lateral diode structure is demonstrated in this paper. A wire rib waveguide with sub-micrometer cross section is adopted. The device is only about 2 mm long. The power consumption of the VOA is 76.3 mW (0.67 V, 113.9 mA), and due to the carrier absorption, the polarization dependent loss (PDL) is 0.1 dB at 20 dB attenuation. The raise time of the VOA is 34.5 ns, the fall time is 37 ns, and the response time is 71.5 ns. 相似文献
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利用有机/无机杂化方法制备了光敏性溶胶-凝胶(sol-gel)SiO2材料,在预生长了18μm厚的SiO2上包层的硅基片上旋涂成膜。经前烘、紫外曝光、后烘的薄膜在5μm×5μm的扫描范围内的表面粗糙度只有0.266nm,表面起伏度只有0.336nm。利用紫外光直写技术,制作出条形波导器件。SEM照片表明波导端面形状较好,侧壁陡直。对1×4多模干涉型分束器进行初步的通光测试,观察到分光效果较好的近场输出图像。 相似文献
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<正>随着光子技术在光纤通信、微波光子学、激光雷达、量子信息处理等领域的广泛应用,光子和光电子集成的重要性日益突显,成为解决相关应用面临的体积、功耗和成本瓶颈的关键。实际上,早在20世纪60年代就提出了集成光学的概念。受到集成电路(IC)技术的启发,提出了光子集成回路(PIC)和光电集成电路(OEIC)的概念,期望通过集成技术来增强光电子器件的性能,减小体积和功耗,并提高可靠性。然而,相比于集成电路芯片的迅猛发展,光子和光电子集成由于面临材料和工艺等一系列挑战,直到近十余年才实现突破。目前,大规模光子集成技术正在逐渐走向实用化。 相似文献
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