Temperature Induces Self-assembly of Silicon Nano/Micro-structure based on Multi-physics Approach

A three-dimensional dynamic model for nano/micro-fabrications of silicon was presented. With the developed model, the fabrication process of silicon on nothing (SON) structure was quantitatively investigated. We employ a diffuse interface model that incorporates the mechanism of surface diffusion. The mechanism of the fabrication is systematically integrated for high reliability of computational analysis. A semi-implicit Fourier spectral scheme is applied for high efficiency and numerical stability. Moreover, the theoretical analysis provides the guidance that is ordered by the fundamental geometrical design parameters to guide different fabrications of SON structures. The performed simulations suggest a substantial potential of the presented model for a reliable design technology of nano/micro-fabrications.     

声辐射力驱动角形金属粉末微输送特性

为解决载气式、超声振动和惯性力等现有微输送方法在较宽输送速率范围内难以克服的角形金属粉体堵塞难题,本文研究以超声驻波场声辐射力为驱动力,通过悬浮分散微喷嘴内密集态粉末颗粒,实现金属粉末的稳定微输送。以激光熔覆技术中常用且易堵塞的100目、200目和300目角形铬粉和200目角形钛合金粉为对象,进行脉冲式和连续式两种模式的微输送精度和稳定性实验研究。实验显示,300目角形铬粉单脉冲输送质量可控范围为0.4~16mg且连续输送速率可控范围为6.0~65mg/s;脉冲微输送质量的变异系数随微喷嘴内径的增大而大幅降低(小于2%)、连续输送速率的变异系数均低于6%。实验结果表明,声辐射力驱动微米级角形金属粉末具有较大的输送速率可控范围、输送精度、稳定性和多种角形金属粉末的普适性,可从根本上解决角形粉末喷嘴微输送的堵塞问题。本文研究结果也可为其它尺度金属粉末和非金属粉末的微输送提供参考。     

基于超声复合场的空间悬浮微粒任意点输运方法

提出了基于超声复合场驱动微粒悬浮输运方法。首先从超声相控阵列的延时聚焦原理出发,建立了空间任意点聚焦模型和作用力公式,然后利用超声驻波场辐射力计算方法,建立了微粒在超声复合场下的运动控制模型和驱动力公式。通过MATLAB模拟复合声场,分析了影响聚焦性能和控制性能的因素,给出了初步实验验证结果。最后提出了任意控制微粒运动的超声复合场驱动方案。