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A fully-differential bandpass CMOS preamplifier for extracellular neural recording is presented in this paper.The capacitive-coupled and capacitive-feedback topology is adopted.We describe the main noise sources of the proposed preamplifier and discuss the methods for achieving the lowest input-referred noise.The preamplifier has a midband gain of 43 dB and a DC gain of 0.The-3 dB upper cut-off frequency of the preamplifier is 6.8 kHz.The lower cut-off frequency can be adjusted for amplifying the field or action potentials located in different bands.It has an input-referred noise of 3.36 μVrms integrated from 1 Hz to 6.8 kHz for recording the local field potentials(LFPs)and the mixed neural spikes with a power dissipation of 24.75 μW from 3.3 V supply.When the passband is configured as 100 Hz-6.8 kHz for only recording spikes,the noise is measured to be 3.01 μVrms.The 0.115 mm2 prototype chip is designed and fabricated in 0.35-μm N-well CMOS(complementary metal oxide semiconductor)2P4M process. 相似文献
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Multi-channel micro neural probe fabricated with SOI 总被引:1,自引:0,他引:1
WeiHua Pei Lin Zhu ShuJing Wang Kai Guo Jun Tang Xu Zhang Lin Lu ShangKai Gao HongDa Chen 《中国科学E辑(英文版)》2009,52(5):1187-1190
Silicon-on-insulator(SOI) substrate is widely used in micro-electro-mechanical systems(MEMS).With the buried oxide layer of SOI acting as an etching stop,silicon based micro neural probe can be fabri-cated with improved uniformity and manufacturability.A seven-record-site neural probe was formed by inductive-coupled plasma(ICP) dry etching of an SOI substrate.The thickness of the probe is 15 μm.The shaft of the probe has dimensions of 3 mm×100 μm×15 μm with typical area of the record site of 78.5 μm2.The im... 相似文献
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He Zhang WeiHua Pei ShanShan Zhao XiaoWei Yang RuiCong Liu YuanYuan Liu Xian Wu DongMei Guo Qiang Gui XuHong Guo Xiao Xing YiJun Wang HongDa Chen 《中国科学:技术科学(英文版)》2016,59(9):1399-1406
Electro-deposition, electrical activation, thermal oxidation, and reactive ion sputtering are the four primary methods to fabricate iridium oxide film. Among these methods, reactive ion sputtering is a commonly used method in standard micro-fabrication processes. In different sputtering conditions, the component, texture, and electrochemistry character of iridium oxide varies considerably. To fabricate the iridium oxide film compatible with the wafer-level processing of neural electrodes, the quality of iridium oxide film must be able to withstand the mechanical and chemical impact of post-processing, and simultaneously achieve good performance as a neural electrode. In this study, parameters of sputtering were researched and developed to achieve a balance between mechanical stability and good electrochemical characteristics of iridium oxide film on electrode. Iridium oxide fabricating process combined with fabrication flow of silicon electrodes, at wafer-level, is introduced to produce silicon based planar iridium oxide neural electrodes. Compared with bare gold electrodes, iridium oxide electrodes fabricated with this method exhibit particularly good electrochemical stability, low impedance of 386 kΩ at 1 kHz, high safe charge storage capacity of 3.2 mC/cm2, and good impedance consistency of less than 25% fluctuation. 相似文献
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Science China Technological Sciences - Fabrication temperature is an important factor affecting the manufacturability of electronic devices, especially for the bottom-up self-assembled nano-device.... 相似文献
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ZHAO Hui PEI WeiHua CHEN SanYuan GUI Qiang TANG RongYu GUO Kai & CHEN HongDa State 《中国科学:技术科学(英文版)》2012,(9):2436-2440
Silicon-based planar neuroprobes are composed of silicon substrate,conducting layer,and insulation layers of SiO 2 or SiN membrane.The insulation layer is very important because it affects many key parameters of neuprobes,like impedance,SNR(signal noise ratio),reliability,etc.Monolayer membrane of SiO 2 or SiN are not good choices for insulation layer,since defects and residual stress in these layers can induce bad passivation.In this paper a composite insulation structure is studied,with thermal SiO 2 as the lower insulation layer and with multilayer membrane composed of PECVD SiO 2 and SiN as the upper insulation layer.This structure not only solves the problem of residual stress but also ensures a good probe passivation.So it’s a good choice for insulation layer of neuroprobes. 相似文献
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