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蒸发沉积态的非晶半导体As2S8薄膜在退火-饱和光照-退火循环处理下,其折射率变化存在可逆。而对于在退火-非饱和光照-退火的连续处理,发现As2S8薄膜折射率先增加达到最大值,然后在退火作用下才出现可逆。退火处理引起S-S键态变化,导致非晶半导体As2S8薄膜结构达到一定稳定状态,伴随着薄膜厚度的减小。As2S8平面波导在130C 温度退火,然饱和光照,又经过130C 温度退火处理后,显示出约为0.27 dB/cm低的传输损耗,在波长632.8 nm导模下有良好的光传输性能。 相似文献
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The refractive index of as-evaporated amorphous semiconductor As2S8 film upon an annealing and saturation irradiation and annealing cycle is reversible.Upon successive treatment with annealing and non-saturation irradiation and further annealing,the refractive index of the as-evaporated amorphous semiconductor As2S8 film reaches a maximum value and then its reversibility occurs upon annealing.The annealing of the amorphous semiconductor As2S8 films results in the stabilization of the structure through changes of the S-S bonds in the nearest environment,accompanied by a decrease of film thickness.The As2S8 planar waveguide after annealing(130℃) and saturation irradiation and annealing(130℃) shows a good propagation characteristic with ca.0.27 dB/cm low propagation loss of the 632.8 nm guided mode. 相似文献
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