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1.
The mechanism of the FA/O chelating agent in the process of chemical mechanical polishing (CMP) is introduced. CMP is carried on a φ300 mm copper film. The higher polishing rate and lower surface roughness are acquired due to the action of an FA/O chelating agent with an extremely strong chelating ability under the condition of low pressure and low abrasive concentration during the CMP process. According to the results of several kinds of additive interaction curves when the pressure is 13.78 kPa, flow rate is 150 mL/min, and the rotating speed is 55/60 rpm, it can be demonstrated that the FA/O chelating agent plays important role during the CMP process.  相似文献
2.
宝石晶体中氢氧根离子的红外振动吸收   总被引:1,自引:1,他引:0  
通过比较原生态宝石和钛宝石晶体中的氢氧根离子的红外振动吸收光谱,明确证明钛宝石晶体中的只有3309cm^-1带与晶体中的钛离子有关,3232cm^-1和3187cm^-1等带跟钛离子并无关系,引起3309cm^-1带的氢氧根离子的近邻必定有四价钛离子,在白宝石和红宝石晶体中,引起3278cm^-1带的氧氧根离子的近邻离子有铬离子出现,提出3278cm^-1带是邻近于二价和四价铬离子对氢氧根离子的振动吸收带。  相似文献
3.
罗宗南  杨耕兴 《电子器件》1999,22(4):287-291
石英玻璃中的羟基含量可以用红外光谱法测定,但需要已知羟基含量的校准标准,即羟基的消光系数εOH,本文将讨论石英玻璃中羟基的消光系数。  相似文献
4.
利用硼掺杂金刚石膜电极在电解液中作阳极,通过控制各种相关条件使电解液中产生大量氢氧自由基和其他强氧化物质,将有机污染物氧化分解成小分子,甚至是CO2和H2O;同时配合专用清洗剂,极好地去除材料表面及狭缝中的固体颗粒和金属杂质,有效实现了被清洗表面的高度洁净化。通过实验分析了pH值的变化对电解液氧化性的影响,确定了最佳pH值为12.5。  相似文献
5.
通过选用含有羟基的丙烯酸酯类单体制备聚合物分散液晶(PDLC)膜,研究了羟基的存在和不同的制膜工艺条件对PDLC膜电-光性能及稳定性的影响。通过分别添加具有刚性和柔性的交联剂,使羟基参与交联,研究了PDLC膜电-光性能及稳定性的变化规律。研究表明向单体中添加含有羟基的分子结构不同的丙烯酸酯,可提高PDLC膜中聚合物网络与两片ITO膜之间的结合力,降低PDLC膜的驱动电压。添加柔性交联剂二异氰酸己酯对PDLC膜的稳定性和黏结性影响较小,适量添加二异氰酸己酯可在保持一定对比度的情况下降低PDLC膜的驱动电压。  相似文献
6.
本文用速率方程理论导出了用激光诱导荧光法探测OH自由基时激光本身产生的自由基浓度,讨论了该浓度与气压的关系,并对低气压测量时,荧光强度的变化进行了定性的研究,结论与他人的实验结果是一致的。  相似文献
7.
We developed Raman spectroscopy to characterize the hydroxyl (OH) solubility in fused silica and thermally grown steam SiO2 from 695 to 1000‡C and 1–10 atm steam pressure. The technique was extended to measure the OH diffusion profiles in bulk v-SiO2, and the derived diffusion coefficients supplement those published in the literature. Fused silicas processed with higner fictive temperatures display larger initial OH solubilities which decrease with time, but saturations at temperatures as low as 600‡C remove much of the prior thermal history as the glass structurally relaxes. The OH solubility appears to be proportional to the square root of external steam pressure; however, the quasiequilibrium temperature dependence is unresolved. The behavior of OH in fused silica and the thermally grown oxide is very similar when the two materials are identically processed.  相似文献
8.
The selective detection of CO gas by stannic oxide incorporated with ThO2(l − 10 wt%), in the presence of H2 and petroleum gases such as C3H8 and iso-C4H2 has been studied. Materials mixed with 5 wt% ThO2 showed high selectivity to CO gas at a sample temperature of 200−250‡C. The effects of hydrophobic or hydrophilic silica present in the samples on the detection sensitivity to CO gas have been investigated. From the results it is apparent that the removal of the hy-droxyl radical from the surface of SnO2 enhances the sensitivity to CO gas.  相似文献
9.
重金属氧化物玻璃中—OH的存在对玻璃光学性质产生干扰影响,使玻璃在中红外波段产生较大损耗。玻璃除水是制作中红外玻璃的关键环节。讨论了羟基对重金属氧化物玻璃的光学、光谱学及光纤性质的影响,总结了近年来出现的中红外重金属氧化物玻璃除水方法(反应气氛除水法、鼓泡法、引入氟化物、氯化物除水等),对比分析了不同方法的除水效果和研究进展,对今后中红外重金属氧化物玻璃除水技术的现状与发展趋势进行了概括。  相似文献
10.
张阳  窦伟  罗巍  卢维尔  解婧  李超波  夏洋 《半导体学报》2013,34(7):073006-5
We develop a novel and convenient method to prepare large area single-layer and multi-layer graphene through surface modification with oxygen plasma.The obtained large area single-layer graphene is dozens of microns wide in the lateral dimension and characterized by optical microscopy,atomic force microscopy.Raman spectroscopy show multilayer graphene has less disorder density than single-layer graphene.X-ray photoelectron spectroscopy(XPS) analysis shows that hydroxyl groups are formed on the HOPG surface during oxygen plasma pre-treatment.Hydrogen bonds develop between hydroxyl groups on HOPG surface and silanol groups on hydroxylated SiO2/Si substrate,which facilitate the transfer process.This study may provide a potential approach to develop graphene-based devices by using the large area lithographic printing process.  相似文献
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