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1.
Perfluorocarbon gas is widely used in the semiconductor industry. However, perfluorocarbon has a
negative effect on the global environment owing to its high global warming potential (GWP) value.
An alternative solution is essential. Therefore, we evaluated the possibility of replacing conventional
perfluorocarbon etching gases such as CHF3 with C6F12O, which has a low GWP and is in a liquid
state at room temperature. In this study, silicon oxynitride (SiON) films were plasma-etched using
inductively coupled CF4 +C6F12O+O2 mixed plasmas. Subsequently, the etching characteristics
of the film, such as etching rate, etching profile, selectivity over Si, and photoresist, were investigated.
A double Langmuir probe was used and optical emission spectroscopy was performed for plasma
diagnostics. In addition, a contact angle goniometer and x-ray photoelectron spectroscope were used
to confirm the change in the surface properties of the etched SiON film surface. Consequently, the
etching characteristics of the C6F12O mixed plasma exhibited a lower etching rate, higher SiON/Si
selectivity, lower plasma damage, and more vertical etched profiles than the conventional CHF3 mixed plasma. In addition, the C6F12O gas can be recovered in the liquid state, thereby decreasing
global warming. These results confirmed that the C6F12O precursor can sufficiently replace the
conventional etching gas. 相似文献
2.
3.
After the remarkable increase of Internet users and broadband Internet subscribers at the end of the 20th century, the size of Korean Internet and e-commerce market steadily increased but the growth rate has been either stagnant or decreased. Trends of Korean Internet and e-commerce market are summarized in this paper the trends on Internet usage are introduced. Trends of online games, blogs and wireless Internet are introduced. The trends of Korean Internet market may have implications for China and Japan. 相似文献
4.
The concept of directional binding energy (DBE) is proposed to describe the binding energy of the crystal and the ideal direction
of the antiaction force against the surface tension, which derives the grain-boundary energy and also energy ratio (γgb/γs). It may provide a simple and lucid way to analyse the surface energy, grain-boundary energy and energy ratio from the correlative
view point. It has been found that the grain-boundary energy can be derived only from the conceptual approach of DBE, irrespective
of the dislocation model, which also makes it possible to determine the energy ratio with the misorientation angle. That is,
the energy ratio (γgb/γs) is proportional to the misorientation angle, 2 sin (k′θ/2) where k′ is a constant and θ is the misorientation angle.
This revised version was published online in November 2006 with corrections to the Cover Date. 相似文献
5.
6.
The sorghum distillery residue (SDR) has been an underutilized by‐product with estimated production of 150 ton/day in Kinmen, Taiwan. The objective of this study was to test for any physiological effects of SDR, thus to utilize it as a nutraceutical feed ingredient in diets for cultured fish. Hot air‐dried, wet, and dehulled‐wet sorghum distillery residue showed 63%, 90% and 97% inhibition of the hemoglobin‐catalyzed oxidation of linoleic acid compared to soybean (13%) and rice bran (78%). The feed formulated with 20% wet or dehulled‐wet sorghum distillery residue both showed an antioxidant activity of 68% being higher than the control diet (53%). Feeding these diets to cultured grey mullet for 60 days in summer (temperature ranged 24–30C), resulted in a lower hydroperoxide content in gill tissue, as shown by a chemiluminesence intensity of 1806 or 1409 mV as opposed to 2666 mV for fish fed a control diet. In winter, when the water temperature decreased to 14C, grey mullet fed a diet consisting of 10% dehulled wet sorghum distillery residue had a blood viscosity of 1.9 mPas and a hematocrit value of 33%, in contrast to 3.6 mPas and 41% for control. The blood of the control group started to aggregate in 6 h and showed hemolysis, while the mullet fed dehulled, wet sorghum distillery residue did not show blood aggregation, maintained normal fluidity and erythrocyte membrane integrity. It seems that cultured fish may have the potential as an animal model for prescreening antioxidant and blood thinning effects of food ingredients. 相似文献
7.
8.
M. R. JOYCE K. K. LEE S. SYNGELLAKIS P. A. S. REED 《Fatigue & Fracture of Engineering Materials & Structures》2004,27(11):1025-1036
Complex multi‐phase Al–Sn–Si alloys are commonly employed in the manufacture of small automotive plain bearings. The fundamental fatigue initiation behaviour of this class of alloys is currently not well understood. A range of analytical techniques were applied to investigate preferential initiation site location and to attempt to identify critical microstructural features. It was apparent from experimental studies that points of fatigue crack initiation are associated with the Si secondary phase. Using tessellation approaches and subsequently both adaptive numerical modelling and micro‐scale finite element modelling allowed the identification of features affecting the probability that a given Si phase would initiate a fatigue crack. 相似文献
9.
J. W. PARK R.F. TESTIN P. J. VERGANO H.J. PARK C.L. WELLER 《Journal of food science》1996,61(4):766-768
The effects of various stearic-palmitic acid blend concentrations in films, storage temperatures and storage times on potato chip quality were evaluated using Response Surface Methodology. Storage temperature and time affected the quality of potato chips. The maximum storage times for acceptable potato chip quality were: 30 to 43 days, 23 to 25 days, and 11 to 12 days for storage temperatures of 15, 25 and 35°C, respectively. Results were independent of stearic-palmitic acid blend concentrations. 相似文献
10.
J.G. CHUNG J.H. LEE C.C. HO J.M. LAI Y.C. CHOU H.H. TENG C.F. HUNG S.C. HUANG 《Journal of Food Biochemistry》1996,20(4):481-490
The N-acetyltransferase activity was determined in 58 common fruits and vegetables. The assay was based on acetylation of 2-aminofluorene or p-amino-benzoic acid, followed by high pressure liquid chromatographic analysis of products and remaining nonacetylated substrate. The highest specific activities were observed in Balsam pear which contained 17.37 ± 1.45 N-acetyl aminofluorene nmole/min/mg protein and 46.27 ± 6.87 N-acetyl p-aminobenzoic acid nmole/min/mg protein. N-acetyltransferase activities within the remaining 57 foodstuffs analyzed ranged from none detected to 3.39 ± 0.72 N-acetyl aminofluorene nmole/min/mg protein and none detected to 32.45 ± 6.55 N-acetyl p-aminobenzoic acid nmole/min/mg protein. This is the first demonstration of acetyl CoA: arylamine N-acetyltransferase activity in common foodstuffs. 相似文献