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计量型原子力显微镜的位移测量系统(英文) 总被引:2,自引:2,他引:0
针对纳米结构表征和纳米制造的质量控制需要,中国计量科学研究院设计并搭建了一台计量型原子力显微镜用于纳米几何结构的测量.为了将位移精确溯源到国际单位米,研制了单频8倍程干涉仪测量位移,样品表面形貌则由接触式原子力显微镜测量.一个立方体反射镜与原子力显微镜的测头固定,作为干涉仪的参考镜.两个互相垂直的干涉仪用于测量样品与探针在x-y方向的相对位置.样品台置于具有三面反射镜的零膨胀玻璃块上,由压电陶瓷位移台驱动.另外两台干涉仪测量样品与探针在z方向的位移,探针针尖位于干涉仪光束的交点以减小Abbe误差.由于光学器件的缺陷产生的相位混合会引起非线性误差,采用谐波分离法拟合干涉信号来修正误差,修正后干涉仪测量误差减小为0.7 nm. 相似文献
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为解决传统分离镜组式干涉仪体积较大,无法在空间受限的环境条件下应用的问题,开展了全光纤F-P干涉位移测量技术研究。根据干涉原理分析了不同反射率条件对干涉信号形式的影响,计算得出:当反射率为4%时,多光束干涉的光强信号将近似为正弦函数,并利用有限元仿真对位移测量原理进行验证。设计搭建了基于非本征F-P干涉技术的全光纤位移测量系统。实验结果表明:该系统在1 min内静态噪声电压标准差为23.3 mV;在1 mm位移范围内,该系统与XL-80激光干涉仪的测量结果呈现高度线性关系,线性相关系数R 2为1,且该系统位移测量重复性优于XL-80激光干涉仪。 相似文献
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A precise and noninvasive method for the size and shape measurement of gold nanorods(GNRs) has been proposed based on depolarized dynamic light scattering(DDLS). A home-made DDLS apparatus has been established. By applying depolarized optical path with precise alignment method, the signal-to-noise ratio(SNR) of this apparatus is highly improved. GNRs with three different diameter and length has been precisely measured by using DDLS method as well as scanning electron microscopy(SEM). The thickness of adsorption layer of cetyltrimethylammonium bromide(CTAB) in solution has been taken into consideration. Results show that size measurement of GNRs by using DDLS method agrees very well with that by using SEM. In addition, it is shown that the extinction spectroscopy strongly limited the application of DDLS method by affecting the effective scattering light intensity. Proper laser wavelength should be chosen before the application of this method. 相似文献
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千家村位于浙江省西部山区,全村167家农户,农业人口738人,总面积441.3hm2,其中林业用地面积364.4hm2,占总面积的82.6%。其他用地面积76.9hm2,占总面积17.4%。农田31.9hm2,人均0.043hm2。经过近10年的农村... 相似文献