Frequency response data-based peak filter design applied to MIMO large-scale high-precision scan stage

A large-scale high-precision scan stage is important equipment in the industrial productions of micro-fabrication such as flat panel display (FPD) lithography systems. Designing controllers for multi-input multi-output (MIMO) systems is time-consuming and needs experience because of the interaction between each axis and many controller tuning parameters. The aim of this study is to develop a peak filter design method based on frequency response data to reduce repetitive disturbance. This data-based approach does not use the model and only uses the frequency response data of the controlled system and the disturbance spectrum calculated from the scanning error data (Contribution 1). The peak filter is designed by convex optimization and satisfies robust stability conditions for six-degree-of-freedom systems (Contribution 2). The control performance of the designed peak filter is experimentally demonstrated with an industrial MIMO large-scale high-precision scan stage in reducing the scanning error of the main stroke of the translation along the $x$-axis (Contribution 3).     

Analysis of pressure and heat distribution in a dilating or contracting filter chamber with two outlets using multivariate spectral quasilinearization method

The development of efficient filters is an essential part of industrial machinery design, specifically to increase the lifespan of a machine. In the filter chamber design considered in this study, the magnetic material is placed along the horizontal surface of the filter chamber. The inside of the filter chamber is layered with a porous material to restrict the outflow of unwanted particles. This study aims to investigate the flow, pressure, and heat distribution in a dilating or contracting filter chamber with two outlets driven by injection through a permeable surface. The proposed model of the fluid dynamics within the filter chamber follows the conservation equations in the form of partial differential equations. The model equations are further reduced to a steady case through Lie's symmetry group of transformation. They are then solved using a multivariate spectral-based quasilinearization method on the Chebyshev–Gauss–Lobatto nodes. Insights and analyses of the thermophysical parameters that drive optimal outflow during the filtration process are provided through the graphs of the numerical solutions of the differential equations. We find, among other results, that expansion of the filter chamber leads to an overall decrease in internal pressure and an increase in heat distribution inside the filter chamber. The results also show that shrinking the filter chamber increases the internal momentum inside the filter, which leads to more outflow of filtrates.     

Finite-time adaptive fuzzy control for a class of output constrained nonlinear systems with dead-zone

The article investigates the finite-time adaptive fuzzy control for a class of nonlinear systems with output constraint and input dead-zone. First, by skillfully combining the barrier Lyapunov function, backstepping design method, and finite-time control theory, a novel adaptive state-feedback tracking controller is constructed, and the output constraint of the nonlinear system is not violated. Second, the fuzzy logic system is used to approximate unknown function in the nonlinear system. Third, the finite-time command filter is introduced to avoid the problem of “complexity explosion” caused by repeated differentiations of the virtual control signal in conventional backstepping control schemes. Meanwhile, a new saturation function is added in the compensating signal for filter error to improve control accuracy. Finally, based on Lyapunov stability analysis, all the signals of the closed-loop are proved to be semi-globally uniformly ultimately bounded, and the tracking error converges to a small neighborhood region of the origin in a finite time. A simulation example is presented to demonstrate the effectiveness for the proposed control scheme.     

Influence of pulse-jet cleaning pressure on performance of compact dust collector with pleated filter operated in clean-on-time mode

To operate a bag filter continuously, pulse-jet cleaning of dust particles from the filter medium is commonly required, and the pulse-jet pressure significantly affects the filter performance. In this study, the accumulation structure of residual dust particles inside and on the surface of a filter medium at different pulse-jet pressures was investigated by constructing a simple model, and the influence of the dust structure on the filter performance was clarified. Using a simple model, we determined the effective ratio of filtration area β, which represents the ratio of the filterable area to the total filtration area, the true resistance coefficient due to the primary dust layer ζ_p’ thinly deposited on the filter surface, and the true resistance coefficient inside the filter media itself ζ_f’_. The effective ratio of filtration area β decreased with operation time for all pulse-jet pressures; however, it maintained a high value when the pulse-jet pressure was high. The validity of β analyzed by the model was verified using two different methods, and the results showed good agreement, indicating that the model is effective in identifying real conditions. The true resistance coefficient due to the primary dust layer ζ_p’ decreased as the pulse-jet pressure increased; however, the true resistance coefficient inside the filter media itself ζ_f’ was the highest at 0.5 MPa. In addition, the dust collection efficiency was different at each pulse-jet pressure, which was considered to be caused by the difference in the dust particle accumulation structure.     

A Fusion Kalman Filter and UFIR Estimator Using the Influence Function Method

In this paper, the Kalman filter (KF) and the unbiased finite impulse response (UFIR) filter are fused in the discrete-time state-space to improve robustness against uncertainties. To avoid the problem where fusion filters may give up some advantages of UFIR filters by fusing based on noise statistics, we attempt to find a way to fuse without using noise statistics. The fusion filtering algorithm is derived using the influence function that provides a quantified measure for disturbances on the resulting filtering outputs and is termed as an influence finite impulse response (IFIR) filter. The main advantage of the proposed method is that the noise statistics of process noise and measurement noise are no longer required in the fusion process, showing that a critical feature of the UFIR filter is inherited. One numerical example and a practice-oriented case are given to illustrate the effectiveness of the proposed method. It is shown that the IFIR filter has adaptive performance and can automatically switch from the Kalman estimate to the UFIR estimates according to operating conditions. Moreover, the proposed method can reduce the effects of optimal horizon length on the UFIR estimate and can give the state estimates of best accuracy among all the compared methods.      

Subdivision based isogeometric analysis for geometric flows

We present a new isogeometric analysis (IGA) approach based on extended Loop subdivision scheme for solving various geometric flows defined on subdivision surfaces. The studied flows include the second-order, fourth-order, and sixth-order geometric flows, such as averaged mean curvature flow, constant mean curvature flow, and minimal mean-curvature-variation flow, which are generally derived by minimizing the associate energy functionals with $L^2$-gradient flow respectively. The geometric flows are discretized by means of subdivision based IGA, where the finite element space is formulated by the limit form of the extended Loop subdivision for different initial control meshes. The basis functions, consisting of quartic box-splines corresponding to each subdivided control mesh, are utilized to represent the geometry exactly. For the cases of the evolution of open surfaces with any shape boundary, high-order continuous boundary conditions derived from the mixed variational forms of the geometric flows should be implemented to be consistent with the isogeometric concept. For time discretization, we adopt an adaptive semi-implicit Euler scheme. By several numerical experiments, we study the convergence behaviors of the proposed approach for solving the geometric flows with high-order boundary conditions. Moreover, the numerical results also show the accuracy and efficiency of the proposed method.     

Long-term performance analysis of chemical filters in clean rooms based on a prediction model

Chemical filters are the most important devices for removing gas-phase pollutants in clean rooms. However, the testing concentration of chemical filters is too high for reflecting their performance in a real clean room environment. This study tested the adsorption performance of chemical filters in the two most commonly used shapes at different concentrations. Then, the Langmuir equation and Wheeler-Jonas kinetic equation were combined to establish an adsorption performance prediction model of chemical filters under actual conditions. The predicted values of the model were in good agreement with the experimental results, which indicated the high accuracy of the prediction model. The model does not need to test the microscopic parameters of the adsorbent and can maintain high accuracy at low concentrations. A fast method for calculating the service life of chemical filters was also presented. Based on this model, the total cost of using a chemical filter with a high carbon content in microelectronic clean rooms could be decreased by 45% due to decreasing the number of filter replacements over 3 months. So a chemical filter with a high carbon content should be preferred over a filter with low resistance in microelectronic clean rooms.     

基于Abaqus的双裂纹不同间距对裂纹扩展速率的研究

扩展有限元法是近年经过大量运用的,在传统有限元的范围中求解不连续问题一种有效计算方法,它是基于单位分解的思想,在计算不连续问题时加入跳跃函数。以ABAQUS为平台,基于扩展有限元方法 (XFEM),以含双穿透型裂纹的有限宽板受横向拉伸载荷为力学模型,建立相应的裂纹尖端应力的有限元模型,研究焊接接头区域不同间距双裂纹相互作用对裂纹扩展速率的影响。结果表明:双裂纹间距的的大小并没有对裂纹的扩展速率产生影响。     

Distributed two‐stage state estimation with event‐triggered strategy for multirate sensor networks

This paper investigates the state estimation issue for a class of wireless sensor networks (WSNs) with the consideration of limited energy resources. First, a multirate estimation model is established, and then, a new event‐triggered two‐stage information fusion algorithm is developed based on the optimal fusion criterion weighted by matrices. Compared with the existing methods, the presented fusion algorithm can significantly reduce the communication cost in WSNs and save energy resources of sensors efficiently. Furthermore, by presetting a desired containment probability over the interval [0,1] with the developed event‐triggered mechanism, one can obtain a suitable compromise between the communication cost and the estimation accuracy. Finally, a numerical simulation for the WSN tracking system is given to demonstrate the effectiveness of the proposed method.