二氧化锡溅射工艺研究

SnO2 是最早使用也是目前使用最广泛的一种气敏材料 ,使用该材料设计制作的气敏传感器具有许多优点。在简要介绍溅射镀膜的成膜过程和特点的基础上 ,着重介绍了SnO2 膜的制备流程 ,分析了功率和温度变化对成膜质量的影响     

Pool boiling on a superhydrophilic surface

Titanium Dioxide, TiO₂, is a photocatalyst with a unique characteristic. A surface coated with TiO₂ exhibits an extremely high affinity for water when exposed to UV light and the contact angle decreases nearly to zero. Inversely, the contact angle increases when the surface is shielded from UV. This superhydrophilic nature gives a self-cleaning effect to the coated surface and has already been applied to some construction materials, car coatings and so on. We applied this property to the enhancement of boiling heat transfer. An experiment involving the pool boiling of pure water has been performed to make clear the effect of high wettability on heat transfer characteristics. The heat transfer surface is a vertical copper cylinder of 17 mm in diameter and the measurement has been done at saturated temperature and in a steady state. Both TiO₂-coated and non-coated surfaces were used for comparison. In the case of the TiO₂-coated surface, it is exposed to UV light for a few hours before experiment and it is found that the maximum heat flux (CHF) is about two times larger than that of the uncoated surface. The temperature at minimum heat flux (MHF) for the superhydrophilic surface is higher by 100 K than that for the normal one. The superhydrophilic surface can be an ideal heat transfer surface. Copyright © 2002 John Wiley & Sons, Ltd.     

中频反应溅射SiO2膜与直流溅射ITO膜的在线联镀

多数ITO透明导电玻璃生产线在实现SiO2膜与ITO膜在线联镀时，应用SiO2靶射频溅射沉积SiO2膜工艺和ITO靶直流溅射沉积ITO膜工艺，如果SiO2膜应用硅靶反应磁控溅射工艺，存在这种工艺是否可以与ITO靶直流溅射沉积ITO膜工艺在线联用以及如何实现联用的问题。作者对现有的生产线进行了改造设计、加工，做了大量实验、质谱分析和多项测试研究，成功地实现反应溅射SiO2膜与ITO膜在线联镀，做到SiO2镀膜室的工作状态的变化基本上不影响ITO镀膜室的工艺条件。     

源气体流量比对F-DLC薄膜结构的影响

以高纯石墨作靶，CHF3/Ar作源气体采用反应磁控溅射法制备出了氟化类金刚石（F-DLC）薄膜。拉曼光谱表明，CHF3相对流量的增加会引起薄膜的D峰与G峰强度之比I（D）/I（G）减小，晶粒增大，芳香环结构出例下降。红外吸收光谱分析证实了这些推论，指出这是由于薄膜中氟含量上升的结果。     

溅射靶材的应用及制备初探

随着电子及信息产业突飞猛进的发展，世界溅射靶材的需求越来越多，本文介绍了靶材的发展概况、分类和应用情况，以及靶材的特性要求．探讨Ni-Cr合金靶材的制备工艺，结果表明，产品能满足靶材特性要求。     

High-pressure dc sputtering of High-Tc BPSCCO thin films withTc(0) above 100 K

High-T _c Bi(Pb)-Sr-Ca-Cu-O thin films have been made on single-crystal MgO substrates using high-pressure dc sputtering technique. X-ray studies confirm the crystallinity and highly oriented structure withc-axis perpendicular to the substrate. By optimizing the annealing schedule the formation of the high-T _c phase is stabilized. The best film exhibited superconducting transition temperature with zero-resistance temperature,T _c(0), as high as 101 K. Temperature dependence ofJ _c indicates the presence of Josephson-type weak links.     

Corrosion Behavior of a Sputtered K38G Nanocrystalline Coating with a Solid NaCl Deposit in Wet Oxygen at 600 to 700°C

A nanocrystalline coating of K38G alloy was obtained by means of magnetron sputtering. The corrosion behavior of cast K38G alloy and its sputtered nanocrystalline coating with a solid NaCl deposit in dry air or wet oxygen at 600 and 700°C have been studied and compared. The results indicated that the mass gain of the coating is higher than that of the cast alloy at 600 and 700°C. Therefore, nanocrystallization reduced the corrosion resistance at these temperatures. Furthermore, the mass gains of the coating and the cast alloy with a NaCl deposit in wet oxygen were less than that with a NaCl deposit in dry air. The relevant corrosion mechanisms are discussed.     

Effect of Thickness on the Structure and Tribological Properties of MoSx Coating

MoSx coatings were prepared by bipolar-pulse DC unbalanced magnetron-sputtering system with the variation of coating thickness at different Ar pressures.The composition and surface morphology were determined by using energy dispersive X-ray and scanning electron microscopy;the structural characterization was analyzed by X-ray diffraction.The friction and wear properties were investigated by fretting tests in air with less than 10% and 50% relative humidity.At 0.40 Pa pressure,(002) basal plane orientation was formed throughout the coatings.At 0.88 Pa and 1.60 Pa pressures,(002) basal plane orientation was only noticed in the first stage of coating growth(around 0.20 μm in thickness), and then edge orientations with their basal planes perpendicular to the surface would be evolved in the coatings.Humidity has a minor influence on the coatings that have(002) basal plane orientation,whereas the tribological properties of MoSx coatings with edge orientations are greatly affected by humidity.The mechanisms of coating growth and friction and wear processes are discussed.     

Growth of CeO_2, Y_2O_3 Buffer Layers for YBCO Coated Conductor

~~Growth of CeO_2, Y_2O_3 Buffer Layers for YBCO Coated Conductor     

Effects of Substrate Temperatures on the Structure and UV-shielding Properties of TiO_2-CeO_2 Films Deposited on Glass by Radio-frequency Magnetron Sputtering

1Introduction Theultravioletrays(UV)insunlight(-4%)cantransmitintoroomthroughcommonfloatglass,theUVcanmakethematerialsintheroom,eg,paper,furni ture,textilefabricandplastics,becoloredanddeterio rated.ShieldingfromUVirradiationisofinterestinmanyfields.Formu…