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1.
Abstract

Among the parameters that affect photolithography, the most important are exposure and development time which affect the coating photoresist characteristics. This study further researches the relationship between the exposure and development time using a high speed image inspection system, and the relationship between the development time and photoresist depth using a Scanning Probe Microscope (SPM). A partial scan CCD camera and high speed frame capture card were used to obtain the photoresist development processing parameters. The experimental results verified that this imaging system provides an economical and effective method for producing a micro‐photo‐etched product. It is expected that these experiments can also offer some good references useful in the micro electro mechanical industrial field.  相似文献   
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The ability to pattern natural polymers at different scales is extremely important for many research areas, such as cell culture, regenerative medicine, bioelectronics, tissue engineering, degradable implants, and photonics. For the first time, the use of wool keratin (WK) as a structural biomaterial for fabricating precise protein microarchitectures is presented. Through straightforward biochemical processes, modified WK proteins become intrinsically photoreactive without significant changes in protein structure or function. Under light irradiation, intermolecular chemical crosslinking between WK molecules can be successfully initiated by using commercially available photoinitiators. As a result, high‐performance WK patterning on the micrometer scale (µm) can be achieved through a combination of water‐based photolithography techniques. By simply mixing with nanoparticles, enzymes, and other dopants, various “functional WK resists” can be generated. In addition, without the addition of any cell‐adhesive ligands, these patterned protein microstructures are demonstrated as bio‐friendly cellular substrates for the spatial guidance of cells on their surface. Furthermore, periodic microfabricated WK structures in complex patterns that display typical iridescent behavior can be designed and formed over macroscale areas (cm).  相似文献   
4.
This paper reports a rational and facile approach to fabricating arrays of 3D annular nanostructures with tunable layers by utilizing the diffraction and interference of UV light. Based on discretized Fresnel bright spots and standing waves formed within a photoresist film, the structures with nanoscale features are realized using simple, conventional photolithography. The 3D annular nanostructures are produced in arrays of single‐, double‐, and triple‐layered ring structures with the height of single layer on a 100 nm scale. The structural formation process and features of the nanostructures are analyzed and explained through 3D modeling that integrates the effects of both UV exposure dose and chemical kinetics. The approach to generating 3D annular nanostructures with tunable layers and discrete heights can be adapted for various applications that require the 3D structures fabricated over a large area with high throughput.  相似文献   
5.
Scalable arrays of chemical vapor sensors based on DNA-decorated graphene   总被引:1,自引:0,他引:1  
Arrays of chemical vapor sensors based on graphene field effect transistors functionalized with single-stranded DNA have been demonstrated. Standard photolithographic processing was adapted for use on large-area graphene by including a metal protection layer, which protected the graphene from contamination and enabled fabrication of high quality field-effect transistors (GFETs). Processed graphene devices had hole mobilities of 1,640 ± 250 cm2.V-1.s-1 and Dirac voltages of 15 ± 10 V under ambient conditions. Atomic force microscopy was used to verify that the graphene surface remained uncontaminated and therefore suitable for controlled chemical functionalization. Single-stranded DNA was chosen as the functionalization layer due to its affinity to a wide range of target molecules and π-π stacking interaction with graphene, which led to minimal degradation of device characteristics. The resulting sensor arrays showed analyte- and DNA sequence-dependent responses down to parts-per-billion concentrations. DNA/GFET sensors were able to differentiate among chemically similar analytes, including a series of carboxylic acids, and structural isomers of carboxylic acids and pinene. Evidence for the important role of electrostatic chemical gating was provided by the observation of understandable differences in the sensor response to two compounds that differed only by the replacement of a (deprotonating) hydroxyl group by a neutral methyl group. Finally, target analytes were detected without loss of sensitivity in a large background of a chemically similar, volatile compound. These results motivate further development of the DNA/graphene sensor family for use in an electronic olfaction system.  相似文献   
6.
Insect climbing footpads are able to adhere to rough surfaces, but the details of this capability are still unclear. To overcome experimental limitations of randomly rough, opaque surfaces, we fabricated transparent test substrates containing square arrays of 1.4 µm diameter pillars, with variable height (0.5 and 1.4 µm) and spacing (from 3 to 22 µm). Smooth pads of cockroaches (Nauphoeta cinerea) made partial contact (limited to the tops of the structures) for the two densest arrays of tall pillars, but full contact (touching the substrate in between pillars) for larger spacings. The transition from partial to full contact was accompanied by a sharp increase in shear forces. Tests on hairy pads of dock beetles (Gastrophysa viridula) showed that setae adhered between pillars for larger spacings, but pads were equally unable to make full contact on the densest arrays. The beetles'' shear forces similarly decreased for denser arrays, but also for short pillars and with a more gradual transition. These observations can be explained by simple contact models derived for soft uniform materials (smooth pads) or thin flat plates (hairy-pad spatulae). Our results show that microstructured substrates are powerful tools to reveal adaptations of natural adhesives for rough surfaces.  相似文献   
7.
Colloidal assemblies develop pronounced structural colors due to the selective diffraction of light. Micropatterns with multiple structural colors are appealing for the use in a variety of photonic applications. Here, a lithographic approach is reported, which provides a high level of control over the size, shape, and color of a micropattern using the anisotropic shrinkage of inverse opals made of a negative photoresist heated to high temperatures. Shrinkage occurs uniformly across the thickness of the film, leading to a blueshift in the structural color while maintaining a high reflectivity across the full visible spectrum. The rate of shrinkage is determined by the annealing temperature and the photoresist crosslinking density. The rate can, therefore, be spatially modulated by applying UV radiation through a photomask to create multicolor micropatterns from single‐colored inverse opals. The lateral dimensions of the micropattern features can be as small as the thickness of the inverse opal.  相似文献   
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Solution processing of polymer semiconductors provides a new paradigm for large‐area electronics manufacturing on flexible substrates, but it also severely restricts the realization of interesting advanced device architectures, such as lateral heterostructures with defined interfaces, which are easily accessible with inorganic materials using photolithography. This is because polymer semiconductors degrade, swell, or dissolve during conventional photoresist processing. Here a versatile, high‐resolution photolithographic method is demonstrated for patterning of polymer semiconductors and exemplify this with high‐performance p‐type and n‐type field‐effect transistors (FETs) in both bottom‐ and top‐gate architectures, as well as ambipolar light‐emitting field‐effect transistors (LEFETs), in which the recombination zone can be pinned at a photolithographically defined lateral heterojunction between two semiconducting polymers. The technique therefore enables the realization of a broad range of novel device architectures while retaining optimum materials performance.  相似文献   
10.
研究了一种基于介电泳机理的金纳米颗粒传感器装配方法。在分析介电泳工作原理的基础上,利用Comsol Multiphysics仿真软件,对平面微电极条件下所产生的空间电场进行了建模仿真,研究了金纳米粒子极化模型及相关介电泳频谱特性。设计加工了基于光刻标准工艺和引线键合技术的平面微电极阵列,构建了具有三维位移平台和视频监控装置的介电泳装配实验平台。以250nm金颗粒为实验对象,在理论分析基础上,完成了在微电极阵列上的介电泳组装实验研究,并通过电特性测量验证了组装结果。实验结果表明:金纳米颗粒的介电泳组装效果与介质溶液的电导率、电场频率和幅度、金纳米粒子浓度、电极间隙及作用时间有关,在适宜的条件下,采用介电泳技术可实现对金纳米颗粒的有效操控和纳米器件装配,该方法为纳米传感器的制造提供了一种有效途径。  相似文献   
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