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1.
Cyclic tension and bend tests were performed on heat-resistant 12Cr1MoV steel specimens in as-supplied condition as well as after Zr+ ion beam surface irradiation. Distinct differences in strain induced relief, as well in cracking pattern of modified surface layer were observed by optical microscopy and interference profilometry. Changes in subsurface layer are characterized by means of nano- and microindentation and fractography of fracture surfaces (with the help of scanning electron microscopy). It is shown that the main influence on mechanical properties is mostly induced by thermal treatment during irradiation rather than formation of a 2 μm thick layer doped with Zr. The differences in deformation behavior may be explained by physical mesomechanics concepts.  相似文献   
2.
NMOS器件两次沟道注入杂质分布和阈电压计算   总被引:1,自引:1,他引:0  
王纪民  蒋志 《微电子学》1997,27(2):121-124
分别考虑了深浅两次沟道区注入杂质在氧化扩散过程中对表面浓度的贡献。对两次注入杂质的扩散分别提取了扩散系数的氧化增强系数、氧化衰减系数和有效杂地系数,给出了表面浓度与工艺参数之间的模拟关系式,以峰值浓度为强反型条件计算了开启电压,文章还给出了开启电压、氧化条件、不同注入组合之间的关系式。  相似文献   
3.
We summarize a continuing investigation into using ion implantation to alter the transition temperature of superconducting thin films. The primary motivation for the work presented here was to study the feasibility of using magnetic ion doping to replace the bi-layer Tc control process currently used for certain cryogenic detector applications at National Institute for Standards and Technology. The results from work with various ion species implanted into aluminum, molybdenum, titanium and tungsten host films are presented.  相似文献   
4.
The changes in surface composition of metallic alloys caused by segregation can be very efficiently studied by low-energy ion scattering (LEIS) due to the specific surface sensitivity of this technique. Investigations of single-crystal surfaces of ordered alloys are of particular interest because they provide the possibility to investigate the interplay between segregation effects and the order-disorder phase transition when passing through the transition temperature. Exemplifying these effects for bimetallic alloys we consider in particular the CuAu-system.For the quantitative interpretation of energy and angle resolved LEIS intensity distributions we compare experimental results with those from numerical simulations using the MARLOWE code which we extended with a detailed trajectory analysis. This allows us to apply various discrimination criteria, such as number of collisions, distance of closest approach, identification of the scattering crystal layer, total path length, etc. On this basis structural effects, ion survival probabilities and the influence of thermal vibrations can be studied.We demonstrate this potential by using CuAu(1 0 0) as a special example. The scattering potential parameters were calibrated with elemental single crystals of known structures and the anisotropic Debye temperatures taken from the literature showed good agreement, neutralization was of minor importance in this case. Our procedure could be successfully used for the quantitative analysis of the composition of the first and second layer as a function of temperature. These results are in good agreement with theoretical predictions.  相似文献   
5.
The effect of the ion bombardment to unbalanced magnetron deposited, approximately 1.5 and 4.5 μm thick, Nb coatings have been investigated as the bias voltage was varied from UB=−75 to −150 V. Increasing bias voltage increased the hardness of the coating from 4.5 to 8.0 GPa. This was associated with residual stress and Ar incorporation into the Nb lattice. Strong {110} texture developed in the samples deposited at low bias voltages, while beyond UB=−100 V a {111} texture became dominant. However, strong {111} texture was observed only with the thicker 3Nb coatings. Secondary electron microscopy investigation of the coating topography showed fewer defects in the thicker coatings. All coatings exhibited good corrosion resistance, with the thicker coatings clearly outperforming the thinner ones. Excessive bias voltages (UB=−150 V) was found to lead to poor adhesion and loss of corrosion resistance.  相似文献   
6.
研究了电子束、离子束作用于Al2O3表面时成分的变化,表明无论电子束或离子束都能使Al2O3发生分解,产生导电的元素Al。实验在PHI610·SAM上进行,电子束轰击下(3keV,O.5μA,入射角60°)10s就有元素Al分解出来,2min以后就达到饱和,分解析出量随时间成a(1-e-bt)的关系。离子束轰击下同样发生元素Al的分解,但当Ei>3keV时,由于剥离速率加大,溅射5min时表面Al峰反而比1min时要弱。这时表面Al含量处于分解析出与溅射剥离的动态平衡中。实验还发现了Al2O3的解析与表面成分有关(如碳的含量)。最后讨论电子束与离子束的解析机理。  相似文献   
7.
K. Pyszniak  M. Turek  A. Wójtowicz 《Vacuum》2007,81(10):1145-1149
The paper presents experimental results of secondary ion energy distributions obtained for Ti and Si targets bombarded by 20-30 keV monoisotope Ar+ ion beam. The influence of the extraction voltages between target and a slit of the electrostatic energy analyzer entrance on the energy distributions of secondary ions was investigated. After optimization of the secondary ion extraction system, the mass spectra of secondary ions were also measured. The investigations were done using recently built experimental system. Experimental data are compared with the computer simulation results obtained using TRQR and SATVAL codes.  相似文献   
8.
中碱值硫化烷基水杨酸钙的制备及性能研究   总被引:1,自引:0,他引:1  
介绍了一种碱值达170mgKOH/g以上、硫含量大于3.0%、钙含量大于6.0%的硫化烷基水杨酸钙盐润滑油添加剂的制备过程及其性能。实验中重点考察了促进剂及硫磺加入量对产品碱值及硫含量的影响;通过冷冻蚀刻电镜法观察了含碳酸盐的胶体粒子结构及粒度分布情况;应用凸轮挺校、四球试验机等考察了硫化烷基水杨酸钙盐产品的极压抗磨性能。结果表明,硫化烷基水杨酸钙产品不但具有良好的高温洁净性、抗氧化安定性、胶体稳定性,而且具有突出的极压抗磨性及热稳定性。  相似文献   
9.
本文介绍了离子束混合工艺方法。与直接注入相比较,离子束混合所使用的设备造价低1/4—1/2,而生产效率可提高1—2个数量级,因而使生产成本大幅度降低,这无疑对离子束工艺的实际应用将产生巨大的促进作用。 通过对轴承材料(GCr15和Cr4Mo4V)经Cr、N、Ta不同元素的混合处理后,在0.5M H_2SO_4和0.1M NaCl的缓冲溶液中的阳极极化曲线表明经混合处理后的两种材料试样,其抗蚀能力和抗点蚀能力均大大提高,这与直接注入的试样效果是一致的。 通过俄歇谱仪和透射电镜的分析结果表明混合是成功的,且在一定的条件下,形成非晶组织。 本文的结论是,无论是离子的直接注入还是离子束混合,对提高轴承材料的抗腐蚀性能都是有效的方法,特别是离子束混合技术具有更大的应用前景。  相似文献   
10.
The successful use of palladium ion implantation into polyimide to seed an electroless plated film of copper on the polyimide surface is reported. Polyimide (Hitachi PIX 3400) was implanted with palladium ions to doses of 1.5 × 1015 − 1.2 × 1017 ions cm−2 using a MEVVA ion implanter. The implanted ions acted as sites for nucleation of copper film. A copper film was then deposited on implanted polyimide using a commercial electroless plating solution. The ion energy was kept low enough to facilitate a low critical ‘seed’ threshold dose that was measured to be 3.6× 1016 Pd ions cm−2. Test patterns were made using polyimide to study the adaptability of this technique to form thick structures. Plated films were studied with optical microscopy, Rutherford Backscattering Spectrometry (RBS) and Profilometry. The adhesion of films was qualitatively assessed by a ‘scotch tape test’. The film growth (thickness) was observed to be linear with plating time. A higher implantation dose led to greater plating rates. The adhesion was found to improve with increasing dose.  相似文献   
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