Frequency response data-based peak filter design applied to MIMO large-scale high-precision scan stage

A large-scale high-precision scan stage is important equipment in the industrial productions of micro-fabrication such as flat panel display (FPD) lithography systems. Designing controllers for multi-input multi-output (MIMO) systems is time-consuming and needs experience because of the interaction between each axis and many controller tuning parameters. The aim of this study is to develop a peak filter design method based on frequency response data to reduce repetitive disturbance. This data-based approach does not use the model and only uses the frequency response data of the controlled system and the disturbance spectrum calculated from the scanning error data (Contribution 1). The peak filter is designed by convex optimization and satisfies robust stability conditions for six-degree-of-freedom systems (Contribution 2). The control performance of the designed peak filter is experimentally demonstrated with an industrial MIMO large-scale high-precision scan stage in reducing the scanning error of the main stroke of the translation along the $x$-axis (Contribution 3).     

Analysis of pressure and heat distribution in a dilating or contracting filter chamber with two outlets using multivariate spectral quasilinearization method

The development of efficient filters is an essential part of industrial machinery design, specifically to increase the lifespan of a machine. In the filter chamber design considered in this study, the magnetic material is placed along the horizontal surface of the filter chamber. The inside of the filter chamber is layered with a porous material to restrict the outflow of unwanted particles. This study aims to investigate the flow, pressure, and heat distribution in a dilating or contracting filter chamber with two outlets driven by injection through a permeable surface. The proposed model of the fluid dynamics within the filter chamber follows the conservation equations in the form of partial differential equations. The model equations are further reduced to a steady case through Lie's symmetry group of transformation. They are then solved using a multivariate spectral-based quasilinearization method on the Chebyshev–Gauss–Lobatto nodes. Insights and analyses of the thermophysical parameters that drive optimal outflow during the filtration process are provided through the graphs of the numerical solutions of the differential equations. We find, among other results, that expansion of the filter chamber leads to an overall decrease in internal pressure and an increase in heat distribution inside the filter chamber. The results also show that shrinking the filter chamber increases the internal momentum inside the filter, which leads to more outflow of filtrates.     

Finite-time adaptive fuzzy control for a class of output constrained nonlinear systems with dead-zone

The article investigates the finite-time adaptive fuzzy control for a class of nonlinear systems with output constraint and input dead-zone. First, by skillfully combining the barrier Lyapunov function, backstepping design method, and finite-time control theory, a novel adaptive state-feedback tracking controller is constructed, and the output constraint of the nonlinear system is not violated. Second, the fuzzy logic system is used to approximate unknown function in the nonlinear system. Third, the finite-time command filter is introduced to avoid the problem of “complexity explosion” caused by repeated differentiations of the virtual control signal in conventional backstepping control schemes. Meanwhile, a new saturation function is added in the compensating signal for filter error to improve control accuracy. Finally, based on Lyapunov stability analysis, all the signals of the closed-loop are proved to be semi-globally uniformly ultimately bounded, and the tracking error converges to a small neighborhood region of the origin in a finite time. A simulation example is presented to demonstrate the effectiveness for the proposed control scheme.     

Influence of pulse-jet cleaning pressure on performance of compact dust collector with pleated filter operated in clean-on-time mode

To operate a bag filter continuously, pulse-jet cleaning of dust particles from the filter medium is commonly required, and the pulse-jet pressure significantly affects the filter performance. In this study, the accumulation structure of residual dust particles inside and on the surface of a filter medium at different pulse-jet pressures was investigated by constructing a simple model, and the influence of the dust structure on the filter performance was clarified. Using a simple model, we determined the effective ratio of filtration area β, which represents the ratio of the filterable area to the total filtration area, the true resistance coefficient due to the primary dust layer ζ_p’ thinly deposited on the filter surface, and the true resistance coefficient inside the filter media itself ζ_f’_. The effective ratio of filtration area β decreased with operation time for all pulse-jet pressures; however, it maintained a high value when the pulse-jet pressure was high. The validity of β analyzed by the model was verified using two different methods, and the results showed good agreement, indicating that the model is effective in identifying real conditions. The true resistance coefficient due to the primary dust layer ζ_p’ decreased as the pulse-jet pressure increased; however, the true resistance coefficient inside the filter media itself ζ_f’ was the highest at 0.5 MPa. In addition, the dust collection efficiency was different at each pulse-jet pressure, which was considered to be caused by the difference in the dust particle accumulation structure.     

A Fusion Kalman Filter and UFIR Estimator Using the Influence Function Method

In this paper, the Kalman filter (KF) and the unbiased finite impulse response (UFIR) filter are fused in the discrete-time state-space to improve robustness against uncertainties. To avoid the problem where fusion filters may give up some advantages of UFIR filters by fusing based on noise statistics, we attempt to find a way to fuse without using noise statistics. The fusion filtering algorithm is derived using the influence function that provides a quantified measure for disturbances on the resulting filtering outputs and is termed as an influence finite impulse response (IFIR) filter. The main advantage of the proposed method is that the noise statistics of process noise and measurement noise are no longer required in the fusion process, showing that a critical feature of the UFIR filter is inherited. One numerical example and a practice-oriented case are given to illustrate the effectiveness of the proposed method. It is shown that the IFIR filter has adaptive performance and can automatically switch from the Kalman estimate to the UFIR estimates according to operating conditions. Moreover, the proposed method can reduce the effects of optimal horizon length on the UFIR estimate and can give the state estimates of best accuracy among all the compared methods.      

Long-term performance analysis of chemical filters in clean rooms based on a prediction model

Chemical filters are the most important devices for removing gas-phase pollutants in clean rooms. However, the testing concentration of chemical filters is too high for reflecting their performance in a real clean room environment. This study tested the adsorption performance of chemical filters in the two most commonly used shapes at different concentrations. Then, the Langmuir equation and Wheeler-Jonas kinetic equation were combined to establish an adsorption performance prediction model of chemical filters under actual conditions. The predicted values of the model were in good agreement with the experimental results, which indicated the high accuracy of the prediction model. The model does not need to test the microscopic parameters of the adsorbent and can maintain high accuracy at low concentrations. A fast method for calculating the service life of chemical filters was also presented. Based on this model, the total cost of using a chemical filter with a high carbon content in microelectronic clean rooms could be decreased by 45% due to decreasing the number of filter replacements over 3 months. So a chemical filter with a high carbon content should be preferred over a filter with low resistance in microelectronic clean rooms.     

基于激光测距的机载光电成像系统目标定位

针对小型机载光电平台无法准确获取视轴指向问题，设计了一种基于激光测距的目标定位算法。利用机载光电侦察平台锁定跟踪目标的特性，对同一目标多次测量，采用激光测距装置获取目标与载机间的距离信息。根据WGS-84定义的地球椭球模型建立系统的测量方程。考虑到测量方程的非线性，利用扩展卡尔曼滤波对目标位置进行估计。该定位方法精度只受到GPS接收机定位精度和激光测距机测量精度的影响，目标定位误差与机载光电侦察设备视轴指向测量无关。采用蒙特卡洛法仿真分析载机位置测量误差及激光测距系统位置误差对目标定位的影响，结果显示该算法定位精度较高。采用飞行试验数据验证了该目标定位算法的有效性，在飞行高度8 000 m时，目标定位精度优于8 m。相比于传统定位算法，该方法可将定位精度明显提高。同时此定位方法易于部署，可操作性强，具有较大的应用价值。     

自适应背景光估计与非局部先验的水下图像复原

有效地实现单幅水下降质图像复原对水下资源探索及环境监控领域的清晰图像获取具有极其重要的意义。为解决常用暗通道先验方法来复原图像时,背景光的估计易受白色物体干扰,且无法有效估计前景中白色物体透射率,复原质量不高的问题。本文提出了自适应背景光估计与非局部先验的水下图像复原算法。首先根据背景光具有高亮度及平坦性的特点,利用阈值分割算法获得背景光的候选区域,再通过图像的色调信息从候选信息中选取最佳的背景光点。随后,利用各颜色通道光的波长与散射系数的相关性,提出了适用于水下图像的非局部先验,并利用该先验估计各通道的透射率。最后针对复原结果中,因水下介质,微生物,水流影响而产生的加性噪声,设计去噪的最小优化问题,并利用引导滤波求解该问题,以去除复原结果中的加性噪声。实验表明:该算法在确保运行效率的基础上,准确地估计透射率,较常用算法的复原精度提高了约18%。证明了该算法能有效用于单幅水下图像复原的工程实践中。     

Distributed two‐stage state estimation with event‐triggered strategy for multirate sensor networks

This paper investigates the state estimation issue for a class of wireless sensor networks (WSNs) with the consideration of limited energy resources. First, a multirate estimation model is established, and then, a new event‐triggered two‐stage information fusion algorithm is developed based on the optimal fusion criterion weighted by matrices. Compared with the existing methods, the presented fusion algorithm can significantly reduce the communication cost in WSNs and save energy resources of sensors efficiently. Furthermore, by presetting a desired containment probability over the interval [0,1] with the developed event‐triggered mechanism, one can obtain a suitable compromise between the communication cost and the estimation accuracy. Finally, a numerical simulation for the WSN tracking system is given to demonstrate the effectiveness of the proposed method.     

Reusable and durable electrostatic air filter based on hybrid metallized microfibers decorated with metal-organic-framework nanocrystals

As global air pollution becomes increasingly severe,various types of fibrous filters have been devel-oped to improve air filter performance.However,fibrous filters have limitations such as high packing density that generally causes high-pressure drop and ultimately deterioration in the filtration effi-ciency.High-pressure particulate matter precipitators are limited in terms of scope for commercialization because they require high voltage supplies and ozone generators.In this study,we develop fibrous fil-ters with enhanced durability and improved performance using metallized microfibers decorated with metal-organic-framework(MOF)nanocrystals.Not only does the efficiency of the developed filters remain at or above 97％for 0.50-1.5 μm PMs but the durability also significantly increases.In addi-tion,using the water purification ability of the MOF,we explore the dye degradation effect of the hybrid microfibers by immersing them into Rhodamine B aqueous solution.In such an experiment the Rho-damine B aqueous solution is completely purified by the presence of the hybrid microfibers under the UV irradiation.